JP5847474B2 - 露光装置、それを用いたデバイスの製造方法 - Google Patents

露光装置、それを用いたデバイスの製造方法 Download PDF

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Publication number
JP5847474B2
JP5847474B2 JP2011160982A JP2011160982A JP5847474B2 JP 5847474 B2 JP5847474 B2 JP 5847474B2 JP 2011160982 A JP2011160982 A JP 2011160982A JP 2011160982 A JP2011160982 A JP 2011160982A JP 5847474 B2 JP5847474 B2 JP 5847474B2
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JP
Japan
Prior art keywords
original
exposure apparatus
gas
holding frame
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2011160982A
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English (en)
Japanese (ja)
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JP2013026500A (ja
JP2013026500A5 (enExample
Inventor
篤志 梅村
篤志 梅村
敬恭 長谷川
敬恭 長谷川
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Canon Inc
Original Assignee
Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2011160982A priority Critical patent/JP5847474B2/ja
Priority to US13/548,362 priority patent/US9523926B2/en
Publication of JP2013026500A publication Critical patent/JP2013026500A/ja
Publication of JP2013026500A5 publication Critical patent/JP2013026500A5/ja
Application granted granted Critical
Publication of JP5847474B2 publication Critical patent/JP5847474B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece
    • G03F7/70875—Temperature, e.g. temperature control of masks or workpieces via control of stage temperature

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  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Atmospheric Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2011160982A 2011-07-22 2011-07-22 露光装置、それを用いたデバイスの製造方法 Expired - Fee Related JP5847474B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011160982A JP5847474B2 (ja) 2011-07-22 2011-07-22 露光装置、それを用いたデバイスの製造方法
US13/548,362 US9523926B2 (en) 2011-07-22 2012-07-13 Exposure apparatus and device manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011160982A JP5847474B2 (ja) 2011-07-22 2011-07-22 露光装置、それを用いたデバイスの製造方法

Publications (3)

Publication Number Publication Date
JP2013026500A JP2013026500A (ja) 2013-02-04
JP2013026500A5 JP2013026500A5 (enExample) 2014-09-04
JP5847474B2 true JP5847474B2 (ja) 2016-01-20

Family

ID=47555561

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011160982A Expired - Fee Related JP5847474B2 (ja) 2011-07-22 2011-07-22 露光装置、それを用いたデバイスの製造方法

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Country Link
US (1) US9523926B2 (enExample)
JP (1) JP5847474B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8876290B2 (en) * 2009-07-06 2014-11-04 Wavetec Vision Systems, Inc. Objective quality metric for ocular wavefront measurements
NL2012291A (en) * 2013-02-20 2014-08-21 Asml Netherlands Bv Gas flow optimization in reticle stage environment.
JP6274246B2 (ja) * 2016-04-08 2018-02-07 株式会社デンソー 監視装置
US10527956B2 (en) 2017-03-24 2020-01-07 Nikon Corporation Temperature controlled heat transfer frame for pellicle
US10670959B2 (en) * 2017-05-10 2020-06-02 Taiwan Semiconductor Manufacturing Company, Ltd. Pellicle and method of using the same
WO2019020443A1 (en) * 2017-07-28 2019-01-31 Asml Netherlands B.V. SYSTEMS AND METHODS FOR DELETION OF PARTICLES

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05188583A (ja) * 1992-01-17 1993-07-30 Fujitsu Ltd ペリクル
JPH06273922A (ja) * 1993-03-22 1994-09-30 Nippon Precision Circuits Kk マスク保護用ペリクル
JPH1126376A (ja) * 1997-07-09 1999-01-29 Canon Inc 投影露光装置およびディバイス製造方法
US6192100B1 (en) * 1999-06-18 2001-02-20 International Business Machines Corporation X-ray mask pellicles and their attachment in semiconductor manufacturing
JP2002353127A (ja) 2001-05-30 2002-12-06 Canon Inc 露光装置およびデバイス製造方法
US8964166B2 (en) * 2007-12-17 2015-02-24 Nikon Corporation Stage device, exposure apparatus and method of producing device
JP2010045300A (ja) * 2008-08-18 2010-02-25 Canon Inc 露光装置
KR101990345B1 (ko) * 2009-10-02 2019-06-18 신에쓰 가가꾸 고교 가부시끼가이샤 펠리클의 제조 방법
JP5479868B2 (ja) * 2009-12-02 2014-04-23 旭化成イーマテリアルズ株式会社 ペリクル及びその取付方法
JP5295283B2 (ja) * 2011-02-07 2013-09-18 キヤノン株式会社 露光装置及びデバイス製造方法

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Publication number Publication date
US20130021594A1 (en) 2013-01-24
JP2013026500A (ja) 2013-02-04
US9523926B2 (en) 2016-12-20

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