JP5845929B2 - ベース基板、電子デバイス、ベース基板の製造方法、及び電子デバイスの製造方法 - Google Patents
ベース基板、電子デバイス、ベース基板の製造方法、及び電子デバイスの製造方法 Download PDFInfo
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- JP5845929B2 JP5845929B2 JP2012015338A JP2012015338A JP5845929B2 JP 5845929 B2 JP5845929 B2 JP 5845929B2 JP 2012015338 A JP2012015338 A JP 2012015338A JP 2012015338 A JP2012015338 A JP 2012015338A JP 5845929 B2 JP5845929 B2 JP 5845929B2
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012015338A JP5845929B2 (ja) | 2012-01-27 | 2012-01-27 | ベース基板、電子デバイス、ベース基板の製造方法、及び電子デバイスの製造方法 |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012015338A JP5845929B2 (ja) | 2012-01-27 | 2012-01-27 | ベース基板、電子デバイス、ベース基板の製造方法、及び電子デバイスの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013157386A JP2013157386A (ja) | 2013-08-15 |
| JP2013157386A5 JP2013157386A5 (enrdf_load_stackoverflow) | 2015-03-19 |
| JP5845929B2 true JP5845929B2 (ja) | 2016-01-20 |
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| Application Number | Title | Priority Date | Filing Date |
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| JP2012015338A Expired - Fee Related JP5845929B2 (ja) | 2012-01-27 | 2012-01-27 | ベース基板、電子デバイス、ベース基板の製造方法、及び電子デバイスの製造方法 |
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| JP (1) | JP5845929B2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102504238B1 (ko) * | 2016-03-08 | 2023-03-02 | 주식회사 아모센스 | 세라믹 기판의 비아홀 충진 방법 |
| JP6341245B2 (ja) | 2016-09-05 | 2018-06-13 | 大日本印刷株式会社 | 貫通電極基板の製造方法、貫通電極基板および半導体装置 |
| JP6369653B1 (ja) * | 2018-05-17 | 2018-08-08 | 大日本印刷株式会社 | 貫通電極基板および半導体装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4630110B2 (ja) * | 2005-04-05 | 2011-02-09 | パナソニック株式会社 | 電子部品の製造方法 |
| JPWO2009104314A1 (ja) * | 2008-02-18 | 2011-06-16 | セイコーインスツル株式会社 | 圧電振動子の製造方法、圧電振動子、発振器、電子機器及び電波時計 |
| JP5135510B2 (ja) * | 2008-02-18 | 2013-02-06 | セイコーインスツル株式会社 | 圧電振動子の製造方法、圧電振動子、発振器、電子機器及び電波時計 |
| JP5143688B2 (ja) * | 2008-09-26 | 2013-02-13 | シチズンファインテックミヨタ株式会社 | 圧電デバイスの製造方法 |
| JP4843012B2 (ja) * | 2008-11-17 | 2011-12-21 | 日本電波工業株式会社 | 圧電デバイスとその製造方法 |
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- 2012-01-27 JP JP2012015338A patent/JP5845929B2/ja not_active Expired - Fee Related
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| JP2013157386A (ja) | 2013-08-15 |
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