JP5813143B2 - 表面形状測定装置およびそれを備えた工作機械 - Google Patents

表面形状測定装置およびそれを備えた工作機械 Download PDF

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Publication number
JP5813143B2
JP5813143B2 JP2014006899A JP2014006899A JP5813143B2 JP 5813143 B2 JP5813143 B2 JP 5813143B2 JP 2014006899 A JP2014006899 A JP 2014006899A JP 2014006899 A JP2014006899 A JP 2014006899A JP 5813143 B2 JP5813143 B2 JP 5813143B2
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Japan
Prior art keywords
surface shape
measurement
data
section
light beam
Prior art date
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Active
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JP2014006899A
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English (en)
Japanese (ja)
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JP2015135276A (ja
Inventor
勝彦 大野
勝彦 大野
静雄 西川
静雄 西川
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DMG Mori Co Ltd
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DMG Mori Co Ltd
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Publication date
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Priority to JP2014006899A priority Critical patent/JP5813143B2/ja
Priority to GB1611354.0A priority patent/GB2536167B/en
Priority to PCT/JP2014/079053 priority patent/WO2015107751A1/fr
Priority to DE112014006201.4T priority patent/DE112014006201T5/de
Publication of JP2015135276A publication Critical patent/JP2015135276A/ja
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Publication of JP5813143B2 publication Critical patent/JP5813143B2/ja
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/2452—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves for measuring features or for detecting a condition of machine parts, tools or workpieces
    • B23Q17/2471—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves for measuring features or for detecting a condition of machine parts, tools or workpieces of workpieces

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
JP2014006899A 2014-01-17 2014-01-17 表面形状測定装置およびそれを備えた工作機械 Active JP5813143B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2014006899A JP5813143B2 (ja) 2014-01-17 2014-01-17 表面形状測定装置およびそれを備えた工作機械
GB1611354.0A GB2536167B (en) 2014-01-17 2014-10-31 Surface shape measurement apparatus and machine tool including the same, and surface shape measurement method
PCT/JP2014/079053 WO2015107751A1 (fr) 2014-01-17 2014-10-31 Dispositif de mesure de la forme de la surface et machine-outil comportant celui-ci, et procédé de mesure de la forme de la surface
DE112014006201.4T DE112014006201T5 (de) 2014-01-17 2014-10-31 Oberflächenformmessvorrichtung und damit versehene Werkzeugmaschine und Oberflächenformmessverfahren

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014006899A JP5813143B2 (ja) 2014-01-17 2014-01-17 表面形状測定装置およびそれを備えた工作機械

Publications (2)

Publication Number Publication Date
JP2015135276A JP2015135276A (ja) 2015-07-27
JP5813143B2 true JP5813143B2 (ja) 2015-11-17

Family

ID=53542655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014006899A Active JP5813143B2 (ja) 2014-01-17 2014-01-17 表面形状測定装置およびそれを備えた工作機械

Country Status (4)

Country Link
JP (1) JP5813143B2 (fr)
DE (1) DE112014006201T5 (fr)
GB (1) GB2536167B (fr)
WO (1) WO2015107751A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017183181A1 (fr) * 2016-04-22 2017-10-26 オリンパス株式会社 Dispositif de mesure de forme tridimensionnelle
JP6937125B2 (ja) * 2017-01-26 2021-09-22 株式会社ニューフレアテクノロジー ステージ機構の位置補正方法及び荷電粒子ビーム描画装置
EP3450936A1 (fr) 2017-09-05 2019-03-06 Renishaw PLC Appareil et procédé optiques permettant d'évaluer le profil de faisceau d'un appareil de réglage d'outil sans contact
JP6973203B2 (ja) * 2018-03-14 2021-11-24 Ｊｆｅエンジニアリング株式会社 異常検出装置、異常検出システム、および異常検出方法
JP6867420B2 (ja) * 2019-01-21 2021-04-28 ファナック株式会社 工作機械、管理システムおよび工具劣化検出方法
JP6708917B1 (ja) 2020-02-05 2020-06-10 リンクウィズ株式会社 形状検出方法、形状検出システム、プログラム
JP6923097B1 (ja) * 2021-03-03 2021-08-18 オムロン株式会社 ワーク形状計測装置、ワーク形状計測システム、ワーク形状計測方法およびワーク形状計測プログラム
JP7411132B1 (ja) 2023-05-01 2024-01-10 Dmg森精機株式会社 ワーク形状測定方法、及びワーク形状測定装置。
CN118129055B (zh) * 2024-04-30 2024-08-09 成都飞机工业（集团）有限责任公司 一种用于航空零部件轮廓的线激光扫描装置及扫描方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2622722B2 (ja) * 1988-06-27 1997-06-18 新電元工業株式会社 圧力検出装置
JPH0213807A (ja) * 1988-06-30 1990-01-18 Juki Corp 位置検出素子による高さ検出方法
JP2943498B2 (ja) * 1992-04-22 1999-08-30 日本電気株式会社 走査型レーザ変位計
JPH08105719A (ja) * 1994-10-04 1996-04-23 Hitachi Denshi Ltd 複数点の変位計を用いたバンプ形状検査装置
CA2620941A1 (fr) * 2005-09-02 2007-03-08 Neptec Systeme et procede d'imagerie
US7684053B2 (en) * 2006-12-12 2010-03-23 Hong Kong Applied Science And Technology Research Institute Co., Ltd. Optical displacement sensor and distance measuring apparatus
JP5351639B2 (ja) * 2009-07-17 2013-11-27 国立大学法人京都大学 機上測定方法及び測定装置

Also Published As

Publication number Publication date
GB201611354D0 (en) 2016-08-17
GB2536167B (en) 2018-08-15
JP2015135276A (ja) 2015-07-27
GB2536167A (en) 2016-09-07
DE112014006201T5 (de) 2016-11-10
WO2015107751A1 (fr) 2015-07-23

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