JP5802060B2 - スイッチング電流を導通するよう構成された基材を有するｍｅｍｓスイッチングアレイ - Google Patents

スイッチング電流を導通するよう構成された基材を有するｍｅｍｓスイッチングアレイ Download PDF

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Publication number
JP5802060B2
JP5802060B2 JP2011129654A JP2011129654A JP5802060B2 JP 5802060 B2 JP5802060 B2 JP 5802060B2 JP 2011129654 A JP2011129654 A JP 2011129654A JP 2011129654 A JP2011129654 A JP 2011129654A JP 5802060 B2 JP5802060 B2 JP 5802060B2
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Prior art keywords
substrate
conductive
switch array
mems switch
mems
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JP2011129654A
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Japanese (ja)
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JP2012004112A5 (enExample
JP2012004112A (ja
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クナ・ヴェンカット・サティア・ラマ・キショア
マルコ・アイミ
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General Electric Co
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General Electric Co
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0063—Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
JP2011129654A 2010-06-17 2011-06-10 スイッチング電流を導通するよう構成された基材を有するｍｅｍｓスイッチングアレイ Active JP5802060B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/817,578 2010-06-17
US12/817,578 US8576029B2 (en) 2010-06-17 2010-06-17 MEMS switching array having a substrate arranged to conduct switching current

Publications (3)

Publication Number Publication Date
JP2012004112A JP2012004112A (ja) 2012-01-05
JP2012004112A5 JP2012004112A5 (enExample) 2014-07-17
JP5802060B2 true JP5802060B2 (ja) 2015-10-28

Family

ID=44823403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011129654A Active JP5802060B2 (ja) 2010-06-17 2011-06-10 スイッチング電流を導通するよう構成された基材を有するｍｅｍｓスイッチングアレイ

Country Status (4)

Country Link
US (1) US8576029B2 (enExample)
EP (1) EP2398028B1 (enExample)
JP (1) JP5802060B2 (enExample)
CN (1) CN102394199B (enExample)

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US8916996B2 (en) * 2011-07-29 2014-12-23 General Electric Company Electrical distribution system
US9573801B2 (en) * 2011-09-13 2017-02-21 Texas Instruments Incorporated MEMS electrostatic actuator device for RF varactor applications
US8659326B1 (en) 2012-09-28 2014-02-25 General Electric Company Switching apparatus including gating circuitry for actuating micro-electromechanical system (MEMS) switches
US9583294B2 (en) * 2014-04-25 2017-02-28 Analog Devices Global MEMS swtich with internal conductive path
US9362608B1 (en) * 2014-12-03 2016-06-07 General Electric Company Multichannel relay assembly with in line MEMS switches
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DE102019211460A1 (de) * 2019-07-31 2021-02-04 Siemens Aktiengesellschaft Anordnung von MEMS-Schaltern
EP3929960A1 (de) * 2020-06-26 2021-12-29 Siemens Aktiengesellschaft Mems-schalter, verfahren zur herstellung eines mems-schalters und vorrichtung
EP3979291A1 (de) * 2020-09-30 2022-04-06 Siemens Aktiengesellschaft Elektronikmodul und anlage
US12365579B2 (en) 2021-12-29 2025-07-22 Menlo Microsystems, Inc. Distributed MEMS switch array design with multiple input/output ports
US20240274388A1 (en) * 2023-02-14 2024-08-15 Texas Instruments Incorporated Electromechanical switch

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Also Published As

Publication number Publication date
CN102394199A (zh) 2012-03-28
EP2398028A2 (en) 2011-12-21
JP2012004112A (ja) 2012-01-05
US20110308924A1 (en) 2011-12-22
EP2398028B1 (en) 2015-08-12
CN102394199B (zh) 2015-11-25
EP2398028A3 (en) 2012-09-05
US8576029B2 (en) 2013-11-05

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