JP5799100B2 - 結晶性シリコンウエハのテクスチャエッチング液組成物およびテクスチャエッチング方法 - Google Patents
結晶性シリコンウエハのテクスチャエッチング液組成物およびテクスチャエッチング方法 Download PDFInfo
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- JP5799100B2 JP5799100B2 JP2013524050A JP2013524050A JP5799100B2 JP 5799100 B2 JP5799100 B2 JP 5799100B2 JP 2013524050 A JP2013524050 A JP 2013524050A JP 2013524050 A JP2013524050 A JP 2013524050A JP 5799100 B2 JP5799100 B2 JP 5799100B2
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- crystalline silicon
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- texture etching
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- 239000000203 mixture Substances 0.000 title claims description 54
- 229910021419 crystalline silicon Inorganic materials 0.000 title claims description 50
- 238000005530 etching Methods 0.000 title claims description 47
- 238000000034 method Methods 0.000 title claims description 28
- 235000012431 wafers Nutrition 0.000 claims description 61
- 239000000243 solution Substances 0.000 claims description 42
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 38
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 28
- 150000001875 compounds Chemical class 0.000 claims description 22
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 18
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 15
- 238000009835 boiling Methods 0.000 claims description 14
- -1 cyclic carboxylic acid Chemical class 0.000 claims description 14
- 239000000377 silicon dioxide Substances 0.000 claims description 14
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 claims description 13
- 150000001923 cyclic compounds Chemical class 0.000 claims description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 11
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- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 claims description 7
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 5
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 claims description 5
- 229910052731 fluorine Inorganic materials 0.000 claims description 5
- 239000011737 fluorine Substances 0.000 claims description 5
- RXYPXQSKLGGKOL-UHFFFAOYSA-N 1,4-dimethylpiperazine Chemical compound CN1CCN(C)CC1 RXYPXQSKLGGKOL-UHFFFAOYSA-N 0.000 claims description 4
- PAMIQIKDUOTOBW-UHFFFAOYSA-N 1-methylpiperidine Chemical compound CN1CCCCC1 PAMIQIKDUOTOBW-UHFFFAOYSA-N 0.000 claims description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 4
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 claims description 4
- YNAVUWVOSKDBBP-UHFFFAOYSA-N Morpholine Chemical compound C1COCCN1 YNAVUWVOSKDBBP-UHFFFAOYSA-N 0.000 claims description 4
- JLTDJTHDQAWBAV-UHFFFAOYSA-N N,N-dimethylaniline Chemical compound CN(C)C1=CC=CC=C1 JLTDJTHDQAWBAV-UHFFFAOYSA-N 0.000 claims description 4
- OJGMBLNIHDZDGS-UHFFFAOYSA-N N-Ethylaniline Chemical compound CCNC1=CC=CC=C1 OJGMBLNIHDZDGS-UHFFFAOYSA-N 0.000 claims description 4
- AFBPFSWMIHJQDM-UHFFFAOYSA-N N-methylaniline Chemical compound CNC1=CC=CC=C1 AFBPFSWMIHJQDM-UHFFFAOYSA-N 0.000 claims description 4
- LCEDQNDDFOCWGG-UHFFFAOYSA-N morpholine-4-carbaldehyde Chemical compound O=CN1CCOCC1 LCEDQNDDFOCWGG-UHFFFAOYSA-N 0.000 claims description 4
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 claims description 4
- 239000004094 surface-active agent Substances 0.000 claims description 4
- CMGDVUCDZOBDNL-UHFFFAOYSA-N 4-methyl-2h-benzotriazole Chemical compound CC1=CC=CC2=NNN=C12 CMGDVUCDZOBDNL-UHFFFAOYSA-N 0.000 claims description 3
- 239000004115 Sodium Silicate Substances 0.000 claims description 3
- IMUDHTPIFIBORV-UHFFFAOYSA-N aminoethylpiperazine Chemical compound NCCN1CCNCC1 IMUDHTPIFIBORV-UHFFFAOYSA-N 0.000 claims description 3
- 125000000129 anionic group Chemical group 0.000 claims description 3
- 125000002091 cationic group Chemical group 0.000 claims description 3
- GLUUGHFHXGJENI-UHFFFAOYSA-N diethylenediamine Natural products C1CNCCN1 GLUUGHFHXGJENI-UHFFFAOYSA-N 0.000 claims description 3
- 239000011734 sodium Substances 0.000 claims description 3
- 229910052911 sodium silicate Inorganic materials 0.000 claims description 3
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 claims description 3
- CYSGHNMQYZDMIA-UHFFFAOYSA-N 1,3-Dimethyl-2-imidazolidinon Chemical compound CN1CCN(C)C1=O CYSGHNMQYZDMIA-UHFFFAOYSA-N 0.000 claims description 2
- HBAIZGPCSAAFSU-UHFFFAOYSA-N 1-(2-hydroxyethyl)imidazolidin-2-one Chemical compound OCCN1CCNC1=O HBAIZGPCSAAFSU-UHFFFAOYSA-N 0.000 claims description 2
- PVOAHINGSUIXLS-UHFFFAOYSA-N 1-Methylpiperazine Chemical compound CN1CCNCC1 PVOAHINGSUIXLS-UHFFFAOYSA-N 0.000 claims description 2
- WGCYRFWNGRMRJA-UHFFFAOYSA-N 1-ethylpiperazine Chemical compound CCN1CCNCC1 WGCYRFWNGRMRJA-UHFFFAOYSA-N 0.000 claims description 2
- HXQHRUJXQJEGER-UHFFFAOYSA-N 1-methylbenzotriazole Chemical compound C1=CC=C2N(C)N=NC2=C1 HXQHRUJXQJEGER-UHFFFAOYSA-N 0.000 claims description 2
- JTPZTKBRUCILQD-UHFFFAOYSA-N 1-methylimidazolidin-2-one Chemical compound CN1CCNC1=O JTPZTKBRUCILQD-UHFFFAOYSA-N 0.000 claims description 2
- KYWXRBNOYGGPIZ-UHFFFAOYSA-N 1-morpholin-4-ylethanone Chemical compound CC(=O)N1CCOCC1 KYWXRBNOYGGPIZ-UHFFFAOYSA-N 0.000 claims description 2
- YAXQOLYGKLGQKA-UHFFFAOYSA-N 1-morpholin-4-ylpropan-2-ol Chemical compound CC(O)CN1CCOCC1 YAXQOLYGKLGQKA-UHFFFAOYSA-N 0.000 claims description 2
- QWENRTYMTSOGBR-UHFFFAOYSA-N 1H-1,2,3-Triazole Chemical compound C=1C=NNN=1 QWENRTYMTSOGBR-UHFFFAOYSA-N 0.000 claims description 2
- KKFDCBRMNNSAAW-UHFFFAOYSA-N 2-(morpholin-4-yl)ethanol Chemical compound OCCN1CCOCC1 KKFDCBRMNNSAAW-UHFFFAOYSA-N 0.000 claims description 2
- KRNUKKZDGDAWBF-UHFFFAOYSA-N 2-(n-ethyl-n-m-toluidino)ethanol Chemical compound OCCN(CC)C1=CC=CC(C)=C1 KRNUKKZDGDAWBF-UHFFFAOYSA-N 0.000 claims description 2
- HYVGFUIWHXLVNV-UHFFFAOYSA-N 2-(n-ethylanilino)ethanol Chemical compound OCCN(CC)C1=CC=CC=C1 HYVGFUIWHXLVNV-UHFFFAOYSA-N 0.000 claims description 2
- KZTWONRVIPPDKH-UHFFFAOYSA-N 2-(piperidin-1-yl)ethanol Chemical compound OCCN1CCCCC1 KZTWONRVIPPDKH-UHFFFAOYSA-N 0.000 claims description 2
- OJPDDQSCZGTACX-UHFFFAOYSA-N 2-[n-(2-hydroxyethyl)anilino]ethanol Chemical compound OCCN(CCO)C1=CC=CC=C1 OJPDDQSCZGTACX-UHFFFAOYSA-N 0.000 claims description 2
- FEWLGASICNTXOZ-UHFFFAOYSA-N 2-aminoethane-1,1,1,2-tetrol Chemical compound NC(O)C(O)(O)O FEWLGASICNTXOZ-UHFFFAOYSA-N 0.000 claims description 2
- PWORFEDVDWBHSJ-UHFFFAOYSA-N 2-methylbenzotriazole Chemical compound C1=CC=CC2=NN(C)N=C21 PWORFEDVDWBHSJ-UHFFFAOYSA-N 0.000 claims description 2
- BSKHPKMHTQYZBB-UHFFFAOYSA-N 2-methylpyridine Chemical compound CC1=CC=CC=N1 BSKHPKMHTQYZBB-UHFFFAOYSA-N 0.000 claims description 2
- WFCSWCVEJLETKA-UHFFFAOYSA-N 2-piperazin-1-ylethanol Chemical compound OCCN1CCNCC1 WFCSWCVEJLETKA-UHFFFAOYSA-N 0.000 claims description 2
- IDWRJRPUIXRFRX-UHFFFAOYSA-N 3,5-dimethylpiperidine Chemical compound CC1CNCC(C)C1 IDWRJRPUIXRFRX-UHFFFAOYSA-N 0.000 claims description 2
- WXVKGHVDWWXBJX-UHFFFAOYSA-N 3-morpholin-4-ylpropanenitrile Chemical compound N#CCCN1CCOCC1 WXVKGHVDWWXBJX-UHFFFAOYSA-N 0.000 claims description 2
- HVCNXQOWACZAFN-UHFFFAOYSA-N 4-ethylmorpholine Chemical compound CCN1CCOCC1 HVCNXQOWACZAFN-UHFFFAOYSA-N 0.000 claims description 2
- UTMDJGPRCLQPBT-UHFFFAOYSA-N 4-nitro-1h-1,2,3-benzotriazole Chemical compound [O-][N+](=O)C1=CC=CC2=NNN=C12 UTMDJGPRCLQPBT-UHFFFAOYSA-N 0.000 claims description 2
- FHQRDEDZJIFJAL-UHFFFAOYSA-N 4-phenylmorpholine Chemical compound C1COCCN1C1=CC=CC=C1 FHQRDEDZJIFJAL-UHFFFAOYSA-N 0.000 claims description 2
- NSPMIYGKQJPBQR-UHFFFAOYSA-N 4H-1,2,4-triazole Chemical compound C=1N=CNN=1 NSPMIYGKQJPBQR-UHFFFAOYSA-N 0.000 claims description 2
- KLSJWNVTNUYHDU-UHFFFAOYSA-N Amitrole Chemical compound NC1=NC=NN1 KLSJWNVTNUYHDU-UHFFFAOYSA-N 0.000 claims description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims description 2
- HTLZVHNRZJPSMI-UHFFFAOYSA-N N-ethylpiperidine Chemical compound CCN1CCCCC1 HTLZVHNRZJPSMI-UHFFFAOYSA-N 0.000 claims description 2
- LFTLOKWAGJYHHR-UHFFFAOYSA-N N-methylmorpholine N-oxide Chemical compound CN1(=O)CCOCC1 LFTLOKWAGJYHHR-UHFFFAOYSA-N 0.000 claims description 2
- 229920003171 Poly (ethylene oxide) Polymers 0.000 claims description 2
- 239000004111 Potassium silicate Substances 0.000 claims description 2
- 239000001089 [(2R)-oxolan-2-yl]methanol Substances 0.000 claims description 2
- 239000003929 acidic solution Substances 0.000 claims description 2
- 125000000217 alkyl group Chemical group 0.000 claims description 2
- 239000000908 ammonium hydroxide Substances 0.000 claims description 2
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 claims description 2
- XXBDWLFCJWSEKW-UHFFFAOYSA-N dimethylbenzylamine Chemical compound CN(C)CC1=CC=CC=C1 XXBDWLFCJWSEKW-UHFFFAOYSA-N 0.000 claims description 2
- 235000019441 ethanol Nutrition 0.000 claims description 2
- PAZHGORSDKKUPI-UHFFFAOYSA-N lithium metasilicate Chemical compound [Li+].[Li+].[O-][Si]([O-])=O PAZHGORSDKKUPI-UHFFFAOYSA-N 0.000 claims description 2
- 229910052912 lithium silicate Inorganic materials 0.000 claims description 2
- YQYUUNRAPYPAPC-UHFFFAOYSA-N n,n-diethyl-2-methylaniline Chemical compound CCN(CC)C1=CC=CC=C1C YQYUUNRAPYPAPC-UHFFFAOYSA-N 0.000 claims description 2
- RWIVICVCHVMHMU-UHFFFAOYSA-N n-aminoethylmorpholine Chemical compound NCCN1CCOCC1 RWIVICVCHVMHMU-UHFFFAOYSA-N 0.000 claims description 2
- 239000003960 organic solvent Substances 0.000 claims description 2
- 229910052913 potassium silicate Inorganic materials 0.000 claims description 2
- NNHHDJVEYQHLHG-UHFFFAOYSA-N potassium silicate Chemical compound [K+].[K+].[O-][Si]([O-])=O NNHHDJVEYQHLHG-UHFFFAOYSA-N 0.000 claims description 2
- 235000019353 potassium silicate Nutrition 0.000 claims description 2
- BSYVTEYKTMYBMK-UHFFFAOYSA-N tetrahydrofurfuryl alcohol Chemical compound OCC1CCCO1 BSYVTEYKTMYBMK-UHFFFAOYSA-N 0.000 claims description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 claims 2
- FMCUPJKTGNBGEC-UHFFFAOYSA-N 1,2,4-triazol-4-amine Chemical compound NN1C=NN=C1 FMCUPJKTGNBGEC-UHFFFAOYSA-N 0.000 claims 1
- LHPPDQUVECZQSW-UHFFFAOYSA-N 2-(benzotriazol-2-yl)-4,6-ditert-butylphenol Chemical compound CC(C)(C)C1=CC(C(C)(C)C)=CC(N2N=C3C=CC=CC3=N2)=C1O LHPPDQUVECZQSW-UHFFFAOYSA-N 0.000 claims 1
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 claims 1
- LRUDIIUSNGCQKF-UHFFFAOYSA-N 5-methyl-1H-benzotriazole Chemical compound C1=C(C)C=CC2=NNN=C21 LRUDIIUSNGCQKF-UHFFFAOYSA-N 0.000 claims 1
- NPZTUJOABDZTLV-UHFFFAOYSA-N hydroxybenzotriazole Substances O=C1C=CC=C2NNN=C12 NPZTUJOABDZTLV-UHFFFAOYSA-N 0.000 claims 1
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- 239000000843 powder Substances 0.000 claims 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 claims 1
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 17
- 229910052710 silicon Inorganic materials 0.000 description 17
- 239000010703 silicon Substances 0.000 description 17
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- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 6
- 239000012153 distilled water Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
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- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 3
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- QKGBRANQIWBMED-UHFFFAOYSA-N 1-(2-methoxyethyl)pyrrolidin-2-one Chemical compound COCCN1CCCC1=O QKGBRANQIWBMED-UHFFFAOYSA-N 0.000 description 1
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- AVFZOVWCLRSYKC-UHFFFAOYSA-N 1-methylpyrrolidine Chemical compound CN1CCCC1 AVFZOVWCLRSYKC-UHFFFAOYSA-N 0.000 description 1
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- LUVQSCCABURXJL-UHFFFAOYSA-N 1-tert-butylpyrrolidin-2-one Chemical compound CC(C)(C)N1CCCC1=O LUVQSCCABURXJL-UHFFFAOYSA-N 0.000 description 1
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- 239000002028 Biomass Substances 0.000 description 1
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- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 101001136034 Homo sapiens Phosphoribosylformylglycinamidine synthase Proteins 0.000 description 1
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- 229910019142 PO4 Inorganic materials 0.000 description 1
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- 229910052796 boron Inorganic materials 0.000 description 1
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- 229930195733 hydrocarbon Natural products 0.000 description 1
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- 150000008624 imidazolidinones Chemical class 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
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- 239000002184 metal Substances 0.000 description 1
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- QUSNBJAOOMFDIB-UHFFFAOYSA-N monoethyl amine Natural products CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 1
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- PZYDAVFRVJXFHS-UHFFFAOYSA-N n-cyclohexyl-2-pyrrolidone Chemical compound O=C1CCCN1C1CCCCC1 PZYDAVFRVJXFHS-UHFFFAOYSA-N 0.000 description 1
- 238000000879 optical micrograph Methods 0.000 description 1
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- XUWHAWMETYGRKB-UHFFFAOYSA-N piperidin-2-one Chemical class O=C1CCCCN1 XUWHAWMETYGRKB-UHFFFAOYSA-N 0.000 description 1
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- 238000010248 power generation Methods 0.000 description 1
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- 229910052717 sulfur Inorganic materials 0.000 description 1
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- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
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- C09K13/00—Etching, surface-brightening or pickling compositions
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- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
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Description
下記表1に記載の成分および組成比によって実施例1ないし14および比較例1ないし4の結晶性シリコンウエハのテクスチャエッチング液組成物を製造した。
NMP:N−メチルピロリドン NMM:N−メチルモルホリン
AEP:アミノエチルピペラジン GBL:γ−ブチロラクトン
IPA:イソプロピルアルコール EG:エチレングリコール
MDG:メチルジグリコール MEA:モノエチルアミン
PFAS:過フッ素アルキル硫酸塩 PFAP:過フッ素アルキルリン酸塩
SSS:液状ケイ酸ナトリウム CS:コロイドシリカ(Na2Oを用いた安定化)
−試験例:結晶性シリコンウエハのテクスチャエッチング液組成物の特性評価−
単結晶シリコンウエハガラス基板を、実施例1ないし実施例14および比較例1ないし比較例4の結晶性シリコンウエハのテクスチャエッチング液組成物に浸漬させた。この時、テクスチャの条件は、温度80℃、時間30分であった。各組成物に対するテクスチャの均一性は目視評価(デジタルカメラ)、光学顕微鏡、SEMなどを用い、ピラミッドの大きさはSEMを用いて評価した。そして、UVを用いて、400〜800nmの波長帯を有する光を照射した時の平均反射率を測定した。その結果を、表2および図1ないし図3に示した。
◎:ウエハの全面にピラミッド形成
○:ウエハの一部にピラミッド未形成(ピラミッド構造の未形成程度5%未満)
X:ウエハにピラミッド未形成(ピラミッドの未形成程度90%以上)
薬液変色:テクスチャ工程温度への昇温時、自体の経時変化が発生し、テクスチャテストを必要としないという意味
表2および図1ないし図3を参照すれば、実施例1ないし14のシリコンウエハのテクスチャエッチング液組成物を用いた単結晶シリコンウエハのテクスチャの均一性に優れていることが分かる。
Claims (7)
- 組成物の総重量に対して、(A)アルカリ化合物0.1〜20重量%;(B)沸点が100℃以上の環状化合物(ただし、環状カルボン酸を除く)0.1〜50重量%;(C)シリカを含む化合物0.00001〜10重量%;および(D)残量の水を含み、
前記(B)沸点が100℃以上の環状化合物は、ピペラジン、N−メチルピペラジン、N−エチルピペラジン、ヒドロキシエチルピペラジン、N−(2−アミノエチル)ピペラジン、N,N’−ジメチルピペラジン、モルホリン、N−メチルモルホリン、N−エチルモルホリン、N−フェニルモルホリン、N−ココモルホリン、N−(2−アミノエチル)モルホリン、N−(2−シアノエチル)モルホリン、N−(2−ヒドロキシエチル)モルホリン、N−(2−ヒドロキシプロピル)モルホリン、N−アセチルモルホリン、N−ホルミルモルホリン、N−メチルモルホリン−N−オキサイド、ピコリン、N−メチルピペリジン、3,5−ジメチルピペリジン、N−エチルピペリジン、N−(2−ヒドロキシエチル)ピペリジン、N−メチルイミダゾリジノン、ジメチルイミダゾリジノン、N−(2−ヒドロキシエチル)−エチレンウレア、テトラヒドロフラン、テトラヒドロフルフリルアルコール、N−メチルアニリン、N−エチルアニリン、N,N−ジメチルアニリン、N−(2−ヒドロキシエチル)アニリン、N,N−ビス−(2−ヒドロキシエチル)アニリン、N−エチル−N−(2−ヒドロキシエチル)アニリン、N,N−ジエチル−o−トルイジン、N−エチル−N−(2−ヒドロキシエチル)−m−トルイジン、ジメチルベンジルアミン、γ−ブチロラクトン、トリルトリアゾール、1,2,3−ベンゾトリアゾール、1,2,3−トリアゾール、1,2,4−トリアゾール、3−アミノ−1,2,4−トリアゾール、4−アミノ−4H−1,2,4−トリアゾール、1−ヒドロキシベンゾトリアゾール、1−メチルベンゾトリアゾール、2−メチルベンゾトリアゾール、5−メチルベンゾトリアゾール、ニトロベンゾトリアゾール、および2−(2H−ベンゾトリアゾール−2−イル)−4,6−ジ−t−ブチルフェノールからなる群より選択される1種または2種以上の化合物であることを特徴とする、結晶性シリコンウエハのテクスチャエッチング液組成物。 - 前記(A)アルカリ化合物は、水酸化カリウム、水酸化ナトリウム、水酸化アンモニウム、テトラヒドロキシメチルアンモニウム、およびテトラヒドロキシエチルアンモニウムからなる群より選択される1種または2種以上の化合物を混合して使用することを特徴とする、請求項1記載の結晶性シリコンウエハのテクスチャエッチング液組成物。
- 前記(C)シリカを含む化合物が、微粉末シリカ;Na2Oで安定化させたコロイドシリカ溶液;K2Oで安定化させたコロイドシリカ溶液;酸性液で安定化させたコロイドシリカ溶液;NH3で安定化させたコロイドシリカ溶液;エチルアルコール、プロピルアルコール、エチレングリコール、メチルエチルケトン(MEK)、およびメチルイソブチルケトン(MIBK)を含む群より選択された有機溶媒上で安定化したコロイドシリカ溶液;液状ケイ酸ナトリウム;液状ケイ酸カリウム;および液状ケイ酸リチウムからなる群より選択される1種または2種以上に由来することを特徴とする、請求項1記載の結晶性シリコンウエハのテクスチャエッチング液組成物。
- (E)フッ素系界面活性剤0.000001〜10重量%をさらに含むことを特徴とする、請求項1記載の結晶性シリコンウエハのテクスチャエッチング液組成物。
- 前記(E)フッ素系界面活性剤は、過フッ素アルキルカルボキシ酸塩、過フッ素アルキルスルホン酸塩、過フッ素アルキル硫酸塩、過フッ素アルキルリン酸塩を含む陰イオン系フッ素界面活性剤;過フッ素アルキルアミン塩、過フッ素アルキル4級アンモニウム塩を含む陽イオン系フッ素界面活性剤;過フッ素アルキルカルボキシベタイン、過フッ素アルキルスルホベタインを含む両性イオン系フッ素界面活性剤;およびフッ素化アルキルポリオキシエチレン、過フッ素アルキルポリオキシエチレンを含む非イオン系フッ素界面活性剤から選択された1種または2種以上であることを特徴とする、請求項4記載の結晶性シリコンウエハのテクスチャエッチング液組成物。
- 前記環状化合物の沸点が150℃以上400℃以下であることを特徴とする、請求項1記載の結晶性シリコンウエハのテクスチャエッチング液組成物。
- 請求項1ないし6のいずれか1項記載の結晶性シリコンウエハのテクスチャエッチング液組成物を、50〜100℃の温度で30秒〜60分間浸漬、噴霧、または浸漬および噴霧し、結晶性シリコンをテクスチャエッチングすることを特徴とする、方法。
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KR1020100077621A KR20120015484A (ko) | 2010-08-12 | 2010-08-12 | 결정성 실리콘 웨이퍼의 텍스쳐 에칭액 조성물 및 텍스쳐 에칭 방법 |
PCT/KR2011/005949 WO2012021026A2 (ko) | 2010-08-12 | 2011-08-12 | 결정성 실리콘 웨이퍼의 텍스쳐 에칭액 조성물 및 텍스쳐 에칭 방법 (1) |
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KR101429198B1 (ko) * | 2012-09-11 | 2014-08-13 | 주식회사 디씨티 | 실리콘 기판의 텍스처링용 식각액 및 이를 이용한 고효율 태양전지의 제조방법 |
WO2015030813A1 (en) | 2013-08-30 | 2015-03-05 | Halliburton Energy Services, Inc. | Removing cured resins from subterranean formations and completions |
US9944890B2 (en) * | 2013-11-11 | 2018-04-17 | Halliburton Energy Services, Inc. | Removing resin coatings from wellbore surfaces |
DE102014001363B3 (de) * | 2014-01-31 | 2015-04-09 | Technische Universität Bergakademie Freiberg | Verfahren zur Erzeugung von Texturen oder von Polituren auf der Oberfläche von monokristallinen Siliciumwafern |
KR102209680B1 (ko) * | 2014-06-27 | 2021-01-29 | 동우 화인켐 주식회사 | 금속막의 식각액 조성물 및 이를 이용한 액정 표시 장치용 어레이 기판의 제조방법 |
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US4137123A (en) | 1975-12-31 | 1979-01-30 | Motorola, Inc. | Texture etching of silicon: method |
ES2068304T3 (es) | 1990-09-28 | 1995-04-16 | Siemens Solar Gmbh | Mordentado estructural quimico-humedo de silicio. |
KR0180621B1 (ko) | 1995-12-01 | 1999-04-15 | 이창세 | 실리콘 웨이퍼의 텍스쳐 에칭 방법 및 텍스쳐 용액 |
DE19811878C2 (de) | 1998-03-18 | 2002-09-19 | Siemens Solar Gmbh | Verfahren und Ätzlösung zum naßchemischen pyramidalen Texturätzen von Siliziumoberflächen |
US6465403B1 (en) * | 1998-05-18 | 2002-10-15 | David C. Skee | Silicate-containing alkaline compositions for cleaning microelectronic substrates |
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EP2015351A1 (en) | 2006-05-02 | 2009-01-14 | Mimasu Semiconductor Industry Co., Ltd. | Method for manufacturing semiconductor substrate, solar semiconductor substrate, and etching liquid |
US20100112728A1 (en) | 2007-03-31 | 2010-05-06 | Advanced Technology Materials, Inc. | Methods for stripping material for wafer reclamation |
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JP2010093194A (ja) | 2008-10-10 | 2010-04-22 | Sharp Corp | 太陽電池の製造方法 |
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