JP5773379B2 - 半導体装置とその製造方法、及び電子機器 - Google Patents
半導体装置とその製造方法、及び電子機器 Download PDFInfo
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- JP5773379B2 JP5773379B2 JP2014260268A JP2014260268A JP5773379B2 JP 5773379 B2 JP5773379 B2 JP 5773379B2 JP 2014260268 A JP2014260268 A JP 2014260268A JP 2014260268 A JP2014260268 A JP 2014260268A JP 5773379 B2 JP5773379 B2 JP 5773379B2
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- Solid State Image Pick-Up Elements (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014260268A JP5773379B2 (ja) | 2009-03-19 | 2014-12-24 | 半導体装置とその製造方法、及び電子機器 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009068582 | 2009-03-19 | ||
| JP2009068582 | 2009-03-19 | ||
| JP2014260268A JP5773379B2 (ja) | 2009-03-19 | 2014-12-24 | 半導体装置とその製造方法、及び電子機器 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010012586A Division JP5985136B2 (ja) | 2009-03-19 | 2010-01-22 | 半導体装置とその製造方法、及び電子機器 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015101103A Division JP2015156516A (ja) | 2009-03-19 | 2015-05-18 | 半導体装置、及び、裏面照射型半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015065479A JP2015065479A (ja) | 2015-04-09 |
| JP2015065479A5 JP2015065479A5 (enExample) | 2015-05-21 |
| JP5773379B2 true JP5773379B2 (ja) | 2015-09-02 |
Family
ID=52833041
Family Applications (9)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014260268A Expired - Fee Related JP5773379B2 (ja) | 2009-03-19 | 2014-12-24 | 半導体装置とその製造方法、及び電子機器 |
| JP2015101103A Pending JP2015156516A (ja) | 2009-03-19 | 2015-05-18 | 半導体装置、及び、裏面照射型半導体装置 |
| JP2016101517A Expired - Fee Related JP6200035B2 (ja) | 2009-03-19 | 2016-05-20 | 半導体装置 |
| JP2017161412A Expired - Fee Related JP6774393B2 (ja) | 2009-03-19 | 2017-08-24 | 固体撮像装置、及び、電子機器 |
| JP2019233338A Pending JP2020057813A (ja) | 2009-03-19 | 2019-12-24 | 装置の製造方法、及び、装置 |
| JP2019233337A Pending JP2020057812A (ja) | 2009-03-19 | 2019-12-24 | 半導体装置、及び、電子機器 |
| JP2021055108A Ceased JP2021103792A (ja) | 2009-03-19 | 2021-03-29 | 固体撮像装置、及び、電子機器 |
| JP2021198681A Pending JP2022031321A (ja) | 2009-03-19 | 2021-12-07 | 装置の製造方法、及び、装置 |
| JP2021198680A Pending JP2022036098A (ja) | 2009-03-19 | 2021-12-07 | 半導体装置、及び、電子機器 |
Family Applications After (8)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015101103A Pending JP2015156516A (ja) | 2009-03-19 | 2015-05-18 | 半導体装置、及び、裏面照射型半導体装置 |
| JP2016101517A Expired - Fee Related JP6200035B2 (ja) | 2009-03-19 | 2016-05-20 | 半導体装置 |
| JP2017161412A Expired - Fee Related JP6774393B2 (ja) | 2009-03-19 | 2017-08-24 | 固体撮像装置、及び、電子機器 |
| JP2019233338A Pending JP2020057813A (ja) | 2009-03-19 | 2019-12-24 | 装置の製造方法、及び、装置 |
| JP2019233337A Pending JP2020057812A (ja) | 2009-03-19 | 2019-12-24 | 半導体装置、及び、電子機器 |
| JP2021055108A Ceased JP2021103792A (ja) | 2009-03-19 | 2021-03-29 | 固体撮像装置、及び、電子機器 |
| JP2021198681A Pending JP2022031321A (ja) | 2009-03-19 | 2021-12-07 | 装置の製造方法、及び、装置 |
| JP2021198680A Pending JP2022036098A (ja) | 2009-03-19 | 2021-12-07 | 半導体装置、及び、電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (9) | JP5773379B2 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10608034B2 (en) | 2009-12-26 | 2020-03-31 | Canon Kabushiki Kaisha | Solid-state image pickup apparatus and image pickup system |
| DE102024103109A1 (de) * | 2024-02-05 | 2025-08-07 | Abacus neo GmbH | Elektronische Bilderfassungs- und Bildverarbeitungseinheit |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5773379B2 (ja) * | 2009-03-19 | 2015-09-02 | ソニー株式会社 | 半導体装置とその製造方法、及び電子機器 |
| JP5985136B2 (ja) | 2009-03-19 | 2016-09-06 | ソニー株式会社 | 半導体装置とその製造方法、及び電子機器 |
| CN204760384U (zh) * | 2015-05-18 | 2015-11-11 | 华天科技(昆山)电子有限公司 | 高像素影像传感芯片的晶圆级封装结构 |
| KR102423813B1 (ko) * | 2015-11-27 | 2022-07-22 | 삼성전자주식회사 | 반도체 소자 |
| CN107534749B (zh) | 2015-11-30 | 2020-03-03 | 奥林巴斯株式会社 | 摄像元件、内窥镜以及内窥镜系统 |
| CN108886043B (zh) * | 2016-04-25 | 2023-06-30 | 奥林巴斯株式会社 | 摄像元件、内窥镜以及内窥镜系统 |
| JP2018078274A (ja) * | 2016-11-10 | 2018-05-17 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | イメージセンサー装置及びそれを含むイメージセンサーモジュール |
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| JP3166220B2 (ja) * | 1991-08-09 | 2001-05-14 | ソニー株式会社 | 固体撮像装置 |
| KR100192576B1 (ko) * | 1995-11-17 | 1999-06-15 | 윤종용 | 콘택 이미지 센서 |
| US6321134B1 (en) * | 1997-07-29 | 2001-11-20 | Silicon Genesis Corporation | Clustertool system software using plasma immersion ion implantation |
| US6489241B1 (en) * | 1999-09-17 | 2002-12-03 | Applied Materials, Inc. | Apparatus and method for surface finishing a silicon film |
| JP2001189423A (ja) * | 1999-12-28 | 2001-07-10 | Sanyo Electric Co Ltd | 半導体集積回路 |
| JP3713418B2 (ja) * | 2000-05-30 | 2005-11-09 | 光正 小柳 | 3次元画像処理装置の製造方法 |
| JP2002118249A (ja) * | 2000-10-06 | 2002-04-19 | Sony Corp | 固体撮像素子 |
| JP4237966B2 (ja) * | 2002-03-08 | 2009-03-11 | 浜松ホトニクス株式会社 | 検出器 |
| JP4123415B2 (ja) * | 2002-05-20 | 2008-07-23 | ソニー株式会社 | 固体撮像装置 |
| JP2005044861A (ja) * | 2003-07-23 | 2005-02-17 | Seiko Epson Corp | 半導体装置、半導体装置の使用方法、半導体装置の製造方法および電子機器 |
| JP4389626B2 (ja) * | 2004-03-29 | 2009-12-24 | ソニー株式会社 | 固体撮像素子の製造方法 |
| JP2007250561A (ja) * | 2004-04-12 | 2007-09-27 | Japan Science & Technology Agency | 半導体素子および半導体システム |
| JP2005322745A (ja) * | 2004-05-07 | 2005-11-17 | Sony Corp | 半導体素子、半導体素子の製造方法、固体撮像素子、並びに固体撮像素子の製造方法 |
| JP2005347707A (ja) * | 2004-06-07 | 2005-12-15 | Sony Corp | 固体撮像素子及びその製造方法 |
| JP4483442B2 (ja) * | 2004-07-13 | 2010-06-16 | ソニー株式会社 | 固体撮像素子と固体撮像装置、固体撮像素子の製造方法 |
| JP4349232B2 (ja) * | 2004-07-30 | 2009-10-21 | ソニー株式会社 | 半導体モジュール及びmos型固体撮像装置 |
| KR100610481B1 (ko) * | 2004-12-30 | 2006-08-08 | 매그나칩 반도체 유한회사 | 수광영역을 넓힌 이미지센서 및 그 제조 방법 |
| JP2006261638A (ja) * | 2005-02-21 | 2006-09-28 | Sony Corp | 固体撮像装置および固体撮像装置の駆動方法 |
| JP4940667B2 (ja) * | 2005-06-02 | 2012-05-30 | ソニー株式会社 | 固体撮像素子及びその製造方法 |
| JP4667094B2 (ja) * | 2005-03-18 | 2011-04-06 | 富士通株式会社 | 電子装置の製造方法 |
| JP4979893B2 (ja) * | 2005-03-23 | 2012-07-18 | ソニー株式会社 | 物理量分布検知装置並びに物理情報取得方法および物理情報取得装置 |
| KR100782463B1 (ko) * | 2005-04-13 | 2007-12-05 | (주)실리콘화일 | 3차원 구조를 갖는 이미지 센서의 분리형 단위화소 및 그제조방법 |
| KR100718878B1 (ko) * | 2005-06-28 | 2007-05-17 | (주)실리콘화일 | 3차원 구조를 갖는 이미지 센서의 분리형 단위화소 및 그제조방법 |
| US7485968B2 (en) * | 2005-08-11 | 2009-02-03 | Ziptronix, Inc. | 3D IC method and device |
| JP4997879B2 (ja) * | 2005-08-26 | 2012-08-08 | ソニー株式会社 | 半導体装置及びその製造方法並びに固体撮像装置及びその製造方法並びに撮像装置 |
| JP4752447B2 (ja) * | 2005-10-21 | 2011-08-17 | ソニー株式会社 | 固体撮像装置およびカメラ |
| JP4915107B2 (ja) * | 2006-02-28 | 2012-04-11 | ソニー株式会社 | 固体撮像装置および固体撮像装置の製造方法 |
| US7866364B2 (en) * | 2006-04-28 | 2011-01-11 | Hewlett-Packard Development Company, L.P. | Fabrication tool for bonding |
| JP2007311385A (ja) * | 2006-05-16 | 2007-11-29 | Sony Corp | 半導体装置の製造方法および半導体装置 |
| KR100801447B1 (ko) * | 2006-06-19 | 2008-02-11 | (주)실리콘화일 | 배면 광 포토다이오드를 이용한 이미지센서 및 그 제조방법 |
| JP5026025B2 (ja) * | 2006-08-24 | 2012-09-12 | 株式会社フジクラ | 半導体装置 |
| US8049256B2 (en) * | 2006-10-05 | 2011-11-01 | Omnivision Technologies, Inc. | Active pixel sensor having a sensor wafer connected to a support circuit wafer |
| TW200818804A (en) * | 2006-10-06 | 2008-04-16 | Interdigital Tech Corp | Method and apparatus of control signaling |
| JP2008130603A (ja) * | 2006-11-16 | 2008-06-05 | Toshiba Corp | イメージセンサ用ウェハレベルパッケージ及びその製造方法 |
| JP4403424B2 (ja) * | 2006-11-30 | 2010-01-27 | ソニー株式会社 | 固体撮像装置 |
| FR2910707B1 (fr) * | 2006-12-20 | 2009-06-12 | E2V Semiconductors Soc Par Act | Capteur d'image a haute densite d'integration |
| JP2008227253A (ja) * | 2007-03-14 | 2008-09-25 | Fujifilm Corp | 裏面照射型固体撮像素子 |
| JP2008235478A (ja) * | 2007-03-19 | 2008-10-02 | Nikon Corp | 撮像素子 |
| TWI436474B (zh) * | 2007-05-07 | 2014-05-01 | Sony Corp | A solid-state image pickup apparatus, a manufacturing method thereof, and an image pickup apparatus |
| JP5055026B2 (ja) * | 2007-05-31 | 2012-10-24 | 富士フイルム株式会社 | 撮像素子、撮像素子の製造方法、及び、撮像素子用の半導体基板 |
| US7772054B2 (en) * | 2007-06-15 | 2010-08-10 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
| EP2158607A1 (en) * | 2007-06-19 | 2010-03-03 | SiliconFile Technologies Inc. | Pixel array preventing the cross talk between unit pixels and image sensor using the pixel |
| JP5773379B2 (ja) * | 2009-03-19 | 2015-09-02 | ソニー株式会社 | 半導体装置とその製造方法、及び電子機器 |
-
2014
- 2014-12-24 JP JP2014260268A patent/JP5773379B2/ja not_active Expired - Fee Related
-
2015
- 2015-05-18 JP JP2015101103A patent/JP2015156516A/ja active Pending
-
2016
- 2016-05-20 JP JP2016101517A patent/JP6200035B2/ja not_active Expired - Fee Related
-
2017
- 2017-08-24 JP JP2017161412A patent/JP6774393B2/ja not_active Expired - Fee Related
-
2019
- 2019-12-24 JP JP2019233338A patent/JP2020057813A/ja active Pending
- 2019-12-24 JP JP2019233337A patent/JP2020057812A/ja active Pending
-
2021
- 2021-03-29 JP JP2021055108A patent/JP2021103792A/ja not_active Ceased
- 2021-12-07 JP JP2021198681A patent/JP2022031321A/ja active Pending
- 2021-12-07 JP JP2021198680A patent/JP2022036098A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10608034B2 (en) | 2009-12-26 | 2020-03-31 | Canon Kabushiki Kaisha | Solid-state image pickup apparatus and image pickup system |
| DE102024103109A1 (de) * | 2024-02-05 | 2025-08-07 | Abacus neo GmbH | Elektronische Bilderfassungs- und Bildverarbeitungseinheit |
| WO2025168266A1 (de) | 2024-02-05 | 2025-08-14 | Abacus neo GmbH | Elektronische bilderfassungs- und bildverarbeitungseinheit |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6200035B2 (ja) | 2017-09-20 |
| JP6774393B2 (ja) | 2020-10-21 |
| JP2020057812A (ja) | 2020-04-09 |
| JP2015156516A (ja) | 2015-08-27 |
| JP2022031321A (ja) | 2022-02-18 |
| JP2021103792A (ja) | 2021-07-15 |
| JP2018011068A (ja) | 2018-01-18 |
| JP2022036098A (ja) | 2022-03-04 |
| JP2016154269A (ja) | 2016-08-25 |
| JP2015065479A (ja) | 2015-04-09 |
| JP2020057813A (ja) | 2020-04-09 |
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