JP5765844B2 - サーマルヘッドおよびその製造方法、並びにプリンタ - Google Patents
サーマルヘッドおよびその製造方法、並びにプリンタ Download PDFInfo
- Publication number
- JP5765844B2 JP5765844B2 JP2011037310A JP2011037310A JP5765844B2 JP 5765844 B2 JP5765844 B2 JP 5765844B2 JP 2011037310 A JP2011037310 A JP 2011037310A JP 2011037310 A JP2011037310 A JP 2011037310A JP 5765844 B2 JP5765844 B2 JP 5765844B2
- Authority
- JP
- Japan
- Prior art keywords
- thermal head
- heating resistor
- upper substrate
- electrode
- thermal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 239000000758 substrate Substances 0.000 claims description 180
- 238000010438 heat treatment Methods 0.000 claims description 118
- 238000003825 pressing Methods 0.000 claims description 10
- 230000007246 mechanism Effects 0.000 claims description 9
- 239000010408 film Substances 0.000 description 33
- 238000000034 method Methods 0.000 description 32
- 230000004048 modification Effects 0.000 description 21
- 238000012986 modification Methods 0.000 description 21
- 230000001681 protective effect Effects 0.000 description 21
- 230000008569 process Effects 0.000 description 16
- 238000005530 etching Methods 0.000 description 15
- 239000000463 material Substances 0.000 description 15
- 238000007639 printing Methods 0.000 description 14
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000009413 insulation Methods 0.000 description 7
- 238000005304 joining Methods 0.000 description 7
- 238000001039 wet etching Methods 0.000 description 7
- 238000001312 dry etching Methods 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- 230000020169 heat generation Effects 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 238000005488 sandblasting Methods 0.000 description 3
- 229910018125 Al-Si Inorganic materials 0.000 description 2
- 229910018520 Al—Si Inorganic materials 0.000 description 2
- 229910003564 SiAlON Inorganic materials 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000005338 heat storage Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- -1 Ta 2 O 5 Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/315—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material
- B41J2/32—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material using thermal heads
- B41J2/335—Structure of thermal heads
- B41J2/33585—Hollow parts under the heater
Landscapes
- Electronic Switches (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011037310A JP5765844B2 (ja) | 2011-02-23 | 2011-02-23 | サーマルヘッドおよびその製造方法、並びにプリンタ |
| EP12155066.9A EP2492101B1 (en) | 2011-02-23 | 2012-02-13 | Thermal Head and Method of Manufacturing the same, and Printer |
| CN201210040855.8A CN102649368B (zh) | 2011-02-23 | 2012-02-21 | 热头及其制造方法、以及打印机 |
| US13/401,894 US8629892B2 (en) | 2011-02-23 | 2012-02-22 | Thermal head, method of manufacturing thermal head, and printer equipped with thermal head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011037310A JP5765844B2 (ja) | 2011-02-23 | 2011-02-23 | サーマルヘッドおよびその製造方法、並びにプリンタ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012171288A JP2012171288A (ja) | 2012-09-10 |
| JP2012171288A5 JP2012171288A5 (enExample) | 2014-01-30 |
| JP5765844B2 true JP5765844B2 (ja) | 2015-08-19 |
Family
ID=45607043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011037310A Expired - Fee Related JP5765844B2 (ja) | 2011-02-23 | 2011-02-23 | サーマルヘッドおよびその製造方法、並びにプリンタ |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8629892B2 (enExample) |
| EP (1) | EP2492101B1 (enExample) |
| JP (1) | JP5765844B2 (enExample) |
| CN (1) | CN102649368B (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013082092A (ja) * | 2011-10-06 | 2013-05-09 | Seiko Instruments Inc | サーマルヘッドおよびその製造方法、並びにサーマルプリンタ |
| JP5943414B2 (ja) * | 2011-12-01 | 2016-07-05 | セイコーインスツル株式会社 | サーマルヘッドの製造方法 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5420745A (en) * | 1977-07-15 | 1979-02-16 | Nec Corp | Thermal head |
| JPS606478A (ja) * | 1983-06-24 | 1985-01-14 | Hitachi Ltd | 感熱記録ヘツド |
| JPS61290067A (ja) * | 1985-06-19 | 1986-12-20 | Hitachi Ltd | サ−マルヘツド |
| JPH01221259A (ja) * | 1988-02-29 | 1989-09-04 | Nikon Corp | サーマルヘッド用基板 |
| JPH04147869A (ja) * | 1990-10-11 | 1992-05-21 | Alps Electric Co Ltd | サーマルヘッド |
| KR920009583A (ko) * | 1990-11-20 | 1992-06-25 | 정용문 | 감열기록소자의 제조방법 |
| JP3241755B2 (ja) * | 1991-07-23 | 2001-12-25 | ローム株式会社 | サーマルヘッド及びそれを使用した電子機器 |
| US5594488A (en) * | 1994-05-12 | 1997-01-14 | Alps Electric Co., Ltd. | Thermal head |
| JP3231951B2 (ja) * | 1994-05-12 | 2001-11-26 | アルプス電気株式会社 | サーマルヘッドおよびその製造方法 |
| JP2002036614A (ja) * | 2000-07-25 | 2002-02-06 | Seiko Instruments Inc | 薄膜型サーマルヘッド |
| JP2002067367A (ja) * | 2000-08-31 | 2002-03-05 | Alps Electric Co Ltd | サーマルヘッド及びその製造方法 |
| JP4895344B2 (ja) * | 2005-09-22 | 2012-03-14 | セイコーインスツル株式会社 | 発熱抵抗素子、これを用いたサーマルヘッド及びプリンタ |
| JP5039940B2 (ja) * | 2005-10-25 | 2012-10-03 | セイコーインスツル株式会社 | 発熱抵抗素子、サーマルヘッド、プリンタ、及び発熱抵抗素子の製造方法 |
| JP2007245667A (ja) * | 2006-03-17 | 2007-09-27 | Sony Corp | サーマルヘッド及びプリンタ装置 |
| JP2007245666A (ja) * | 2006-03-17 | 2007-09-27 | Sony Corp | サーマルヘッド及びプリンタ装置 |
| JP4548370B2 (ja) * | 2006-03-17 | 2010-09-22 | ソニー株式会社 | サーマルヘッド及びプリンタ装置 |
| US7768541B2 (en) * | 2007-10-23 | 2010-08-03 | Seiko Instruments Inc. | Heating resistor element, manufacturing method for the same, thermal head, and printer |
| JP2009119850A (ja) | 2007-10-23 | 2009-06-04 | Seiko Instruments Inc | 発熱抵抗素子とその製造方法、サーマルヘッドおよびプリンタ |
| JP5408695B2 (ja) * | 2008-10-27 | 2014-02-05 | セイコーインスツル株式会社 | サーマルヘッドの製造方法 |
| JP5672479B2 (ja) * | 2010-08-25 | 2015-02-18 | セイコーインスツル株式会社 | サーマルヘッド、プリンタおよびサーマルヘッドの製造方法 |
-
2011
- 2011-02-23 JP JP2011037310A patent/JP5765844B2/ja not_active Expired - Fee Related
-
2012
- 2012-02-13 EP EP12155066.9A patent/EP2492101B1/en not_active Not-in-force
- 2012-02-21 CN CN201210040855.8A patent/CN102649368B/zh not_active Expired - Fee Related
- 2012-02-22 US US13/401,894 patent/US8629892B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN102649368A (zh) | 2012-08-29 |
| CN102649368B (zh) | 2015-11-18 |
| US20120212558A1 (en) | 2012-08-23 |
| EP2492101A1 (en) | 2012-08-29 |
| JP2012171288A (ja) | 2012-09-10 |
| US8629892B2 (en) | 2014-01-14 |
| EP2492101B1 (en) | 2014-10-08 |
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