JP5763534B2 - マイクロリソグラフィック投影システムのためのテレセントリシティ補正素子 - Google Patents

マイクロリソグラフィック投影システムのためのテレセントリシティ補正素子 Download PDF

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Publication number
JP5763534B2
JP5763534B2 JP2011516307A JP2011516307A JP5763534B2 JP 5763534 B2 JP5763534 B2 JP 5763534B2 JP 2011516307 A JP2011516307 A JP 2011516307A JP 2011516307 A JP2011516307 A JP 2011516307A JP 5763534 B2 JP5763534 B2 JP 5763534B2
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Japan
Prior art keywords
telecentricity
correction
change
image plane
illuminator
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Expired - Fee Related
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JP2011516307A
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English (en)
Japanese (ja)
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JP2011527024A5 (enExample
JP2011527024A (ja
Inventor
ディー コーネル，ジム
ディー コーネル，ジム
ディー マラク，ジョーゼフ
ディー マラク，ジョーゼフ
エフ ミカロスキ，ポール
エフ ミカロスキ，ポール
イー ウェッブ，ジェームズ
イー ウェッブ，ジェームズ
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Corning Inc
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Corning Inc
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70191—Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/22—Telecentric objectives or lens systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G02B27/0037—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration with diffracting elements
    • G02B27/0043—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration with diffracting elements in projection exposure systems, e.g. microlithographic systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4205—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant
    • G02B27/4222—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant in projection exposure systems, e.g. photolithographic systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Lenses (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2011516307A 2008-06-30 2009-06-25 マイクロリソグラフィック投影システムのためのテレセントリシティ補正素子 Expired - Fee Related JP5763534B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US7688808P 2008-06-30 2008-06-30
US61/076,888 2008-06-30
PCT/US2009/003795 WO2010005491A1 (en) 2008-06-30 2009-06-25 Telecentricity corrector for microlithographic projection system

Publications (3)

Publication Number Publication Date
JP2011527024A JP2011527024A (ja) 2011-10-20
JP2011527024A5 JP2011527024A5 (enExample) 2012-06-07
JP5763534B2 true JP5763534B2 (ja) 2015-08-12

Family

ID=41168460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011516307A Expired - Fee Related JP5763534B2 (ja) 2008-06-30 2009-06-25 マイクロリソグラフィック投影システムのためのテレセントリシティ補正素子

Country Status (6)

Country Link
US (1) US8314922B2 (enExample)
EP (1) EP2310914B1 (enExample)
JP (1) JP5763534B2 (enExample)
KR (1) KR101624758B1 (enExample)
CN (1) CN102077143B (enExample)
WO (1) WO2010005491A1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101624758B1 (ko) * 2008-06-30 2016-05-26 코닝 인코포레이티드 마이크로리소그래픽 투사 시스템용 텔레센트릭성 교정기
TWI772897B (zh) 2011-08-29 2022-08-01 美商安美基公司 用於非破壞性檢測-流體中未溶解粒子之方法及裝置
JP6147058B2 (ja) * 2013-04-01 2017-06-14 キヤノン株式会社 ノズルチップの製造方法
US9188767B2 (en) 2013-11-04 2015-11-17 Christie Digital Systems Usa, Inc. Relay lens system for a high dynamic range projector
US9232172B2 (en) 2013-11-04 2016-01-05 Christie Digital Systems Usa, Inc. Two-stage light modulation for high dynamic range
JP2018519535A (ja) * 2015-05-21 2018-07-19 カール・ツァイス・エスエムティー・ゲーエムベーハー マイクロリソグラフィ投影装置を作動させる方法
US10088660B2 (en) 2017-02-10 2018-10-02 Amgen Inc. Imaging system for counting and sizing particles in fluid-filled vessels
JP2018151832A (ja) * 2017-03-13 2018-09-27 キヤノン株式会社 情報処理装置、情報処理方法、および、プログラム
WO2019082727A1 (ja) * 2017-10-24 2019-05-02 キヤノン株式会社 露光装置および物品の製造方法
JP2019079029A (ja) 2017-10-24 2019-05-23 キヤノン株式会社 露光装置および物品の製造方法
EP3486866A1 (en) * 2017-11-15 2019-05-22 Thomson Licensing A method for processing a light field video based on the use of a super-rays representation
US12111147B2 (en) 2019-09-04 2024-10-08 Ams Sensors Singapore Pte. Ltd. Designing and constructing dot projectors for three-dimensional sensor modules
CN113552774A (zh) * 2020-04-23 2021-10-26 上海微电子装备（集团）股份有限公司 照明光学系统、光刻机设备及曝光方法
EP4650875A1 (en) 2024-05-13 2025-11-19 ASML Netherlands B.V. Illumination uniformity correction apparatus with a transmissive correction plate with a varying parameter profile

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62266513A (ja) * 1986-05-14 1987-11-19 Canon Inc 投影露光光学系
US5461456A (en) * 1992-11-24 1995-10-24 General Signal Corporation Spatial uniformity varier for microlithographic illuminator
US5995263A (en) * 1993-11-12 1999-11-30 Nikon Corporation Projection exposure apparatus
KR960042227A (ko) * 1995-05-19 1996-12-21 오노 시게오 투영노광장치
US6522386B1 (en) * 1997-07-24 2003-02-18 Nikon Corporation Exposure apparatus having projection optical system with aberration correction element
JP2000195778A (ja) 1998-12-28 2000-07-14 Nikon Corp 露光装置及びテレセントリシティ―ムラ補正部材の製造方法
TWI283798B (en) * 2000-01-20 2007-07-11 Asml Netherlands Bv A microlithography projection apparatus
JP2002184676A (ja) * 2000-12-18 2002-06-28 Nikon Corp 照明光学装置および該照明光学装置を備えた露光装置
JP2003203844A (ja) * 2002-01-08 2003-07-18 Nikon Corp 投影露光装置及び露光方法
DE102004035595B4 (de) * 2004-04-09 2008-02-07 Carl Zeiss Smt Ag Verfahren zur Justage eines Projektionsobjektives
JP4599936B2 (ja) * 2004-08-17 2010-12-15 株式会社ニコン 照明光学装置、照明光学装置の調整方法、露光装置、および露光方法
WO2006029796A2 (en) * 2004-09-13 2006-03-23 Carl Zeiss Smt Ag Microlithographic projection exposure apparatus
US7508489B2 (en) * 2004-12-13 2009-03-24 Carl Zeiss Smt Ag Method of manufacturing a miniaturized device
US20090021830A1 (en) * 2005-09-14 2009-01-22 Carl Zeiss Smt Ag Projection lens of a microlithographic exposure system
JP2009536370A (ja) 2006-05-05 2009-10-08 コーニング インコーポレイテッド 擬テレセントリック結像レンズの歪調整
KR101624758B1 (ko) * 2008-06-30 2016-05-26 코닝 인코포레이티드 마이크로리소그래픽 투사 시스템용 텔레센트릭성 교정기

Also Published As

Publication number Publication date
EP2310914A1 (en) 2011-04-20
CN102077143A (zh) 2011-05-25
CN102077143B (zh) 2014-01-22
KR20110026496A (ko) 2011-03-15
JP2011527024A (ja) 2011-10-20
WO2010005491A1 (en) 2010-01-14
EP2310914B1 (en) 2018-12-26
US8314922B2 (en) 2012-11-20
US20090323040A1 (en) 2009-12-31
KR101624758B1 (ko) 2016-05-26

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