JP5755009B2 - エンコーダ - Google Patents

エンコーダ Download PDF

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Publication number
JP5755009B2
JP5755009B2 JP2011089728A JP2011089728A JP5755009B2 JP 5755009 B2 JP5755009 B2 JP 5755009B2 JP 2011089728 A JP2011089728 A JP 2011089728A JP 2011089728 A JP2011089728 A JP 2011089728A JP 5755009 B2 JP5755009 B2 JP 5755009B2
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JP
Japan
Prior art keywords
signal
element array
scale
amplitude
pattern
Prior art date
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Active
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JP2011089728A
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English (en)
Japanese (ja)
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JP2012220457A (ja
Inventor
春彦 堀口
春彦 堀口
名倉 千裕
千裕 名倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
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Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2011089728A priority Critical patent/JP5755009B2/ja
Priority to US13/444,934 priority patent/US9121731B2/en
Priority to EP12163898.5A priority patent/EP2511666B1/fr
Publication of JP2012220457A publication Critical patent/JP2012220457A/ja
Application granted granted Critical
Publication of JP5755009B2 publication Critical patent/JP5755009B2/ja
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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/262Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with optical projection of a pointer or a scale
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746Linear encoders
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34776Absolute encoders with analogue or digital scales
    • G01D5/34784Absolute encoders with analogue or digital scales with only analogue scales or both analogue and incremental scales

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP2011089728A 2011-04-14 2011-04-14 エンコーダ Active JP5755009B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011089728A JP5755009B2 (ja) 2011-04-14 2011-04-14 エンコーダ
US13/444,934 US9121731B2 (en) 2011-04-14 2012-04-12 Encoder having a scale with two areas in which an increasing direction of the amplitude of the energy distribution is opposite between the two areas for precisely obtaining a position of the scale
EP12163898.5A EP2511666B1 (fr) 2011-04-14 2012-04-12 Codeur

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011089728A JP5755009B2 (ja) 2011-04-14 2011-04-14 エンコーダ

Publications (2)

Publication Number Publication Date
JP2012220457A JP2012220457A (ja) 2012-11-12
JP5755009B2 true JP5755009B2 (ja) 2015-07-29

Family

ID=46245799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011089728A Active JP5755009B2 (ja) 2011-04-14 2011-04-14 エンコーダ

Country Status (3)

Country Link
US (1) US9121731B2 (fr)
EP (1) EP2511666B1 (fr)
JP (1) JP5755009B2 (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6032924B2 (ja) 2011-04-13 2016-11-30 キヤノン株式会社 エンコーダ
JP5791340B2 (ja) 2011-04-14 2015-10-07 キヤノン株式会社 エンコーダ
JP5755010B2 (ja) 2011-04-14 2015-07-29 キヤノン株式会社 エンコーダ
WO2014057726A1 (fr) * 2012-10-11 2014-04-17 ソニー株式会社 Dispositif de détection de position, barillet d'objectif et dispositif de capture d'images
EP2920649B1 (fr) 2012-11-19 2023-03-29 ASML Netherlands B.V. Système de mesure de position et réseau pour système de mesure de position
JP6207208B2 (ja) * 2013-04-12 2017-10-04 キヤノン株式会社 位置検出手段
JP6253320B2 (ja) 2013-09-13 2017-12-27 キヤノン株式会社 エンコーダおよびこれを用いた装置
JP6533360B2 (ja) * 2013-10-30 2019-06-19 キヤノン株式会社 位置検出装置及びそれを有するレンズ装置及び撮影装置
JP6313571B2 (ja) * 2013-11-12 2018-04-18 キヤノン株式会社 位置検出装置及びそれを有するレンズ装置及び撮影装置
JP2016050886A (ja) * 2014-09-01 2016-04-11 オークマ株式会社 光学式リニアエンコーダ
TWI623200B (zh) * 2016-04-27 2018-05-01 財團法人工業技術研究院 定位絕對碼的解碼裝置及解碼方法
US9871595B2 (en) 2016-04-27 2018-01-16 Industrial Technology Research Institute Decoding device and method for absolute positioning code
US9958294B2 (en) * 2016-06-30 2018-05-01 Mitutoyo Corporation Absolute position encoder including scale with varying spatial characteristic and utilizing Fourier transform or other signal processing
JP2018084462A (ja) * 2016-11-22 2018-05-31 株式会社ミツトヨ エンコーダ及び信号処理回路
US10612946B2 (en) 2018-05-30 2020-04-07 Rockwell Automation Technologies, Inc. Encoder system for position determination with inclined scale

Family Cites Families (24)

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JPS5530603A (en) 1978-08-25 1980-03-04 Nippon Telegr & Teleph Corp <Ntt> Position detector
US4291976A (en) 1980-03-10 1981-09-29 Sperry Corporation Digital fiber optic position sensor
JPS6363916A (ja) 1986-09-04 1988-03-22 Mitsutoyo Corp 光学式変位検出器
JPS6363917A (ja) 1986-09-04 1988-03-22 Mitsutoyo Corp 光学式変位検出器
JPS6365316A (ja) 1986-09-05 1988-03-23 Mitsutoyo Corp 光学式変位検出装置
JPS6365315A (ja) 1986-09-05 1988-03-23 Mitsutoyo Corp 光学式変位検出装置
JPH01229905A (ja) 1988-03-10 1989-09-13 Mitsutoyo Corp 変位検出器
JPH0295203A (ja) 1988-09-30 1990-04-06 Matsushita Electric Ind Co Ltd 位置合わせ装置
US5069547A (en) 1988-11-23 1991-12-03 The Boeing Company Multitrack multilevel sensing system with error detecting
US5699058A (en) * 1994-03-17 1997-12-16 Copal Company Limited Absolute encoder generating phase-shifted triangular waveforms to produce multi-bit signals
JPH09196705A (ja) 1996-01-23 1997-07-31 Mitsutoyo Corp 変位測定装置
US6707029B1 (en) 1999-01-22 2004-03-16 Citizen Watch Co., Ltd. Optical displacement measuring apparatus having light receiving arrays
US6512222B2 (en) 2000-02-03 2003-01-28 Mitutoyo Corporation Displacement measuring apparatus
US6713756B2 (en) 2000-05-09 2004-03-30 Olympus Corporation Optical encoder and optical rotary encoder
US6765195B1 (en) 2001-05-22 2004-07-20 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Method and apparatus for two-dimensional absolute optical encoding
JP2007248359A (ja) 2006-03-17 2007-09-27 Citizen Holdings Co Ltd 位置検出装置
US7521669B2 (en) 2006-06-02 2009-04-21 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Multi-bit absolute position optical encoder with reduced number of tracks
JP2009198318A (ja) 2008-02-21 2009-09-03 Mitsutoyo Corp 光電式エンコーダ
US8188420B2 (en) 2009-11-14 2012-05-29 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. High resolution optical encoder systems having a set of light detecting elements each comprising a pair of complementary detectors (as amended)
JP5887064B2 (ja) 2010-04-28 2016-03-16 株式会社ミツトヨ 光学式エンコーダ
US8309906B2 (en) 2010-06-10 2012-11-13 Mitutoyo Corporation Absolute optical encoder with long range intensity modulation on scale
JP6032924B2 (ja) 2011-04-13 2016-11-30 キヤノン株式会社 エンコーダ
JP5791340B2 (ja) 2011-04-14 2015-10-07 キヤノン株式会社 エンコーダ
JP5755010B2 (ja) 2011-04-14 2015-07-29 キヤノン株式会社 エンコーダ

Also Published As

Publication number Publication date
US9121731B2 (en) 2015-09-01
EP2511666B1 (fr) 2019-07-03
EP2511666A3 (fr) 2014-08-20
JP2012220457A (ja) 2012-11-12
US20120261561A1 (en) 2012-10-18
EP2511666A2 (fr) 2012-10-17

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