JP5740394B2 - 旋回流形成体及び非接触搬送装置 - Google Patents

旋回流形成体及び非接触搬送装置 Download PDF

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Publication number
JP5740394B2
JP5740394B2 JP2012510594A JP2012510594A JP5740394B2 JP 5740394 B2 JP5740394 B2 JP 5740394B2 JP 2012510594 A JP2012510594 A JP 2012510594A JP 2012510594 A JP2012510594 A JP 2012510594A JP 5740394 B2 JP5740394 B2 JP 5740394B2
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JP
Japan
Prior art keywords
flow forming
swirling flow
fluid
main body
forming body
Prior art date
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Active
Application number
JP2012510594A
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English (en)
Japanese (ja)
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JPWO2011129152A1 (ja
Inventor
秀夫 小澤
秀夫 小澤
角田　耕一
耕一 角田
貴裕 安田
貴裕 安田
松本　浩司
浩司 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oiles Corp
Original Assignee
Oiles Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Oiles Corp filed Critical Oiles Corp
Priority to JP2012510594A priority Critical patent/JP5740394B2/ja
Publication of JPWO2011129152A1 publication Critical patent/JPWO2011129152A1/ja
Application granted granted Critical
Publication of JP5740394B2 publication Critical patent/JP5740394B2/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP2012510594A 2010-04-14 2011-02-24 旋回流形成体及び非接触搬送装置 Active JP5740394B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012510594A JP5740394B2 (ja) 2010-04-14 2011-02-24 旋回流形成体及び非接触搬送装置

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2010092726 2010-04-14
JP2010092726 2010-04-14
PCT/JP2011/054095 WO2011129152A1 (ja) 2010-04-14 2011-02-24 旋回流形成体及び非接触搬送装置
JP2012510594A JP5740394B2 (ja) 2010-04-14 2011-02-24 旋回流形成体及び非接触搬送装置

Publications (2)

Publication Number Publication Date
JPWO2011129152A1 JPWO2011129152A1 (ja) 2013-07-11
JP5740394B2 true JP5740394B2 (ja) 2015-06-24

Family

ID=44798531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012510594A Active JP5740394B2 (ja) 2010-04-14 2011-02-24 旋回流形成体及び非接触搬送装置

Country Status (5)

Country Link
JP (1) JP5740394B2 (zh)
KR (1) KR20130059318A (zh)
CN (1) CN102892693B (zh)
TW (1) TWI503269B (zh)
WO (1) WO2011129152A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5536516B2 (ja) * 2010-04-14 2014-07-02 オイレス工業株式会社 非接触搬送装置
CN103662835B (zh) * 2013-09-03 2015-07-29 浙江大学 气旋流悬浮装置
KR101469688B1 (ko) * 2014-03-21 2014-12-05 한국뉴매틱(주) 진공 시스템용 체크-밸브 어셈블리

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007074855A1 (ja) * 2005-12-27 2007-07-05 Harmotec Co., Ltd. 非接触搬送装置
JP2009028862A (ja) * 2007-07-27 2009-02-12 Ihi Corp 非接触搬送装置
WO2009119377A1 (ja) * 2008-03-24 2009-10-01 オイレス工業株式会社 非接触搬送装置
WO2010004800A1 (ja) * 2008-07-10 2010-01-14 オイレス工業株式会社 旋回流形成体及び非接触搬送装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0276242A (ja) * 1988-09-12 1990-03-15 Nippon Telegr & Teleph Corp <Ntt> 基板搬送方法およびその装置
TWI222423B (en) * 2001-12-27 2004-10-21 Orbotech Ltd System and methods for conveying and transporting levitated articles
JP4437415B2 (ja) * 2004-03-03 2010-03-24 リンク・パワー株式会社 非接触保持装置および非接触保持搬送装置
TWM341017U (en) * 2007-12-25 2008-09-21 Jin-Wei Huang Fan air-floating device for glass substrate transportation

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007074855A1 (ja) * 2005-12-27 2007-07-05 Harmotec Co., Ltd. 非接触搬送装置
JP2009028862A (ja) * 2007-07-27 2009-02-12 Ihi Corp 非接触搬送装置
WO2009119377A1 (ja) * 2008-03-24 2009-10-01 オイレス工業株式会社 非接触搬送装置
WO2010004800A1 (ja) * 2008-07-10 2010-01-14 オイレス工業株式会社 旋回流形成体及び非接触搬送装置

Also Published As

Publication number Publication date
TWI503269B (zh) 2015-10-11
CN102892693B (zh) 2014-09-10
JPWO2011129152A1 (ja) 2013-07-11
TW201206808A (en) 2012-02-16
KR20130059318A (ko) 2013-06-05
WO2011129152A1 (ja) 2011-10-20
CN102892693A (zh) 2013-01-23

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