JP5700080B2 - カチオン界面活性剤含有排水の処理方法及び処理装置 - Google Patents
カチオン界面活性剤含有排水の処理方法及び処理装置 Download PDFInfo
- Publication number
- JP5700080B2 JP5700080B2 JP2013138915A JP2013138915A JP5700080B2 JP 5700080 B2 JP5700080 B2 JP 5700080B2 JP 2013138915 A JP2013138915 A JP 2013138915A JP 2013138915 A JP2013138915 A JP 2013138915A JP 5700080 B2 JP5700080 B2 JP 5700080B2
- Authority
- JP
- Japan
- Prior art keywords
- reverse osmosis
- membrane separation
- osmosis membrane
- cationic surfactant
- membrane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000003093 cationic surfactant Substances 0.000 title claims description 52
- 239000002351 wastewater Substances 0.000 title claims description 51
- 238000000034 method Methods 0.000 title claims description 22
- 239000012528 membrane Substances 0.000 claims description 172
- 238000001223 reverse osmosis Methods 0.000 claims description 146
- 238000000926 separation method Methods 0.000 claims description 101
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 76
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 32
- 238000011084 recovery Methods 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 239000004952 Polyamide Substances 0.000 claims description 10
- 229920002647 polyamide Polymers 0.000 claims description 10
- 239000004372 Polyvinyl alcohol Substances 0.000 claims description 5
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 5
- 238000004065 wastewater treatment Methods 0.000 claims description 2
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 9
- 238000001914 filtration Methods 0.000 description 8
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 6
- 239000002253 acid Substances 0.000 description 6
- 239000003513 alkali Substances 0.000 description 6
- 230000004907 flux Effects 0.000 description 6
- 230000004931 aggregating effect Effects 0.000 description 5
- 238000005188 flotation Methods 0.000 description 5
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 4
- 238000005189 flocculation Methods 0.000 description 4
- 230000016615 flocculation Effects 0.000 description 4
- 238000001471 micro-filtration Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000000108 ultra-filtration Methods 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 239000004760 aramid Substances 0.000 description 3
- 229920003235 aromatic polyamide Polymers 0.000 description 3
- 238000005345 coagulation Methods 0.000 description 3
- 230000015271 coagulation Effects 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 3
- 238000005374 membrane filtration Methods 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- 239000011780 sodium chloride Substances 0.000 description 3
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 241000282320 Panthera leo Species 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- 239000013543 active substance Substances 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000010612 desalination reaction Methods 0.000 description 2
- 238000011033 desalting Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 238000004062 sedimentation Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- 241000894006 Bacteria Species 0.000 description 1
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- DIZPMCHEQGEION-UHFFFAOYSA-H aluminium sulfate (anhydrous) Chemical compound [Al+3].[Al+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O DIZPMCHEQGEION-UHFFFAOYSA-H 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 239000008119 colloidal silica Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000008394 flocculating agent Substances 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000010979 pH adjustment Methods 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000010802 sludge Substances 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 239000003206 sterilizing agent Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- BJAARRARQJZURR-UHFFFAOYSA-N trimethylazanium;hydroxide Chemical compound O.CN(C)C BJAARRARQJZURR-UHFFFAOYSA-N 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F9/00—Multistage treatment of water, waste water or sewage
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/02—Reverse osmosis; Hyperfiltration ; Nanofiltration
- B01D61/04—Feed pretreatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/02—Reverse osmosis; Hyperfiltration ; Nanofiltration
- B01D61/025—Reverse osmosis; Hyperfiltration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/02—Reverse osmosis; Hyperfiltration ; Nanofiltration
- B01D61/025—Reverse osmosis; Hyperfiltration
- B01D61/026—Reverse osmosis; Hyperfiltration comprising multiple reverse osmosis steps
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/28—Treatment of water, waste water, or sewage by sorption
- C02F1/283—Treatment of water, waste water, or sewage by sorption using coal, charred products, or inorganic mixtures containing them
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
- C02F1/441—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by reverse osmosis
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/66—Treatment of water, waste water, or sewage by neutralisation; pH adjustment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2311/00—Details relating to membrane separation process operations and control
- B01D2311/04—Specific process operations in the feed stream; Feed pretreatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2311/00—Details relating to membrane separation process operations and control
- B01D2311/26—Further operations combined with membrane separation processes
- B01D2311/2626—Absorption or adsorption
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2317/00—Membrane module arrangements within a plant or an apparatus
- B01D2317/02—Elements in series
- B01D2317/025—Permeate series
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2101/00—Nature of the contaminant
- C02F2101/30—Organic compounds
- C02F2101/301—Detergents, surfactants
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
- C02F2103/34—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32
- C02F2103/346—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32 from semiconductor processing, e.g. waste water from polishing of wafers
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2209/00—Controlling or monitoring parameters in water treatment
- C02F2209/06—Controlling or monitoring parameters in water treatment pH
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2301/00—General aspects of water treatment
- C02F2301/08—Multistage treatments, e.g. repetition of the same process step under different conditions
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Water Supply & Treatment (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Environmental & Geological Engineering (AREA)
- Organic Chemistry (AREA)
- Nanotechnology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Water Treatment By Sorption (AREA)
Description
(1) 排水を活性汚泥法又は担体方式で生物処理した後、凝集浮上濾過、凝集沈殿濾過、或いは限外濾過(UF)膜又は精密濾過(MF)膜による膜分離処理により生物処理水中の菌体やSSを分離除去し、次いで逆浸透(RO)膜分離により脱塩処理し、RO膜透過水を回収する。
(2) 上記(1)の方法において、生物処理を省略して、凝集浮上濾過、凝集沈殿濾過、或いはUF膜又はMF膜による膜分離処理により排水中のSSを分離除去した後、RO膜分離により脱塩処理し、RO膜透過水を回収する。
特許文献1に記載の方法では、コンベア潤滑剤として用いられたカチオン界面活性剤を含むペットボトルの殺菌洗浄排水を、殺菌剤分解装置で処理した後、pH6以下、好ましくはpH5〜6にpH調整し、その後RO膜処理装置で処理して洗浄水として再利用している。
モノアルキルアンモニウムクロライド系のカチオン界面活性剤(ライオン社製「アーカードT」)を2mg/L含む排水を原水として図1に示す装置で処理するに当たり、第1のRO膜分離装置3に導入するRO給水のpHを変え、RO給水と、第1のRO膜分離装置3のRO膜の透過流束の経時変化との関係を調べる実験を行った。
各pHのRO給水におけるRO膜の透過流束の経時変化を図2に示す。
図2より、RO給水のpHが7又は9の場合には透過流束が経時により大きく低下するのに対して、RO給水のpHが4又は5であると、30日後でも透過流束の低下の度合いは小さく、カチオン界面活性剤による膜閉塞が防止されていることが分かる。
モノアルキルアンモニウムクロライド系のカチオン界面活性剤(ライオン社製「アーカードT」)を2mg/L含む排水を原水として図1に示す装置で処理した。
次いで、第1のRO膜分離装置3の透過水にアルカリ(水酸化ナトリウム)を添加してpH7に調整し、第2のRO膜分離装置4でRO膜分離処理した。第2のRO膜分離装置4としては日東電工社製芳香族ポリアミドRO膜「ES−20」(NaCl除去率99.5%)を装填したものを用い、水回収率90%で運転した。
実施例1において、第1のRO膜分離装置3の透過水(pH4.2)をpH調整せずに、そのまま第2のRO膜分離装置4でRO膜分離処理したこと以外は同様にして処理を行い、第1のRO膜分離装置3の透過水及び第2のRO膜分離装置4の透過水の水質を調べ、結果を表1に示した。また、処理開始から30日間通水運転した後の第2のRO膜分離装置4における透過流束の低下率を調べ、結果を表1に示した。
また、比較例1における第2のRO膜分離装置の透過水の水質から、2段RO膜分離処理を行っても、第1のRO膜分離装置の透過水のpH調整を行わないと、良好な水質の処理水を得ることができないことが分かる。
2 活性炭塔
3 第1のRO膜分離装置
4 第2のRO膜分離装置
Claims (4)
- カチオン界面活性剤含有排水をpH3〜5にpH調整した後逆浸透膜分離処理する第1の逆浸透膜分離工程と、該第1の逆浸透膜分離工程で得られる逆浸透膜透過水をpH6.5〜10.5にpH調整した後逆浸透膜分離処理する第2の逆浸透膜分離工程とを備えるカチオン界面活性剤含有排水の処理方法であって、
前記カチオン界面活性剤含有排水が電子産業プロセス排水であり、前記第1の逆浸透膜分離工程における逆浸透膜がポリアミド膜又はポリビニルアルコール膜で、水回収率が60〜90%であり、前記第2の逆浸透膜分離工程における逆浸透膜がポリアミド膜で、水回収率が80〜90%であり、該第2の逆浸透膜分離工程の逆浸透膜透過水を回収することを特徴とするカチオン界面活性剤含有排水の処理方法。 - 請求項1において、前記カチオン界面活性剤含有排水を活性炭処理した後、前記第1の逆浸透膜分離工程で処理することを特徴とするカチオン界面活性剤含有排水の処理方法。
- カチオン界面活性剤含有排水をpH3〜5にpH調整した後逆浸透膜分離処理する第1の逆浸透膜分離手段と、該第1の逆浸透膜分離手段で得られる逆浸透膜透過水をpH6.5〜10.5にpH調整した後逆浸透膜分離処理する第2の逆浸透膜分離手段とを備えるカチオン界面活性剤含有排水の処理装置であって、
前記カチオン界面活性剤含有排水が電子産業プロセス排水であり、前記第1の逆浸透膜分離手段における逆浸透膜がポリアミド膜又はポリビニルアルコール膜で、水回収率が60〜90%であり、前記第2の逆浸透膜分離手段における逆浸透膜がポリアミド膜で、水回収率が80〜90%であり、該第2の逆浸透膜分離手段の逆浸透膜透過水を回収することを特徴とするカチオン界面活性剤含有排水の処理装置。 - 請求項3において、前記第1の逆浸透膜分離手段の前段において、前記カチオン界面活性剤含有排水を処理する活性炭塔を有することを特徴とするカチオン界面活性剤含有排水の処理装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013138915A JP5700080B2 (ja) | 2013-07-02 | 2013-07-02 | カチオン界面活性剤含有排水の処理方法及び処理装置 |
US14/901,847 US20160368801A1 (en) | 2013-07-02 | 2014-06-24 | Method and apparatus for treating wastewater containing cationic surfactant |
SG11201510718UA SG11201510718UA (en) | 2013-07-02 | 2014-06-24 | Method and apparatus for treating wastewater containing cationic surfactant |
KR1020157036964A KR102203037B1 (ko) | 2013-07-02 | 2014-06-24 | 카티온 계면 활성제 함유 배수의 처리 방법 및 처리 장치 |
PCT/JP2014/066629 WO2015002014A1 (ja) | 2013-07-02 | 2014-06-24 | カチオン界面活性剤含有排水の処理方法及び処理装置 |
CN201480032673.3A CN105358489B (zh) | 2013-07-02 | 2014-06-24 | 含有阳离子表面活性剂的废水的处理方法及处理装置 |
TW103122490A TWI593636B (zh) | 2013-07-02 | 2014-06-30 | Drainage treatment method and processing device containing cationic surfactant |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013138915A JP5700080B2 (ja) | 2013-07-02 | 2013-07-02 | カチオン界面活性剤含有排水の処理方法及び処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015009230A JP2015009230A (ja) | 2015-01-19 |
JP5700080B2 true JP5700080B2 (ja) | 2015-04-15 |
Family
ID=52143593
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013138915A Active JP5700080B2 (ja) | 2013-07-02 | 2013-07-02 | カチオン界面活性剤含有排水の処理方法及び処理装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20160368801A1 (ja) |
JP (1) | JP5700080B2 (ja) |
KR (1) | KR102203037B1 (ja) |
CN (1) | CN105358489B (ja) |
SG (1) | SG11201510718UA (ja) |
TW (1) | TWI593636B (ja) |
WO (1) | WO2015002014A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10981819B2 (en) * | 2018-06-28 | 2021-04-20 | Fluent Technologies, Llc | Variable pulsed ionic waste stream reclamation system and method |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1478345A (en) * | 1974-04-10 | 1977-06-29 | Ebara Infilco | Process for purifying water containing suspended matter |
JPS5850487A (ja) * | 1981-09-21 | 1983-03-24 | Brother Ind Ltd | 被検出物体の検出装置 |
US4574049B1 (en) * | 1984-06-04 | 1999-02-02 | Ionpure Filter Us Inc | Reverse osmosis system |
JPH062277B2 (ja) * | 1985-08-15 | 1994-01-12 | 栗田工業株式会社 | 高純度水の製造装置 |
AU617290B3 (en) * | 1991-05-27 | 1991-10-04 | Hoefer, Dawn Annette | Process for removing silica from aqueous liquors |
JP3278918B2 (ja) * | 1992-08-21 | 2002-04-30 | 栗田工業株式会社 | 脱塩方法 |
JP3376639B2 (ja) * | 1993-05-27 | 2003-02-10 | 栗田工業株式会社 | 半導体洗浄排水からの純水回収方法 |
JP3862816B2 (ja) * | 1997-06-18 | 2006-12-27 | 日東電工株式会社 | 逆浸透膜分離方法 |
JP3575271B2 (ja) * | 1998-03-06 | 2004-10-13 | 栗田工業株式会社 | 純水の製造方法 |
JP2000015257A (ja) * | 1998-07-06 | 2000-01-18 | Kurita Water Ind Ltd | 高純度水の製造装置および方法 |
JP2001205267A (ja) * | 2000-01-24 | 2001-07-31 | Japan Organo Co Ltd | 2段逆浸透膜処理装置および方法 |
JP2003071252A (ja) * | 2001-09-06 | 2003-03-11 | Nitto Denko Corp | 多段式逆浸透処理方法 |
JP4519487B2 (ja) * | 2003-03-06 | 2010-08-04 | 株式会社トクヤマ | 洗浄用組成物 |
US6929748B2 (en) * | 2003-03-28 | 2005-08-16 | Chemitreat Pte Ltd | Apparatus and method for continuous electrodeionization |
JP2005246158A (ja) * | 2004-03-02 | 2005-09-15 | Kobelco Eco-Solutions Co Ltd | 海水の淡水化処理法および装置 |
CN1950302A (zh) * | 2004-04-23 | 2007-04-18 | 永久水有限公司 | 从水中去除污染物的方法和装置 |
JP4813810B2 (ja) * | 2005-03-11 | 2011-11-09 | 日本錬水株式会社 | 界面活性剤を含有する排水の処理方法、および排水処理システム |
US8883012B2 (en) * | 2007-01-19 | 2014-11-11 | Purolite Corporation | Reduced fouling of reverse osmosis membranes |
JP5813280B2 (ja) * | 2008-03-19 | 2015-11-17 | 富士フイルム株式会社 | 半導体デバイス用洗浄液、および洗浄方法 |
-
2013
- 2013-07-02 JP JP2013138915A patent/JP5700080B2/ja active Active
-
2014
- 2014-06-24 KR KR1020157036964A patent/KR102203037B1/ko active IP Right Grant
- 2014-06-24 SG SG11201510718UA patent/SG11201510718UA/en unknown
- 2014-06-24 CN CN201480032673.3A patent/CN105358489B/zh active Active
- 2014-06-24 US US14/901,847 patent/US20160368801A1/en not_active Abandoned
- 2014-06-24 WO PCT/JP2014/066629 patent/WO2015002014A1/ja active Application Filing
- 2014-06-30 TW TW103122490A patent/TWI593636B/zh active
Also Published As
Publication number | Publication date |
---|---|
US20160368801A1 (en) | 2016-12-22 |
SG11201510718UA (en) | 2016-01-28 |
KR102203037B1 (ko) | 2021-01-13 |
JP2015009230A (ja) | 2015-01-19 |
WO2015002014A1 (ja) | 2015-01-08 |
TW201509827A (zh) | 2015-03-16 |
CN105358489A (zh) | 2016-02-24 |
TWI593636B (zh) | 2017-08-01 |
CN105358489B (zh) | 2017-08-08 |
KR20160025527A (ko) | 2016-03-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4862361B2 (ja) | 排水処理装置及び排水処理方法 | |
JP5879901B2 (ja) | 有機排水の回収処理装置及び回収処理方法 | |
WO2010017303A3 (en) | Reverse osmosis enhanced recovery hybrid process | |
JP2007160233A (ja) | 有機物含有排水の処理装置及び処理方法 | |
JP2010017614A (ja) | 有機性排水の処理方法及び装置 | |
JP2014213306A (ja) | 純水製造装置、純水およびろ過水製造装置、純水製造方法、ならびに純水およびろ過水製造方法 | |
WO2011136043A1 (ja) | 廃水処理装置および廃水処理方法 | |
JP2012210568A (ja) | 現像廃液の再生装置及び再生方法 | |
JP5700080B2 (ja) | カチオン界面活性剤含有排水の処理方法及び処理装置 | |
JP5957890B2 (ja) | 電子産業プロセス排水の回収方法及び回収装置 | |
JP2006281174A (ja) | 排水のリサイクル処理方法及び排水リサイクル処理装置並びに排水リサイクル処理システム | |
JP4899565B2 (ja) | 水処理装置及び水処理方法 | |
JP2006095425A (ja) | 廃水の生物処理水含有水の浄化方法及び浄化装置 | |
JP2010046562A (ja) | 資源回収型水処理方法及び資源回収型水処理システム | |
JP2004267830A (ja) | 生物処理水含有水の処理方法 | |
JP3697938B2 (ja) | 用排水処理装置 | |
CA2682057A1 (en) | Method for reducing fouling in microfiltration systems | |
JP6515443B2 (ja) | 重金属類及び/又は硬度成分を含む有機物含有水の生物処理方法及び処理装置 | |
CN111051253A (zh) | 含二氧化硅水的处理装置及处理方法 | |
JP2010058019A (ja) | エマルション型の水溶性切削油の処理方法 | |
JP2005081269A (ja) | 有機物含有排水の処理方法及び処理装置 | |
JP7120095B2 (ja) | 水処理システム | |
JP5927770B2 (ja) | 現像廃液の再生装置及び再生方法 | |
JP5044578B2 (ja) | 浄水膜処理装置 | |
JP2006130367A (ja) | 有機物含有水からの水の回収装置および回収方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20141023 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20150120 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150202 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5700080 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |