JP5693068B2 - 液体吐出ヘッド及びその製造方法 - Google Patents

液体吐出ヘッド及びその製造方法 Download PDF

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Publication number
JP5693068B2
JP5693068B2 JP2010159746A JP2010159746A JP5693068B2 JP 5693068 B2 JP5693068 B2 JP 5693068B2 JP 2010159746 A JP2010159746 A JP 2010159746A JP 2010159746 A JP2010159746 A JP 2010159746A JP 5693068 B2 JP5693068 B2 JP 5693068B2
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JP
Japan
Prior art keywords
silicon substrate
resin layer
layer
liquid
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010159746A
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English (en)
Japanese (ja)
Other versions
JP2012020470A (ja
JP2012020470A5 (enExample
Inventor
充 千田
充 千田
智 伊部
智 伊部
裕登 小宮山
裕登 小宮山
田川　義則
義則 田川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2010159746A priority Critical patent/JP5693068B2/ja
Priority to US13/170,695 priority patent/US8596759B2/en
Publication of JP2012020470A publication Critical patent/JP2012020470A/ja
Publication of JP2012020470A5 publication Critical patent/JP2012020470A5/ja
Application granted granted Critical
Publication of JP5693068B2 publication Critical patent/JP5693068B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/1404—Geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2010159746A 2010-07-14 2010-07-14 液体吐出ヘッド及びその製造方法 Expired - Fee Related JP5693068B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2010159746A JP5693068B2 (ja) 2010-07-14 2010-07-14 液体吐出ヘッド及びその製造方法
US13/170,695 US8596759B2 (en) 2010-07-14 2011-06-28 Liquid ejection head and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010159746A JP5693068B2 (ja) 2010-07-14 2010-07-14 液体吐出ヘッド及びその製造方法

Publications (3)

Publication Number Publication Date
JP2012020470A JP2012020470A (ja) 2012-02-02
JP2012020470A5 JP2012020470A5 (enExample) 2013-08-08
JP5693068B2 true JP5693068B2 (ja) 2015-04-01

Family

ID=45466632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010159746A Expired - Fee Related JP5693068B2 (ja) 2010-07-14 2010-07-14 液体吐出ヘッド及びその製造方法

Country Status (2)

Country Link
US (1) US8596759B2 (enExample)
JP (1) JP5693068B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6039259B2 (ja) 2011-07-25 2016-12-07 キヤノン株式会社 液体吐出ヘッド、およびその製造方法
JP2013059904A (ja) * 2011-09-13 2013-04-04 Canon Inc 液体記録ヘッド及びにその製造方法
JP2014028471A (ja) 2012-07-31 2014-02-13 Canon Inc 液体吐出ヘッド及びその製造方法
JP6202869B2 (ja) 2013-04-17 2017-09-27 キヤノン株式会社 液体吐出ヘッド
US9889664B2 (en) 2013-09-20 2018-02-13 Hewlett-Packard Development Company, L.P. Molded printhead structure
CN105555539B (zh) 2013-09-20 2017-08-15 惠普发展公司，有限责任合伙企业 打印杆以及形成打印杆的方法
CN112039489B (zh) * 2020-01-22 2022-08-05 中芯集成电路（宁波）有限公司 一种薄膜压电声波滤波器及其制造方法
CN112039491B (zh) * 2020-03-31 2022-08-05 中芯集成电路（宁波）有限公司 一种薄膜压电声波滤波器及其制造方法

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5451837A (en) 1977-09-30 1979-04-24 Ricoh Co Ltd Ink jet head device
JP3343875B2 (ja) 1995-06-30 2002-11-11 キヤノン株式会社 インクジェットヘッドの製造方法
JP3984689B2 (ja) 1996-11-11 2007-10-03 キヤノン株式会社 インクジェットヘッドの製造方法
JP2005035281A (ja) 2003-06-23 2005-02-10 Canon Inc 液体吐出ヘッドの製造方法
JP4455282B2 (ja) 2003-11-28 2010-04-21 キヤノン株式会社 インクジェットヘッドの製造方法、インクジェットヘッドおよびインクジェットカートリッジ
JP4766658B2 (ja) * 2005-05-10 2011-09-07 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
JP4881081B2 (ja) 2005-07-25 2012-02-22 キヤノン株式会社 液体吐出ヘッドの製造方法
US7523553B2 (en) 2006-02-02 2009-04-28 Canon Kabushiki Kaisha Method of manufacturing ink jet recording head
JP2007203623A (ja) 2006-02-02 2007-08-16 Canon Inc インクジェット記録ヘッド及びその製造方法
JP4834426B2 (ja) 2006-03-06 2011-12-14 キヤノン株式会社 インクジェット記録ヘッドの製造方法
US8037603B2 (en) 2006-04-27 2011-10-18 Canon Kabushiki Kaisha Ink jet head and producing method therefor
US8267503B2 (en) 2006-10-16 2012-09-18 Canon Kabushiki Kaisha Ink jet recording head and manufacturing method therefor
JP2008179045A (ja) * 2007-01-24 2008-08-07 Canon Inc インクジェット記録ヘッド及びその製造方法、半導体デバイス及びその製造方法
US8197705B2 (en) 2007-09-06 2012-06-12 Canon Kabushiki Kaisha Method of processing silicon substrate and method of manufacturing liquid discharge head
JP2009061664A (ja) 2007-09-06 2009-03-26 Canon Inc インクジェットヘッド用基板の製造方法
JP5031492B2 (ja) 2007-09-06 2012-09-19 キヤノン株式会社 インクジェットヘッド基板の製造方法
JP5031493B2 (ja) 2007-09-06 2012-09-19 キヤノン株式会社 インクジェットヘッド用基板の製造方法
JP5511191B2 (ja) 2008-01-28 2014-06-04 キヤノン株式会社 液体吐出ヘッド、液体吐出ヘッドの製造方法および構造体の形成方法
JP5305691B2 (ja) * 2008-02-27 2013-10-02 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
JP2009208393A (ja) 2008-03-05 2009-09-17 Canon Inc インクジェット記録ヘッド
JP5393423B2 (ja) 2009-12-10 2014-01-22 キヤノン株式会社 インク吐出ヘッド及びその製造方法
JP5578859B2 (ja) 2010-01-14 2014-08-27 キヤノン株式会社 液体吐出ヘッド及び液体吐出ヘッドの製造方法

Also Published As

Publication number Publication date
US20120013682A1 (en) 2012-01-19
JP2012020470A (ja) 2012-02-02
US8596759B2 (en) 2013-12-03

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