JP5681845B2 - 薄膜太陽電池モジュールの製造方法 - Google Patents
薄膜太陽電池モジュールの製造方法 Download PDFInfo
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Description
2 第一電極(前面電極)
3 光活性層配列
4 第二電極(背面電極)
5 第一セグメント
6 接触区域
7 第二セグメント
10、11、12 分離線
20、21 分離線
22 絶縁線
23 被覆線
24、25、26 分離線
30 分離線
31 接触線
32 分離線
40 分離線
41 接触線
42 分離線
43 導電性粘着ストリップ
44 導電性ストランド
50 第一搬送システム
51 ガラス基板
52 洗浄部
53 第一真空ロック
54 コーティング設備
55 第二搬送システム
56 第一PVD/(LP)CVDコーティング場
57 PECVDコーティング場
58 第二PVD/(LP)CVDコーティング場
59 第二真空ロック
60 第三搬送システム
61 構造化装置
62 プロセスヘッド
63 薄層太陽電池モジュール
Claims (6)
- 電気的に直列接続され共通の基板(1)に配置された複数のセグメント(5,7)を含む薄膜太陽電池モジュールの製造方法であって、
少なくとも1つの電極(2)と、1つの光活性層配列(3)と、更なる電極(4)であって前記光活性層配列が前記電極と前記更なる電極との間に配置される、更なる電極と、を形成するために前記基板に層を形成する工程と、
前記複数のセグメントを構造化するために、形成された前記層を構造化する工程と、を備え、
前記構造化する工程が実行される前に、最小限1つの前記電極と1つの前記光活性層配列と前記更なる電極とが形成され、
既に形成された前記層についての前記層を構造化する工程は、
前記複数のセグメントを直列に接続するための前記更なる電極と前記電極との電気的接続において経由する接触線(41)を作成する工程と、
前記電極、前記光活性層配列及び前記更なる電極を分断する分離線(42)を作成する工程と、
前記接触線を作成する工程の後に前記更なる電極の前記電気的接続を回復するために、前記分離線の領域内の前記更なる電極に導電性ペーストのストランド(44)又は導電性の粘着ストリップ(43)を形成する工程と、を備える、
ことを特徴とする薄膜太陽電池モジュールの製造方法。 - 前記電極(2)は、少なくとも1つの透明な導電性酸化物の層および/または金属の層で形成されることを特徴とする請求項1に記載の薄膜太陽電池モジュールの製造方法。
- 前記光活性層配列(3)は、少なくとも1つの個々の層が、非結晶か微細結晶のSiおよび/または非結晶か微細結晶のSiGeおよび/または複合半導体で形成されていて、複合半導体は特にCdTeかCISかCIGSであることを特徴とする請求項1または2に記載の薄膜太陽電池モジュールの製造方法。
- 前記光活性層配列(3)は、非結晶Siであるpドープ型の層と真性の層とnドープ型の層、および/または、微細結晶Siであるpドープ型の層と真性の層とnドープ型の層、および/または、非結晶Si(Ge)であるpドープ型の層と真性の層とnドープ型の層で形成されることを特徴とする請求項3に記載の薄膜太陽電池モジュールの製造方法。
- 前記層を形成する工程は、PVD過程、特にスパッタリング工程、および/または、CVD過程、特にPECVD過程、を介して実行されることを特徴とする請求項1ないし4のいずれか1項に記載の薄膜太陽電池モジュールの製造方法。
- 前記基板(1)はガラスであることを特徴とする請求項1ないし5のいずれか1項に記載の薄膜太陽電池モジュールの製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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DE102007032283A DE102007032283A1 (de) | 2007-07-11 | 2007-07-11 | Dünnschichtsolarzellen-Modul und Verfahren zu dessen Herstellung |
DE102007032283.8 | 2007-07-11 | ||
PCT/EP2008/058864 WO2009007375A2 (de) | 2007-07-11 | 2008-07-08 | Dünnschichtsolarzellen-modul und verfahren zu dessen herstellung |
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JP2014137538A Division JP2015038969A (ja) | 2007-07-11 | 2014-07-03 | 薄膜太陽電池モジュールの製造方法、薄膜太陽電池モジュールおよび薄膜太陽電池モジュールの製造ライン |
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JP2010533369A JP2010533369A (ja) | 2010-10-21 |
JP5681845B2 true JP5681845B2 (ja) | 2015-03-11 |
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JP2010515497A Expired - Fee Related JP5681845B2 (ja) | 2007-07-11 | 2008-07-08 | 薄膜太陽電池モジュールの製造方法 |
JP2014137538A Pending JP2015038969A (ja) | 2007-07-11 | 2014-07-03 | 薄膜太陽電池モジュールの製造方法、薄膜太陽電池モジュールおよび薄膜太陽電池モジュールの製造ライン |
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US (2) | US8470615B2 (ja) |
EP (1) | EP2168177B1 (ja) |
JP (2) | JP5681845B2 (ja) |
KR (1) | KR20100032928A (ja) |
CN (2) | CN102299208B (ja) |
DE (1) | DE102007032283A1 (ja) |
WO (1) | WO2009007375A2 (ja) |
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GB2483922B (en) | 2010-09-25 | 2013-11-20 | M Solv Ltd | Method and apparatus for dividing thin film device into separate cells |
CN102544197B (zh) * | 2010-10-12 | 2015-08-05 | 上方能源技术(杭州)有限公司 | 薄膜太阳能电池的划线方法及其设备 |
DE202011110969U1 (de) * | 2010-10-15 | 2017-11-16 | Wilhelm Stein | Dünnschichtfotovoltaikmodul |
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FR2972299B1 (fr) * | 2011-03-01 | 2016-11-25 | Commissariat Energie Atomique | Procédé pour la mise en série électrique monolithique de cellules photovoltaïques d'un module solaire et module photovoltaïque mettant en œuvre ce procédé |
DE102011104020A1 (de) * | 2011-06-11 | 2012-12-13 | Forschungszentrum Jülich GmbH | Verfahren zur Herstellung einer Kontaktschicht eines Solarmoduls und auf diese Weise hergestelltes Solarmodul |
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-
2007
- 2007-07-11 DE DE102007032283A patent/DE102007032283A1/de not_active Withdrawn
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2008
- 2008-07-08 CN CN201110266457.3A patent/CN102299208B/zh not_active Expired - Fee Related
- 2008-07-08 CN CN2008800241759A patent/CN101743643B/zh not_active Expired - Fee Related
- 2008-07-08 KR KR1020107003002A patent/KR20100032928A/ko not_active Application Discontinuation
- 2008-07-08 WO PCT/EP2008/058864 patent/WO2009007375A2/de active Application Filing
- 2008-07-08 JP JP2010515497A patent/JP5681845B2/ja not_active Expired - Fee Related
- 2008-07-08 EP EP08785978.1A patent/EP2168177B1/de active Active
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Also Published As
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EP2168177B1 (de) | 2019-09-04 |
DE102007032283A1 (de) | 2009-01-15 |
EP2168177A2 (de) | 2010-03-31 |
US20100170558A1 (en) | 2010-07-08 |
US8846419B2 (en) | 2014-09-30 |
JP2010533369A (ja) | 2010-10-21 |
CN101743643A (zh) | 2010-06-16 |
CN101743643B (zh) | 2012-12-26 |
WO2009007375A3 (de) | 2010-02-25 |
CN102299208B (zh) | 2014-06-25 |
WO2009007375A2 (de) | 2009-01-15 |
CN102299208A (zh) | 2011-12-28 |
US8470615B2 (en) | 2013-06-25 |
US20130284231A1 (en) | 2013-10-31 |
JP2015038969A (ja) | 2015-02-26 |
KR20100032928A (ko) | 2010-03-26 |
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