DE19651655C2 - Verschaltete Solarzellen, insbesondere seriell verschaltete Dünnschicht-Solarmodule, und Verfahren zu ihrer Herstellung - Google Patents
Verschaltete Solarzellen, insbesondere seriell verschaltete Dünnschicht-Solarmodule, und Verfahren zu ihrer HerstellungInfo
- Publication number
- DE19651655C2 DE19651655C2 DE19651655A DE19651655A DE19651655C2 DE 19651655 C2 DE19651655 C2 DE 19651655C2 DE 19651655 A DE19651655 A DE 19651655A DE 19651655 A DE19651655 A DE 19651655A DE 19651655 C2 DE19651655 C2 DE 19651655C2
- Authority
- DE
- Germany
- Prior art keywords
- layer
- solar cells
- semiconductor layer
- electrically conductive
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims description 25
- 239000010409 thin film Substances 0.000 title claims description 10
- 238000004519 manufacturing process Methods 0.000 title description 4
- 239000004065 semiconductor Substances 0.000 claims description 75
- 239000000463 material Substances 0.000 claims description 30
- 238000006243 chemical reaction Methods 0.000 claims description 26
- 229910021426 porous silicon Inorganic materials 0.000 claims description 25
- 239000011810 insulating material Substances 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 16
- 239000004020 conductor Substances 0.000 claims description 15
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- 239000012212 insulator Substances 0.000 claims description 8
- 238000000926 separation method Methods 0.000 claims description 7
- 239000012777 electrically insulating material Substances 0.000 claims description 5
- 238000002161 passivation Methods 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 3
- 238000005275 alloying Methods 0.000 claims 1
- 239000007858 starting material Substances 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 description 16
- 239000002184 metal Substances 0.000 description 16
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 9
- 229910010271 silicon carbide Inorganic materials 0.000 description 7
- 238000005530 etching Methods 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 6
- 229910021419 crystalline silicon Inorganic materials 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 238000007650 screen-printing Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000002178 crystalline material Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 229910021471 metal-silicon alloy Inorganic materials 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
- H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
- H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
- H01L31/0465—PV modules composed of a plurality of thin film solar cells deposited on the same substrate comprising particular structures for the electrical interconnection of adjacent PV cells in the module
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0475—PV cell arrays made by cells in a planar, e.g. repetitive, configuration on a single semiconductor substrate; PV cell microarrays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/062—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the metal-insulator-semiconductor type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Description
Claims (14)
- - Aufbringen einer elektrisch leitfähigen Schicht auf ein Trägersubstrat,
- - Abscheiden mindestens einer Halbleiterschicht auf die elektrisch leitfähige Schicht,
- - Ausbilden einer zweiten Halbleiterschicht auf die erste Halbleiterschicht mit einem zu dieser entgegengesetzten Leitungstyp,
- - Aufteilen des so gebildeten Schichtsystems in in Draufsicht streifen- oder rechteckförmige Teilbereiche durch Umwandeln von streifenförmig überein ander liegenden Bereichen der elektrisch leitfähigen Schicht, der ersten Halblei terschicht und der zweiten Halbleiterschicht bis hin zum Substrat in elektrisch isolierendes Material,
- - serielles Verschalten der so gebildeten Teilbereiche über zweite sich entlang der oberen Halbleiterschicht erstreckende elektrische Leiter.
- - Ausbilden eines halbleitenden Schichtsystems mit mindestens einem pn- Übergang auf einem Substrat,
- - Umwandeln von halbleitendem Material in elektrisch isolierendes Material zur Aufteilung des Schichtsystems in elektrisch gegeneinander isolierte Teilberei che,
- - Einlegieren von zweiten elektrischen Leitern auf der oberen Halbleiterschicht derart, daß der zweite elektrische Leiter mit einer oberen Halbleiterschicht einer Solarzelle und mit der unteren Halbleiterschicht der benachbarten Solarzelle kontaktiert wird, wobei das Kontaktieren zu der unteren Halbleiterschicht durch bereichsweise Umwandlung von Material der oberen Halbleiterschicht unterhalb des zweiten elektrischen Leiters jenseits der isolierenden Zone erfolgt.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19651655A DE19651655C2 (de) | 1996-07-28 | 1996-12-12 | Verschaltete Solarzellen, insbesondere seriell verschaltete Dünnschicht-Solarmodule, und Verfahren zu ihrer Herstellung |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19630438 | 1996-07-28 | ||
DE19651655A DE19651655C2 (de) | 1996-07-28 | 1996-12-12 | Verschaltete Solarzellen, insbesondere seriell verschaltete Dünnschicht-Solarmodule, und Verfahren zu ihrer Herstellung |
Publications (2)
Publication Number | Publication Date |
---|---|
DE19651655A1 DE19651655A1 (de) | 1998-01-29 |
DE19651655C2 true DE19651655C2 (de) | 2002-10-02 |
Family
ID=7801086
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19651655A Expired - Fee Related DE19651655C2 (de) | 1996-07-28 | 1996-12-12 | Verschaltete Solarzellen, insbesondere seriell verschaltete Dünnschicht-Solarmodule, und Verfahren zu ihrer Herstellung |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE19651655C2 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006004869B4 (de) * | 2006-01-27 | 2007-12-20 | Universität Stuttgart | Verfahren zum Herstellen von seriell verschalteten Solarzellen sowie Vorrichtung zur Durchführung des Verfahrens |
DE102007032283A1 (de) * | 2007-07-11 | 2009-01-15 | Stein, Wilhelm, Dr. | Dünnschichtsolarzellen-Modul und Verfahren zu dessen Herstellung |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3712589A1 (de) * | 1987-04-14 | 1988-11-03 | Nukem Gmbh | Verfahren zur herstellung von in reihe verschalteten duennschicht-solarzellen |
JPH0715023A (ja) * | 1993-06-18 | 1995-01-17 | Sanyo Electric Co Ltd | 光起電力装置及びその製造方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4745078A (en) * | 1986-01-30 | 1988-05-17 | Siemens Aktiengesellschaft | Method for integrated series connection of thin film solar cells |
DE3727825A1 (de) * | 1987-08-20 | 1989-03-02 | Siemens Ag | Serienverschaltetes duennschichtsolarmodul aus kristallinem silizium |
EP0334111A1 (de) * | 1988-03-24 | 1989-09-27 | Siemens Aktiengesellschaft | Verfahren zur integrierten Serienverschaltung von Dickschichtsolarzellen sowie Verwendung dieses Verfahrens bei der Herstellung einer Tandem-Solarzelle |
-
1996
- 1996-12-12 DE DE19651655A patent/DE19651655C2/de not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3712589A1 (de) * | 1987-04-14 | 1988-11-03 | Nukem Gmbh | Verfahren zur herstellung von in reihe verschalteten duennschicht-solarzellen |
JPH0715023A (ja) * | 1993-06-18 | 1995-01-17 | Sanyo Electric Co Ltd | 光起電力装置及びその製造方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006004869B4 (de) * | 2006-01-27 | 2007-12-20 | Universität Stuttgart | Verfahren zum Herstellen von seriell verschalteten Solarzellen sowie Vorrichtung zur Durchführung des Verfahrens |
DE102007032283A1 (de) * | 2007-07-11 | 2009-01-15 | Stein, Wilhelm, Dr. | Dünnschichtsolarzellen-Modul und Verfahren zu dessen Herstellung |
US8470615B2 (en) | 2007-07-11 | 2013-06-25 | Wilhelm Stein | Thin layer solar cell module and method for producing it |
US8846419B2 (en) | 2007-07-11 | 2014-09-30 | Wilhelm Stein | Thin layer solar cell module and method for producing it |
Also Published As
Publication number | Publication date |
---|---|
DE19651655A1 (de) | 1998-01-29 |
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Legal Events
Date | Code | Title | Description |
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OP8 | Request for examination as to paragraph 44 patent law | ||
8127 | New person/name/address of the applicant |
Owner name: RWE SOLAR GMBH, 63755 ALZENAU, DE |
|
D2 | Grant after examination | ||
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: SCHOTT SOLAR GMBH, 63755 ALZENAU, DE |
|
R081 | Change of applicant/patentee |
Owner name: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANG, DE Free format text: FORMER OWNER: SCHOTT SOLAR GMBH, 63755 ALZENAU, DE Effective date: 20130808 |
|
R082 | Change of representative |
Representative=s name: STOFFREGEN, HANS-HERBERT, DIPL.-PHYS. DR.RER.N, DE Effective date: 20130808 |
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R119 | Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee | ||
R079 | Amendment of ipc main class |
Free format text: PREVIOUS MAIN CLASS: H01L0031060000 Ipc: H01L0031046500 |
|
R079 | Amendment of ipc main class |
Free format text: PREVIOUS MAIN CLASS: H01L0031060000 Ipc: H01L0031046500 Effective date: 20140825 |
|
R119 | Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee |
Effective date: 20140701 |