JP5675653B2 - センサモジュールとその製造方法 - Google Patents
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- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00222—Integrating an electronic processing unit with a micromechanical structure
- B81C1/0023—Packaging together an electronic processing unit die and a micromechanical structure die
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- Computer Hardware Design (AREA)
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
- Details Of Audible-Bandwidth Transducers (AREA)
Description
センサモジュールであって、キャリアと、少なくとも一つのセンサチップと、センサチップに電気的に接続された少なくとも一つの評価チップと、から構成される。キャリアはカットアウトを備え、センサチップは、少なくとも部分的にはカットアウト内に配置されている。評価チップは、キャリア上に位置し、少なくとも部分的にはカットアウトを覆っている。カットアウト付きのキャリアはセンサチップのハウジング(筐体)として、評価チップはカバーとして、別々のカバーが得られるようになっている。この場合、評価チップの少なくとも長さ又は幅はカットアウトの長さ又は幅よりも大きく、カットアウトをブリッジする(またぐ)ことができる。
一例として、図1は、メンブレン5を備えるセンサチップ3と開口部6を備えるキャリア1を備える圧力センサとを示している。
計測対象の圧力は、開口部6を介してセンサチップ3に到達する。開口部6はセンサモジュール22の他の場所に形成されてもよい。
2 カットアウト
3 センサチップ
4 評価チップ
5 メンブレン
6 開口部
7 センサチップの電気的コンタクト領域
8 キャリアの第2電気的コンタクト領域
9 導電接続
10 スルーホール
11 キャリアの第1電気的コンタクト領域
12 シール
13 第1層
14 もう一つの層
15 導電性のバネ
16 ボンディングワイヤ
17 評価チップの電気的コンタクト領域
18 もう一つのカットアウト
19 マージン
20 内側部分
21 外側部分
22 センサモジュール
Claims (14)
- センサモジュールであって、
キャリア(1)と、
少なくとも一つのセンサチップ(3)と、
センサチップ(3)と電気的に接続された少なくとも一つの評価チップ(4)と、から構成され、
前記キャリア(1)はカットアウト(2)を備え、
前記センサチップ(3)は、前記カットアウト(2)内に配置されており、
前記評価チップ(4)は、前記キャリア(1)上に位置し、少なくとも部分的にはカットアウト(2)を覆っており、
第1層(13)が、前記評価チップ(4)と前記キャリア(1)上に配置され、前記第1層(13)は、前記評価チップ(4)に接触した状態で、前記カットアウト(2)を密封し、前記キャリア(1)と共に前記評価チップ(4)を密封し、前記第1層(13)は、少なくとも1つの熱可塑性層、熱硬化性プラスチック層、熱溶融性接着剤コーティング又は反応性接着剤コーティングを備え、
前記キャリア(1)が、スルーホール(10)を介して前記キャリア(1)の第1電気的コンタクト領域(11)に電気的に接触している、第2電気的コンタクト領域(8)を前記カットアウト(2)の中に備え、
前記評価チップ(4)が、前記キャリア(1)に面していて、フリップチップ技術により、前記キャリア(1)の前記第1電気的コンタクト領域(11)に電気的に接続されている、電気的コンタクト領域(17)を備え、
前記センサチップ(3)の電気的コンタクト領域(7)は、導電性のバネ(15)にのみ該センサチップ(3)が機械的に接続されるように、該導電性のバネ(15)により、前記キャリア(1)の前記第2電気的コンタクト領域(8)に電気的にフリップチップ技術によって接続されている、
ことを特徴とするセンサモジュール。 - 請求項1に記載のセンサモジュールであって、
前記評価チップ(4)は、前記カットアウト(2)を完全に覆っている、
ことを特徴とするセンサモジュール。 - 請求項1に記載のセンサモジュールであって、
前記導電性のバネ(15)の少なくとも1つは、少なくとも二つの曲がり角を有する、
ことを特徴とするセンサモジュール。 - 請求項3に記載のセンサモジュールであって、
曲がり角は少なくとも二つの異なる空間的方向に面する、
ことを特徴とするセンサモジュール。 - 請求項1から4の何れかに記載のセンサモジュールであって、
前記評価チップ(4)と前記キャリア(1)の間に、シール(12)が配置されている、
ことを特徴とするセンサモジュール。 - 請求項5に記載のセンサモジュールであって、
前記シール(12)は、はんだ付けされたフレーム、粘着性のもの、もしくはアンダフィル、から構成される、
ことを特徴とするセンサモジュール。 - 請求項1に記載のセンサモジュールであって、
金属から形成される少なくとももう一つの層(14)が、前記第1層(13)上に形成されている、
ことを特徴とするセンサモジュール。 - 請求項7に記載のセンサモジュールであって、
前記評価チップ(4)が、前記評価チップ(4)のへりからキャリア(1)のへりまでマージン(19)ができるように、前記キャリア(1)よりも小さく、
前記第1層(13)が前記マージン(19)の内側部分(20)を覆い、前記マージン(19)の外側部分(21)は覆わず、
前記もう一つの層(14)は、前記第1層(13)を完全に覆い、前記マージン(19)の外側部分(21)で前記キャリア(1)に接続されている、
ことを特徴とするセンサモジュール。 - 請求項8に記載のセンサモジュールであって、
マージン(19)は、前記評価チップ(4)の周囲に、閉じたフレーム型に広がっている、
ことを特徴とするセンサモジュール。 - 請求項1から9の何れかに記載のセンサモジュールであって、
前記評価チップ(4)は、増幅器かASICから構成され、
前記センサチップ(3)は、MEMSから構成される、
ことを特徴とするセンサモジュール。 - 請求項10に記載のセンサモジュールであって、
前記MEMSは、圧力センサ、マイク、湿度センサ、加速度センサ、を構成する、
ことを特徴とするセンサモジュール。 - 請求項1から11の何れかに記載のセンサモジュールであって、
前記キャリア(1)はセラミック製である、
ことを特徴とするセンサモジュール。 - 請求項10に記載のセンサモジュールであって
前記センサチップ(3)の厚さは100〜200μmであり、
前記評価チップ(4)の厚さは200〜400μmである、
ことを特徴とするセンサモジュール。 - 請求項1、又は、請求項8から13の何れかに記載のセンサモジュールの製造方法であって、
少なくとも第1層(13)が、パネル技術を用いて、複数のセンサモジュールの上に適用され、前記センサモジュールは、続いて、単一化されている、
ことを特徴とするセンサモジュールの製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009007837.1 | 2009-02-06 | ||
DE102009007837A DE102009007837A1 (de) | 2009-02-06 | 2009-02-06 | Sensormodul und Verfahren zum Herstellen von Sensormodulen |
PCT/EP2010/051113 WO2010089261A2 (de) | 2009-02-06 | 2010-01-29 | Sensormodul und verfahren zum herstellen von sensormodulen |
Publications (2)
Publication Number | Publication Date |
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JP2012517009A JP2012517009A (ja) | 2012-07-26 |
JP5675653B2 true JP5675653B2 (ja) | 2015-02-25 |
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Application Number | Title | Priority Date | Filing Date |
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JP2011548652A Expired - Fee Related JP5675653B2 (ja) | 2009-02-06 | 2010-01-29 | センサモジュールとその製造方法 |
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Country | Link |
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US (1) | US9061888B2 (ja) |
JP (1) | JP5675653B2 (ja) |
DE (1) | DE102009007837A1 (ja) |
WO (1) | WO2010089261A2 (ja) |
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DE102007058951B4 (de) * | 2007-12-07 | 2020-03-26 | Snaptrack, Inc. | MEMS Package |
DE102010006132B4 (de) | 2010-01-29 | 2013-05-08 | Epcos Ag | Miniaturisiertes elektrisches Bauelement mit einem Stapel aus einem MEMS und einem ASIC |
US8171800B1 (en) * | 2011-01-25 | 2012-05-08 | Continental Automotive Systems, Inc. | Differential pressure sensor using dual backside absolute pressure sensing |
JP5365665B2 (ja) | 2011-06-23 | 2013-12-11 | 横河電機株式会社 | センサユニット |
US8981497B2 (en) * | 2011-07-19 | 2015-03-17 | Xintec Inc. | Chip package structure and method for forming the same |
JP5768594B2 (ja) * | 2011-08-24 | 2015-08-26 | 株式会社デンソー | 半導体装置、及び、その製造方法 |
JP5633493B2 (ja) * | 2011-09-16 | 2014-12-03 | オムロン株式会社 | 半導体装置及びマイクロフォン |
DE102012102021A1 (de) * | 2012-03-09 | 2013-09-12 | Epcos Ag | Mikromechanisches Messelement und Verfahren zur Herstellung eines mikromechanischen Messelements |
US8941223B2 (en) * | 2012-09-10 | 2015-01-27 | Invensense, Inc. | MEMS device package with conductive shell |
WO2014040017A1 (en) | 2012-09-10 | 2014-03-13 | Robert Bosch Gmbh | Mems microphone package with molded interconnect device |
DE102013100388B4 (de) * | 2013-01-15 | 2014-07-24 | Epcos Ag | Bauelement mit einer MEMS Komponente und Verfahren zur Herstellung |
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