JP5663207B2 - モジュラ光学検査システム - Google Patents
モジュラ光学検査システム Download PDFInfo
- Publication number
- JP5663207B2 JP5663207B2 JP2010131351A JP2010131351A JP5663207B2 JP 5663207 B2 JP5663207 B2 JP 5663207B2 JP 2010131351 A JP2010131351 A JP 2010131351A JP 2010131351 A JP2010131351 A JP 2010131351A JP 5663207 B2 JP5663207 B2 JP 5663207B2
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- JP
- Japan
- Prior art keywords
- modular
- inspection
- wafer
- light
- fourier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8822—Dark field detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
Description
本発明の特色と利点は、以下の詳細な説明及び関連する図面を参照することで更によく理解されよう。
1/f=1/オブジェクト距離+1/画像距離、
f=レンズシステムの焦点距離。
ここでオブジェクト距離は、実際または仮想を問わず、直線化されていない光が焦点を結ぶ場所までの距離を表す。
この式のQは、好適な実施形態において、約0.015である。このパターンの最大の間隔は、単一のワイヤが単一のスポットを含むフーリエパターンをブロックできるような切れ目のサイズによって決定される。テープ全体の長さは、好適な実施形態での使用では、約38cmが好適である。
Claims (6)
- 半導体ウエーハの表面を検査するモジュラ光学検査システムであって、
それぞれが半導体ウエーハの表面の部分上の欠陥を検出するように構成された複数のモジュラ検査サブシステムと、
少なくとも一つの表面と複数のモジュラ検査サブシステムとを相対的に移動させる機構と、
を備え、
複数のモジュラ検査サブシステムの少なくとも一つが、
(i)表面からの光を受光するように構成された二次元センサと、
(ii)該二次元センサから1行分のデータが読み出される相対速度を、モジュラ検査サブシステムと表面とが互いに対して1ピクセル分移動する相対速度に一致させ、時間遅延統合モードにおいて表面が連続した画像となるように制御すべく構成されたコントローラと、
を含み、
少なくとも一つの前記モジュラ検査サブシステムが、表面上の層の厚さを測定するように構成されたエリプソメータを含み、
前記半導体ウエーハの異なる区画に対して、前記二次元センサを用いた検査と前記エリプソメータを用いた測定とを、並列して行なう
モジュラ光学検査システム。 - 少なくとも一つの前記検査サブシステムが、前記表面に対して1ピクセル長の移動をする度に、前記コントローラは、前記二次元センサからの1行のピクセルデータの読み出しを実行させる請求項1記載のモジュラ光学検査システム。
- 前記二次元センサが少なくとも一つのCCDアレイを含む請求項1記載のモジュラ光学検査システム。
- 少なくとも一つの前記モジュラ検査サブシステムが、500nm以下の波長で光を発することが可能な発光体を備える請求項1記載のモジュラ光学検査システム。
- 半導体ウエーハの表面を検査するモジュラ光学検査システムであって、
それぞれが半導体ウエーハの表面の部分上の欠陥を検出するように構成された複数のモジュラ検査サブシステムと、
少なくとも一つの表面と複数のモジュラ検査サブシステムとを互いに対して移動させる機構と、
少なくとも一つのモジュラ検査サブシステムから伝達されたデータを処理するように構成されたマスタプロセッサと、
を備え、
複数のモジュラ検査サブシステムの第一のものが、
表面からの光を受光するように構成された二次元センサと、
第一のモジュラ検査サブシステムが収集したデータを処理するように構成されたローカルプロセッサと
を含み、
前記二次元センサから1行分のデータが読み出される相対速度を、モジュラ検査サブシステムと表面とが互いに対して1ピクセル分移動する相対速度に一致させ、時間遅延統合モードにおいて表面が連続した画像となるように制御し、
前記複数のモジュラ検査サブシステムの第二のものが、表面上の層の厚さを測定するように構成されたエリプソメータを含み、
前記半導体ウエーハの異なる区画に対して、前記モジュラ検査サブシステムの第一のものによる前記二次元センサを用いた検査と前記モジュラ検査サブシステムの第二のものによる前記エリプソメータを用いた測定とを、並列して行なう
モジュラ光学検査システム。 - 前記ローカルプロセッサが、有効なパターンの散乱と表面上での欠陥の散乱とを識別するアルゴリズムを実施する請求項5記載のモジュラ光学検査システム。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/070,437 US6020957A (en) | 1998-04-30 | 1998-04-30 | System and method for inspecting semiconductor wafers |
US09/070,437 | 1998-04-30 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000546223A Division JP5060684B2 (ja) | 1998-04-30 | 1999-04-30 | 半導体ウェーハを検査するシステム及び方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010249833A JP2010249833A (ja) | 2010-11-04 |
JP5663207B2 true JP5663207B2 (ja) | 2015-02-04 |
Family
ID=22095289
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000546223A Expired - Lifetime JP5060684B2 (ja) | 1998-04-30 | 1999-04-30 | 半導体ウェーハを検査するシステム及び方法 |
JP2010131351A Expired - Lifetime JP5663207B2 (ja) | 1998-04-30 | 2010-06-08 | モジュラ光学検査システム |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000546223A Expired - Lifetime JP5060684B2 (ja) | 1998-04-30 | 1999-04-30 | 半導体ウェーハを検査するシステム及び方法 |
Country Status (5)
Country | Link |
---|---|
US (2) | US6020957A (ja) |
EP (1) | EP1075652B1 (ja) |
JP (2) | JP5060684B2 (ja) |
AU (1) | AU3875899A (ja) |
WO (1) | WO1999056113A1 (ja) |
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EP1075652B1 (en) | 2011-07-13 |
US6791680B1 (en) | 2004-09-14 |
US6020957A (en) | 2000-02-01 |
JP5060684B2 (ja) | 2012-10-31 |
JP2010249833A (ja) | 2010-11-04 |
AU3875899A (en) | 1999-11-16 |
WO1999056113A1 (en) | 1999-11-04 |
EP1075652A1 (en) | 2001-02-14 |
EP1075652A4 (en) | 2007-06-06 |
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