JP5660748B2 - 低温エアロゾル堆積方法及び物品 - Google Patents
低温エアロゾル堆積方法及び物品 Download PDFInfo
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- 239000000443 aerosol Substances 0.000 title claims description 70
- 238000000151 deposition Methods 0.000 title claims description 24
- 239000000758 substrate Substances 0.000 claims description 72
- 238000012545 processing Methods 0.000 claims description 55
- 239000000463 material Substances 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 23
- 239000002245 particle Substances 0.000 claims description 18
- 229910052727 yttrium Inorganic materials 0.000 claims description 16
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims description 16
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims description 13
- 239000012159 carrier gas Substances 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 11
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 9
- 150000002910 rare earth metals Chemical class 0.000 claims description 9
- 239000011777 magnesium Substances 0.000 claims description 6
- 239000000956 alloy Substances 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000010936 titanium Substances 0.000 claims description 5
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052749 magnesium Inorganic materials 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 229910000946 Y alloy Inorganic materials 0.000 claims description 2
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 229910052734 helium Inorganic materials 0.000 claims description 2
- 239000010419 fine particle Substances 0.000 claims 13
- 239000010410 layer Substances 0.000 description 48
- 239000002994 raw material Substances 0.000 description 30
- 239000007789 gas Substances 0.000 description 17
- 230000008021 deposition Effects 0.000 description 12
- 238000000576 coating method Methods 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- JNDMLEXHDPKVFC-UHFFFAOYSA-N aluminum;oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Y+3] JNDMLEXHDPKVFC-UHFFFAOYSA-N 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000002923 metal particle Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229910019901 yttrium aluminum garnet Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000005923 long-lasting effect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C24/00—Coating starting from inorganic powder
- C23C24/02—Coating starting from inorganic powder by application of pressure only
- C23C24/04—Impact or kinetic deposition of particles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4404—Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
Description
本発明の実施形態は、一般に、半導体処理に係り、特に、半導体処理チャンバコンポーネントへの耐プラズマ層の低温エアロゾル堆積に関する。
半導体処理には、数多くの化学及び物理処理が含まれ、微細な集積回路が基板上に作成される。集積回路を作成する材料の層は、化学蒸着、物理蒸着、エピタキシャル成長等により作成される。材料層のいくつかは、フォトレジストマスク及びウェット又はドライエッチング技術を用いてパターン化される。集積回路を形成するのに利用される基板は、シリコン、ガリウム、砒素、リン化インジウム、ガラス又はその他適切な材料である。
従って、チャンバコンポーネントの表面に強固な耐プラズマ層をコーティング及び/又は形成する改善された方法が必要とされている。
原材料108の基板132への分配は、耐プラズマ層が所望の厚さに達するまで維持される。一実施形態において、耐プラズマ層の厚さは約1μm〜約500μmである。
Claims (14)
- エアロゾル発生器において微粒子のエアロゾルを形成する工程と、
前記エアロゾル発生器から処理チャンバ内の基板材料を含む基板の表面に向かって前記エアロゾルを噴出する工程と、
前記処理チャンバ内の前記基板の温度を摂氏0度〜摂氏50度の間に維持し、前記エアロゾル発生器から前記処理チャンバ内の前記基板に向かって前記エアロゾルを噴出することによって、前記基板の表面内に前記微粒子を埋め込み、前記微粒子と前記基板材料の合金層を含んだボンディング層を形成すると共に、前記微粒子からなる耐プラズマ層を堆積する工程とを含む半導体処理チャンバコンポーネントへの低温エアロゾル堆積方法。 - 前記微粒子が希土類金属を含む請求項1記載の方法。
- 前記微粒子の直径が0.05μm〜3μmである請求項1記載の方法。
- 前記微粒子のエアロゾルを形成する工程が、
Ar、He、Xe、O2、N2及びH2のうち少なくとも1つを含むキャリアガスを前記エアロゾル発生器に提供する工程を含む請求項1記載の方法。 - 前記キャリアガスを提供する工程が、
前記エアロゾル発生器中の前記キャリアガスの圧力を10Pa〜50Paに維持する工程を含む請求項4記載の方法。 - 前記基板表面に堆積した層の厚さが、1μm〜100μmである請求項1記載の方法。
- 前記基板表面に堆積した層の粒径が、0.01μm〜1μmである請求項1記載の方法。
- 前記ボンディング層の厚さが0.01μm〜0.2μmである請求項1記載の方法。
- 前記微粒子の直径が2μm未満である請求項1又は8記載の方法。
- エアロゾル発生器において直径が2μm未満の希土類金属含有材料からなる微粒子のエアロゾルを形成する工程と、
前記エアロゾル発生器から処理チャンバ内の基板材料を含む基板の表面に向かって前記エアロゾルを噴出する工程と、
前記処理チャンバ内の前記基板の温度を摂氏0度〜摂氏50度の間に維持し、前記エアロゾル発生器から前記処理チャンバ内の前記基板に向かって前記エアロゾルを噴出することによって、前記基板の表面内に前記微粒子を埋め込み、前記希土類金属含有材料と前記基板材料の合金層を含んだボンディング層を形成すると共に、前記希土類金属含有材からなる耐プラズマ層を堆積する工程とを含む半導体チャンバコンポーネントへの低温エアロゾル堆積方法。 - 前記微粒子はイットリウム含有材料である請求項1又は10記載の方法。
- 前記イットリウム含有材料が、バルクイットリウム、イットリウム合金、又は金属と混合された酸化イットリウム(Y2O3)のうち少なくとも1つを含む請求項11記載の方法。
- 前記金属がアルミニウム(Al)、マグネシウム(Mg)、チタン(T)又はタンタル(Ta)のうち少なくとも1つである請求項12記載の方法。
- 耐プラズマ層を有する半導体処理チャンバで用いられる物品であって、
前記耐プラズマ層は、
エアロゾル発生器において微粒子のエアロゾルを形成する工程と、
前記エアロゾル発生器から処理チャンバ内の基板材料を含む基板の表面に向かって前記エアロゾルを噴出する工程と、
前記処理チャンバ内の前記基板の温度を摂氏0度〜摂氏50度の間に維持し、前記エアロゾル発生器から前記処理チャンバ内の前記基板に向かって前記エアロゾルを噴出することによって、前記基板の表面内に前記微粒子を埋め込み、前記微粒子と前記基板材料の合金層を含んだボンディング層を形成すると共に、前記微粒子からなる耐プラズマ層を堆積する工程により形成される物品。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/552,013 US7479464B2 (en) | 2006-10-23 | 2006-10-23 | Low temperature aerosol deposition of a plasma resistive layer |
US11/552,013 | 2006-10-23 |
Publications (3)
Publication Number | Publication Date |
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JP2008106363A JP2008106363A (ja) | 2008-05-08 |
JP2008106363A5 JP2008106363A5 (ja) | 2010-12-09 |
JP5660748B2 true JP5660748B2 (ja) | 2015-01-28 |
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JP2007273363A Active JP5660748B2 (ja) | 2006-10-23 | 2007-10-22 | 低温エアロゾル堆積方法及び物品 |
Country Status (6)
Country | Link |
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US (1) | US7479464B2 (ja) |
EP (1) | EP1918420A1 (ja) |
JP (1) | JP5660748B2 (ja) |
KR (1) | KR100938474B1 (ja) |
CN (1) | CN101168842B (ja) |
TW (1) | TWI368937B (ja) |
Families Citing this family (51)
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KR100941472B1 (ko) * | 2007-12-14 | 2010-02-11 | 한국기계연구원 | 에어로졸 증착법을 이용하여 제조된 치밀한 상온 전도성후막 및 이의 제조방법 |
DE102008047955A1 (de) * | 2008-09-18 | 2010-04-01 | Otto Hauser | Verfahren und Vorrichtung zur Erzeugung von Halbleiterschichten |
KR101108692B1 (ko) * | 2010-09-06 | 2012-01-25 | 한국기계연구원 | 다공성 세라믹 표면을 밀봉하는 치밀한 희토류 금속 산화물 코팅막 및 이의 제조방법 |
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TWI368937B (en) | 2012-07-21 |
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US7479464B2 (en) | 2009-01-20 |
TW200820325A (en) | 2008-05-01 |
JP2008106363A (ja) | 2008-05-08 |
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EP1918420A1 (en) | 2008-05-07 |
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