JP5657400B2 - 水晶デバイス - Google Patents

水晶デバイス Download PDF

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Publication number
JP5657400B2
JP5657400B2 JP2011003801A JP2011003801A JP5657400B2 JP 5657400 B2 JP5657400 B2 JP 5657400B2 JP 2011003801 A JP2011003801 A JP 2011003801A JP 2011003801 A JP2011003801 A JP 2011003801A JP 5657400 B2 JP5657400 B2 JP 5657400B2
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JP
Japan
Prior art keywords
frame
crystal
plane
axis
electrode
Prior art date
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Active
Application number
JP2011003801A
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English (en)
Japanese (ja)
Other versions
JP2012147228A (ja
JP2012147228A5 (enExample
Inventor
水沢　周一
周一 水沢
岳寛 高橋
岳寛 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP2011003801A priority Critical patent/JP5657400B2/ja
Priority to CN201110424495.7A priority patent/CN102594280B/zh
Priority to US13/338,949 priority patent/US8773005B2/en
Priority to TW100149388A priority patent/TWI492531B/zh
Publication of JP2012147228A publication Critical patent/JP2012147228A/ja
Publication of JP2012147228A5 publication Critical patent/JP2012147228A5/ja
Application granted granted Critical
Publication of JP5657400B2 publication Critical patent/JP5657400B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/177—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of the energy-trap type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0595—Holders or supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H2003/022—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the cantilever type

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2011003801A 2011-01-12 2011-01-12 水晶デバイス Active JP5657400B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2011003801A JP5657400B2 (ja) 2011-01-12 2011-01-12 水晶デバイス
CN201110424495.7A CN102594280B (zh) 2011-01-12 2011-12-16 水晶装置
US13/338,949 US8773005B2 (en) 2011-01-12 2011-12-28 Quartz-crystal devices exhibiting reduced electrical impedance
TW100149388A TWI492531B (zh) 2011-01-12 2011-12-29 石英晶體裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011003801A JP5657400B2 (ja) 2011-01-12 2011-01-12 水晶デバイス

Publications (3)

Publication Number Publication Date
JP2012147228A JP2012147228A (ja) 2012-08-02
JP2012147228A5 JP2012147228A5 (enExample) 2014-01-23
JP5657400B2 true JP5657400B2 (ja) 2015-01-21

Family

ID=46454728

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011003801A Active JP5657400B2 (ja) 2011-01-12 2011-01-12 水晶デバイス

Country Status (4)

Country Link
US (1) US8773005B2 (enExample)
JP (1) JP5657400B2 (enExample)
CN (1) CN102594280B (enExample)
TW (1) TWI492531B (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011199065A (ja) * 2010-03-19 2011-10-06 Seiko Instruments Inc 真空パッケージ、真空パッケージの製造方法、圧電振動子、発振器、電子機器及び電波時計
JP5325151B2 (ja) * 2010-03-31 2013-10-23 日本電波工業株式会社 水晶デバイス、及びその製造方法
JP2012060628A (ja) * 2010-08-07 2012-03-22 Nippon Dempa Kogyo Co Ltd 圧電デバイス及びその製造方法
USD674364S1 (en) * 2011-07-08 2013-01-15 Nihon Dempa Kogyo Co., Ltd. Crystal unit
JP5806547B2 (ja) * 2011-08-05 2015-11-10 日本電波工業株式会社 圧電デバイス及び圧電デバイスの製造方法
US20130043770A1 (en) * 2011-08-17 2013-02-21 Nihon Dempa Kogyo Co., Ltd. Piezoelectric vibrating piece and piezoelectric device
JP5756712B2 (ja) * 2011-08-17 2015-07-29 日本電波工業株式会社 水晶デバイス
JP2013098814A (ja) * 2011-11-02 2013-05-20 Nippon Dempa Kogyo Co Ltd 圧電振動片及び圧電デバイス
JP5972598B2 (ja) * 2012-02-22 2016-08-17 日本電波工業株式会社 圧電デバイス及び圧電デバイスの製造方法
JP5980530B2 (ja) * 2012-03-15 2016-08-31 日本電波工業株式会社 圧電デバイス及び圧電デバイスの製造方法
JP5930532B2 (ja) * 2012-06-01 2016-06-08 日本電波工業株式会社 圧電振動片及び圧電デバイス
JP2014175899A (ja) * 2013-03-11 2014-09-22 Nippon Dempa Kogyo Co Ltd 圧電デバイス
JP2015019240A (ja) * 2013-07-11 2015-01-29 日本電波工業株式会社 圧電振動片、圧電振動片の製造方法、圧電デバイス、及び圧電デバイスの製造方法
KR20150019296A (ko) * 2013-08-13 2015-02-25 삼성전기주식회사 압전 진동소자 및 이를 포함하는 진동소자 패키지

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6590315B2 (en) * 2000-05-26 2003-07-08 William D. Beaver Surface mount quartz crystal resonators and methods for making same
JP4707021B2 (ja) * 2005-08-22 2011-06-22 セイコーエプソン株式会社 圧電デバイス
JP4305542B2 (ja) * 2006-08-09 2009-07-29 エプソントヨコム株式会社 Ａｔカット水晶振動片及びその製造方法
JP4412506B2 (ja) * 2007-09-07 2010-02-10 エプソントヨコム株式会社 圧電デバイスおよびその製造方法
JP5196121B2 (ja) * 2007-11-07 2013-05-15 セイコーエプソン株式会社 デバイス
JP5288116B2 (ja) * 2008-12-17 2013-09-11 セイコーエプソン株式会社 圧電振動子およびその製造方法

Also Published As

Publication number Publication date
TWI492531B (zh) 2015-07-11
JP2012147228A (ja) 2012-08-02
CN102594280A (zh) 2012-07-18
TW201230676A (en) 2012-07-16
CN102594280B (zh) 2015-05-13
US20120176004A1 (en) 2012-07-12
US8773005B2 (en) 2014-07-08

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