JP5657218B2 - 表示基板 - Google Patents
表示基板 Download PDFInfo
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- JP5657218B2 JP5657218B2 JP2009165334A JP2009165334A JP5657218B2 JP 5657218 B2 JP5657218 B2 JP 5657218B2 JP 2009165334 A JP2009165334 A JP 2009165334A JP 2009165334 A JP2009165334 A JP 2009165334A JP 5657218 B2 JP5657218 B2 JP 5657218B2
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- electrode
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- storage
- conductive film
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- 239000010408 film Substances 0.000 claims description 79
- 239000010409 thin film Substances 0.000 claims description 56
- 239000000758 substrate Substances 0.000 claims description 52
- 239000004065 semiconductor Substances 0.000 claims description 51
- 239000000463 material Substances 0.000 claims description 18
- 230000007423 decrease Effects 0.000 claims description 3
- 239000003990 capacitor Substances 0.000 description 7
- 239000004020 conductor Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 6
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 5
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000000470 constituent Substances 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 230000009977 dual effect Effects 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- OFIYHXOOOISSDN-UHFFFAOYSA-N tellanylidenegallium Chemical compound [Te]=[Ga] OFIYHXOOOISSDN-UHFFFAOYSA-N 0.000 description 3
- 229910005265 GaInZnO Inorganic materials 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
- H01L27/1225—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- Mathematical Physics (AREA)
- Ceramic Engineering (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Description
151 導電膜パターン
200 表示基板
PE 画素電極
CL 共通電圧ライン
GL ゲートライン
DL データライン
TR 薄膜トランジスタ
BE 接続電極
SL ストレージライン
ST ストレージ電極
PXL 画素
Claims (6)
- 基板と、
前記基板上に設けられるゲート電極と、
前記ゲート電極の上部に設けられる半導体パターンと、
前記半導体パターン上に設けられるソース電極と、
前記ソース電極と離間して前記半導体パターン上に設けられるドレーン電極と、
前記ソース電極及び前記ドレーン電極上に設けられて前記ソース電極及び前記ドレーン電極をカバーする絶縁膜と、
前記絶縁膜上に設けられて前記半導体パターンと整列される導電膜パターンと、
前記ドレーン電極と電気的に接続される画素電極と、
前記基板上に設けられて前記画素電極と重畳し、前記導電膜パターンと電気的に接続されるストレージ電極と、
前記基板上に設けられ、前記ゲート電極と電気的に接続されるゲートラインと、
前記ゲートラインと絶縁されて前記基板の上部に設けられるデータラインと、
前記ストレージ電極及び前記導電膜パターンと電気的に接続され前記ストレージ電極及び前記導電膜パターン側に共通電圧を提供するストレージラインと、
前記ストレージライン及び前記ストレージ電極は、互いに離間し、前記導電膜パターンは、前記ストレージ電極及び前記ストレージラインを電気的に接続されることを特徴とする表示基板。 - 前記半導体パターンは、酸化物半導体を含むことを特徴とする請求項1に記載の表示基板。
- 前記導電膜パターン及び前記画素電極は、前記表示基板の同一層上に形成されて互いに同一の物質で形成されることを特徴とする請求項1に記載の表示基板。
- 前記ゲート電極、前記半導体パターン、前記ソース電極、及び前記ドレーン電極によって定義される薄膜トランジスタのスレッショルド電圧は、前記共通電圧の大きさによって調節されることを特徴とする請求項1に記載の表示基板。
- 前記共通電圧の大きさが増加するほど前記スレッショルド電圧の大きさが減少し、前記共通電圧の大きさが減少するほど前記スレッショルド電圧の大きさが増加することを特徴とする請求項4に記載の表示基板。
- 平面上で前記ストレージ電極は、前記データライン及び前記データラインを間に置いて隣接する画素電極と重畳することを特徴とする請求項1に記載の表示基板。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2008-0068242 | 2008-07-14 | ||
KR20080068242A KR101488927B1 (ko) | 2008-07-14 | 2008-07-14 | 표시기판 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010020322A JP2010020322A (ja) | 2010-01-28 |
JP5657218B2 true JP5657218B2 (ja) | 2015-01-21 |
Family
ID=41504321
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009165334A Active JP5657218B2 (ja) | 2008-07-14 | 2009-07-14 | 表示基板 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7847291B2 (ja) |
JP (1) | JP5657218B2 (ja) |
KR (1) | KR101488927B1 (ja) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8748892B2 (en) * | 2009-10-09 | 2014-06-10 | Lg Display Co., Ltd. | Thin film transistor and method for fabricating the same |
KR101272892B1 (ko) * | 2009-11-11 | 2013-06-11 | 엘지디스플레이 주식회사 | 어레이 기판 |
KR101819197B1 (ko) | 2010-02-05 | 2018-02-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치, 및 반도체 장치의 제조 방법 |
WO2011099336A1 (en) * | 2010-02-12 | 2011-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
CN105810752B (zh) | 2010-04-02 | 2019-11-19 | 株式会社半导体能源研究所 | 半导体装置 |
WO2011155295A1 (en) * | 2010-06-10 | 2011-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Dc/dc converter, power supply circuit, and semiconductor device |
CN103081108B (zh) * | 2010-09-09 | 2016-08-03 | 夏普株式会社 | 薄膜晶体管基板及其制造方法、显示装置 |
KR20120091638A (ko) * | 2011-02-09 | 2012-08-20 | 삼성전자주식회사 | 표시 장치 및 그 제조 방법 |
TWI671911B (zh) * | 2011-05-05 | 2019-09-11 | 日商半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
KR101619158B1 (ko) * | 2013-04-30 | 2016-05-10 | 엘지디스플레이 주식회사 | 박막 트랜지스터 기판 및 그를 이용한 유기 발광장치 |
JP2015195327A (ja) * | 2013-06-05 | 2015-11-05 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6400336B2 (ja) * | 2013-06-05 | 2018-10-03 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6345544B2 (ja) * | 2013-09-05 | 2018-06-20 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
CN103474472B (zh) * | 2013-09-10 | 2016-05-11 | 深圳市华星光电技术有限公司 | 一种薄膜晶体管、阵列基板及显示面板 |
KR20150087647A (ko) | 2014-01-22 | 2015-07-30 | 삼성디스플레이 주식회사 | 게이트 구동회로 및 이를 포함하는 표시장치 |
CN104952880A (zh) * | 2015-05-06 | 2015-09-30 | 深圳市华星光电技术有限公司 | 双栅极tft基板的制作方法及其结构 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2776083B2 (ja) * | 1991-08-23 | 1998-07-16 | 日本電気株式会社 | 液晶表示装置およびその製造方法 |
TW289097B (ja) * | 1994-08-24 | 1996-10-21 | Hitachi Ltd | |
JP3215287B2 (ja) * | 1995-04-19 | 2001-10-02 | シャープ株式会社 | 薄膜トランジスタ、その製造方法および液晶表示装置 |
JPH10290012A (ja) * | 1997-04-14 | 1998-10-27 | Nec Corp | アクティブマトリクス型液晶表示装置およびその製造方法 |
JP2000164873A (ja) * | 1998-11-24 | 2000-06-16 | Sony Corp | 液晶表示装置 |
JP2001284592A (ja) * | 2000-03-29 | 2001-10-12 | Sony Corp | 薄膜半導体装置及びその駆動方法 |
JP3909583B2 (ja) * | 2001-08-27 | 2007-04-25 | セイコーエプソン株式会社 | 電気光学装置の製造方法 |
US7642573B2 (en) * | 2004-03-12 | 2010-01-05 | Hewlett-Packard Development Company, L.P. | Semiconductor device |
JP4940615B2 (ja) * | 2005-09-30 | 2012-05-30 | カシオ計算機株式会社 | 液晶表示装置 |
-
2008
- 2008-07-14 KR KR20080068242A patent/KR101488927B1/ko active IP Right Grant
-
2009
- 2009-06-17 US US12/486,328 patent/US7847291B2/en active Active
- 2009-07-14 JP JP2009165334A patent/JP5657218B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
US20100006835A1 (en) | 2010-01-14 |
JP2010020322A (ja) | 2010-01-28 |
KR20100007566A (ko) | 2010-01-22 |
KR101488927B1 (ko) | 2015-02-09 |
US7847291B2 (en) | 2010-12-07 |
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