JP5651596B2 - 圧縮可能リングによりベアリングとシャフトを中心に配置する磁性流体封止装置 - Google Patents

圧縮可能リングによりベアリングとシャフトを中心に配置する磁性流体封止装置 Download PDF

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Publication number
JP5651596B2
JP5651596B2 JP2011531172A JP2011531172A JP5651596B2 JP 5651596 B2 JP5651596 B2 JP 5651596B2 JP 2011531172 A JP2011531172 A JP 2011531172A JP 2011531172 A JP2011531172 A JP 2011531172A JP 5651596 B2 JP5651596 B2 JP 5651596B2
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Japan
Prior art keywords
shaft
rolling element
element bearing
magnetic structure
ring
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2011531172A
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English (en)
Japanese (ja)
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JP2012505361A (ja
JP2012505361A5 (enExample
Inventor
デイビッド ジー. マホーニー、
デイビッド ジー. マホーニー、
ウォルター ヘルジランド、
ウォルター ヘルジランド、
Original Assignee
リガク イノベイティブ テクノロジーズ インコーポレイテッド
リガク イノベイティブ テクノロジーズ インコーポレイテッド
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Publication of JP2012505361A publication Critical patent/JP2012505361A/ja
Publication of JP2012505361A5 publication Critical patent/JP2012505361A5/ja
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16JPISTONS; CYLINDERS; SEALINGS
    • F16J15/00Sealings
    • F16J15/16Sealings between relatively-moving surfaces
    • F16J15/40Sealings between relatively-moving surfaces by means of fluid
    • F16J15/43Sealings between relatively-moving surfaces by means of fluid kept in sealing position by magnetic force
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C27/00Elastic or yielding bearings or bearing supports, for exclusively rotary movement
    • F16C27/06Elastic or yielding bearings or bearing supports, for exclusively rotary movement by means of parts of rubber or like materials
    • F16C27/066Ball or roller bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/72Sealings
    • F16C33/76Sealings of ball or roller bearings
    • F16C33/762Sealings of ball or roller bearings by means of a fluid
    • F16C33/763Sealings of ball or roller bearings by means of a fluid retained in the sealing gap
    • F16C33/765Sealings of ball or roller bearings by means of a fluid retained in the sealing gap by a magnetic field
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/72Sealings
    • F16C33/76Sealings of ball or roller bearings
    • F16C33/768Sealings of ball or roller bearings between relatively stationary parts, i.e. static seals
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C35/00Rigid support of bearing units; Housings, e.g. caps, covers
    • F16C35/04Rigid support of bearing units; Housings, e.g. caps, covers in the case of ball or roller bearings
    • F16C35/06Mounting or dismounting of ball or roller bearings; Fixing them onto shaft or in housing
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00Bearings with rolling contact, for exclusively rotary movement
    • F16C19/22Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings
    • F16C19/34Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings for both radial and axial load
    • F16C19/36Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings for both radial and axial load with a single row of rollers
    • F16C19/361Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings for both radial and axial load with a single row of rollers with cylindrical rollers
    • F16C19/362Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings for both radial and axial load with a single row of rollers with cylindrical rollers the rollers being crossed within the single row
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49826Assembling or joining

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
  • Support Of The Bearing (AREA)
  • Mounting Of Bearings Or Others (AREA)
  • Rolling Contact Bearings (AREA)
JP2011531172A 2008-10-09 2009-10-08 圧縮可能リングによりベアリングとシャフトを中心に配置する磁性流体封止装置 Expired - Fee Related JP5651596B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10418108P 2008-10-09 2008-10-09
US61/104,181 2008-10-09
PCT/US2009/060000 WO2010042718A1 (en) 2008-10-09 2009-10-08 Magnetic fluid seal with centering of bearing and shaft by compressible member

Publications (3)

Publication Number Publication Date
JP2012505361A JP2012505361A (ja) 2012-03-01
JP2012505361A5 JP2012505361A5 (enExample) 2014-01-23
JP5651596B2 true JP5651596B2 (ja) 2015-01-14

Family

ID=41470445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011531172A Expired - Fee Related JP5651596B2 (ja) 2008-10-09 2009-10-08 圧縮可能リングによりベアリングとシャフトを中心に配置する磁性流体封止装置

Country Status (5)

Country Link
US (1) US8382118B2 (enExample)
EP (2) EP2647857A1 (enExample)
JP (1) JP5651596B2 (enExample)
CA (1) CA2739789C (enExample)
WO (1) WO2010042718A1 (enExample)

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US8422193B2 (en) * 2006-12-19 2013-04-16 Axcelis Technologies, Inc. Annulus clamping and backside gas cooled electrostatic chuck
US9036326B2 (en) * 2008-04-30 2015-05-19 Axcelis Technologies, Inc. Gas bearing electrostatic chuck
US9558980B2 (en) 2008-04-30 2017-01-31 Axcelis Technologies, Inc. Vapor compression refrigeration chuck for ion implanters
JP2013532354A (ja) 2010-05-28 2013-08-15 アクセリス テクノロジーズ, インコーポレイテッド 冷却されるイオン注入システムのための加熱回転式のシールおよび軸受け
US8481969B2 (en) * 2010-06-04 2013-07-09 Axcelis Technologies, Inc. Effective algorithm for warming a twist axis for cold ion implantations
US9711324B2 (en) 2012-05-31 2017-07-18 Axcelis Technologies, Inc. Inert atmospheric pressure pre-chill and post-heat
JP5913254B2 (ja) * 2013-10-30 2016-04-27 グローブライド株式会社 魚釣用リール
JP6209096B2 (ja) * 2014-02-06 2017-10-04 グローブライド株式会社 魚釣用スピニングリール
CN105952904B (zh) * 2016-07-15 2019-03-29 湖南维格磁流体股份有限公司 真空设备及其磁流体密封传动装置
RU2663299C1 (ru) * 2017-11-08 2018-08-03 Федеральное государственное бюджетное образовательное учреждение высшего образования "Тверской государственный технический университет" Способ получения магнитного масла
CN107842613B (zh) 2017-12-13 2019-04-02 广西科技大学 一种弧形阶梯式磁流体密封装置
CN111207217B (zh) * 2019-08-27 2021-10-08 杭州慧翔电液技术开发有限公司 集成高精度旋转功能的磁流体密封装置
CN112648374B (zh) * 2020-12-30 2022-07-05 清华大学 软填料密封装置
CN113319825B (zh) * 2021-06-10 2024-03-15 潍坊新松机器人自动化有限公司 一种智能机器人回转装置

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US4335885A (en) * 1980-08-19 1982-06-22 Mechanical Technology Incorporated Plural fluid magnetic/centrifugal seal
CH657721A5 (de) * 1982-01-11 1986-09-15 Papst Motoren Gmbh & Co Kg Aussenlaeufer-direktantriebsmotor.
US4577340A (en) * 1983-09-19 1986-03-18 Technicare Corporation High vacuum rotating anode X-ray tube
JPS61137168U (enExample) * 1985-02-15 1986-08-26
DE3616866A1 (de) * 1986-05-20 1987-01-02 Ruediger Prof Dr Ing Haberland Selbstausrichtendes klebeverfahren fuer kugellager
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Also Published As

Publication number Publication date
EP2334940A1 (en) 2011-06-22
JP2012505361A (ja) 2012-03-01
US20100090413A1 (en) 2010-04-15
CA2739789C (en) 2016-08-02
EP2647857A1 (en) 2013-10-09
CA2739789A1 (en) 2010-04-15
EP2334940B1 (en) 2014-05-07
WO2010042718A1 (en) 2010-04-15
US8382118B2 (en) 2013-02-26

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