JP5651596B2 - 圧縮可能リングによりベアリングとシャフトを中心に配置する磁性流体封止装置 - Google Patents
圧縮可能リングによりベアリングとシャフトを中心に配置する磁性流体封止装置 Download PDFInfo
- Publication number
- JP5651596B2 JP5651596B2 JP2011531172A JP2011531172A JP5651596B2 JP 5651596 B2 JP5651596 B2 JP 5651596B2 JP 2011531172 A JP2011531172 A JP 2011531172A JP 2011531172 A JP2011531172 A JP 2011531172A JP 5651596 B2 JP5651596 B2 JP 5651596B2
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- rolling element
- element bearing
- magnetic structure
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007789 sealing Methods 0.000 title claims description 68
- 239000011553 magnetic fluid Substances 0.000 title claims description 49
- 230000005291 magnetic effect Effects 0.000 claims description 119
- 238000005096 rolling process Methods 0.000 claims description 94
- 239000000463 material Substances 0.000 claims description 55
- 238000000034 method Methods 0.000 claims description 46
- 239000007788 liquid Substances 0.000 claims description 11
- 238000001816 cooling Methods 0.000 claims description 6
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- 229920006132 styrene block copolymer Polymers 0.000 claims description 2
- 229920000642 polymer Polymers 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000011554 ferrofluid Substances 0.000 description 11
- 230000004907 flux Effects 0.000 description 8
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- 229910001220 stainless steel Inorganic materials 0.000 description 5
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- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
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- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
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- 150000004665 fatty acids Chemical class 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
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- 238000005468 ion implantation Methods 0.000 description 1
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- 230000000717 retained effect Effects 0.000 description 1
- 229910000938 samarium–cobalt magnet Inorganic materials 0.000 description 1
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- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/40—Sealings between relatively-moving surfaces by means of fluid
- F16J15/43—Sealings between relatively-moving surfaces by means of fluid kept in sealing position by magnetic force
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
- F16C27/06—Elastic or yielding bearings or bearing supports, for exclusively rotary movement by means of parts of rubber or like materials
- F16C27/066—Ball or roller bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/72—Sealings
- F16C33/76—Sealings of ball or roller bearings
- F16C33/762—Sealings of ball or roller bearings by means of a fluid
- F16C33/763—Sealings of ball or roller bearings by means of a fluid retained in the sealing gap
- F16C33/765—Sealings of ball or roller bearings by means of a fluid retained in the sealing gap by a magnetic field
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/72—Sealings
- F16C33/76—Sealings of ball or roller bearings
- F16C33/768—Sealings of ball or roller bearings between relatively stationary parts, i.e. static seals
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C35/00—Rigid support of bearing units; Housings, e.g. caps, covers
- F16C35/04—Rigid support of bearing units; Housings, e.g. caps, covers in the case of ball or roller bearings
- F16C35/06—Mounting or dismounting of ball or roller bearings; Fixing them onto shaft or in housing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C19/00—Bearings with rolling contact, for exclusively rotary movement
- F16C19/22—Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings
- F16C19/34—Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings for both radial and axial load
- F16C19/36—Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings for both radial and axial load with a single row of rollers
- F16C19/361—Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings for both radial and axial load with a single row of rollers with cylindrical rollers
- F16C19/362—Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings for both radial and axial load with a single row of rollers with cylindrical rollers the rollers being crossed within the single row
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49826—Assembling or joining
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
- Support Of The Bearing (AREA)
- Mounting Of Bearings Or Others (AREA)
- Rolling Contact Bearings (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10418108P | 2008-10-09 | 2008-10-09 | |
| US61/104,181 | 2008-10-09 | ||
| PCT/US2009/060000 WO2010042718A1 (en) | 2008-10-09 | 2009-10-08 | Magnetic fluid seal with centering of bearing and shaft by compressible member |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012505361A JP2012505361A (ja) | 2012-03-01 |
| JP2012505361A5 JP2012505361A5 (enExample) | 2014-01-23 |
| JP5651596B2 true JP5651596B2 (ja) | 2015-01-14 |
Family
ID=41470445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011531172A Expired - Fee Related JP5651596B2 (ja) | 2008-10-09 | 2009-10-08 | 圧縮可能リングによりベアリングとシャフトを中心に配置する磁性流体封止装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8382118B2 (enExample) |
| EP (2) | EP2647857A1 (enExample) |
| JP (1) | JP5651596B2 (enExample) |
| CA (1) | CA2739789C (enExample) |
| WO (1) | WO2010042718A1 (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8422193B2 (en) * | 2006-12-19 | 2013-04-16 | Axcelis Technologies, Inc. | Annulus clamping and backside gas cooled electrostatic chuck |
| US9036326B2 (en) * | 2008-04-30 | 2015-05-19 | Axcelis Technologies, Inc. | Gas bearing electrostatic chuck |
| US9558980B2 (en) | 2008-04-30 | 2017-01-31 | Axcelis Technologies, Inc. | Vapor compression refrigeration chuck for ion implanters |
| JP2013532354A (ja) | 2010-05-28 | 2013-08-15 | アクセリス テクノロジーズ, インコーポレイテッド | 冷却されるイオン注入システムのための加熱回転式のシールおよび軸受け |
| US8481969B2 (en) * | 2010-06-04 | 2013-07-09 | Axcelis Technologies, Inc. | Effective algorithm for warming a twist axis for cold ion implantations |
| US9711324B2 (en) | 2012-05-31 | 2017-07-18 | Axcelis Technologies, Inc. | Inert atmospheric pressure pre-chill and post-heat |
| JP5913254B2 (ja) * | 2013-10-30 | 2016-04-27 | グローブライド株式会社 | 魚釣用リール |
| JP6209096B2 (ja) * | 2014-02-06 | 2017-10-04 | グローブライド株式会社 | 魚釣用スピニングリール |
| CN105952904B (zh) * | 2016-07-15 | 2019-03-29 | 湖南维格磁流体股份有限公司 | 真空设备及其磁流体密封传动装置 |
| RU2663299C1 (ru) * | 2017-11-08 | 2018-08-03 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Тверской государственный технический университет" | Способ получения магнитного масла |
| CN107842613B (zh) | 2017-12-13 | 2019-04-02 | 广西科技大学 | 一种弧形阶梯式磁流体密封装置 |
| CN111207217B (zh) * | 2019-08-27 | 2021-10-08 | 杭州慧翔电液技术开发有限公司 | 集成高精度旋转功能的磁流体密封装置 |
| CN112648374B (zh) * | 2020-12-30 | 2022-07-05 | 清华大学 | 软填料密封装置 |
| CN113319825B (zh) * | 2021-06-10 | 2024-03-15 | 潍坊新松机器人自动化有限公司 | 一种智能机器人回转装置 |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1243234A (en) * | 1968-08-06 | 1971-08-18 | Dowding & Plummer Ltd | Improvements in or relating to shaft mountings |
| US4335885A (en) * | 1980-08-19 | 1982-06-22 | Mechanical Technology Incorporated | Plural fluid magnetic/centrifugal seal |
| CH657721A5 (de) * | 1982-01-11 | 1986-09-15 | Papst Motoren Gmbh & Co Kg | Aussenlaeufer-direktantriebsmotor. |
| US4577340A (en) * | 1983-09-19 | 1986-03-18 | Technicare Corporation | High vacuum rotating anode X-ray tube |
| JPS61137168U (enExample) * | 1985-02-15 | 1986-08-26 | ||
| DE3616866A1 (de) * | 1986-05-20 | 1987-01-02 | Ruediger Prof Dr Ing Haberland | Selbstausrichtendes klebeverfahren fuer kugellager |
| JPS6314018U (enExample) * | 1986-07-11 | 1988-01-29 | ||
| US4824122A (en) * | 1987-03-02 | 1989-04-25 | Ferrofluidics Corporation | Compact magnetic fluid low pressure seal |
| JPH075325Y2 (ja) * | 1988-02-13 | 1995-02-08 | 光洋精工株式会社 | 密封装置 |
| US5215313A (en) * | 1990-10-24 | 1993-06-01 | Nsk, Ltd. | Magnetic fluid sealing device |
| US5235227A (en) * | 1991-01-23 | 1993-08-10 | Panavision International L.P. | Noise and vibration dampened electric motor such as for use with a sound movie camera |
| US5340122A (en) * | 1992-06-22 | 1994-08-23 | Ferrofluidics Corporation | Differentially-pumped ferrofluidic seal |
| AU4863093A (en) * | 1992-10-08 | 1994-04-21 | Ferrofluidics Corporation | Ferrofluidic seal centering ring |
| JP2729734B2 (ja) * | 1992-10-12 | 1998-03-18 | 株式会社三協精機製作所 | 磁気ディスク駆動モータ |
| US5826885A (en) * | 1996-10-02 | 1998-10-27 | Rigaku/Usa, Inc. | Magnetic fluid sealing device |
| JP3687288B2 (ja) * | 1997-07-15 | 2005-08-24 | Nok株式会社 | 磁性流体を利用した密封装置 |
| US6199867B1 (en) * | 1997-09-30 | 2001-03-13 | Rigaku/Usa, Inc. | Rotary motion feedthrough device |
| US5975536A (en) | 1997-09-30 | 1999-11-02 | Rigaku/Usa, Inc. | Rotary motion feedthrough with rotating magnet system |
| JP4073064B2 (ja) * | 1997-12-02 | 2008-04-09 | 株式会社リガク | 耐磁場磁性流体シール装置 |
| JP2000337391A (ja) * | 1999-05-28 | 2000-12-05 | Minebea Co Ltd | 軸受装置 |
| US6857635B1 (en) * | 2001-10-18 | 2005-02-22 | Ferrotec (Usa) Corporation | Ultra high vacuum ferrofluidic seals and method of manufacture |
| US6854351B2 (en) | 2001-11-14 | 2005-02-15 | Nsk Ltd. | Linear motion device, rolling device and separator for rolling device |
| US6558042B1 (en) | 2001-12-28 | 2003-05-06 | Sae Magnetics(H. K.) Ltd. | Bearing guided ferrofluid seal and seal carrier |
| US7343002B1 (en) | 2003-02-05 | 2008-03-11 | Varian Medical Systems Technologies, Inc. | Bearing assembly |
| JP4885490B2 (ja) | 2005-06-30 | 2012-02-29 | 株式会社リガク | 磁性流体シール装置 |
| US7129609B1 (en) * | 2005-08-30 | 2006-10-31 | Ferrolabs, Inc. | Magneto-fluidic seal with wide working temperature range |
| JP5607978B2 (ja) * | 2010-04-08 | 2014-10-15 | ミネベア株式会社 | ピボットアッシー軸受 |
-
2009
- 2009-10-08 JP JP2011531172A patent/JP5651596B2/ja not_active Expired - Fee Related
- 2009-10-08 CA CA2739789A patent/CA2739789C/en not_active Expired - Fee Related
- 2009-10-08 EP EP13169115.6A patent/EP2647857A1/en not_active Withdrawn
- 2009-10-08 US US12/575,933 patent/US8382118B2/en not_active Expired - Fee Related
- 2009-10-08 EP EP09737301.3A patent/EP2334940B1/en not_active Not-in-force
- 2009-10-08 WO PCT/US2009/060000 patent/WO2010042718A1/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| EP2334940A1 (en) | 2011-06-22 |
| JP2012505361A (ja) | 2012-03-01 |
| US20100090413A1 (en) | 2010-04-15 |
| CA2739789C (en) | 2016-08-02 |
| EP2647857A1 (en) | 2013-10-09 |
| CA2739789A1 (en) | 2010-04-15 |
| EP2334940B1 (en) | 2014-05-07 |
| WO2010042718A1 (en) | 2010-04-15 |
| US8382118B2 (en) | 2013-02-26 |
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Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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| LAPS | Cancellation because of no payment of annual fees |