JP2012505361A5 - - Google Patents

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Publication number
JP2012505361A5
JP2012505361A5 JP2011531172A JP2011531172A JP2012505361A5 JP 2012505361 A5 JP2012505361 A5 JP 2012505361A5 JP 2011531172 A JP2011531172 A JP 2011531172A JP 2011531172 A JP2011531172 A JP 2011531172A JP 2012505361 A5 JP2012505361 A5 JP 2012505361A5
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JP
Japan
Prior art keywords
shaft
rolling element
element bearing
magnetic structure
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011531172A
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English (en)
Japanese (ja)
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JP2012505361A (ja
JP5651596B2 (ja
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Application filed filed Critical
Priority claimed from PCT/US2009/060000 external-priority patent/WO2010042718A1/en
Publication of JP2012505361A publication Critical patent/JP2012505361A/ja
Publication of JP2012505361A5 publication Critical patent/JP2012505361A5/ja
Application granted granted Critical
Publication of JP5651596B2 publication Critical patent/JP5651596B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011531172A 2008-10-09 2009-10-08 圧縮可能リングによりベアリングとシャフトを中心に配置する磁性流体封止装置 Expired - Fee Related JP5651596B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10418108P 2008-10-09 2008-10-09
US61/104,181 2008-10-09
PCT/US2009/060000 WO2010042718A1 (en) 2008-10-09 2009-10-08 Magnetic fluid seal with centering of bearing and shaft by compressible member

Publications (3)

Publication Number Publication Date
JP2012505361A JP2012505361A (ja) 2012-03-01
JP2012505361A5 true JP2012505361A5 (enExample) 2014-01-23
JP5651596B2 JP5651596B2 (ja) 2015-01-14

Family

ID=41470445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011531172A Expired - Fee Related JP5651596B2 (ja) 2008-10-09 2009-10-08 圧縮可能リングによりベアリングとシャフトを中心に配置する磁性流体封止装置

Country Status (5)

Country Link
US (1) US8382118B2 (enExample)
EP (2) EP2647857A1 (enExample)
JP (1) JP5651596B2 (enExample)
CA (1) CA2739789C (enExample)
WO (1) WO2010042718A1 (enExample)

Families Citing this family (14)

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US8422193B2 (en) * 2006-12-19 2013-04-16 Axcelis Technologies, Inc. Annulus clamping and backside gas cooled electrostatic chuck
US9036326B2 (en) * 2008-04-30 2015-05-19 Axcelis Technologies, Inc. Gas bearing electrostatic chuck
US9558980B2 (en) 2008-04-30 2017-01-31 Axcelis Technologies, Inc. Vapor compression refrigeration chuck for ion implanters
JP2013532354A (ja) 2010-05-28 2013-08-15 アクセリス テクノロジーズ， インコーポレイテッド 冷却されるイオン注入システムのための加熱回転式のシールおよび軸受け
US8481969B2 (en) * 2010-06-04 2013-07-09 Axcelis Technologies, Inc. Effective algorithm for warming a twist axis for cold ion implantations
US9711324B2 (en) 2012-05-31 2017-07-18 Axcelis Technologies, Inc. Inert atmospheric pressure pre-chill and post-heat
JP5913254B2 (ja) * 2013-10-30 2016-04-27 グローブライド株式会社 魚釣用リール
JP6209096B2 (ja) * 2014-02-06 2017-10-04 グローブライド株式会社 魚釣用スピニングリール
CN105952904B (zh) * 2016-07-15 2019-03-29 湖南维格磁流体股份有限公司 真空设备及其磁流体密封传动装置
RU2663299C1 (ru) * 2017-11-08 2018-08-03 Федеральное государственное бюджетное образовательное учреждение высшего образования "Тверской государственный технический университет" Способ получения магнитного масла
CN107842613B (zh) 2017-12-13 2019-04-02 广西科技大学 一种弧形阶梯式磁流体密封装置
CN111207217B (zh) * 2019-08-27 2021-10-08 杭州慧翔电液技术开发有限公司 集成高精度旋转功能的磁流体密封装置
CN112648374B (zh) * 2020-12-30 2022-07-05 清华大学 软填料密封装置
CN113319825B (zh) * 2021-06-10 2024-03-15 潍坊新松机器人自动化有限公司 一种智能机器人回转装置

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GB1243234A (en) * 1968-08-06 1971-08-18 Dowding & Plummer Ltd Improvements in or relating to shaft mountings
US4335885A (en) * 1980-08-19 1982-06-22 Mechanical Technology Incorporated Plural fluid magnetic/centrifugal seal
CH657721A5 (de) * 1982-01-11 1986-09-15 Papst Motoren Gmbh & Co Kg Aussenlaeufer-direktantriebsmotor.
US4577340A (en) * 1983-09-19 1986-03-18 Technicare Corporation High vacuum rotating anode X-ray tube
JPS61137168U (enExample) * 1985-02-15 1986-08-26
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US5340122A (en) * 1992-06-22 1994-08-23 Ferrofluidics Corporation Differentially-pumped ferrofluidic seal
AU4863093A (en) * 1992-10-08 1994-04-21 Ferrofluidics Corporation Ferrofluidic seal centering ring
JP2729734B2 (ja) * 1992-10-12 1998-03-18 株式会社三協精機製作所 磁気ディスク駆動モータ
US5826885A (en) * 1996-10-02 1998-10-27 Rigaku/Usa, Inc. Magnetic fluid sealing device
JP3687288B2 (ja) * 1997-07-15 2005-08-24 Ｎｏｋ株式会社 磁性流体を利用した密封装置
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JP4073064B2 (ja) * 1997-12-02 2008-04-09 株式会社リガク 耐磁場磁性流体シール装置
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JP4885490B2 (ja) 2005-06-30 2012-02-29 株式会社リガク 磁性流体シール装置
US7129609B1 (en) * 2005-08-30 2006-10-31 Ferrolabs, Inc. Magneto-fluidic seal with wide working temperature range
JP5607978B2 (ja) * 2010-04-08 2014-10-15 ミネベア株式会社 ピボットアッシー軸受

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