JP5635112B2 - ガラス質ボンド砥粒 - Google Patents
ガラス質ボンド砥粒 Download PDFInfo
- Publication number
- JP5635112B2 JP5635112B2 JP2012537015A JP2012537015A JP5635112B2 JP 5635112 B2 JP5635112 B2 JP 5635112B2 JP 2012537015 A JP2012537015 A JP 2012537015A JP 2012537015 A JP2012537015 A JP 2012537015A JP 5635112 B2 JP5635112 B2 JP 5635112B2
- Authority
- JP
- Japan
- Prior art keywords
- superabrasive
- vitrified
- component
- range
- oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
- B24D3/10—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements for porous or cellular structure, e.g. for use with diamonds as abrasives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/14—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings
- B24D3/18—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings for porous or cellular structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
- B24B37/245—Pads with fixed abrasives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1409—Abrasive particles per se
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Description
Claims (5)
- ビトリファイド超砥粒製品において、
a)超砥粒成分と;
b)前記超砥粒成分が内部に分散させられ、ビトリファイドボンドがセリウム酸化物を含むランタノイドの酸化物を含んでいるビトリファイドボンド成分であって、本質的に全てが800μm未満の直径を有し、うち70パーセントが40μm〜500μmの範囲内にあり、2未満の平均縦横比を有し、かつ前記超砥粒製品の合計体積の50%〜90%の範囲内の気孔率を有する細孔を画定し、前記ランタノイドの酸化物は、ビトリファイド超砥粒製品の0.1〜10体積%の範囲内の量で存在しているビトリファイドボンド成分と;
を含むビトリファイド超砥粒製品であり、
前記超砥粒成分の中間粒径が0.1ミクロン〜2ミクロンの範囲内にあるビトリファイド超砥粒製品。 - a)ベースと;
b)前記ベースの表面にあるビトリファイド超砥粒成分であって、
i)超砥粒成分と;
ii)セリウム酸化物を含むランタノイドの酸化物を含み前記超砥粒成分が内部に分散させられるビトリファイドボンド成分であって、ビトリファイド超砥粒成分の合計体積の50パーセント超を占める細孔を画定し、前記ランタノイドの酸化物は、ビトリファイド超砥粒製品の0.1〜10体積%の範囲内の量で存在しているビトリファイドボンド成分と、を含む、ビトリファイド超砥粒成分と;
を含む研削工具であり、
前記超砥粒成分の中間粒径が0.1ミクロン〜2ミクロンの範囲内にある研削工具。 - ビトリファイド超砥粒製品において、
a)超砥粒成分と;
b)前記超砥粒成分が内部に分散させられ、セリウム酸化物を含むランタノイドの酸化物を含むビトリファイドボンド成分であって、本質的に全てが800μm未満の直径を有し、うち70パーセントが40μm〜500μmの範囲内にあり、2未満の平均縦横比を有する細孔を画定しているビトリファイドボンド成分と;
を含み;
その表面粗さ指数が、35オングストローム以下であって、前記表面粗さ指数が、2.032cm(8インチ)のシリコンウェーハを研削するために、12.7cm(5インチ)の研削ホイールを用いて測定される際の表面粗さ指数であり、
前記ランタノイドの酸化物は、ビトリファイド超砥粒製品の0.1〜10体積%の範囲内の量で存在しているビトリファイド超砥粒製品であり、
前記超砥粒成分の中間粒径が0.1ミクロン〜2ミクロンの範囲内にあるビトリファイド超砥粒製品。 - 前記超砥粒成分が前記ビトリファイド超砥粒製品の0.1〜20体積パーセントの範囲内の量で存在する、請求項1に記載のビトリファイド超砥粒製品。
- 前記ビトリファイドボンド成分が、二酸化ケイ素(SiO2)、酸化ホウ素(B2O3)、酸化アルミニウム(Al2O3)、酸化アルカリ(Li2O、Na2O、K2O)およびアルカリ土類酸化物(CaO、MgO、BaO)からなる群から選択される少なくとも1つの要素を含む、請求項1に記載のビトリファイド超砥粒製品。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US25525409P | 2009-10-27 | 2009-10-27 | |
US61/255,254 | 2009-10-27 | ||
PCT/US2010/054347 WO2011056680A2 (en) | 2009-10-27 | 2010-10-27 | Vitreous bonded abrasive |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013508185A JP2013508185A (ja) | 2013-03-07 |
JP5635112B2 true JP5635112B2 (ja) | 2014-12-03 |
Family
ID=43970689
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012537015A Expired - Fee Related JP5635112B2 (ja) | 2009-10-27 | 2010-10-27 | ガラス質ボンド砥粒 |
Country Status (10)
Country | Link |
---|---|
US (2) | US8784519B2 (ja) |
EP (1) | EP2493659A4 (ja) |
JP (1) | JP5635112B2 (ja) |
KR (2) | KR20120085863A (ja) |
CN (1) | CN102639297B (ja) |
AU (1) | AU2010315469B2 (ja) |
BR (1) | BR112012009810A2 (ja) |
CA (1) | CA2779254A1 (ja) |
MX (1) | MX2012004912A (ja) |
WO (1) | WO2011056680A2 (ja) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5539339B2 (ja) | 2008-06-23 | 2014-07-02 | サンーゴバン アブレイシブズ,インコーポレイティド | 高気孔率ビトリファイド超砥粒製品および製造方法 |
AU2010315460B2 (en) | 2009-10-27 | 2014-11-20 | Saint-Gobain Abrasifs | Resin bonded abrasive |
US8784519B2 (en) | 2009-10-27 | 2014-07-22 | Saint-Gobain Abrasives, Inc. | Vitrious bonded abbrasive |
US9266220B2 (en) | 2011-12-30 | 2016-02-23 | Saint-Gobain Abrasives, Inc. | Abrasive articles and method of forming same |
KR20150081267A (ko) * | 2012-10-31 | 2015-07-13 | 가부시키가이샤 후지미인코퍼레이티드 | 연마용 조성물 |
WO2016109786A1 (en) * | 2014-12-31 | 2016-07-07 | Saint-Gobain Abrasives, Inc. | Aggregates of diamond with vitrified bond |
TWI641679B (zh) * | 2015-07-08 | 2018-11-21 | 聖高拜磨料有限公司 | 研磨物件及其形成方法 |
CN105924173A (zh) * | 2016-04-22 | 2016-09-07 | 天津大学 | 一种低温常压烧结的导热玻璃/金刚石复合材料 |
JP6854634B2 (ja) * | 2016-12-07 | 2021-04-07 | 株式会社ディスコ | ビトリファイドボンド砥石 |
US10518387B2 (en) * | 2017-07-18 | 2019-12-31 | Taiwan Semiconductor Manufacturing Co., Ltd. | Grinding element, grinding wheel and manufacturing method of semiconductor package using the same |
US11999029B2 (en) | 2018-06-29 | 2024-06-04 | Saint-Gobain Abrasives, Inc. | Abrasive articles and methods for forming same |
EP3814052A4 (en) * | 2018-06-29 | 2022-07-13 | Saint-gobain Abrasives, Inc | ABRASIVE ARTICLES AND FORMING METHOD THEREOF |
CN111251201A (zh) * | 2020-02-21 | 2020-06-09 | 燕山大学 | 一种碳材料结合剂复合磨具及其制备方法 |
JP7420603B2 (ja) | 2020-03-13 | 2024-01-23 | 株式会社ノリタケカンパニーリミテド | ダイヤモンド砥粒を含む低気孔率ビトリファイド砥石 |
WO2022011234A1 (en) | 2020-07-10 | 2022-01-13 | Saint-Gobain Abrasives, Inc. | Bonded abrasive article and method of making the same |
EP4298395A1 (en) * | 2021-02-23 | 2024-01-03 | Saint-Gobain Ceramics & Plastics Inc. | Porous ballistic armor |
Family Cites Families (68)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3422032A (en) | 1965-09-07 | 1969-01-14 | Allied Chem | Synthetic diamantiferous composition |
EP0211247A3 (de) | 1985-07-31 | 1987-05-27 | Techno-Keramik GmbH | Feinschleifwerkzeug für die Bearbeitung von Werkstücken aus Metall, Glas oder Keramik |
US4944773A (en) | 1987-09-14 | 1990-07-31 | Norton Company | Bonded abrasive tools with combination of finely microcrystalline aluminous abrasive and a superabrasive |
US5152810A (en) | 1987-09-14 | 1992-10-06 | Norton Company | Bonded abrasive tools with combination of finely microcrystalline aluminous abrasive and a superabrasive |
US4951427A (en) | 1989-05-30 | 1990-08-28 | General Electric Company | Refractory metal oxide coated abrasives and grinding wheels made therefrom |
JPH0716880B2 (ja) | 1990-03-09 | 1995-03-01 | 株式会社ノリタケカンパニーリミテド | 巨大気孔を備えた多孔性砥石 |
US5129919A (en) | 1990-05-02 | 1992-07-14 | Norton Company | Bonded abrasive products containing sintered sol gel alumina abrasive filaments |
JPH05202483A (ja) | 1991-04-25 | 1993-08-10 | Shipley Co Inc | 無電解金属化方法と組成物 |
US5212120A (en) * | 1991-06-10 | 1993-05-18 | Corning Incorporated | Photosensitive glass |
US5436063A (en) | 1993-04-15 | 1995-07-25 | Minnesota Mining And Manufacturing Company | Coated abrasive article incorporating an energy cured hot melt make coat |
US5472461A (en) | 1994-01-21 | 1995-12-05 | Norton Company | Vitrified abrasive bodies |
JPH0857768A (ja) | 1994-08-23 | 1996-03-05 | Mitsubishi Materials Corp | 重研削用ビトリファイドボンド砥石 |
JP3074246B2 (ja) | 1995-03-13 | 2000-08-07 | 内外セラミックス株式会社 | 高強度無機発泡体の製造方法 |
BR9607820A (pt) | 1995-03-21 | 1998-07-07 | Norton Co | Esmerilhadora aperfeiçoada para escantilhar vidro plano |
JPH08257920A (ja) | 1995-03-24 | 1996-10-08 | Mitsui Kensaku Toishi Kk | 有気孔型ビトリファイド超砥粒ホィールおよびその製造方法 |
US5738697A (en) | 1996-07-26 | 1998-04-14 | Norton Company | High permeability grinding wheels |
US5738696A (en) | 1996-07-26 | 1998-04-14 | Norton Company | Method for making high permeability grinding wheels |
US5891206A (en) | 1997-05-08 | 1999-04-06 | Norton Company | Sintered abrasive tools |
US5863308A (en) * | 1997-10-31 | 1999-01-26 | Norton Company | Low temperature bond for abrasive tools |
JP3539854B2 (ja) | 1997-11-28 | 2004-07-07 | 株式会社ノリタケカンパニーリミテド | レジノイド研削砥石 |
JPH11188647A (ja) | 1997-12-25 | 1999-07-13 | Fuji Photo Film Co Ltd | 研磨体 |
US6074278A (en) | 1998-01-30 | 2000-06-13 | Norton Company | High speed grinding wheel |
US5989301A (en) | 1998-02-18 | 1999-11-23 | Saint-Gobain Industrial Ceramics, Inc. | Optical polishing formulation |
US6102789A (en) | 1998-03-27 | 2000-08-15 | Norton Company | Abrasive tools |
US6709747B1 (en) | 1998-09-28 | 2004-03-23 | Skeleton Technologies Ag | Method of manufacturing a diamond composite and a composite produced by same |
JP2000190232A (ja) | 1998-10-13 | 2000-07-11 | Hitachi Chem Co Ltd | 半導体ウエハ研磨用樹脂砥石、その製造方法、半導体ウエハの研磨方法、半導体素子および半導体装置 |
US6056794A (en) | 1999-03-05 | 2000-05-02 | 3M Innovative Properties Company | Abrasive articles having bonding systems containing abrasive particles |
US6394888B1 (en) | 1999-05-28 | 2002-05-28 | Saint-Gobain Abrasive Technology Company | Abrasive tools for grinding electronic components |
JP3542520B2 (ja) | 1999-06-01 | 2004-07-14 | 株式会社ノリタケカンパニーリミテド | ビトリファイド砥石 |
US6527854B1 (en) | 1999-06-16 | 2003-03-04 | Mark A. Prelas | Method for contact diffusion of impurities into diamond and other crystalline structures and products |
US6755720B1 (en) | 1999-07-15 | 2004-06-29 | Noritake Co., Limited | Vitrified bond tool and method of manufacturing the same |
WO2001070463A2 (en) | 2000-03-23 | 2001-09-27 | Saint-Gobain Abrasives, Inc. | Vitrified bonded abrasive tools |
US6645624B2 (en) * | 2000-11-10 | 2003-11-11 | 3M Innovative Properties Company | Composite abrasive particles and method of manufacture |
US6593391B2 (en) | 2001-03-27 | 2003-07-15 | General Electric Company | Abrasive-filled thermoset composition and its preparation, and abrasive-filled articles and their preparation |
US6802877B2 (en) | 2001-04-20 | 2004-10-12 | Thomas J. Drury | Polyvinyl acetal composition roller brush with abrasive outer surface |
JP2003136410A (ja) | 2001-10-31 | 2003-05-14 | Allied Material Corp | 超砥粒ビトリファイドボンド砥石 |
EP1310316B1 (de) | 2001-11-13 | 2008-10-22 | sia Abrasives Industries AG | Sägegarn |
US6685755B2 (en) * | 2001-11-21 | 2004-02-03 | Saint-Gobain Abrasives Technology Company | Porous abrasive tool and method for making the same |
US7544114B2 (en) | 2002-04-11 | 2009-06-09 | Saint-Gobain Technology Company | Abrasive articles with novel structures and methods for grinding |
US6988937B2 (en) | 2002-04-11 | 2006-01-24 | Saint-Gobain Abrasives Technology Company | Method of roll grinding |
US6679758B2 (en) * | 2002-04-11 | 2004-01-20 | Saint-Gobain Abrasives Technology Company | Porous abrasive articles with agglomerated abrasives |
US6913517B2 (en) | 2002-05-23 | 2005-07-05 | Cabot Microelectronics Corporation | Microporous polishing pads |
JP2004034173A (ja) | 2002-06-28 | 2004-02-05 | Ebara Corp | 固定砥粒研磨工具 |
US6833014B2 (en) | 2002-07-26 | 2004-12-21 | 3M Innovative Properties Company | Abrasive product, method of making and using the same, and apparatus for making the same |
US20040137834A1 (en) | 2003-01-15 | 2004-07-15 | General Electric Company | Multi-resinous molded articles having integrally bonded graded interfaces |
US7066801B2 (en) | 2003-02-21 | 2006-06-27 | Dow Global Technologies, Inc. | Method of manufacturing a fixed abrasive material |
CN1795078A (zh) * | 2003-05-30 | 2006-06-28 | 博世株式会社 | 瓷胶结砂轮及其制造方法 |
US20050076577A1 (en) | 2003-10-10 | 2005-04-14 | Hall Richard W.J. | Abrasive tools made with a self-avoiding abrasive grain array |
US8029338B2 (en) | 2003-12-23 | 2011-10-04 | Diamond Innovations, Inc. | Grinding wheel for roll grinding application and method of roll grinding thereof |
JP2005319556A (ja) | 2004-05-11 | 2005-11-17 | Kurenooton Kk | 気孔発生型レジノイド砥石 |
DE602005005549T2 (de) | 2004-05-20 | 2009-04-30 | Disco Corp. | Keramisch gebundene Schleifscheibe und Herstellungsverfahren derselben |
JP4769488B2 (ja) | 2004-05-20 | 2011-09-07 | 株式会社ディスコ | ビトリファイドボンド砥石の製造方法 |
US20060135045A1 (en) | 2004-12-17 | 2006-06-22 | Jinru Bian | Polishing compositions for reducing erosion in semiconductor wafers |
US7258705B2 (en) | 2005-08-05 | 2007-08-21 | 3M Innovative Properties Company | Abrasive article and methods of making same |
TW200744790A (en) | 2005-09-09 | 2007-12-16 | Inopla Inc | Apparatus and method for polishing objects using object cleaners |
JP2007196345A (ja) | 2006-01-30 | 2007-08-09 | Shinano Denki Seiren Kk | 研磨パッド表面調整用砥石及び研磨パッド表面調整方法 |
JP2007290101A (ja) | 2006-04-27 | 2007-11-08 | Disco Abrasive Syst Ltd | ビトリファイドボンド砥石およびその製造方法 |
JP4752670B2 (ja) | 2006-08-17 | 2011-08-17 | 三菱マテリアル株式会社 | 砥石の製造方法 |
MX354090B (es) | 2007-03-14 | 2018-02-13 | Saint Gobain Abrasives Inc | Articulo abrasivo ligado y metodo de fabricacion. |
WO2008117883A1 (ja) | 2007-03-26 | 2008-10-02 | Tokyo Diamond Tools Mfg.Co., Ltd. | 合成砥石 |
JP2009061554A (ja) | 2007-09-07 | 2009-03-26 | Alps Electric Co Ltd | ビトリファイドボンド砥石 |
US7658665B2 (en) * | 2007-10-09 | 2010-02-09 | Saint-Gobain Abrasives, Inc. | Techniques for cylindrical grinding |
US20090218276A1 (en) | 2008-02-29 | 2009-09-03 | Brigham Young University | Functionalized diamond particles and methods for preparing the same |
EP2276820A4 (en) | 2008-04-18 | 2013-12-25 | Saint Gobain Abrasives Inc | HIGH POROSITY ABRASIVE ARTICLES AND METHODS OF MAKING THE SAME |
JP5539339B2 (ja) | 2008-06-23 | 2014-07-02 | サンーゴバン アブレイシブズ,インコーポレイティド | 高気孔率ビトリファイド超砥粒製品および製造方法 |
JP2011525432A (ja) | 2008-06-23 | 2011-09-22 | サンーゴバン アブレイシブズ,インコーポレイティド | 高気孔率超砥粒樹脂製品および製造方法 |
US8784519B2 (en) | 2009-10-27 | 2014-07-22 | Saint-Gobain Abrasives, Inc. | Vitrious bonded abbrasive |
EP2509751A4 (en) | 2009-12-11 | 2015-09-09 | Saint Gobain Abrasives Inc | GRINDING MATERIAL FOR USE WITH A GRINDING WHEEL |
-
2010
- 2010-10-27 US US13/504,915 patent/US8784519B2/en not_active Expired - Fee Related
- 2010-10-27 WO PCT/US2010/054347 patent/WO2011056680A2/en active Application Filing
- 2010-10-27 KR KR1020127013458A patent/KR20120085863A/ko active Application Filing
- 2010-10-27 KR KR20157006041A patent/KR20150038627A/ko active IP Right Grant
- 2010-10-27 BR BR112012009810A patent/BR112012009810A2/pt not_active IP Right Cessation
- 2010-10-27 AU AU2010315469A patent/AU2010315469B2/en not_active Ceased
- 2010-10-27 MX MX2012004912A patent/MX2012004912A/es not_active Application Discontinuation
- 2010-10-27 CA CA2779254A patent/CA2779254A1/en not_active Abandoned
- 2010-10-27 CN CN201080054451.3A patent/CN102639297B/zh not_active Expired - Fee Related
- 2010-10-27 EP EP10828912.5A patent/EP2493659A4/en not_active Withdrawn
- 2010-10-27 JP JP2012537015A patent/JP5635112B2/ja not_active Expired - Fee Related
-
2014
- 2014-06-12 US US14/302,998 patent/US20140290149A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
BR112012009810A2 (pt) | 2016-11-22 |
EP2493659A2 (en) | 2012-09-05 |
WO2011056680A2 (en) | 2011-05-12 |
CA2779254A1 (en) | 2011-05-12 |
EP2493659A4 (en) | 2015-09-02 |
WO2011056680A3 (en) | 2011-09-22 |
JP2013508185A (ja) | 2013-03-07 |
AU2010315469A1 (en) | 2012-05-24 |
US20140290149A1 (en) | 2014-10-02 |
AU2010315469B2 (en) | 2013-10-31 |
KR20150038627A (ko) | 2015-04-08 |
KR20120085863A (ko) | 2012-08-01 |
CN102639297B (zh) | 2015-11-25 |
MX2012004912A (es) | 2012-08-15 |
US20120266543A1 (en) | 2012-10-25 |
US8784519B2 (en) | 2014-07-22 |
CN102639297A (zh) | 2012-08-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5635112B2 (ja) | ガラス質ボンド砥粒 | |
JP5539339B2 (ja) | 高気孔率ビトリファイド超砥粒製品および製造方法 | |
JP6431586B2 (ja) | 研磨物品及びその形成方法 | |
US20110083374A1 (en) | Bonded abrasive article and method of forming | |
KR20140045567A (ko) | 결합된 연마 물품 및 생성 방법 | |
EP3240853B1 (en) | Aggregates of diamond with vitrified bond | |
EP0892696B1 (en) | Vitreous grinding tool containing metal coated abrasive | |
US9266220B2 (en) | Abrasive articles and method of forming same | |
TWI791411B (zh) | 黏合磨料製品及其製造方法 | |
JP5921772B2 (ja) | より低速での研削作業のための研磨物品 | |
JPH08257920A (ja) | 有気孔型ビトリファイド超砥粒ホィールおよびその製造方法 | |
EP2691208B1 (en) | Abrasive article for high-speed grinding operations | |
TW201408438A (zh) | 使用陶瓷結合劑之超研磨粒砂輪及使用該砂輪之晶圓的製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20121214 |
|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20121214 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20121228 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20130509 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130718 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130730 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131029 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20140304 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140703 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20140710 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140916 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20141015 |
|
LAPS | Cancellation because of no payment of annual fees |