JP5626784B2 - シート剥離装置及び剥離方法 - Google Patents

シート剥離装置及び剥離方法 Download PDF

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JP5626784B2
JP5626784B2 JP2010209177A JP2010209177A JP5626784B2 JP 5626784 B2 JP5626784 B2 JP 5626784B2 JP 2010209177 A JP2010209177 A JP 2010209177A JP 2010209177 A JP2010209177 A JP 2010209177A JP 5626784 B2 JP5626784 B2 JP 5626784B2
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adhesive sheet
peeling
folding
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end side
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JP2012064850A5 (https=
JP2012064850A (ja
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絵里奈 原
絵里奈 原
厚史 上道
厚史 上道
威洋 斎藤
威洋 斎藤
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Lintec Corp
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JP2010209177A 2010-09-17 2010-09-17 シート剥離装置及び剥離方法 Active JP5626784B2 (ja)

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JP2010209177A JP5626784B2 (ja) 2010-09-17 2010-09-17 シート剥離装置及び剥離方法

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JP2012064850A JP2012064850A (ja) 2012-03-29
JP2012064850A5 JP2012064850A5 (https=) 2013-08-01
JP5626784B2 true JP5626784B2 (ja) 2014-11-19

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107636821A (zh) * 2015-08-31 2018-01-26 琳得科株式会社 片材剥离装置及剥离方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5429903B2 (ja) * 2012-04-20 2014-02-26 Ｎｅｃエンジニアリング株式会社 テープ把持機構、シート剥離装置及びシート剥離方法
JP6621365B2 (ja) * 2016-04-11 2019-12-18 株式会社ディスコ 保護テープの剥離方法
JP6654976B2 (ja) * 2016-06-30 2020-02-26 リンテック株式会社 シート剥離装置および剥離方法
JP7407552B2 (ja) * 2019-10-07 2024-01-04 リンテック株式会社 シート折畳装置およびシート折畳方法
CN115140378A (zh) * 2022-08-05 2022-10-04 允哲半导体科技(浙江)有限公司 一种晶圆撕膜方法及装置
JP2024069749A (ja) 2022-11-10 2024-05-22 株式会社ディスコ 保護テープの剥離方法及び保護テープ剥離装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0348233U (https=) * 1989-09-14 1991-05-08
JP2010147123A (ja) * 2008-12-17 2010-07-01 Lintec Corp シート剥離装置及び剥離方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107636821A (zh) * 2015-08-31 2018-01-26 琳得科株式会社 片材剥离装置及剥离方法
CN107636821B (zh) * 2015-08-31 2021-07-09 琳得科株式会社 片材剥离装置及剥离方法

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