JP5608238B2 - 半導体構造 - Google Patents
半導体構造 Download PDFInfo
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- JP5608238B2 JP5608238B2 JP2012529243A JP2012529243A JP5608238B2 JP 5608238 B2 JP5608238 B2 JP 5608238B2 JP 2012529243 A JP2012529243 A JP 2012529243A JP 2012529243 A JP2012529243 A JP 2012529243A JP 5608238 B2 JP5608238 B2 JP 5608238B2
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- 239000004065 semiconductor Substances 0.000 title claims description 58
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 141
- 230000004888 barrier function Effects 0.000 claims description 108
- 239000002800 charge carrier Substances 0.000 claims description 91
- 125000006850 spacer group Chemical group 0.000 claims description 75
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 74
- 229910002601 GaN Inorganic materials 0.000 claims description 72
- 229910002704 AlGaN Inorganic materials 0.000 claims description 36
- 150000004767 nitrides Chemical class 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 17
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- 229910052733 gallium Inorganic materials 0.000 description 12
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 10
- 229910052782 aluminium Inorganic materials 0.000 description 9
- 230000007547 defect Effects 0.000 description 9
- 230000005669 field effect Effects 0.000 description 9
- 239000000758 substrate Substances 0.000 description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 230000008901 benefit Effects 0.000 description 6
- 239000011229 interlayer Substances 0.000 description 6
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052738 indium Inorganic materials 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
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- 239000000956 alloy Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 230000002269 spontaneous effect Effects 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- -1 GaN metal oxide Chemical class 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- AJGDITRVXRPLBY-UHFFFAOYSA-N aluminum indium Chemical compound [Al].[In] AJGDITRVXRPLBY-UHFFFAOYSA-N 0.000 description 1
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- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
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- H01L29/66409—Unipolar field-effect transistors
- H01L29/66431—Unipolar field-effect transistors with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
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- H01L29/2003—Nitride compounds
Description
本発明による実施例は、添付の図を参照して、以下において更に詳細に説明される。
図1は、本発明の一実施例による半導体構造100の横断面図解図である。半導体構造100は、障壁層110、スペーサ構造120およびチャネル層130を含む。障壁層110は、III族窒化物を含む。スペーサ構造120は、第1の窒化アルミニウム層122、中間層124および第2の窒化アルミニウム層126を含む。中間層124は、III族窒化物を含み、第1の窒化アルミニウム層122および第2の窒化アルミニウム層126の間に配置される。さらに、中間層124は、第2の窒化アルミニウム層126との界面において第1の自由電荷担体密度を有する。スペーサ構造120は、障壁層110およびチャネル層130の間に配置される。チャネル層130は、障壁層110のように、III族窒化物を含み、スペーサ構造120の第1の窒化アルミニウム層122との界面において第2の自由電荷担体密度を有する。第1の窒化アルミニウム層122、中間層124および第2の窒化アルミニウム層126は、第1の自由電荷担体密度が第2の自由電荷担体密度の10%未満であるような層厚さを有する。
この種のトランジスタは、ヘテロ構造電界効果トランジスタとしても公知である。
この実施例の図解図は、縮尺比に忠実に記載されていない。
d(GaN、中間層)<(1.9×d(AlN、チャネル側)−0.1nm)
d(GaN、中間層)<2×d(AlN、チャネル側)
図3のように、図5の図解図は、縮尺に忠実に描かれていない。
Claims (12)
- 半導体構造(100;200;300;500)であって:
AlGaInN、AlInNまたはAlGaNを含む障壁層(110);
第1の窒化アルミニウム層(122)、中間層(124)および第2の窒化アルミニウム層(126)を含み、前記中間層(124)はIII族窒化物を含むとともに前記第1の窒化アルミニウム層(122)と前記第2の窒化アルミニウム層(126)との間に配置され、前記中間層(124)は、前記第2の窒化アルミニウム層(126)との界面において第1の自由電荷担体密度を有するスペーサ構造(120);および
III族窒化物を含むチャネル層(130)であって、前記スペーサ構造(120)が前記障壁層(110)と前記チャネル層(130)との間に配置されるチャネル層(130)を含み、
前記チャネル層(130)が前記第1の窒化アルミニウム層(122)と結合し、前記障壁層(110)が前記第2の窒化アルミニウム層(126)と結合するように、前記スペーサ構造は前記チャネル層上に成長し、AlGaInN障壁層、AlInN障壁層またはAlGaN障壁層は前記スペーサ層上に成長し、
前記チャネル層(130)は前記スペーサ構造(120)の前記第1の窒化アルミニウム層(122)との界面において第2の自由電荷担体密度を有し、前記第1の窒化アルミニウム層(122)、前記中間層(124)および前記第2の窒化フルミニウム層(126)は、第1の自由電荷担体密度が第2の自由電荷担体密度の10%未満であるような層厚さを有する、半導体構造。 - 前記中間層(124)の層厚さが前記第1の窒化アルミニウム層(122)の層厚さの2倍未満であるか、または、前記中間層(124)の層厚さが前記第1の窒化アルミニウム層の層厚さの1.9倍マイナス0.1nm未満である、請求項1に記載の半導体構造。
- 前記第1の窒化アルミニウム層(122)および前記第2の窒化アルミニウム層(126)は、0.4nmより大きく1.4nmより小さい層厚さを有し、前記中間層(124)は、1.5nmより小さい層厚さを有する、請求項1または請求項2に記載の半導体構造。
- 前記障壁層(110)、前記中間層(124)および前記チャネル層(130)の各々はIII族窒化物を含み、前記第1の窒化アルミニウム層(122)、前記第2の窒化アルミニウム層(126)および前記中間層(124)の層厚さと組み合わされて、第1の自由電荷担体密度が第2の自由電荷担体密度の10%未満になる、請求項1ないし請求項3のいずれかに記載の半導体構造。
- 前記中間層(124)はGaNを含む、請求項1ないし請求項4のいずれかに記載の半導体構造。
- 前記チャネル層はGaNまたはInGaNを含む、請求項1ないし請求項5のいずれかに記載の半導体構造。
- 前記障壁層(110)、前記第1の窒化アルミニウム層(122)、前記中間層(124)、前記第2の窒化アルミニウム層(126)および前記チャネル層(130)は、前記チャネル層(130)の半導体構造の伝導帯がエネルギー極小を有するように設計される、請求項1ないし請求項6のいずれかに記載の半導体構造。
- トランジスタであって:
請求項1ないし請求項7のいずれかに記載の半導体構造;
前記チャネル層(130)に電気的に接続されるソース接点(302);
前記チャネル層(130)に電気的に接続されるドレイン接点(304);
前記ソース接点(302)と前記ドレイン接点(304)との間に配置されて、ゲート電位を与えることによって前記チャネル層(130)における前記ソース接点(302)と前記ドレイン接点(304)との間の電流のアンペア数を制御するように設計されたゲート接点(306)を含む、トランジスタ。 - 半導体構造(200)であって:
AlGaInN、AlInNまたはAlGaNを含む障壁層(110);
第1の窒化アルミニウム層(122)、第2の窒化アルミニウム層(126)および窒化ガリウム層(124)を含み、前記第1の窒化アルミニウム層(122)は0.4nmから1.4nmの間の層厚さを有し、前記第2の窒化アルミニウム層(126)は0.4nmから1.4nmの間の層厚さを有し、前記窒化ガリウム層(124)は1.5nm未満の層厚さを有し、前記窒化ガリウム層(124)は前記第1の窒化アルミニウム層(122)と前記第2の窒化アルミニウム層(126)との間に配置され、前記窒化ガリウム層(124)は前記第2の窒化アルミニウム層(126)との界面において第1の自由電荷担体密度を有するスペーサ構造(120);および
窒化ガリウムまたはInGaNを含むチャネル層(130)であって、前記スペーサ構造(120)は前記障壁層(110)と前記チャネル層(130)との間に配置されるチャネル層(130)を含み、
前記チャネル層(130)が前記第1の窒化アルミニウム層(122)と結合し、前記障壁層(110)が前記第2の窒化アルミニウム層(126)と結合するように、前記スペーサ構造は前記チャネル層上に成長し、AlGaInN障壁層、AlInN障壁層またはAlGaN障壁層は前記スペーサ層上に成長し、
前記チャネル層(130)は前記スペーサ構造(120)の前記第1の窒化アルミニウム層(122)との界面において第2の自由電荷担体密度を有し、前記第1の窒化アルミニウム層(122)、前記窒化ガリウム層(124)および前記第2の窒化アルミニウム層(126)は、第1の自由電荷担体密度が第2の自由電荷担体密度の10%未満であるような層厚さを有する、半導体構造。 - 半導体構造を製造する方法(700)であって:
III族窒化物を含むチャネル層を作製するステップ(710);
前記チャネル層が前記第1の窒化アルミニウム層と結合するように、前記チャネル層上に第1の窒化アルミニウム層を作製するステップ(720);
前記第1の窒化アルミニウム層上にIII族窒化物を含む中間層を作製するステップ(730);
前記中間層上に第2の窒化アルミニウム層を作製するステップ(740);および
III族窒化物を含む障壁層を作製するステップ(750)であって、前記障壁層が前記第2の窒化アルミニウム層と結合するように、AlGaInN障壁層、AlInN障壁層またはAlGaN障壁層は前記第2の窒化アルミニウム層上に成長し、前記中間層は前記第2の窒化アルミニウム層との界面において第1の自由電荷担体密度を有し、前記チャネル層は前記第1の窒化アルミニウム層との界面において第2の自由電荷担体密度を有し、前記第1の窒化アルミニウム層、前記中間層および前記第2の窒化アルミニウム層は、第1の自由電荷担体密度が第2の自由電荷担体密度の10%未満であるような層厚さを有するものであるステップ(750)を含む、方法。 - 前記中間層(124)の層厚さが前記第1の窒化アルミニウム層(122)の層厚さの2倍未満であるように、または、前記中間層(124)の層厚さが前記第1の窒化アルミニウム層の層厚さの1.9倍マイナス0.1nm未満であるように、前記中間層(124)および前記第1のアルミニウム窒化層(122)が作製される、請求項10に記載の方法。
- 前記第1の窒化アルミニウム層(122)および前記第2の窒化アルミニウム層(126)が0.4nmより大きく1.4nmより小さい層厚さを有するように、前記中間層(124)が1.5nm未満の層厚さを有するように、前記中間層(124)、前記第1の窒化アルミニウム層(122)および前記第2の窒化アルミニウム層(126)が作製される、請求項10または請求項11に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009041548A DE102009041548A1 (de) | 2009-09-15 | 2009-09-15 | Halbleiterstruktur |
DE102009041548.3 | 2009-09-15 | ||
PCT/EP2010/063496 WO2011032949A1 (de) | 2009-09-15 | 2010-09-14 | Halbleiterstruktur |
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EP (1) | EP2465142B1 (ja) |
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US8853709B2 (en) | 2011-07-29 | 2014-10-07 | Hrl Laboratories, Llc | III-nitride metal insulator semiconductor field effect transistor |
JP6035721B2 (ja) * | 2011-09-27 | 2016-11-30 | 住友電気工業株式会社 | 半導体装置の製造方法 |
CN102637723A (zh) * | 2012-03-28 | 2012-08-15 | 华为技术有限公司 | GaN衬底、半导体器件及其制作方法 |
US9337332B2 (en) | 2012-04-25 | 2016-05-10 | Hrl Laboratories, Llc | III-Nitride insulating-gate transistors with passivation |
US20140151712A1 (en) * | 2012-06-07 | 2014-06-05 | Iqe, Kc, Llc | Enhancement-mode high electron mobility transistor structure and method of making same |
CN103828030B (zh) * | 2012-08-10 | 2017-11-10 | 日本碍子株式会社 | 半导体元件、hemt元件、以及半导体元件的制造方法 |
JP2014086707A (ja) * | 2012-10-26 | 2014-05-12 | Furukawa Electric Co Ltd:The | 半導体装置およびその製造方法、並びにショットキーバリアダイオードおよび電界効果トランジスタ |
CN104937731B (zh) * | 2013-01-23 | 2017-08-25 | 优志旺电机株式会社 | Led元件 |
US9076812B2 (en) | 2013-06-27 | 2015-07-07 | Iqe Kc, Llc | HEMT structure with iron-doping-stop component and methods of forming |
JP2015073073A (ja) * | 2013-09-06 | 2015-04-16 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
CN105556678B (zh) * | 2013-09-30 | 2018-04-10 | Hrl实验室有限责任公司 | 具有高阈值电压和低导通电阻的常关型iii族氮化物晶体管 |
US10276712B2 (en) | 2014-05-29 | 2019-04-30 | Hrl Laboratories, Llc | III-nitride field-effect transistor with dual gates |
US9583607B2 (en) * | 2015-07-17 | 2017-02-28 | Mitsubishi Electric Research Laboratories, Inc. | Semiconductor device with multiple-functional barrier layer |
US9812532B1 (en) | 2015-08-28 | 2017-11-07 | Hrl Laboratories, Llc | III-nitride P-channel transistor |
WO2017087197A1 (en) | 2015-11-19 | 2017-05-26 | Hrl Laboratories, Llc | Iii-nitride field-effect transistor with dual gates |
US9735240B2 (en) * | 2015-12-21 | 2017-08-15 | Toshiba Corporation | High electron mobility transistor (HEMT) |
JP2018085414A (ja) * | 2016-11-22 | 2018-05-31 | 富士通株式会社 | 化合物半導体装置 |
US20180151714A1 (en) * | 2016-11-30 | 2018-05-31 | Coorstek Kk | Nitride semiconductor substrate |
JP6313509B2 (ja) * | 2017-07-18 | 2018-04-18 | 株式会社東芝 | 半導体装置 |
TWI668861B (zh) * | 2018-09-20 | 2019-08-11 | 環球晶圓股份有限公司 | 磊晶結構 |
JP7439536B2 (ja) * | 2020-01-28 | 2024-02-28 | 富士通株式会社 | 半導体装置 |
JP7247129B2 (ja) * | 2020-02-14 | 2023-03-28 | 株式会社東芝 | 半導体装置 |
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US5192987A (en) * | 1991-05-17 | 1993-03-09 | Apa Optics, Inc. | High electron mobility transistor with GaN/Alx Ga1-x N heterojunctions |
DE19723677A1 (de) * | 1997-06-05 | 1998-12-10 | Siemens Ag | Optoelektronisches Halbleiterbauelement |
US6764888B2 (en) | 2000-09-27 | 2004-07-20 | Sensor Electronic Technology, Inc. | Method of producing nitride-based heterostructure devices |
JP4117535B2 (ja) * | 2001-11-30 | 2008-07-16 | 信越半導体株式会社 | 化合物半導体素子 |
JP3733420B2 (ja) * | 2002-03-01 | 2006-01-11 | 独立行政法人産業技術総合研究所 | 窒化物半導体材料を用いたヘテロ接合電界効果型トランジスタ |
TWI295085B (en) | 2003-12-05 | 2008-03-21 | Int Rectifier Corp | Field effect transistor with enhanced insulator structure |
JP4542912B2 (ja) | 2005-02-02 | 2010-09-15 | 株式会社東芝 | 窒素化合物半導体素子 |
US7253454B2 (en) | 2005-03-03 | 2007-08-07 | Cree, Inc. | High electron mobility transistor |
JP2007250721A (ja) * | 2006-03-15 | 2007-09-27 | Matsushita Electric Ind Co Ltd | 窒化物半導体電界効果トランジスタ構造 |
JP2008098298A (ja) * | 2006-10-10 | 2008-04-24 | Furukawa Electric Co Ltd:The | 化合物半導体デバイス |
TW200903805A (en) * | 2007-05-24 | 2009-01-16 | Univ California | Polarization-induced barriers for N-face nitride-based electronics |
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DE102009041548A1 (de) | 2011-03-24 |
EP2465142B1 (de) | 2015-11-11 |
US8872233B2 (en) | 2014-10-28 |
JP2013504889A (ja) | 2013-02-07 |
WO2011032949A1 (de) | 2011-03-24 |
EP2465142A1 (de) | 2012-06-20 |
US20130181224A1 (en) | 2013-07-18 |
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