JP5604692B2 - 選択的無電解めっき層の成形方法。 - Google Patents
選択的無電解めっき層の成形方法。 Download PDFInfo
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- JP5604692B2 JP5604692B2 JP2010118757A JP2010118757A JP5604692B2 JP 5604692 B2 JP5604692 B2 JP 5604692B2 JP 2010118757 A JP2010118757 A JP 2010118757A JP 2010118757 A JP2010118757 A JP 2010118757A JP 5604692 B2 JP5604692 B2 JP 5604692B2
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- electroless plating
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- 238000007772 electroless plating Methods 0.000 title claims description 54
- 238000000034 method Methods 0.000 title claims description 20
- 239000003054 catalyst Substances 0.000 claims description 45
- 229920005989 resin Polymers 0.000 claims description 35
- 239000011347 resin Substances 0.000 claims description 35
- 229920000106 Liquid crystal polymer Polymers 0.000 claims description 25
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 claims description 24
- 239000000243 solution Substances 0.000 claims description 20
- 238000001746 injection moulding Methods 0.000 claims description 14
- 229920005992 thermoplastic resin Polymers 0.000 claims description 14
- 239000007864 aqueous solution Substances 0.000 claims description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 239000000945 filler Substances 0.000 claims description 9
- 229920000954 Polyglycolide Polymers 0.000 claims description 6
- 238000000465 moulding Methods 0.000 claims description 6
- 229920000747 poly(lactic acid) Polymers 0.000 claims description 6
- 239000004633 polyglycolic acid Substances 0.000 claims description 6
- 239000004626 polylactic acid Substances 0.000 claims description 6
- 230000000903 blocking effect Effects 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims description 5
- 239000004372 Polyvinyl alcohol Substances 0.000 claims description 4
- 230000005661 hydrophobic surface Effects 0.000 claims description 4
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 62
- 238000007747 plating Methods 0.000 description 26
- 239000000758 substrate Substances 0.000 description 26
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 19
- 229910052802 copper Inorganic materials 0.000 description 19
- 239000010949 copper Substances 0.000 description 19
- 229920000642 polymer Polymers 0.000 description 14
- 230000004048 modification Effects 0.000 description 11
- 238000012986 modification Methods 0.000 description 11
- 239000002344 surface layer Substances 0.000 description 11
- 229910052751 metal Inorganic materials 0.000 description 10
- 239000002184 metal Substances 0.000 description 10
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 9
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 7
- 125000003118 aryl group Chemical group 0.000 description 7
- 239000010408 film Substances 0.000 description 7
- 125000000524 functional group Chemical group 0.000 description 6
- 230000002209 hydrophobic effect Effects 0.000 description 5
- 229920003232 aliphatic polyester Polymers 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 125000001931 aliphatic group Chemical group 0.000 description 3
- 239000003513 alkali Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 2
- 239000004721 Polyphenylene oxide Substances 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- JUNWLZAGQLJVLR-UHFFFAOYSA-J calcium diphosphate Chemical compound [Ca+2].[Ca+2].[O-]P([O-])(=O)OP([O-])([O-])=O JUNWLZAGQLJVLR-UHFFFAOYSA-J 0.000 description 2
- 229940043256 calcium pyrophosphate Drugs 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical compound OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000005238 degreasing Methods 0.000 description 2
- 235000019821 dicalcium diphosphate Nutrition 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 150000002940 palladium Chemical class 0.000 description 2
- 239000000049 pigment Substances 0.000 description 2
- 229920002492 poly(sulfone) Polymers 0.000 description 2
- 150000007519 polyprotic acids Polymers 0.000 description 2
- 238000007788 roughening Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- TXUICONDJPYNPY-UHFFFAOYSA-N (1,10,13-trimethyl-3-oxo-4,5,6,7,8,9,11,12,14,15,16,17-dodecahydrocyclopenta[a]phenanthren-17-yl) heptanoate Chemical compound C1CC2CC(=O)C=C(C)C2(C)C2C1C1CCC(OC(=O)CCCCCC)C1(C)CC2 TXUICONDJPYNPY-UHFFFAOYSA-N 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004697 Polyetherimide Substances 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 239000004974 Thermotropic liquid crystal Substances 0.000 description 1
- 229910021626 Tin(II) chloride Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229920001400 block copolymer Polymers 0.000 description 1
- 229920006026 co-polymeric resin Polymers 0.000 description 1
- 238000004581 coalescence Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000003301 hydrolyzing effect Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- JFNLZVQOOSMTJK-KNVOCYPGSA-N norbornene Chemical compound C1[C@@H]2CC[C@H]1C=C2 JFNLZVQOOSMTJK-KNVOCYPGSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- -1 polyarylsulfone Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920006380 polyphenylene oxide Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229920005604 random copolymer Polymers 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 239000001119 stannous chloride Substances 0.000 description 1
- 235000011150 stannous chloride Nutrition 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Images
Landscapes
- Injection Moulding Of Plastics Or The Like (AREA)
- Chemically Coating (AREA)
Description
パラジウム塩を表面改質層12に吸着させる。次に5〜10重量%の硫酸水溶液に浸漬して、パラジウム塩を活性化して、金属パラジウムを表面改質層12内に生成して定着させる。
11 回路となるべき部分
12 表面改質層
2 マスク
3 二次成形品
4 紫外線
5 触媒
6 無電解銅めっき層(無電解めっき層)
61 不動態の薄膜
Claims (7)
- 熱可塑性樹脂を射出成形して、表面が疎水性の一次成形品を成形する第1の工程と、
上記一次成形品の表面をめっきすべき部分を除いて覆うように、紫外線を吸収または遮断する機能を有する、加水分解性樹脂のマスクを射出成形して二次成形品を成形する第2の工程と、
上記二次成形品の全表面に有酸素雰囲気の下で紫外線を照射して、上記マスクで覆われていない上記一次成形品の露出部分を選択的に表面改質する第3の工程と、
上記マスクをアルカリ水溶液で除去する第4の工程と、
上記マスクを除去した一次成形品を無電解めっきのための触媒液に浸漬して、上記表面改質された露出部分に選択的に触媒を付与する第5の工程と、
上記触媒を付与した露出部分に選択的に無電解めっき層を成形する第6の工程とを備える
ことを特徴とする選択的無電解めっき層の成形方法。 - 熱可塑性樹脂を射出成形して、表面が疎水性の一次成形品を成形する第1の工程と、
上記一次成形品の表面をめっきすべき部分を除いて覆うように、紫外線を吸収または遮断する機能を有する、水溶性樹脂からなるマスクを射出成形して二次成形品を成形する第2の工程と、
上記二次成形品の全表面に有酸素雰囲気の下で紫外線を照射して、上記マスクで覆われていない上記一次成形品の露出部分を選択的に表面改質する第3の工程と、
上記マスクを温湯で除去する第4の工程と、
上記マスクを除去した一次成形品を無電解めっきのための触媒液に浸漬して、上記表面改質された露出部分に選択的に触媒を付与する第5の工程と、
上記触媒を付与した露出部分に選択的に無電解めっき層を成形する第6の工程とを備える
ことを特徴とする選択的無電解めっき層の成形方法。 - 前記加水分解性樹脂は、ポリグリコール酸系樹脂またはポリ乳酸系樹脂である
ことを特徴とする請求項1に記載の選択的無電解めっき層の成形方法。 - 前記水溶性樹脂は、ポリビニールアルコール系樹脂である
ことを特徴とする請求項2に記載の選択的無電解めっき層の成形方法。 - 前記熱可塑性樹脂は、液晶ポリマーであって、配向性を制御するためのフィラーを10〜50重量%含有する
ことを特徴とする請求項1乃至4のいずれかに記載の選択的無電解めっき層の成形方法。 - 前記紫外線は、その波長が180〜400nmであって、その照射強度が1〜500mw/cm2である
ことを特徴とする請求項1乃至5のいずれかに記載の選択的無電解めっき層の成形方法。 - 前記マスクは、少なくとも0.1mmの厚さを有する
ことを特徴とする請求項1乃至6のいずれかに記載の選択的無電解めっき層の成形方法。
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JP5604692B2 true JP5604692B2 (ja) | 2014-10-15 |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5615881B2 (ja) * | 2012-09-14 | 2014-10-29 | 学校法人関東学院 | 無電解めっき方法 |
JP5558549B2 (ja) * | 2012-12-19 | 2014-07-23 | 学校法人関東学院 | めっき膜の製造方法 |
JP6190154B2 (ja) * | 2013-05-14 | 2017-08-30 | 三共化成株式会社 | 無電解めっき層の形成方法 |
JP2015110821A (ja) * | 2013-12-06 | 2015-06-18 | 学校法人関東学院 | アルミニウム材の表面にニッケル層を形成する方法、その形成方法を用いた半導体ウエハのアルミニウム電極表面へのニッケル層の形成方法及びその形成方法を用いて得られる半導体ウエハ基板 |
JP2016024998A (ja) * | 2014-07-22 | 2016-02-08 | 江東電気株式会社 | 水銀ランプ |
Family Cites Families (6)
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JPH08253869A (ja) * | 1995-03-14 | 1996-10-01 | Sharp Corp | 樹脂の無電解メッキ方法 |
JP4610079B2 (ja) * | 1999-12-21 | 2011-01-12 | 亮 伊藤 | 基体の部分的メッキ方法 |
JP2006346980A (ja) * | 2005-06-15 | 2006-12-28 | Sumitomo Electric Ind Ltd | 射出成形回路部品とその製造方法 |
JP2007239081A (ja) * | 2006-03-13 | 2007-09-20 | Hitachi Maxell Ltd | プラスチック成形品の製造方法及びプラスチック成形品 |
JP5135575B2 (ja) * | 2006-08-28 | 2013-02-06 | 国立大学法人岩手大学 | 機能性分子接着剤と分子接着性樹脂表面とその作成法並びに樹脂めっき製品もしくはプリント配線板の製造法 |
JP5166980B2 (ja) * | 2008-06-10 | 2013-03-21 | 三共化成株式会社 | 成形回路部品の製造方法 |
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