JP5604447B2 - レーザーのミラーの過渡加熱の補償 - Google Patents

レーザーのミラーの過渡加熱の補償 Download PDF

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Publication number
JP5604447B2
JP5604447B2 JP2011545367A JP2011545367A JP5604447B2 JP 5604447 B2 JP5604447 B2 JP 5604447B2 JP 2011545367 A JP2011545367 A JP 2011545367A JP 2011545367 A JP2011545367 A JP 2011545367A JP 5604447 B2 JP5604447 B2 JP 5604447B2
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Japan
Prior art keywords
mirror
mirror structure
reflecting surface
reflecting
laser beam
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JP2011545367A
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Japanese (ja)
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JP2012514869A5 (enExample
JP2012514869A (ja
Inventor
パパニード・エイドリアン
ニューマン・レオン、エー
ラニー・ラフマン
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コヒーレント・インク
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Publication of JP2012514869A5 publication Critical patent/JP2012514869A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/0401—Arrangements for thermal management of optical elements being part of laser resonator, e.g. windows, mirrors, lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
    • H01S3/0346—Protection of windows or mirrors against deleterious effects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/2232—Carbon dioxide (CO2) or monoxide [CO]

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
JP2011545367A 2009-01-08 2009-12-22 レーザーのミラーの過渡加熱の補償 Active JP5604447B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US14323809P 2009-01-08 2009-01-08
US61/143,238 2009-01-08
US12/464,442 2009-05-12
US12/464,442 US8201954B2 (en) 2009-01-08 2009-05-12 Compensation for transient heating of laser mirrors
PCT/US2009/069194 WO2010080650A2 (en) 2009-01-08 2009-12-22 Compensation for transient heating of laser mirrors

Publications (3)

Publication Number Publication Date
JP2012514869A JP2012514869A (ja) 2012-06-28
JP2012514869A5 JP2012514869A5 (enExample) 2012-11-22
JP5604447B2 true JP5604447B2 (ja) 2014-10-08

Family

ID=42311534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011545367A Active JP5604447B2 (ja) 2009-01-08 2009-12-22 レーザーのミラーの過渡加熱の補償

Country Status (6)

Country Link
US (1) US8201954B2 (enExample)
EP (1) EP2382694B1 (enExample)
JP (1) JP5604447B2 (enExample)
KR (1) KR101674231B1 (enExample)
CN (1) CN102273025B (enExample)
WO (1) WO2010080650A2 (enExample)

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3836236A (en) 1972-11-24 1974-09-17 Gte Sylvania Inc Mirror mount for high power lasers
US4287421A (en) 1978-06-07 1981-09-01 Jersey Nuclear-Avco Isotopes, Inc. Compensation of thermal expansion in mirrors for high power radiation beams
US4266857A (en) * 1980-01-30 1981-05-12 The United States Of America As Represented By The Secretary Of The Treasury Liquid or gas cooled flexible beam-compensating adjustable cylindrical mirror
DE3330626A1 (de) 1983-08-25 1987-06-25 Wisotzki Juergen Spiegel fuer die lasertechnik
JPS6361171U (enExample) * 1986-10-08 1988-04-22
US4719639B1 (en) 1987-01-08 1994-06-28 Boreal Laser Inc Carbon dioxide slab laser
DE3900467C2 (de) 1989-01-10 1995-09-07 Trumpf Lasertechnik Gmbh Vorrichtung mit einem Spiegelkopf
US5048048A (en) 1989-08-11 1991-09-10 Mitsubishi Denki K.K. Gas laser device
US5140606A (en) 1990-10-12 1992-08-18 Coherent, Inc. RF excited CO2 slab waveguide laser
DE4428194C2 (de) * 1994-08-09 1998-02-12 Rofin Sinar Laser Gmbh Lasersystem mit einer kompensierten Spiegeloptik
JP3648350B2 (ja) * 1997-04-07 2005-05-18 株式会社リコー 光学素子
US6255599B1 (en) 1997-08-18 2001-07-03 Ibm Relocating the neutral plane in a PBGA substrate to eliminate chip crack and interfacial delamination
JPH11271595A (ja) * 1998-03-24 1999-10-08 Aida Eng Ltd ミラーホルダ装置
US6912052B2 (en) 2000-11-17 2005-06-28 Cymer, Inc. Gas discharge MOPA laser spectral analysis module
DE50100494D1 (de) * 2001-02-22 2003-09-18 Trumpf Lasertechnik Gmbh Vorrichtung zur Strahlführung eines Laserstrahls
WO2002084823A1 (en) * 2001-04-04 2002-10-24 Coherent Deos A thermally efficient laser head
DE10201334A1 (de) * 2002-01-16 2003-08-14 Rofin Sinar Laser Gmbh Spiegel für einen Laserstrahl
US7664159B2 (en) 2007-07-31 2010-02-16 Coherent, Inc. Thermal distortion compensation for laser mirrors

Also Published As

Publication number Publication date
WO2010080650A3 (en) 2010-08-26
KR20110111471A (ko) 2011-10-11
KR101674231B1 (ko) 2016-11-08
US20100172042A1 (en) 2010-07-08
US8201954B2 (en) 2012-06-19
CN102273025A (zh) 2011-12-07
WO2010080650A2 (en) 2010-07-15
CN102273025B (zh) 2015-02-11
JP2012514869A (ja) 2012-06-28
EP2382694B1 (en) 2015-01-21
EP2382694A2 (en) 2011-11-02

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