JP2012514869A5 - - Google Patents

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Publication number
JP2012514869A5
JP2012514869A5 JP2011545367A JP2011545367A JP2012514869A5 JP 2012514869 A5 JP2012514869 A5 JP 2012514869A5 JP 2011545367 A JP2011545367 A JP 2011545367A JP 2011545367 A JP2011545367 A JP 2011545367A JP 2012514869 A5 JP2012514869 A5 JP 2012514869A5
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JP
Japan
Prior art keywords
mirror
resonator
change
curvature
branch unstable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2011545367A
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English (en)
Japanese (ja)
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JP5604447B2 (ja
JP2012514869A (ja
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Publication date
Priority claimed from US12/464,442 external-priority patent/US8201954B2/en
Application filed filed Critical
Publication of JP2012514869A publication Critical patent/JP2012514869A/ja
Publication of JP2012514869A5 publication Critical patent/JP2012514869A5/ja
Application granted granted Critical
Publication of JP5604447B2 publication Critical patent/JP5604447B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011545367A 2009-01-08 2009-12-22 レーザーのミラーの過渡加熱の補償 Active JP5604447B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US14323809P 2009-01-08 2009-01-08
US61/143,238 2009-01-08
US12/464,442 2009-05-12
US12/464,442 US8201954B2 (en) 2009-01-08 2009-05-12 Compensation for transient heating of laser mirrors
PCT/US2009/069194 WO2010080650A2 (en) 2009-01-08 2009-12-22 Compensation for transient heating of laser mirrors

Publications (3)

Publication Number Publication Date
JP2012514869A JP2012514869A (ja) 2012-06-28
JP2012514869A5 true JP2012514869A5 (enExample) 2012-11-22
JP5604447B2 JP5604447B2 (ja) 2014-10-08

Family

ID=42311534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011545367A Active JP5604447B2 (ja) 2009-01-08 2009-12-22 レーザーのミラーの過渡加熱の補償

Country Status (6)

Country Link
US (1) US8201954B2 (enExample)
EP (1) EP2382694B1 (enExample)
JP (1) JP5604447B2 (enExample)
KR (1) KR101674231B1 (enExample)
CN (1) CN102273025B (enExample)
WO (1) WO2010080650A2 (enExample)

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3836236A (en) 1972-11-24 1974-09-17 Gte Sylvania Inc Mirror mount for high power lasers
US4287421A (en) 1978-06-07 1981-09-01 Jersey Nuclear-Avco Isotopes, Inc. Compensation of thermal expansion in mirrors for high power radiation beams
US4266857A (en) * 1980-01-30 1981-05-12 The United States Of America As Represented By The Secretary Of The Treasury Liquid or gas cooled flexible beam-compensating adjustable cylindrical mirror
DE3330626A1 (de) 1983-08-25 1987-06-25 Wisotzki Juergen Spiegel fuer die lasertechnik
JPS6361171U (enExample) * 1986-10-08 1988-04-22
US4719639B1 (en) 1987-01-08 1994-06-28 Boreal Laser Inc Carbon dioxide slab laser
DE3900467C2 (de) 1989-01-10 1995-09-07 Trumpf Lasertechnik Gmbh Vorrichtung mit einem Spiegelkopf
US5048048A (en) 1989-08-11 1991-09-10 Mitsubishi Denki K.K. Gas laser device
US5140606A (en) 1990-10-12 1992-08-18 Coherent, Inc. RF excited CO2 slab waveguide laser
DE4428194C2 (de) * 1994-08-09 1998-02-12 Rofin Sinar Laser Gmbh Lasersystem mit einer kompensierten Spiegeloptik
JP3648350B2 (ja) * 1997-04-07 2005-05-18 株式会社リコー 光学素子
US6255599B1 (en) 1997-08-18 2001-07-03 Ibm Relocating the neutral plane in a PBGA substrate to eliminate chip crack and interfacial delamination
JPH11271595A (ja) * 1998-03-24 1999-10-08 Aida Eng Ltd ミラーホルダ装置
US6912052B2 (en) 2000-11-17 2005-06-28 Cymer, Inc. Gas discharge MOPA laser spectral analysis module
DE50100494D1 (de) * 2001-02-22 2003-09-18 Trumpf Lasertechnik Gmbh Vorrichtung zur Strahlführung eines Laserstrahls
WO2002084823A1 (en) * 2001-04-04 2002-10-24 Coherent Deos A thermally efficient laser head
DE10201334A1 (de) * 2002-01-16 2003-08-14 Rofin Sinar Laser Gmbh Spiegel für einen Laserstrahl
US7664159B2 (en) 2007-07-31 2010-02-16 Coherent, Inc. Thermal distortion compensation for laser mirrors

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