JP2012514869A5 - - Google Patents
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- Publication number
- JP2012514869A5 JP2012514869A5 JP2011545367A JP2011545367A JP2012514869A5 JP 2012514869 A5 JP2012514869 A5 JP 2012514869A5 JP 2011545367 A JP2011545367 A JP 2011545367A JP 2011545367 A JP2011545367 A JP 2011545367A JP 2012514869 A5 JP2012514869 A5 JP 2012514869A5
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- resonator
- change
- curvature
- branch unstable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14323809P | 2009-01-08 | 2009-01-08 | |
| US61/143,238 | 2009-01-08 | ||
| US12/464,442 | 2009-05-12 | ||
| US12/464,442 US8201954B2 (en) | 2009-01-08 | 2009-05-12 | Compensation for transient heating of laser mirrors |
| PCT/US2009/069194 WO2010080650A2 (en) | 2009-01-08 | 2009-12-22 | Compensation for transient heating of laser mirrors |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012514869A JP2012514869A (ja) | 2012-06-28 |
| JP2012514869A5 true JP2012514869A5 (enExample) | 2012-11-22 |
| JP5604447B2 JP5604447B2 (ja) | 2014-10-08 |
Family
ID=42311534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011545367A Active JP5604447B2 (ja) | 2009-01-08 | 2009-12-22 | レーザーのミラーの過渡加熱の補償 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8201954B2 (enExample) |
| EP (1) | EP2382694B1 (enExample) |
| JP (1) | JP5604447B2 (enExample) |
| KR (1) | KR101674231B1 (enExample) |
| CN (1) | CN102273025B (enExample) |
| WO (1) | WO2010080650A2 (enExample) |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3836236A (en) | 1972-11-24 | 1974-09-17 | Gte Sylvania Inc | Mirror mount for high power lasers |
| US4287421A (en) | 1978-06-07 | 1981-09-01 | Jersey Nuclear-Avco Isotopes, Inc. | Compensation of thermal expansion in mirrors for high power radiation beams |
| US4266857A (en) * | 1980-01-30 | 1981-05-12 | The United States Of America As Represented By The Secretary Of The Treasury | Liquid or gas cooled flexible beam-compensating adjustable cylindrical mirror |
| DE3330626A1 (de) | 1983-08-25 | 1987-06-25 | Wisotzki Juergen | Spiegel fuer die lasertechnik |
| JPS6361171U (enExample) * | 1986-10-08 | 1988-04-22 | ||
| US4719639B1 (en) | 1987-01-08 | 1994-06-28 | Boreal Laser Inc | Carbon dioxide slab laser |
| DE3900467C2 (de) | 1989-01-10 | 1995-09-07 | Trumpf Lasertechnik Gmbh | Vorrichtung mit einem Spiegelkopf |
| US5048048A (en) | 1989-08-11 | 1991-09-10 | Mitsubishi Denki K.K. | Gas laser device |
| US5140606A (en) | 1990-10-12 | 1992-08-18 | Coherent, Inc. | RF excited CO2 slab waveguide laser |
| DE4428194C2 (de) * | 1994-08-09 | 1998-02-12 | Rofin Sinar Laser Gmbh | Lasersystem mit einer kompensierten Spiegeloptik |
| JP3648350B2 (ja) * | 1997-04-07 | 2005-05-18 | 株式会社リコー | 光学素子 |
| US6255599B1 (en) | 1997-08-18 | 2001-07-03 | Ibm | Relocating the neutral plane in a PBGA substrate to eliminate chip crack and interfacial delamination |
| JPH11271595A (ja) * | 1998-03-24 | 1999-10-08 | Aida Eng Ltd | ミラーホルダ装置 |
| US6912052B2 (en) | 2000-11-17 | 2005-06-28 | Cymer, Inc. | Gas discharge MOPA laser spectral analysis module |
| DE50100494D1 (de) * | 2001-02-22 | 2003-09-18 | Trumpf Lasertechnik Gmbh | Vorrichtung zur Strahlführung eines Laserstrahls |
| WO2002084823A1 (en) * | 2001-04-04 | 2002-10-24 | Coherent Deos | A thermally efficient laser head |
| DE10201334A1 (de) * | 2002-01-16 | 2003-08-14 | Rofin Sinar Laser Gmbh | Spiegel für einen Laserstrahl |
| US7664159B2 (en) | 2007-07-31 | 2010-02-16 | Coherent, Inc. | Thermal distortion compensation for laser mirrors |
-
2009
- 2009-05-12 US US12/464,442 patent/US8201954B2/en active Active
- 2009-12-22 JP JP2011545367A patent/JP5604447B2/ja active Active
- 2009-12-22 CN CN200980154321.4A patent/CN102273025B/zh active Active
- 2009-12-22 WO PCT/US2009/069194 patent/WO2010080650A2/en not_active Ceased
- 2009-12-22 KR KR1020117018375A patent/KR101674231B1/ko active Active
- 2009-12-22 EP EP09801629.8A patent/EP2382694B1/en active Active
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