KR101674231B1 - 레이저 미러의 과도 가열을 위한 보상 - Google Patents

레이저 미러의 과도 가열을 위한 보상 Download PDF

Info

Publication number
KR101674231B1
KR101674231B1 KR1020117018375A KR20117018375A KR101674231B1 KR 101674231 B1 KR101674231 B1 KR 101674231B1 KR 1020117018375 A KR1020117018375 A KR 1020117018375A KR 20117018375 A KR20117018375 A KR 20117018375A KR 101674231 B1 KR101674231 B1 KR 101674231B1
Authority
KR
South Korea
Prior art keywords
mirror
reflective surface
thermal
delete delete
thermal balance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020117018375A
Other languages
English (en)
Korean (ko)
Other versions
KR20110111471A (ko
Inventor
아드리안 파파니드
레온 에이. 뉴만
래니 라프만
Original Assignee
코히어런트, 인크.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 코히어런트, 인크. filed Critical 코히어런트, 인크.
Publication of KR20110111471A publication Critical patent/KR20110111471A/ko
Application granted granted Critical
Publication of KR101674231B1 publication Critical patent/KR101674231B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/0401—Arrangements for thermal management of optical elements being part of laser resonator, e.g. windows, mirrors, lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
    • H01S3/0346—Protection of windows or mirrors against deleterious effects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/2232—Carbon dioxide (CO2) or monoxide [CO]

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
KR1020117018375A 2009-01-08 2009-12-22 레이저 미러의 과도 가열을 위한 보상 Active KR101674231B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US14323809P 2009-01-08 2009-01-08
US61/143,238 2009-01-08
US12/464,442 2009-05-12
US12/464,442 US8201954B2 (en) 2009-01-08 2009-05-12 Compensation for transient heating of laser mirrors
PCT/US2009/069194 WO2010080650A2 (en) 2009-01-08 2009-12-22 Compensation for transient heating of laser mirrors

Publications (2)

Publication Number Publication Date
KR20110111471A KR20110111471A (ko) 2011-10-11
KR101674231B1 true KR101674231B1 (ko) 2016-11-08

Family

ID=42311534

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020117018375A Active KR101674231B1 (ko) 2009-01-08 2009-12-22 레이저 미러의 과도 가열을 위한 보상

Country Status (6)

Country Link
US (1) US8201954B2 (enExample)
EP (1) EP2382694B1 (enExample)
JP (1) JP5604447B2 (enExample)
KR (1) KR101674231B1 (enExample)
CN (1) CN102273025B (enExample)
WO (1) WO2010080650A2 (enExample)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3836236A (en) 1972-11-24 1974-09-17 Gte Sylvania Inc Mirror mount for high power lasers
US4266857A (en) 1980-01-30 1981-05-12 The United States Of America As Represented By The Secretary Of The Treasury Liquid or gas cooled flexible beam-compensating adjustable cylindrical mirror
US20020163700A1 (en) * 2001-02-22 2002-11-07 Borstel Michael Von Device for the beam guiding of a laser beam
US20020167976A1 (en) * 2001-04-04 2002-11-14 Seguin Vernon A. Thermally efficient laser head

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4287421A (en) 1978-06-07 1981-09-01 Jersey Nuclear-Avco Isotopes, Inc. Compensation of thermal expansion in mirrors for high power radiation beams
DE3330626A1 (de) 1983-08-25 1987-06-25 Wisotzki Juergen Spiegel fuer die lasertechnik
JPS6361171U (enExample) * 1986-10-08 1988-04-22
US4719639B1 (en) 1987-01-08 1994-06-28 Boreal Laser Inc Carbon dioxide slab laser
DE3900467C2 (de) 1989-01-10 1995-09-07 Trumpf Lasertechnik Gmbh Vorrichtung mit einem Spiegelkopf
US5048048A (en) 1989-08-11 1991-09-10 Mitsubishi Denki K.K. Gas laser device
US5140606A (en) 1990-10-12 1992-08-18 Coherent, Inc. RF excited CO2 slab waveguide laser
DE4428194C2 (de) * 1994-08-09 1998-02-12 Rofin Sinar Laser Gmbh Lasersystem mit einer kompensierten Spiegeloptik
JP3648350B2 (ja) * 1997-04-07 2005-05-18 株式会社リコー 光学素子
US6255599B1 (en) 1997-08-18 2001-07-03 Ibm Relocating the neutral plane in a PBGA substrate to eliminate chip crack and interfacial delamination
JPH11271595A (ja) * 1998-03-24 1999-10-08 Aida Eng Ltd ミラーホルダ装置
US6912052B2 (en) 2000-11-17 2005-06-28 Cymer, Inc. Gas discharge MOPA laser spectral analysis module
DE10201334A1 (de) * 2002-01-16 2003-08-14 Rofin Sinar Laser Gmbh Spiegel für einen Laserstrahl
US7664159B2 (en) 2007-07-31 2010-02-16 Coherent, Inc. Thermal distortion compensation for laser mirrors

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3836236A (en) 1972-11-24 1974-09-17 Gte Sylvania Inc Mirror mount for high power lasers
US4266857A (en) 1980-01-30 1981-05-12 The United States Of America As Represented By The Secretary Of The Treasury Liquid or gas cooled flexible beam-compensating adjustable cylindrical mirror
US20020163700A1 (en) * 2001-02-22 2002-11-07 Borstel Michael Von Device for the beam guiding of a laser beam
US20020167976A1 (en) * 2001-04-04 2002-11-14 Seguin Vernon A. Thermally efficient laser head

Also Published As

Publication number Publication date
WO2010080650A3 (en) 2010-08-26
KR20110111471A (ko) 2011-10-11
US20100172042A1 (en) 2010-07-08
US8201954B2 (en) 2012-06-19
CN102273025A (zh) 2011-12-07
JP5604447B2 (ja) 2014-10-08
WO2010080650A2 (en) 2010-07-15
CN102273025B (zh) 2015-02-11
JP2012514869A (ja) 2012-06-28
EP2382694B1 (en) 2015-01-21
EP2382694A2 (en) 2011-11-02

Similar Documents

Publication Publication Date Title
US4891820A (en) Fast axial flow laser circulating system
US10627339B2 (en) Modular photoacoustic detection device
EP0695599B1 (en) Laser oscillator
US20080240183A1 (en) RF excited CO2 slab laser tube housing and electrodes cooling
US5805625A (en) Laser
KR101674231B1 (ko) 레이저 미러의 과도 가열을 위한 보상
EP1357647A2 (en) Solid state laser master oscillator gain module
JP5419297B2 (ja) レーザーミラーにおける熱変形の補償
US6747789B2 (en) Laser amplifying system
US20140251964A1 (en) Laser assembly with package beam pointing registration
US3817606A (en) Mirror for high power lasers and method of fabricating same
JP2933578B2 (ja) 面冷却式高出力レーザ光学セル
WO2005050797A2 (en) Optical bench for diode-pumped solid state lasers in field applications
KR102364278B1 (ko) 중공 도파관 레이저
JPH102790A (ja) レーザ出力検出器およびレーザ発振器
JP2552615B2 (ja) レーザ共振器アライメント保持装置
JP2000022244A (ja) 固体レーザ装置
JP4045952B2 (ja) ガスレーザ発振装置
US11387620B2 (en) Compact Raman laser capable of efficient operation at low peak powers with good beam quality
JP2003338647A (ja) レーザ発振器
Koechner Thermo-Optic Effects and Heat Removal

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20110805

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20141216

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20160415

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20161027

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20161102

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20161102

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
PR1001 Payment of annual fee

Payment date: 20190927

Start annual number: 4

End annual number: 4

PR1001 Payment of annual fee

Payment date: 20201005

Start annual number: 5

End annual number: 5

PR1001 Payment of annual fee

Payment date: 20211005

Start annual number: 6

End annual number: 6

PR1001 Payment of annual fee

Payment date: 20220915

Start annual number: 7

End annual number: 7

PR1001 Payment of annual fee

Payment date: 20230918

Start annual number: 8

End annual number: 8

PR1001 Payment of annual fee

Payment date: 20240919

Start annual number: 9

End annual number: 9