CN102273025B - 激光器镜的瞬态受热补偿 - Google Patents

激光器镜的瞬态受热补偿 Download PDF

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Publication number
CN102273025B
CN102273025B CN200980154321.4A CN200980154321A CN102273025B CN 102273025 B CN102273025 B CN 102273025B CN 200980154321 A CN200980154321 A CN 200980154321A CN 102273025 B CN102273025 B CN 102273025B
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CN
China
Prior art keywords
mirror
reflective surface
laser
assembly
resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN200980154321.4A
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English (en)
Chinese (zh)
Other versions
CN102273025A (zh
Inventor
A·帕帕奈德
L·A·纽曼
L·拉夫曼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coherent Inc
Original Assignee
Coherent Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Coherent Inc filed Critical Coherent Inc
Publication of CN102273025A publication Critical patent/CN102273025A/zh
Application granted granted Critical
Publication of CN102273025B publication Critical patent/CN102273025B/zh
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/0401—Arrangements for thermal management of optical elements being part of laser resonator, e.g. windows, mirrors, lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
    • H01S3/0346—Protection of windows or mirrors against deleterious effects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/2232—Carbon dioxide (CO2) or monoxide [CO]

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
CN200980154321.4A 2009-01-08 2009-12-22 激光器镜的瞬态受热补偿 Active CN102273025B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US14323809P 2009-01-08 2009-01-08
US61/143,238 2009-01-08
US12/464,442 2009-05-12
US12/464,442 US8201954B2 (en) 2009-01-08 2009-05-12 Compensation for transient heating of laser mirrors
PCT/US2009/069194 WO2010080650A2 (en) 2009-01-08 2009-12-22 Compensation for transient heating of laser mirrors

Publications (2)

Publication Number Publication Date
CN102273025A CN102273025A (zh) 2011-12-07
CN102273025B true CN102273025B (zh) 2015-02-11

Family

ID=42311534

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200980154321.4A Active CN102273025B (zh) 2009-01-08 2009-12-22 激光器镜的瞬态受热补偿

Country Status (6)

Country Link
US (1) US8201954B2 (enExample)
EP (1) EP2382694B1 (enExample)
JP (1) JP5604447B2 (enExample)
KR (1) KR101674231B1 (enExample)
CN (1) CN102273025B (enExample)
WO (1) WO2010080650A2 (enExample)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3836236A (en) * 1972-11-24 1974-09-17 Gte Sylvania Inc Mirror mount for high power lasers
DE3330626A1 (de) * 1983-08-25 1987-06-25 Wisotzki Juergen Spiegel fuer die lasertechnik
US6709118B2 (en) * 2001-02-22 2004-03-23 Trumpf Lasertechnik Gmbh Device for the beam guiding of a laser beam
US20050046856A1 (en) * 2000-11-17 2005-03-03 Rao Rajasekhar M. Gas discharge mopa laser spectral analysis module

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4287421A (en) 1978-06-07 1981-09-01 Jersey Nuclear-Avco Isotopes, Inc. Compensation of thermal expansion in mirrors for high power radiation beams
US4266857A (en) * 1980-01-30 1981-05-12 The United States Of America As Represented By The Secretary Of The Treasury Liquid or gas cooled flexible beam-compensating adjustable cylindrical mirror
JPS6361171U (enExample) * 1986-10-08 1988-04-22
US4719639B1 (en) 1987-01-08 1994-06-28 Boreal Laser Inc Carbon dioxide slab laser
DE3900467C2 (de) 1989-01-10 1995-09-07 Trumpf Lasertechnik Gmbh Vorrichtung mit einem Spiegelkopf
US5048048A (en) 1989-08-11 1991-09-10 Mitsubishi Denki K.K. Gas laser device
US5140606A (en) 1990-10-12 1992-08-18 Coherent, Inc. RF excited CO2 slab waveguide laser
DE4428194C2 (de) * 1994-08-09 1998-02-12 Rofin Sinar Laser Gmbh Lasersystem mit einer kompensierten Spiegeloptik
JP3648350B2 (ja) * 1997-04-07 2005-05-18 株式会社リコー 光学素子
US6255599B1 (en) 1997-08-18 2001-07-03 Ibm Relocating the neutral plane in a PBGA substrate to eliminate chip crack and interfacial delamination
JPH11271595A (ja) * 1998-03-24 1999-10-08 Aida Eng Ltd ミラーホルダ装置
WO2002084823A1 (en) * 2001-04-04 2002-10-24 Coherent Deos A thermally efficient laser head
DE10201334A1 (de) * 2002-01-16 2003-08-14 Rofin Sinar Laser Gmbh Spiegel für einen Laserstrahl
US7664159B2 (en) 2007-07-31 2010-02-16 Coherent, Inc. Thermal distortion compensation for laser mirrors

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3836236A (en) * 1972-11-24 1974-09-17 Gte Sylvania Inc Mirror mount for high power lasers
DE3330626A1 (de) * 1983-08-25 1987-06-25 Wisotzki Juergen Spiegel fuer die lasertechnik
US20050046856A1 (en) * 2000-11-17 2005-03-03 Rao Rajasekhar M. Gas discharge mopa laser spectral analysis module
US6709118B2 (en) * 2001-02-22 2004-03-23 Trumpf Lasertechnik Gmbh Device for the beam guiding of a laser beam

Also Published As

Publication number Publication date
WO2010080650A3 (en) 2010-08-26
KR20110111471A (ko) 2011-10-11
KR101674231B1 (ko) 2016-11-08
US20100172042A1 (en) 2010-07-08
US8201954B2 (en) 2012-06-19
CN102273025A (zh) 2011-12-07
JP5604447B2 (ja) 2014-10-08
WO2010080650A2 (en) 2010-07-15
JP2012514869A (ja) 2012-06-28
EP2382694B1 (en) 2015-01-21
EP2382694A2 (en) 2011-11-02

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