JP5591480B2 - 磁気回路加速度計における振動整流エラーを最小限に抑える方法及びシステム - Google Patents
磁気回路加速度計における振動整流エラーを最小限に抑える方法及びシステム Download PDFInfo
- Publication number
- JP5591480B2 JP5591480B2 JP2009063045A JP2009063045A JP5591480B2 JP 5591480 B2 JP5591480 B2 JP 5591480B2 JP 2009063045 A JP2009063045 A JP 2009063045A JP 2009063045 A JP2009063045 A JP 2009063045A JP 5591480 B2 JP5591480 B2 JP 5591480B2
- Authority
- JP
- Japan
- Prior art keywords
- piece
- ring
- accelerometer
- pole piece
- magnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/11—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by inductive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/050,854 | 2008-03-18 | ||
| US12/050,854 US7926348B2 (en) | 2008-03-18 | 2008-03-18 | Methods and systems for minimizing vibration rectification error in magnetic circuit accelerometers |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014153789A Division JP5774171B2 (ja) | 2008-03-18 | 2014-07-29 | 磁気回路加速度計における振動整流エラーを最小限に抑える方法及びシステム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009236911A JP2009236911A (ja) | 2009-10-15 |
| JP2009236911A5 JP2009236911A5 (enExample) | 2014-01-30 |
| JP5591480B2 true JP5591480B2 (ja) | 2014-09-17 |
Family
ID=41087577
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009063045A Expired - Fee Related JP5591480B2 (ja) | 2008-03-18 | 2009-03-16 | 磁気回路加速度計における振動整流エラーを最小限に抑える方法及びシステム |
| JP2014153789A Expired - Fee Related JP5774171B2 (ja) | 2008-03-18 | 2014-07-29 | 磁気回路加速度計における振動整流エラーを最小限に抑える方法及びシステム |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014153789A Expired - Fee Related JP5774171B2 (ja) | 2008-03-18 | 2014-07-29 | 磁気回路加速度計における振動整流エラーを最小限に抑える方法及びシステム |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US7926348B2 (enExample) |
| JP (2) | JP5591480B2 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8215169B2 (en) * | 2009-03-26 | 2012-07-10 | Honeywell International Inc. | Using pole pieces to guide magnetic flux through a MEMS device and method of making |
| US8649418B1 (en) | 2013-02-08 | 2014-02-11 | CBF Networks, Inc. | Enhancement of the channel propagation matrix order and rank for a wireless channel |
| US9164117B2 (en) * | 2012-10-19 | 2015-10-20 | Honeywell International Inc. | Stress reduction components for sensors |
| US10161956B2 (en) | 2016-04-25 | 2018-12-25 | Honeywell International Inc. | Reducing bias in an accelerometer via a pole piece |
| WO2019118870A1 (en) * | 2017-12-14 | 2019-06-20 | Trak Microwave Corporation | Broadband circulator and method of manufacturing the same |
| CN110806495B (zh) * | 2019-10-18 | 2021-06-01 | 中国航空工业集团公司西安飞行自动控制研究所 | 一种高精度加速度计摆组件装配夹具 |
| US11422152B2 (en) | 2019-12-10 | 2022-08-23 | Honeywell International Inc. | Stress relieving sensor flange |
| US11169175B2 (en) | 2020-02-11 | 2021-11-09 | Honeywell International Inc. | Multilayer excitation ring |
| US11521772B2 (en) | 2020-02-11 | 2022-12-06 | Honeywell International Inc. | Multilayer magnetic circuit assembly |
| US11275098B2 (en) | 2020-07-14 | 2022-03-15 | Honeywell International Inc. | Accelerometer including rectangular coil and rectangular pole piece |
| US12436169B2 (en) | 2022-10-05 | 2025-10-07 | Honeywell International Inc. | Accelerometer forming a recess enclosing an electromagnetic coil |
| US12210034B2 (en) | 2022-10-05 | 2025-01-28 | Honeywell International Inc. | Accelerometer including protective housing |
| US20240410914A1 (en) * | 2023-06-09 | 2024-12-12 | Honeywell International Inc. | Translational mass accelerometer |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3702073A (en) * | 1969-02-28 | 1972-11-07 | Sundstrand Data Control | Accelerometer |
| US4094199A (en) * | 1976-07-06 | 1978-06-13 | Sundstrand Data Control, Inc. | Accelerometer |
| US4555944A (en) * | 1984-05-01 | 1985-12-03 | Sundstrand Data Control, Inc. | Method and apparatus for producing a controlled preload on a transducer assembly |
| JPS6111666A (ja) * | 1984-06-27 | 1986-01-20 | Matsushita Electric Ind Co Ltd | モ−シヨンセンサ |
| JPH026335Y2 (enExample) * | 1985-05-24 | 1990-02-15 | ||
| US4726228A (en) * | 1986-04-16 | 1988-02-23 | Sundstrand Data Control, Inc. | Accelerometer proof mass interface |
| JPS633600A (ja) * | 1986-06-23 | 1988-01-08 | Minebea Kk | スピ−カの製造方法 |
| EP0272316B1 (en) * | 1986-06-27 | 1992-12-16 | Sundstrand Corporation | Mounting system for precision transducer |
| JPS6373861A (ja) * | 1986-09-11 | 1988-04-04 | Fuji Elelctrochem Co Ltd | 磁気回路の製造方法 |
| US4854169A (en) | 1987-06-15 | 1989-08-08 | Japan Aviation Electronics Industry Ltd. | Accelerometer |
| JPS6412273A (en) * | 1987-07-06 | 1989-01-17 | Japan Aviation Electron | Magnet construction body in accelerometer |
| JPS6448675U (enExample) * | 1987-09-22 | 1989-03-27 | ||
| JPH0339656A (ja) * | 1989-07-06 | 1991-02-20 | Niles Parts Co Ltd | 加速度センサ |
| US5133214A (en) * | 1990-05-18 | 1992-07-28 | New Sd, Inc. | Adjustment of scale factor linearity in a servo accelerometer |
| US5182949A (en) * | 1991-05-17 | 1993-02-02 | Sundstrand Corporation | Accelerometer with support caging |
| JPH05249136A (ja) * | 1992-03-09 | 1993-09-28 | Takata Kk | 加速度センサ |
| US5557044A (en) * | 1994-01-21 | 1996-09-17 | Alliedsignal, Inc. | Low stress magnet interface |
| JP4054073B2 (ja) * | 1994-10-03 | 2008-02-27 | アライドシグナル インコーポレイテッド | 低応力の磁石インターフエースを含む力再釣合加速度計 |
| JPH08331690A (ja) * | 1995-05-31 | 1996-12-13 | Sony Corp | スピーカとスピーカ装置およびスピーカ装置の製造方法 |
| JPH1154329A (ja) * | 1997-07-31 | 1999-02-26 | Kyocera Corp | 巻線型インダクタ |
| JP2000114062A (ja) * | 1998-09-30 | 2000-04-21 | Tokin Corp | 巻線部品 |
| JP2002058093A (ja) * | 2000-08-08 | 2002-02-22 | Kenwood Corp | スピーカおよびスピーカの作製方法 |
| JP3631461B2 (ja) * | 2001-12-04 | 2005-03-23 | 東京コイルエンジニアリング株式会社 | ポットリベット型コアチョークコイル |
| US7194903B2 (en) * | 2004-12-14 | 2007-03-27 | Honeywell International Inc. | Suspension mechanism for high performance accelerometers |
| US7191654B2 (en) * | 2005-08-17 | 2007-03-20 | Honeywell International Inc. | Methods and systems for adjusting magnetic return path with minimized reluctance |
| JP2007336145A (ja) * | 2006-06-14 | 2007-12-27 | Pioneer Electronic Corp | スピーカー装置用磁気回路の製造方法 |
| US20090205424A1 (en) * | 2008-02-15 | 2009-08-20 | Honeywell International Inc. | Flexure type accelerometer and method of making same |
-
2008
- 2008-03-18 US US12/050,854 patent/US7926348B2/en active Active
-
2009
- 2009-03-16 JP JP2009063045A patent/JP5591480B2/ja not_active Expired - Fee Related
-
2014
- 2014-07-29 JP JP2014153789A patent/JP5774171B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2014238413A (ja) | 2014-12-18 |
| US7926348B2 (en) | 2011-04-19 |
| US20090235745A1 (en) | 2009-09-24 |
| JP5774171B2 (ja) | 2015-09-02 |
| JP2009236911A (ja) | 2009-10-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5591480B2 (ja) | 磁気回路加速度計における振動整流エラーを最小限に抑える方法及びシステム | |
| US8143083B2 (en) | Physical quantity sensor device and method for producing the same | |
| JP2007510865A (ja) | 振動感受機器用の試験プラットフォーム | |
| CN113514082A (zh) | 微半球谐振陀螺结构装配夹具、装配系统及装配方法 | |
| CN115144614A (zh) | 惯性传感器 | |
| CN111051430A (zh) | 碳纤维增强塑料结构体及加工装置 | |
| JP5051021B2 (ja) | 電子部品の製造装置および製造方法 | |
| JP5504376B2 (ja) | スタック型ウエハアセンブリのための精密スペーシング | |
| JP2002036103A (ja) | 研磨試料作成治具 | |
| JP4614581B2 (ja) | ワークの固定用治具および固定方法 | |
| JP5626993B2 (ja) | ダイナミックマイクロホンユニットの製造方法 | |
| US8824068B2 (en) | Rapid optical assembly via simultaneous passive bonding | |
| JP2015017879A (ja) | 電子装置およびその製造方法 | |
| JP7533285B2 (ja) | 慣性センサおよび慣性センサの製造方法 | |
| JP2012121120A (ja) | ウエハホルダの製造方法 | |
| JP6111155B2 (ja) | コンデンサマイクロホンユニット | |
| TWI826686B (zh) | 荷重感測器的電壓調整方法 | |
| CN106919000B (zh) | 平面电机永磁体阵列气浮表面的加工方法 | |
| JP3463563B2 (ja) | 振動形半導体トランスデューサ | |
| JPH09183047A (ja) | 試料研磨方法 | |
| JPH0435119B2 (enExample) | ||
| CN117666072A (zh) | 振镜反射镜装置及无应力振镜反射镜的粘接方法 | |
| CN110176820A (zh) | 空芯线圈、促动器以及空芯线圈的制造方法 | |
| JPH0454847A (ja) | ロータ体 | |
| CN110246681A (zh) | 线圈部件的制造方法和线圈部件的制造装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20120313 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130830 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130906 |
|
| A524 | Written submission of copy of amendment under section 19 (pct) |
Free format text: JAPANESE INTERMEDIATE CODE: A524 Effective date: 20131205 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140701 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140730 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 5591480 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| LAPS | Cancellation because of no payment of annual fees |