JP5583196B2 - 薄膜太陽電池およびその製造方法 - Google Patents
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- 239000010409 thin film Substances 0.000 title claims description 83
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- 239000012535 impurity Substances 0.000 claims description 64
- 239000004065 semiconductor Substances 0.000 claims description 60
- 230000015572 biosynthetic process Effects 0.000 claims description 56
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- 229910052710 silicon Inorganic materials 0.000 claims description 16
- 239000010703 silicon Substances 0.000 claims description 16
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- 229910052751 metal Inorganic materials 0.000 claims description 15
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- 238000010438 heat treatment Methods 0.000 claims description 14
- 229910052796 boron Inorganic materials 0.000 claims description 8
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 6
- 230000004913 activation Effects 0.000 claims description 6
- 229910052785 arsenic Inorganic materials 0.000 claims description 5
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 5
- 238000005229 chemical vapour deposition Methods 0.000 claims description 5
- 238000005224 laser annealing Methods 0.000 claims description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 238000000137 annealing Methods 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 239000002245 particle Substances 0.000 claims description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 2
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 21
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- 239000010937 tungsten Substances 0.000 description 21
- 238000006243 chemical reaction Methods 0.000 description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 14
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- 238000010586 diagram Methods 0.000 description 11
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- 239000010953 base metal Substances 0.000 description 8
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- 229910000577 Silicon-germanium Inorganic materials 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 6
- 238000001994 activation Methods 0.000 description 6
- 230000006798 recombination Effects 0.000 description 6
- 238000005215 recombination Methods 0.000 description 6
- 229910052774 Proactinium Inorganic materials 0.000 description 4
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- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 238000001069 Raman spectroscopy Methods 0.000 description 2
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 2
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- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
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- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
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Classifications
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/065—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the graded gap type
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- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/075—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PIN type
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- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
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- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1864—Annealing
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1872—Recrystallisation
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- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
- H01L31/202—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic System
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
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- Y02E10/548—Amorphous silicon PV cells
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Description
前記積層体は、前記金属膜と前記透明導電膜とに挟まれ、前記第1の拡散層、前記成膜層および前記第2の拡散層はシリコンからなり、かつ、体積分率で70%以上が多結晶の結晶相であると共に、少なくとも粒径が1nm〜20nmの範囲の結晶粒が層中に存在しており、
前記第1の拡散層および前記第2の拡散層は、その膜厚方向に沿って不純物密度が傾斜して分布しており、前記第1の拡散層の前記成膜層との界面での不純物密度よりも、前記第1の拡散層の表面での不純物密度の方が高く、前記第2の拡散層の前記成膜層との界面での不純物密度よりも、前記第2の拡散層の表面での不純物密度の方が高い、薄膜太陽電池を提供する。
本発明の薄膜太陽電池は、1)第1の拡散層と、成膜層と、第2の拡散層と、を含む積層体であって、pin接合型を有する積層体を含み、好ましくは2)導電性を有する基材または導電層が成膜された基材をも含む。第1の拡散層は、導電性を有する基材または基材に成膜された導電層に接触していることが好ましい。さらに、第2の拡散層の表面に配置された表面電極などを有していてもよい。前記積層体の厚みは、60μm以下であることが好ましく、50μm以下であることがより好ましい。
図1および図2を参照して、実施の形態1の薄膜太陽電池およびその製造方法を説明する。実施の形態1の薄膜太陽電池は、サブストレート型構造をなしている。
1)i型Si成膜層204aが結晶化することで、結晶相を含むi型Si成膜層204bとなっている。
2)As注入領域203a中のAsが、i型Si成膜層204b中に、深さ方向に約1〜100nmの範囲で拡散しており、かつSi相中で活性化されて、第1の拡散層であるn型Si拡散層203bが形成されている。
3)B注入領域205a中のBが、i型Si成膜層204b中に、深さ方向に約1〜100nmの範囲で拡散しており、かつSi相中で活性化されて、第2の拡散層であるp型Si拡散層205bが形成されている。
図3および図4を参照して、実施の形態2の薄膜太陽電池およびその製造方法を説明する。実施の形態2の薄膜太陽電池は、スーパーストレート型構造をなしている。図3および図4において、図1および図2と同じ構成要素については同じ符号を用い、説明を省略する。
図5および図6を参照して、実施の形態3の薄膜太陽電池およびその製造方法を説明する。実施の形態3の薄膜太陽電池は、サブストレート型構造をなしている。図5および図6において、図1および図2と同じ構成要素については同じ符号を用い、説明を省略する。
1)i型Si成膜層204aが結晶化して、第1の拡散層であるi型Si成膜層204bとなっている。
2)B注入領域211a中のBがi型Si成膜層204b中に、深さ方向に約1〜100nmの範囲で拡散して、かつSi相中で活性化されて、第1の拡散層であるp型Si拡散層211bとなっている。
3)As注入領域212a中のAsが、i型Si成膜層204b中に、深さ方向に約1〜100nmの範囲で拡散して、かつSi相中で活性化されて、第2の拡散層であるn型Si拡散層212bとなっている。
図7および図8を参照して、実施の形態4の薄膜太陽電池およびその製造方法を説明する。実施の形態4の薄膜太陽電池は、サブストレート型構造をなしている。図7および図8において、図5および図6と同じ構成要素については同じ符号を付して、説明を省略する。
202 W膜
203a As注入領域
212a As注入領域
212b 拡散層
204 成膜層であるi型Si成膜層
205a B注入領域
211a B注入領域
211b 拡散層
206a 積層体
206b 積層体
206e 積層体
206f 積層体
208X 界面
208Y 界面
Claims (13)
- ガラス基板と、前記ガラス基板に成膜された金属膜と、透明導電膜と、p型或いはn型の導電性を有する半導体からなる第1の拡散層、前記第1の拡散層よりも低い導電性を有する半導体からなる成膜層、および、前記第1の拡散膜とは異なる極性を有する半導体からなる第2の拡散層を少なくとも含む厚み60μm以下の積層体と、を含む薄膜太陽電池であって、
前記積層体は、前記金属膜と前記透明導電膜とに挟まれ、前記第1の拡散層、前記成膜層および前記第2の拡散層はシリコンからなり、かつ、体積分率で70%以上が多結晶の結晶相であると共に、少なくとも粒径が1nm〜20nmの範囲の結晶粒が層中に存在しており、
前記第1の拡散層および前記第2の拡散層は、その膜厚方向に沿って不純物密度が傾斜して分布しており、
前記第1の拡散層の前記成膜層との界面での不純物密度よりも、前記第1の拡散層の表面での不純物密度の方が高く、
前記第2の拡散層の前記成膜層との界面での不純物密度よりも、前記第2の拡散層の表面での不純物密度の方が高い、薄膜太陽電池。 - 前記第1の拡散層は、前記金属膜に接している、請求項1に記載の薄膜太陽電池。
- 前記積層体はpin接合型を有し、
前記第1の拡散層はn型の導電性を有し、前記成膜層は真性に近い低い導電性を有し、前記第2の拡散層はp型の導電性を有するか、または
前記第1の拡散層はp型の導電性を有し、前記成膜層は真性に近い低い導電性を有し、前記第2の拡散層はn型の導電性を有する、
pin接合型の太陽電池である、請求項1に記載の薄膜太陽電池。 - 前記第1の拡散層および前記第2の拡散層は、接合深さが150nm以下である、請求項1に記載の薄膜太陽電池。
- 前記p型の導電性を有する前記第1の拡散層または前記第2の拡散層には、アルミニウムまたはホウ素の不純物が導入され、
前記n型の導電性を有する前記第1の拡散層または前記第2の拡散層には、リン、窒素またはヒ素の不純物が導入されている、
請求項1に記載の薄膜太陽電池。 - 前記第1の拡散層および前記第2の拡散層の前記表面における不純物密度が、1×1021〜3×1022atom/cm2である、請求項1に記載の薄膜太陽電池。
- 前記成膜層の膜厚方向に対する不純物密度の偏差が、前記成膜層の不純物密度の平均値の±20%以下である、請求項1に記載の薄膜太陽電池。
- 表面に金属膜が成膜されたガラス基板の前記金属膜上に、p型またはn型の導電性を有する半導体からなる第1の拡散層を成膜し、
前記第1の拡散層の上に、前記第1の拡散層よりも低い導電性を有する半導体からなる成膜層を成膜し、
前記成膜層の上に、前記第1の拡散層とは異なる極性を有する半導体からなる第2の拡散層を成膜し、
少なくとも3層からなる、厚み60μm以下の積層体を形成し、
前記積層体の上に、透明導電膜を成膜する、薄膜太陽電池の製造方法であって、
前記第1の拡散層、前記成膜層および前記第2の拡散層はシリコンからなり、かつ、体積分率で70%以上が多結晶の結晶相であると共に、少なくとも粒径が1nm〜20nmの範囲の結晶粒が層中に存在しており、
前記第1の拡散層および前記第2の拡散層は、その膜厚方向に沿って不純物密度が傾斜して分布しており、
前記第1の拡散層の前記成膜層との界面での不純物密度よりも、前記第1の拡散層の表面での不純物密度の方が高く、
前記第2の拡散層の前記成膜層との界面での不純物密度よりも、前記第2の拡散層の表面での不純物密度の方が高い、薄膜太陽電池の製造方法。 - 前記積層体はpin接合型を有し、
前記第1の拡散層はn型の導電性を有し、前記成膜層は真性に近い低い導電性を有し、前記第1の拡散層はp型の導電性を有するか、または
前記第1の拡散層はp型の導電性を有し、前記成膜層は真性に近い低い導電性を有し、前記第2の拡散層はn型の導電性を有する、
請求項8記載の薄膜太陽電池の製造方法。 - 表面に金属膜が成膜されたガラス基板を準備し、
前記金属膜の表面に、第1の導電型の不純物を導入し、
前記金属膜の表面に、スパッタリング法、蒸着法、またはCVD法により半導体層を成膜し、
前記半導体層の表面に、第2の導電型の不純物を導入し、
前記半導体層を熱処理して、前記第1の導電型の不純物および前記第2の導電型の不純物を活性化させる、
ことを含む、請求項8に記載の薄膜太陽電池の製造方法。 - 前記半導体層の成膜は、スパッタリング法による成膜である、請求項10に記載の薄膜太陽電池の製造方法。
- 前記第1の導電型の不純物の導入または前記第2の導電型の不純物の導入は、プラズマドーピング法による不純物の導入である、請求項10に記載の薄膜太陽電池の製造方法。
- 前記半導体層の熱処理は、大気圧プラズマ、フラッシュランプアニール、またはレーザーアニールによる急速加熱を含み、
前記第1の導電型の不純物および前記第2の導電型の不純物の活性化とともに、前記半導体層を結晶化させる、
請求項10記載の薄膜太陽電池の製造方法。
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