JP5579465B2 - 機能性フィルムの製造方法 - Google Patents
機能性フィルムの製造方法 Download PDFInfo
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- JP5579465B2 JP5579465B2 JP2010042509A JP2010042509A JP5579465B2 JP 5579465 B2 JP5579465 B2 JP 5579465B2 JP 2010042509 A JP2010042509 A JP 2010042509A JP 2010042509 A JP2010042509 A JP 2010042509A JP 5579465 B2 JP5579465 B2 JP 5579465B2
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D2252/00—Sheets
- B05D2252/02—Sheets of indefinite length
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
- B05D7/02—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber
- B05D7/04—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber to surfaces of films or sheets
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
- B32B37/24—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer not being coherent before laminating, e.g. made up from granular material sprinkled onto a substrate
- B32B2037/243—Coating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2305/00—Condition, form or state of the layers or laminate
- B32B2305/02—Cellular or porous
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2309/00—Parameters for the laminating or treatment process; Apparatus details
- B32B2309/60—In a particular environment
- B32B2309/68—Vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/0007—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding involving treatment or provisions in order to avoid deformation or air inclusion, e.g. to improve surface quality
- B32B37/003—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding involving treatment or provisions in order to avoid deformation or air inclusion, e.g. to improve surface quality to avoid air inclusion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/12—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by using adhesives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
- B32B37/16—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating
- B32B37/20—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating involving the assembly of continuous webs only
- B32B37/203—One or more of the layers being plastic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/10—Removing layers, or parts of layers, mechanically or chemically
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Physical Vapour Deposition (AREA)
- Laminated Bodies (AREA)
- Chemical Vapour Deposition (AREA)
Description
よる成膜を行なう装置で、基材ロール42から支持体Boを送り出し、長手方向に搬送しつつ無機膜14を成膜して、コーティング膜12と無機膜14とを成膜した機能性フィルム10を巻取り軸58によってロール状に巻き取る。
〔性能(水分透過率)評価基準〕
×:1.0×10−3g/m2・day以上
△:2.0×10−4g/m2・day以上、1.0×10−3g/m2・day未満
○:1.0×10−4g/m2・day以上、2.0×10−4g/m2・day未満
◎:1.0×10−4g/m2・day未満
Claims (8)
- フィルムロールから連続的に支持体を送り出し、該支持体上に、モノマー又はオリゴマーが含有された塗布液を塗布・乾燥し硬膜することでコーティング膜を成膜し、該コーティング膜の表面に1層以上で構成されるラミネートフィルムを付与してフィルムロールにして巻き取る工程と、
前記工程で巻き取られたフィルムロールを真空成膜装置の供給室に装填し、該フィルムロールを装填した該真空成膜装置の該供給室を減圧し、該フィルムロールから連続的にラミネートフィルムが付与された支持体を送り出し、前記ラミネートフィルムを剥離し、前記支持体のコーティング膜上に無機膜を成膜し、該支持体をフィルムロールに巻き取る工程と、
を備えることを特徴とする機能性フィルムの製造方法。 - 前記ラミネートフィルムは、
前記コーティング膜の硬膜後であって、コーティング膜面側に触れるパスローラよりも手前で付与することを特徴とする請求項1に記載の機能性フィルムの製造方法。 - 前記ラミネートフィルムは、
前記無機膜の成膜前であって、コーティング膜面側に触れるパスローラを全て通過した後で剥離することを特徴とする請求項1又は2に記載の機能性フィルムの製造方法。 - 前記ラミネートフィルムの厚みが10μm以上300μm以下であることを特徴とする請求項1〜3の何れか1に記載の機能性フィルムの製造方法。
- 前記無機膜を形成する厚みが10nm以上200nm以下であることを特徴とする請求項1〜4の何れか1に記載の機能性フィルムの製造方法。
- 前記ラミネートフィルムは、コーティング膜に対して1N/m以上5N/m以下の剥離力になる粘着材が使用されていることを特徴とする請求項1〜5の何れか1に記載の機能性フィルムの製造方法。
- 前記機能性フィルムの水分透過率が1.0×10-3g/m2・day未満であることを特徴とする請求項1〜6の何れか1に記載の機能性フィルムの製造方法。
- 前記モノマー又は前記オリゴマーが放射線硬化性である請求項1〜7の何れか1に記載の機能性フィルムの製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010042509A JP5579465B2 (ja) | 2009-02-26 | 2010-02-26 | 機能性フィルムの製造方法 |
Applications Claiming Priority (3)
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JP2009044574 | 2009-02-26 | ||
JP2009044574 | 2009-02-26 | ||
JP2010042509A JP5579465B2 (ja) | 2009-02-26 | 2010-02-26 | 機能性フィルムの製造方法 |
Publications (2)
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JP2010222702A JP2010222702A (ja) | 2010-10-07 |
JP5579465B2 true JP5579465B2 (ja) | 2014-08-27 |
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Family Applications (1)
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JP2010042509A Active JP5579465B2 (ja) | 2009-02-26 | 2010-02-26 | 機能性フィルムの製造方法 |
Country Status (4)
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---|---|
US (1) | US8540837B2 (ja) |
EP (1) | EP2228463B1 (ja) |
JP (1) | JP5579465B2 (ja) |
CN (1) | CN101818331B (ja) |
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CN101818331B (zh) | 2009-02-26 | 2013-10-09 | 富士胶片株式会社 | 功能性膜和用于制备功能性膜的方法 |
JP5274342B2 (ja) * | 2009-03-31 | 2013-08-28 | 富士フイルム株式会社 | 機能性フィルムの製造方法 |
JP5371680B2 (ja) * | 2009-10-15 | 2013-12-18 | 富士フイルム株式会社 | 機能性フィルムの製造方法 |
CN103154311B (zh) * | 2010-10-06 | 2014-12-17 | 株式会社爱发科 | 真空处理装置 |
JP5739178B2 (ja) * | 2011-01-31 | 2015-06-24 | 帝人デュポンフィルム株式会社 | 反射フィルム |
JP2012177179A (ja) * | 2011-02-28 | 2012-09-13 | Fujifilm Corp | 機能性フィルムの製造方法および製造装置 |
JP6011337B2 (ja) * | 2011-04-05 | 2016-10-19 | 東レフィルム加工株式会社 | ガスバリア性フィルム |
JPWO2015119109A1 (ja) * | 2014-02-04 | 2017-03-23 | コニカミノルタ株式会社 | ガスバリアーフィルムの製造方法及びガスバリアーフィルム |
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WO2007138837A1 (ja) | 2006-05-25 | 2007-12-06 | Konica Minolta Holdings, Inc. | ガスバリア性樹脂基材の製造方法及びガスバリア性樹脂基材の製造装置 |
JP5573158B2 (ja) | 2007-10-31 | 2014-08-20 | 住友金属鉱山株式会社 | フレキシブル透明導電フィルム及びこれを用いたフレキシブル機能性素子 |
JP2009221541A (ja) | 2008-03-17 | 2009-10-01 | Fujifilm Corp | 無機層の真空成膜法、バリア性積層体、デバイスおよび光学部材 |
JPWO2010024149A1 (ja) | 2008-08-27 | 2012-01-26 | コニカミノルタホールディングス株式会社 | 複合フィルム、ガスバリアフィルム及びその製造方法並びに有機エレクトロルミネッセンス素子 |
CN101818331B (zh) | 2009-02-26 | 2013-10-09 | 富士胶片株式会社 | 功能性膜和用于制备功能性膜的方法 |
JP5274342B2 (ja) | 2009-03-31 | 2013-08-28 | 富士フイルム株式会社 | 機能性フィルムの製造方法 |
JP5371680B2 (ja) | 2009-10-15 | 2013-12-18 | 富士フイルム株式会社 | 機能性フィルムの製造方法 |
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CN101818331B (zh) | 2013-10-09 |
JP2010222702A (ja) | 2010-10-07 |
EP2228463B1 (en) | 2017-11-29 |
US8540837B2 (en) | 2013-09-24 |
EP2228463A1 (en) | 2010-09-15 |
US20100215986A1 (en) | 2010-08-26 |
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