JP5578377B2 - 基板処理装置及び方法 - Google Patents
基板処理装置及び方法 Download PDFInfo
- Publication number
- JP5578377B2 JP5578377B2 JP2012166684A JP2012166684A JP5578377B2 JP 5578377 B2 JP5578377 B2 JP 5578377B2 JP 2012166684 A JP2012166684 A JP 2012166684A JP 2012166684 A JP2012166684 A JP 2012166684A JP 5578377 B2 JP5578377 B2 JP 5578377B2
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- Prior art keywords
- gantry
- substrate
- nozzle
- processing liquid
- inkjet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Liquid Crystal (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20110075771 | 2011-07-29 | ||
KR10-2011-0075771 | 2011-07-29 | ||
KR1020110104761A KR101223037B1 (ko) | 2011-07-29 | 2011-10-13 | 기판 처리 장치 및 방법 |
KR10-2011-0104761 | 2011-10-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013031840A JP2013031840A (ja) | 2013-02-14 |
JP5578377B2 true JP5578377B2 (ja) | 2014-08-27 |
Family
ID=47570560
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012166684A Active JP5578377B2 (ja) | 2011-07-29 | 2012-07-27 | 基板処理装置及び方法 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP5578377B2 (zh) |
CN (1) | CN102898032B (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104722444B (zh) * | 2013-12-23 | 2017-03-29 | 昆山国显光电有限公司 | 一种涂布装置 |
CN109116596B (zh) * | 2018-09-06 | 2024-04-05 | 武汉精测电子集团股份有限公司 | 用于连接显示面板上t-fpc和主fpc的半自动反折工装及设备 |
CN109759278B (zh) * | 2019-01-29 | 2021-02-26 | 苏州威格尔纳米科技有限公司 | 一种挤压式狭缝涂布封装设备 |
CN115921168B (zh) * | 2023-02-10 | 2023-10-03 | 东莞市华纬涂装设备有限公司 | 一种多工位喷涂机械手 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3236703B2 (ja) * | 1993-05-31 | 2001-12-10 | 平田機工株式会社 | 流体塗布装置 |
DE10224128A1 (de) * | 2002-05-29 | 2003-12-18 | Schmid Rhyner Ag Adliswil | Verfahren zum Auftrag von Beschichtungen auf Oberflächen |
JP4679895B2 (ja) * | 2003-12-17 | 2011-05-11 | 大日本印刷株式会社 | パターン形成装置、ヘッドユニット |
JP4573645B2 (ja) * | 2004-12-27 | 2010-11-04 | 大日本スクリーン製造株式会社 | 塗布装置 |
JP4980644B2 (ja) * | 2005-05-30 | 2012-07-18 | 東京エレクトロン株式会社 | 塗布方法及び塗布装置 |
KR100889308B1 (ko) * | 2007-11-21 | 2009-03-18 | 세메스 주식회사 | 스크라이빙 장치 및 방법 및 이를 이용한 기판 절단 장치 |
JP5417186B2 (ja) * | 2010-01-08 | 2014-02-12 | 大日本スクリーン製造株式会社 | 基板処理装置 |
-
2012
- 2012-07-27 JP JP2012166684A patent/JP5578377B2/ja active Active
- 2012-07-30 CN CN201210265320.0A patent/CN102898032B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
JP2013031840A (ja) | 2013-02-14 |
CN102898032A (zh) | 2013-01-30 |
CN102898032B (zh) | 2016-04-27 |
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