JP5570645B2 - 超小型非対称電界イオン移動度フィルタおよび検出システム - Google Patents
超小型非対称電界イオン移動度フィルタおよび検出システム Download PDFInfo
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- JP5570645B2 JP5570645B2 JP2013189978A JP2013189978A JP5570645B2 JP 5570645 B2 JP5570645 B2 JP 5570645B2 JP 2013189978 A JP2013189978 A JP 2013189978A JP 2013189978 A JP2013189978 A JP 2013189978A JP 5570645 B2 JP5570645 B2 JP 5570645B2
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- 238000001514 detection method Methods 0.000 title claims abstract description 26
- 150000002500 ions Chemical class 0.000 claims abstract description 131
- 230000005684 electric field Effects 0.000 claims description 11
- 230000000694 effects Effects 0.000 claims description 2
- 239000000758 substrate Substances 0.000 abstract description 17
- 230000000737 periodic effect Effects 0.000 abstract description 14
- 102100037819 Fas apoptotic inhibitory molecule 1 Human genes 0.000 description 18
- 101000878509 Homo sapiens Fas apoptotic inhibitory molecule 1 Proteins 0.000 description 18
- 229910052710 silicon Inorganic materials 0.000 description 13
- 239000010703 silicon Substances 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 125000006850 spacer group Chemical group 0.000 description 12
- 239000012530 fluid Substances 0.000 description 11
- 238000001228 spectrum Methods 0.000 description 10
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 8
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- 230000005855 radiation Effects 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- 238000011144 upstream manufacturing Methods 0.000 description 5
- 238000004891 communication Methods 0.000 description 4
- 238000010408 sweeping Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000002360 explosive Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- GNVRJGIVDSQCOP-UHFFFAOYSA-N n-ethyl-n-methylethanamine Chemical compound CCN(C)CC GNVRJGIVDSQCOP-UHFFFAOYSA-N 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000005297 pyrex Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 102000004310 Ion Channels Human genes 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 229960000074 biopharmaceutical Drugs 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- -1 ions 38c Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000004081 narcotic agent Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/0013—Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components
- H01J49/0018—Microminiaturised spectrometers, e.g. chip-integrated devices, Micro-Electro-Mechanical Systems [MEMS]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
- G01N27/622—Ion mobility spectrometry
- G01N27/624—Differential mobility spectrometry [DMS]; Field asymmetric-waveform ion mobility spectrometry [FAIMS]
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- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Biochemistry (AREA)
- Electrochemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measurement Of Radiation (AREA)
Description
他の実施形態は当業者には理解されるであろう。また他の実施形態は特許請求の範囲に含まれる。
14a ポンプ
16 サンプル入口
18 イオン化源
20(20a〜20e) フィルタ電極
22(22a〜22e) フィルタ電極
26 流路
30 電子コントローラ
32 検出器
32'〜32'''' 分割体
44 バイアス電圧
52 基板
54 基板
56a〜56h 閉じ込め電極
Claims (2)
- サンプルの入口および出口の間に延びた流路と、
前記流路において、対向する電極を有するイオン・フィルタと、
前記イオン・フィルタの電極に非対称波形を有する信号を印加して電界を形成し、前記イオン・フィルタを介してイオンを横方向に通過させる、電気コントローラと、
前記非対称波形のデューティサイクルを選択的に調整することで、前記電界におけるイオン移動度に従って、イオン種類を分離して選択する選択回路とを備え、
前記選択回路で選択されたイオン種類は、前記非対称波形の調整による既知の効果に基づいて検出および識別を行うために、前記イオン・フィルタを通過させられる、非対称電界イオン移動度フィルタ・システム。 - 請求項1において、前記信号は、DCバイアスなしに作用する、非対称電界イオン移動度フィルタ・システム。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/358,312 | 1999-07-21 | ||
US09/358,312 US6495823B1 (en) | 1999-07-21 | 1999-07-21 | Micromachined field asymmetric ion mobility filter and detection system |
Related Parent Applications (1)
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JP2011276841A Division JP5452578B2 (ja) | 1999-07-21 | 2011-12-19 | 超小型非対称電界イオン移動度フィルタおよび検出システム |
Related Child Applications (1)
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JP2014108783A Division JP5690963B2 (ja) | 1999-07-21 | 2014-05-27 | 超小型非対称電界イオン移動度フィルタおよび検出システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013257342A JP2013257342A (ja) | 2013-12-26 |
JP5570645B2 true JP5570645B2 (ja) | 2014-08-13 |
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JP2001512617A Expired - Lifetime JP5015395B2 (ja) | 1999-07-21 | 2000-06-29 | 超小型非対称電界イオン移動度フィルタおよび検出システム |
JP2010277847A Expired - Lifetime JP5281070B2 (ja) | 1999-07-21 | 2010-12-14 | 超小型非対称電界イオン移動度フィルタおよび検出システム |
JP2011276841A Expired - Lifetime JP5452578B2 (ja) | 1999-07-21 | 2011-12-19 | 超小型非対称電界イオン移動度フィルタおよび検出システム |
JP2013189978A Expired - Lifetime JP5570645B2 (ja) | 1999-07-21 | 2013-09-13 | 超小型非対称電界イオン移動度フィルタおよび検出システム |
JP2014108783A Expired - Lifetime JP5690963B2 (ja) | 1999-07-21 | 2014-05-27 | 超小型非対称電界イオン移動度フィルタおよび検出システム |
Family Applications Before (3)
Application Number | Title | Priority Date | Filing Date |
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JP2001512617A Expired - Lifetime JP5015395B2 (ja) | 1999-07-21 | 2000-06-29 | 超小型非対称電界イオン移動度フィルタおよび検出システム |
JP2010277847A Expired - Lifetime JP5281070B2 (ja) | 1999-07-21 | 2010-12-14 | 超小型非対称電界イオン移動度フィルタおよび検出システム |
JP2011276841A Expired - Lifetime JP5452578B2 (ja) | 1999-07-21 | 2011-12-19 | 超小型非対称電界イオン移動度フィルタおよび検出システム |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
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JP2014108783A Expired - Lifetime JP5690963B2 (ja) | 1999-07-21 | 2014-05-27 | 超小型非対称電界イオン移動度フィルタおよび検出システム |
Country Status (8)
Country | Link |
---|---|
US (1) | US6495823B1 (ja) |
EP (1) | EP1203397B1 (ja) |
JP (5) | JP5015395B2 (ja) |
CN (1) | CN100358081C (ja) |
AT (1) | ATE520145T1 (ja) |
AU (1) | AU6058900A (ja) |
CA (1) | CA2379502A1 (ja) |
WO (1) | WO2001008197A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022102172A1 (ja) * | 2020-11-12 | 2022-05-19 | シャープ株式会社 | 分析装置 |
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Cited By (2)
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WO2022102172A1 (ja) * | 2020-11-12 | 2022-05-19 | シャープ株式会社 | 分析装置 |
JP7352755B2 (ja) | 2020-11-12 | 2023-09-28 | シャープ株式会社 | 分析装置 |
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EP1203397B1 (en) | 2011-08-10 |
JP5281070B2 (ja) | 2013-09-04 |
WO2001008197A9 (en) | 2002-07-25 |
JP2011077054A (ja) | 2011-04-14 |
CN100358081C (zh) | 2007-12-26 |
WO2001008197A1 (en) | 2001-02-01 |
US6495823B1 (en) | 2002-12-17 |
CA2379502A1 (en) | 2001-02-01 |
JP2012069531A (ja) | 2012-04-05 |
JP2013257342A (ja) | 2013-12-26 |
CN1361922A (zh) | 2002-07-31 |
JP5452578B2 (ja) | 2014-03-26 |
AU6058900A (en) | 2001-02-13 |
JP2014194427A (ja) | 2014-10-09 |
EP1203397A4 (en) | 2005-12-28 |
ATE520145T1 (de) | 2011-08-15 |
JP5015395B2 (ja) | 2012-08-29 |
EP1203397A1 (en) | 2002-05-08 |
JP5690963B2 (ja) | 2015-03-25 |
JP2003505846A (ja) | 2003-02-12 |
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