ATE520145T1 - Mikromechanisch hergestellter ionenmobilitätsfilter mit asymetrischem feld und messvorrichtung dafür - Google Patents

Mikromechanisch hergestellter ionenmobilitätsfilter mit asymetrischem feld und messvorrichtung dafür

Info

Publication number
ATE520145T1
ATE520145T1 AT00946904T AT00946904T ATE520145T1 AT E520145 T1 ATE520145 T1 AT E520145T1 AT 00946904 T AT00946904 T AT 00946904T AT 00946904 T AT00946904 T AT 00946904T AT E520145 T1 ATE520145 T1 AT E520145T1
Authority
AT
Austria
Prior art keywords
filter
ion mobility
asymetric
measuring device
field
Prior art date
Application number
AT00946904T
Other languages
English (en)
Inventor
Raanan A Miller
Erkinjon Nazarov
Original Assignee
Draper Lab Charles S
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Draper Lab Charles S filed Critical Draper Lab Charles S
Application granted granted Critical
Publication of ATE520145T1 publication Critical patent/ATE520145T1/de

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/0013Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components
    • H01J49/0018Microminiaturised spectrometers, e.g. chip-integrated devices, Micro-Electro-Mechanical Systems [MEMS]
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/622Ion mobility spectrometry
    • G01N27/624Differential mobility spectrometry [DMS]; Field asymmetric-waveform ion mobility spectrometry [FAIMS]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Biochemistry (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measurement Of Radiation (AREA)
AT00946904T 1999-07-21 2000-06-29 Mikromechanisch hergestellter ionenmobilitätsfilter mit asymetrischem feld und messvorrichtung dafür ATE520145T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/358,312 US6495823B1 (en) 1999-07-21 1999-07-21 Micromachined field asymmetric ion mobility filter and detection system
PCT/US2000/017971 WO2001008197A1 (en) 1999-07-21 2000-06-29 Micromachined field asymmetric ion mobility filter and detection system

Publications (1)

Publication Number Publication Date
ATE520145T1 true ATE520145T1 (de) 2011-08-15

Family

ID=23409170

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00946904T ATE520145T1 (de) 1999-07-21 2000-06-29 Mikromechanisch hergestellter ionenmobilitätsfilter mit asymetrischem feld und messvorrichtung dafür

Country Status (8)

Country Link
US (1) US6495823B1 (de)
EP (1) EP1203397B1 (de)
JP (5) JP5015395B2 (de)
CN (1) CN100358081C (de)
AT (1) ATE520145T1 (de)
AU (1) AU6058900A (de)
CA (1) CA2379502A1 (de)
WO (1) WO2001008197A1 (de)

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JP2012069531A (ja) 2012-04-05
JP2011077054A (ja) 2011-04-14
CN100358081C (zh) 2007-12-26
JP5281070B2 (ja) 2013-09-04
US6495823B1 (en) 2002-12-17
EP1203397A1 (de) 2002-05-08
WO2001008197A9 (en) 2002-07-25
CA2379502A1 (en) 2001-02-01
EP1203397A4 (de) 2005-12-28
JP5452578B2 (ja) 2014-03-26
AU6058900A (en) 2001-02-13
EP1203397B1 (de) 2011-08-10
JP2003505846A (ja) 2003-02-12
JP5015395B2 (ja) 2012-08-29
JP5690963B2 (ja) 2015-03-25
JP5570645B2 (ja) 2014-08-13
WO2001008197A1 (en) 2001-02-01
JP2013257342A (ja) 2013-12-26
CN1361922A (zh) 2002-07-31

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