DE69227825T2 - Vierpolige Elektrode und Herstellungsverfahren derselben. - Google Patents
Vierpolige Elektrode und Herstellungsverfahren derselben.Info
- Publication number
- DE69227825T2 DE69227825T2 DE1992627825 DE69227825T DE69227825T2 DE 69227825 T2 DE69227825 T2 DE 69227825T2 DE 1992627825 DE1992627825 DE 1992627825 DE 69227825 T DE69227825 T DE 69227825T DE 69227825 T2 DE69227825 T2 DE 69227825T2
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- same
- pole electrode
- pole
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
- H01J49/4205—Device types
- H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
- H01J49/4215—Quadrupole mass filters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/06—Electron- or ion-optical arrangements
- H01J49/068—Mounting, supporting, spacing, or insulating electrodes
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3231658A JP3056847B2 (ja) | 1991-09-11 | 1991-09-11 | 四重極電極およびその製造方法 |
JP3233055A JPH0574342A (ja) | 1991-09-12 | 1991-09-12 | 四重極電極の製造方法 |
PCT/JP1992/001141 WO1993005532A1 (en) | 1991-09-11 | 1992-09-07 | Quadrupole electrode and manufacture thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69227825D1 DE69227825D1 (de) | 1999-01-21 |
DE69227825T2 true DE69227825T2 (de) | 1999-08-05 |
Family
ID=26530009
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1992627825 Expired - Fee Related DE69227825T2 (de) | 1991-09-11 | 1992-09-07 | Vierpolige Elektrode und Herstellungsverfahren derselben. |
Country Status (5)
Country | Link |
---|---|
US (1) | US5373157A (de) |
EP (1) | EP0556411B1 (de) |
CA (1) | CA2085729C (de) |
DE (1) | DE69227825T2 (de) |
WO (1) | WO1993005532A1 (de) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5298745A (en) * | 1992-12-02 | 1994-03-29 | Hewlett-Packard Company | Multilayer multipole |
US5616485A (en) * | 1993-12-23 | 1997-04-01 | Cangene Corporation | Streptomyces proteases and improved streptomyces strains for expression of peptides and polypeptides |
US5525084A (en) * | 1994-03-25 | 1996-06-11 | Hewlett Packard Company | Universal quadrupole and method of manufacture |
GB9506972D0 (en) * | 1995-04-04 | 1995-05-24 | Univ Liverpool | Improvements in and relating to quadrupole mass |
US5559327A (en) * | 1995-07-27 | 1996-09-24 | Bear Instruments, Inc. | Ion filter and mass spectrometer using arcuate hyperbolic quadrapoles |
US5852302A (en) * | 1996-01-30 | 1998-12-22 | Shimadzu Corporation | Cylindrical multiple-pole mass filter with CVD-deposited electrode layers |
US5852270A (en) * | 1996-07-16 | 1998-12-22 | Leybold Inficon Inc. | Method of manufacturing a miniature quadrupole using electrode-discharge machining |
FR2762713A1 (fr) * | 1997-04-25 | 1998-10-30 | Commissariat Energie Atomique | Microdispositif pour generer un champ multipolaire, en particulier pour filtrer ou devier ou focaliser des particules chargees |
US6239429B1 (en) | 1998-10-26 | 2001-05-29 | Mks Instruments, Inc. | Quadrupole mass spectrometer assembly |
US7098449B1 (en) | 1999-07-21 | 2006-08-29 | The Charles Stark Draper Laboratory, Inc. | Spectrometer chip assembly |
US6815668B2 (en) * | 1999-07-21 | 2004-11-09 | The Charles Stark Draper Laboratory, Inc. | Method and apparatus for chromatography-high field asymmetric waveform ion mobility spectrometry |
US6806463B2 (en) | 1999-07-21 | 2004-10-19 | The Charles Stark Draper Laboratory, Inc. | Micromachined field asymmetric ion mobility filter and detection system |
US6690004B2 (en) * | 1999-07-21 | 2004-02-10 | The Charles Stark Draper Laboratory, Inc. | Method and apparatus for electrospray-augmented high field asymmetric ion mobility spectrometry |
US6815669B1 (en) * | 1999-07-21 | 2004-11-09 | The Charles Stark Draper Laboratory, Inc. | Longitudinal field driven ion mobility filter and detection system |
US6495823B1 (en) | 1999-07-21 | 2002-12-17 | The Charles Stark Draper Laboratory, Inc. | Micromachined field asymmetric ion mobility filter and detection system |
US6410924B1 (en) * | 1999-11-16 | 2002-06-25 | Schlumberger Technologies, Inc. | Energy filtered focused ion beam column |
EP1137046A2 (de) * | 2000-03-13 | 2001-09-26 | Agilent Technologies Inc. a Delaware Corporation | Herstellung von Hochpräzisionsmultipolen und -filtern |
US6441370B1 (en) | 2000-04-11 | 2002-08-27 | Thermo Finnigan Llc | Linear multipole rod assembly for mass spectrometers |
US6528798B1 (en) * | 2000-11-21 | 2003-03-04 | Schlumberger Technologies Inc. | Technique for manufacturing an electrostatic element for steering a charged particle beam |
WO2003005016A1 (en) * | 2001-06-30 | 2003-01-16 | Sionex Corporation | System for collection of data and identification of unknown ion species in an electric field |
US7274015B2 (en) * | 2001-08-08 | 2007-09-25 | Sionex Corporation | Capacitive discharge plasma ion source |
US7122794B1 (en) | 2002-02-21 | 2006-10-17 | Sionex Corporation | Systems and methods for ion mobility control |
US6936815B2 (en) * | 2003-06-05 | 2005-08-30 | Thermo Finnigan Llc | Integrated shield in multipole rod assemblies for mass spectrometers |
WO2005067582A2 (en) | 2004-01-13 | 2005-07-28 | Sionex Corporation | Methods and apparatus for enhanced sample identification based on combined analytical techniques |
WO2007014303A2 (en) | 2005-07-26 | 2007-02-01 | Sionex Corporation | Ultra compact ion mobility based analyzer system and method |
WO2008070204A2 (en) * | 2006-06-09 | 2008-06-12 | Ion Applications, Inc. | Miniaturized ion mobility spectrometer |
GB2446184B (en) * | 2007-01-31 | 2011-07-27 | Microsaic Systems Ltd | High performance micro-fabricated quadrupole lens |
US8389950B2 (en) * | 2007-01-31 | 2013-03-05 | Microsaic Systems Plc | High performance micro-fabricated quadrupole lens |
CA2685169C (en) | 2007-02-01 | 2016-12-13 | Sionex Corporation | Differential mobility spectrometer pre-filter assembly for a mass spectrometer |
GB0816258D0 (en) * | 2008-09-05 | 2008-10-15 | Ulive Entpr Ltd | Process |
GB2484898A (en) * | 2009-11-04 | 2012-05-02 | Bruker Daltonik Gmbh | Multipole rod systems made by wire erosion |
WO2017038168A1 (ja) * | 2015-09-01 | 2017-03-09 | 株式会社島津製作所 | ゲート電極及びイオン移動度分析装置 |
GB201720884D0 (en) * | 2017-12-15 | 2018-01-31 | Shimadzu Corp | Multipole device and manufacturing method |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3553451A (en) * | 1968-01-30 | 1971-01-05 | Uti | Quadrupole in which the pole electrodes comprise metallic rods whose mounting surfaces coincide with those of the mounting means |
GB1263762A (en) * | 1969-09-08 | 1972-02-16 | Ronald David Smith | Improvements in or relating to mass spectrometers |
DE2215763C3 (de) * | 1972-03-30 | 1978-06-08 | Geoffrey William Bellingdon Cesham Buckinghamshire Ball (Grossbritannien) | Verfahren zur Herstellung eines Körpers für ein Ionenfilter eines Massenspektrometer |
DE2625660A1 (de) * | 1976-06-08 | 1977-12-22 | Leybold Heraeus Gmbh & Co Kg | Verfahren zur herstellung eines ionenfilters fuer einen massenanalysator |
JPH0646560B2 (ja) * | 1984-06-01 | 1994-06-15 | 日電アネルバ株式会社 | 質量分析計 |
DE3784138T2 (de) * | 1986-11-19 | 1993-06-03 | Hewlett Packard Co | Quarz-quadrupol fuer massenfilter. |
US4885500A (en) * | 1986-11-19 | 1989-12-05 | Hewlett-Packard Company | Quartz quadrupole for mass filter |
JP2757424B2 (ja) * | 1989-02-20 | 1998-05-25 | 株式会社島津製作所 | 多重極電極およびその製造方法 |
JP2812405B2 (ja) * | 1991-03-15 | 1998-10-22 | 信越半導体株式会社 | 半導体基板の製造方法 |
-
1992
- 1992-09-07 CA CA 2085729 patent/CA2085729C/en not_active Expired - Fee Related
- 1992-09-07 DE DE1992627825 patent/DE69227825T2/de not_active Expired - Fee Related
- 1992-09-07 US US07/965,258 patent/US5373157A/en not_active Expired - Fee Related
- 1992-09-07 WO PCT/JP1992/001141 patent/WO1993005532A1/ja active IP Right Grant
- 1992-09-07 EP EP92918881A patent/EP0556411B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CA2085729A1 (en) | 1993-03-12 |
CA2085729C (en) | 1998-09-29 |
WO1993005532A1 (en) | 1993-03-18 |
EP0556411B1 (de) | 1998-12-09 |
EP0556411A4 (de) | 1995-02-01 |
DE69227825D1 (de) | 1999-01-21 |
US5373157A (en) | 1994-12-13 |
EP0556411A1 (de) | 1993-08-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |