JP5568792B2 - 多孔体の製造方法 - Google Patents
多孔体の製造方法 Download PDFInfo
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- JP5568792B2 JP5568792B2 JP2012069906A JP2012069906A JP5568792B2 JP 5568792 B2 JP5568792 B2 JP 5568792B2 JP 2012069906 A JP2012069906 A JP 2012069906A JP 2012069906 A JP2012069906 A JP 2012069906A JP 5568792 B2 JP5568792 B2 JP 5568792B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 16
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 33
- 229910052799 carbon Inorganic materials 0.000 claims description 31
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 26
- 239000002184 metal Substances 0.000 claims description 25
- 229910052751 metal Inorganic materials 0.000 claims description 25
- 239000000843 powder Substances 0.000 claims description 17
- 239000011230 binding agent Substances 0.000 claims description 14
- 239000012298 atmosphere Substances 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 8
- 239000011812 mixed powder Substances 0.000 claims description 7
- 239000011856 silicon-based particle Substances 0.000 claims description 6
- 239000011261 inert gas Substances 0.000 claims description 4
- 239000011863 silicon-based powder Substances 0.000 claims description 4
- 238000003825 pressing Methods 0.000 claims 1
- 239000002245 particle Substances 0.000 description 50
- 229910052710 silicon Inorganic materials 0.000 description 23
- 239000010703 silicon Substances 0.000 description 23
- 238000010438 heat treatment Methods 0.000 description 10
- 235000012431 wafers Nutrition 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 7
- 239000011521 glass Substances 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 229910021642 ultra pure water Inorganic materials 0.000 description 3
- 239000012498 ultrapure water Substances 0.000 description 3
- 238000007731 hot pressing Methods 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000004506 ultrasonic cleaning Methods 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- 238000007088 Archimedes method Methods 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000004088 foaming agent Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Landscapes
- Porous Artificial Stone Or Porous Ceramic Products (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Ceramic Products (AREA)
Description
[実施例1〜8、比較例1〜3]
市販のSiC粉末(粒径(D50)135[μm]、純度99[%])、Si粉末(粒径(D50)45[μm]、純度99.9[%])及びフェノール粉末(ノボラック型、残留炭素率50重量部)を表1に示されている割合で混合し、1時間にわたり乾式混合する。その後、20[kg/cm2]の圧力をかけながら150[℃]で1時間にわたり熱プレスを行った。熱プレス後、12時間−150℃で硬化処理を行い、その後、表1の温度で熱処理(Ar雰囲気)を行った。こうして得られた多孔体をパーティクルを測定するために□30[mm]×t3[mm]形状に加工した。加工後の洗浄はメタノールによる超音波洗浄(40[kHz])を15分間行った後、炭化水素系洗剤に30分間浸漬、超純水に10分間浸漬した。さらに超純水による超音波洗浄(40[kHz])を10分間にわたって行い、最後に超純水でシャワーを行った。その後、乾燥した後、測定を行った。
[比較例4]
上記実施例と同様に成形したものを、熱処理において、700[℃]まで大気中にて加熱し、バインダー起因のカーボンを除去した後に、Ar雰囲気で加熱した。その他の工程は、上記実施例と同様に行った。
Claims (1)
- 100重量部のSiC粉末と、5重量部以下のカーボン粉末または5重量部以下のカーボンを含む有機系バインダーと、純度が99.9%以上である20重量部以上の金属シリコン粉末との混合粉末をプレス成形して成形体とする工程と、
前記成形体を真空中または不活性ガス雰囲気中、1200〜1350[℃]で熱処理することにより金属シリコンの粒子同士をネッキングさせる工程を含むことを特徴とする多孔体の製造方法。
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JP2012069906A JP5568792B2 (ja) | 2012-03-26 | 2012-03-26 | 多孔体の製造方法 |
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JP2012069906A JP5568792B2 (ja) | 2012-03-26 | 2012-03-26 | 多孔体の製造方法 |
Related Parent Applications (1)
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JP2007201515A Division JP2009035452A (ja) | 2007-08-02 | 2007-08-02 | 多孔体及びその製造方法 |
Publications (2)
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JP2012162452A JP2012162452A (ja) | 2012-08-30 |
JP5568792B2 true JP5568792B2 (ja) | 2014-08-13 |
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JP2012069906A Active JP5568792B2 (ja) | 2012-03-26 | 2012-03-26 | 多孔体の製造方法 |
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Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR102192815B1 (ko) | 2019-03-21 | 2020-12-18 | 에스케이씨 주식회사 | 잉곳의 제조방법, 잉곳 성장용 원료물질 및 이의 제조방법 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5641875A (en) * | 1979-09-06 | 1981-04-18 | Toshiba Ceramics Co | Mechanical sliding member and its manufacture |
EP0767765B1 (de) * | 1995-04-28 | 2000-03-08 | Didier-Werke Ag | SiC-FORMKÖRPER |
JP2001158680A (ja) * | 1999-11-30 | 2001-06-12 | Ibiden Co Ltd | 炭化珪素・金属複合体及びその製造方法、並びにウェハ研磨装置用部材及びウェハ研磨装置用テーブル |
JP2002154876A (ja) * | 2000-11-17 | 2002-05-28 | Ngk Insulators Ltd | ハニカム構造体及びその製造方法 |
JP4111676B2 (ja) * | 2001-01-29 | 2008-07-02 | イビデン株式会社 | 多孔質炭化珪素焼結体の製造方法 |
JP2004167482A (ja) * | 2002-11-08 | 2004-06-17 | Ibiden Co Ltd | 排気ガス浄化用ハニカムフィルタおよびその製造方法 |
JP4868885B2 (ja) * | 2005-05-24 | 2012-02-01 | 京セラ株式会社 | 珪素−炭化珪素複合部材の製造方法 |
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