JP5562413B2 - 薄膜太陽電池の製造方法 - Google Patents
薄膜太陽電池の製造方法 Download PDFInfo
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- JP5562413B2 JP5562413B2 JP2012511717A JP2012511717A JP5562413B2 JP 5562413 B2 JP5562413 B2 JP 5562413B2 JP 2012511717 A JP2012511717 A JP 2012511717A JP 2012511717 A JP2012511717 A JP 2012511717A JP 5562413 B2 JP5562413 B2 JP 5562413B2
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Description
まず、本実施形態で使用する薄膜形成装置の基本構造について説明する。図1に示すように、薄膜形成装置Sは、チャンバー1と、チャンバー1内に位置している第1電極6と、チャンバー1内に第1電極6と離間して位置して、第1原料ガスを供給できる第1供給部4aおよび第2原料ガスを供給できる第2供給部4bを備えた第2電極2と、第1供給部4aに接続されて第1原料ガスが導入される導入経路と、この導入経路内に配置されている加熱体11と、第1供給部4aからのガス供給、第2供給部4bからのガス供給および加熱体11の加熱を制御する制御手段(不図示)とを備えている。
1) SiH4+SiH2→Si2H6
2) Si2H6+SiH2→Si3H8
・・・ 以下、同様なSiH2挿入反応が続く・・・
といった、SiH2挿入反応によって高分子重合体が生成していく反応である。
次に、薄膜太陽電池の製造方法の一例について説明する。基材10の上に、シリコン結晶相を有する少なくとも1層の光活性層を含む光電変換層を備えた薄膜太陽電池を製造するには、以下に示す工程が必要である。
次に、製造方法の変形例について説明する。図5に示すように、薄膜形成装置Sにおいて、加熱体11が占有する領域A1を基材10の薄膜形成領域A2よりも広くしてもよい。上記構成とすることによって、加熱体11で加熱された第1原料ガスがその温度を維持しつつ基材10上に均一に供給される。領域A1が領域A2より狭い場合、加熱体11の外周領域においては加熱体11の空間占有密度が小さいため、第1原料ガスの効率的な加熱が難しい。さらに、温度上昇した第1原料ガスが加熱体11の領域外にある第1原料ガスおよび第1導入経路3aの内壁に接触することよって熱を奪われ、温度が低下することから、十分なガスヒーティング効果が加熱体11の外周領域に近くなるほど得られにくい。
2 :第2電極
4 :供給部
4a :第1供給部
4b :第2供給部
5 :高周波電源
6 :第1電極
10 :基材
11 :加熱体
31 :第1導電層
32 :第1光電変換層
33 :第2光電変換層
34 :第2導電層
35 :第3導電層
S :薄膜形成装置
Claims (12)
- 基材の上に、結晶シリコンを有する少なくとも1層の光活性層を含む光電変換層を備えた薄膜太陽電池を製造する薄膜太陽電池の製造方法であって、
アノード用の第1電極と、該第1電極に対向して配置されて高周波電力が印加されるカソード用の第2電極とを備えているチャンバー内に、前記第1電極と前記第2電極との間に前記基材を配置する基材準備工程と、
前記チャンバー内のガス圧が1000Pa以上になるように、シリコンを含むシリコン系ガスと、加熱体を用いて加熱した、前記シリコン系ガスの25倍以上58倍以下の流量比の水素ガスとを、前記第1電極と前記第2電極との間に供給して、前記第2電極への前記高周波電力の印加によって前記第1電極と前記第2電極との間に発生させたプラズマでもって、前記光活性層を前記基材の上に形成する光活性層形成工程とを含み、
前記光活性層形成工程の後に、前記水素ガスおよび前記シリコン系ガスの供給を停止して、前記チャンバー内を排気する排気工程と、前記加熱体を冷却する冷却工程とをさらに有することを特徴とする薄膜太陽電池の製造方法。 - 前記シリコン系ガスとして、シラン、ジシラン、四フッ化珪素、六フッ化二珪素およびジクロロシランから選択される1種以上のガスを用いることを特徴とする請求項1に記載の薄膜太陽電池の製造方法。
- 前記基材準備工程において、前記基材の表面と該表面に対向させる前記第2電極の表面との距離が5mm以上15mm以下となるように前記基材を配置することを特徴とする請求項1または2に記載の薄膜太陽電池の製造方法。
- 前記加熱体として、加熱触媒体または抵抗加熱ヒーターを用いることを特徴とする請求項1乃至3のいずれかに記載の薄膜太陽電池の製造方法。
- 前記加熱体を800℃以上に加熱することを特徴とする請求項1乃至4のいずれかに記載の薄膜太陽電池の製造方法。
- 前記光活性層形成工程において、前記高周波電力のパワー密度を0.5W/cm2以上1.7W/cm2以下に設定することを特徴とする請求項1乃至5のいずれかに記載の薄膜太陽電池の製造方法。
- 前記光活性層形成工程において、前記高周波電力の周波数を13.56MHz以上40
.68MHz以下に設定することを特徴とする請求項1乃至6のいずれかに記載の薄膜太陽電池の製造方法。 - 前記光活性層形成工程において、前記シリコン系ガスに対する前記水素ガスの流量比が工程開始時よりも工程途中で小さくなるように、工程途中で前記流量比を調整することを特徴とする請求項1乃至7のいずれかに記載の薄膜太陽電池の製造方法。
- 前記水素ガスを前記シリコン系ガスよりも先に前記第1電極と前記第2電極との間に供給することを特徴とする請求項1乃至8のいずれかに記載の薄膜太陽電池の製造方法。
- 前記光活性層形成工程の後に、前記基材を180℃以上220℃以下の温度で加熱することを特徴とする請求項1乃至9のいずれかに記載の薄膜太陽電池の製造方法。
- 前記排気工程において、前記シリコン系ガスの供給の停止を前記水素ガスの供給の停止よりも先に行なうことを特徴とする請求項1乃至10のいずれかに記載の薄膜太陽電池の製造方法。
- 前記冷却工程において、前記基材を前記チャンバーの外に出すことを特徴とする請求項1乃至11のいずれかに記載の薄膜太陽電池の製造方法。
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