JP5514356B2 - 光硬化性樹脂組成物、プリント配線板、及び光硬化性樹脂組成物の製造方法 - Google Patents
光硬化性樹脂組成物、プリント配線板、及び光硬化性樹脂組成物の製造方法 Download PDFInfo
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- JP5514356B2 JP5514356B2 JP2013137427A JP2013137427A JP5514356B2 JP 5514356 B2 JP5514356 B2 JP 5514356B2 JP 2013137427 A JP2013137427 A JP 2013137427A JP 2013137427 A JP2013137427 A JP 2013137427A JP 5514356 B2 JP5514356 B2 JP 5514356B2
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- 230000007613 environmental effect Effects 0.000 description 1
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- 125000005745 ethoxymethyl group Chemical group [H]C([H])([H])C([H])([H])OC([H])([H])* 0.000 description 1
- ORBFAMHUKZLWSD-UHFFFAOYSA-N ethyl 2-(dimethylamino)benzoate Chemical compound CCOC(=O)C1=CC=CC=C1N(C)C ORBFAMHUKZLWSD-UHFFFAOYSA-N 0.000 description 1
- XYIBRDXRRQCHLP-UHFFFAOYSA-N ethyl acetoacetate Chemical compound CCOC(=O)CC(C)=O XYIBRDXRRQCHLP-UHFFFAOYSA-N 0.000 description 1
- AOIISAGZKQIFKC-UHFFFAOYSA-N ethyl carbamate 1-ethylpyrrole-2,5-dione 3,5,5-trimethylcyclohex-2-en-1-one Chemical compound C(C)N1C(C=CC1=O)=O.C(C)N1C(C=CC1=O)=O.NC(=O)OCC.NC(=O)OCC.O=C1C=C(CC(C)(C)C1)C AOIISAGZKQIFKC-UHFFFAOYSA-N 0.000 description 1
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- 125000000623 heterocyclic group Chemical group 0.000 description 1
- RRAMGCGOFNQTLD-UHFFFAOYSA-N hexamethylene diisocyanate Chemical compound O=C=NCCCCCCN=C=O RRAMGCGOFNQTLD-UHFFFAOYSA-N 0.000 description 1
- ACCCMOQWYVYDOT-UHFFFAOYSA-N hexane-1,1-diol Chemical compound CCCCCC(O)O ACCCMOQWYVYDOT-UHFFFAOYSA-N 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- WJRBRSLFGCUECM-UHFFFAOYSA-N hydantoin Chemical compound O=C1CNC(=O)N1 WJRBRSLFGCUECM-UHFFFAOYSA-N 0.000 description 1
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- NWVVVBRKAWDGAB-UHFFFAOYSA-N hydroquinone methyl ether Natural products COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 1
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- 239000011777 magnesium Substances 0.000 description 1
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- 239000000347 magnesium hydroxide Substances 0.000 description 1
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- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
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- GVALZJMUIHGIMD-UHFFFAOYSA-H magnesium phosphate Chemical compound [Mg+2].[Mg+2].[Mg+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O GVALZJMUIHGIMD-UHFFFAOYSA-H 0.000 description 1
- 239000004137 magnesium phosphate Substances 0.000 description 1
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- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
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- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
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- WZESLRDFSNLECD-UHFFFAOYSA-N phenyl prop-2-eneperoxoate Chemical compound C=CC(=O)OOC1=CC=CC=C1 WZESLRDFSNLECD-UHFFFAOYSA-N 0.000 description 1
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 description 1
- CCDXIADKBDSBJU-UHFFFAOYSA-N phenylmethanetriol Chemical compound OC(O)(O)C1=CC=CC=C1 CCDXIADKBDSBJU-UHFFFAOYSA-N 0.000 description 1
- 150000003018 phosphorus compounds Chemical class 0.000 description 1
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- 238000000206 photolithography Methods 0.000 description 1
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- 230000036211 photosensitivity Effects 0.000 description 1
- XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 description 1
- 229920000779 poly(divinylbenzene) Polymers 0.000 description 1
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- 229920002647 polyamide Polymers 0.000 description 1
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- 239000004814 polyurethane Substances 0.000 description 1
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- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 239000005033 polyvinylidene chloride Substances 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
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- 229910052700 potassium Inorganic materials 0.000 description 1
- 235000015497 potassium bicarbonate Nutrition 0.000 description 1
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- TYJJADVDDVDEDZ-UHFFFAOYSA-M potassium hydrogencarbonate Chemical compound [K+].OC([O-])=O TYJJADVDDVDEDZ-UHFFFAOYSA-M 0.000 description 1
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- SCUZVMOVTVSBLE-UHFFFAOYSA-N prop-2-enenitrile;styrene Chemical compound C=CC#N.C=CC1=CC=CC=C1 SCUZVMOVTVSBLE-UHFFFAOYSA-N 0.000 description 1
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- QCTJRYGLPAFRMS-UHFFFAOYSA-N prop-2-enoic acid;1,3,5-triazine-2,4,6-triamine Chemical class OC(=O)C=C.NC1=NC(N)=NC(N)=N1 QCTJRYGLPAFRMS-UHFFFAOYSA-N 0.000 description 1
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- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 125000004076 pyridyl group Chemical group 0.000 description 1
- 125000005551 pyridylene group Chemical group 0.000 description 1
- FYNROBRQIVCIQF-UHFFFAOYSA-N pyrrolo[3,2-b]pyrrole-5,6-dione Chemical compound C1=CN=C2C(=O)C(=O)N=C21 FYNROBRQIVCIQF-UHFFFAOYSA-N 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
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- 239000002893 slag Substances 0.000 description 1
- 239000010802 sludge Substances 0.000 description 1
- 239000001488 sodium phosphate Substances 0.000 description 1
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- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 229910052911 sodium silicate Inorganic materials 0.000 description 1
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- 229960002317 succinimide Drugs 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
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- 238000009864 tensile test Methods 0.000 description 1
- WMXCDAVJEZZYLT-UHFFFAOYSA-N tert-butylthiol Chemical compound CC(C)(C)S WMXCDAVJEZZYLT-UHFFFAOYSA-N 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- 239000012974 tin catalyst Substances 0.000 description 1
- KSBAEPSJVUENNK-UHFFFAOYSA-L tin(ii) 2-ethylhexanoate Chemical compound [Sn+2].CCCCC(CC)C([O-])=O.CCCCC(CC)C([O-])=O KSBAEPSJVUENNK-UHFFFAOYSA-L 0.000 description 1
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
- RUELTTOHQODFPA-UHFFFAOYSA-N toluene 2,6-diisocyanate Chemical compound CC1=C(N=C=O)C=CC=C1N=C=O RUELTTOHQODFPA-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- CENHPXAQKISCGD-UHFFFAOYSA-N trioxathietane 4,4-dioxide Chemical compound O=S1(=O)OOO1 CENHPXAQKISCGD-UHFFFAOYSA-N 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- 239000006097 ultraviolet radiation absorber Substances 0.000 description 1
- UKRDPEFKFJNXQM-UHFFFAOYSA-N vinylsilane Chemical compound [SiH3]C=C UKRDPEFKFJNXQM-UHFFFAOYSA-N 0.000 description 1
- 239000010456 wollastonite Substances 0.000 description 1
- 229910052882 wollastonite Inorganic materials 0.000 description 1
- 150000007964 xanthones Chemical class 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 125000002256 xylenyl group Chemical class C1(C(C=CC=C1)C)(C)* 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
- PAPBSGBWRJIAAV-UHFFFAOYSA-N ε-Caprolactone Chemical compound O=C1CCCCCO1 PAPBSGBWRJIAAV-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/44—Polymerisation in the presence of compounding ingredients, e.g. plasticisers, dyestuffs, fillers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0047—Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/285—Permanent coating compositions
- H05K3/287—Photosensitive compositions
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
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- H05K2201/0209—Inorganic, non-metallic particles
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- H—ELECTRICITY
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
- H05K2201/0203—Fillers and particles
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
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Description
カルボキシル基含有樹脂としては、分子中にカルボキシル基を有している従来公知の各種カルボキシル基含有樹脂を使用できる。特に、分子中にエチレン性不飽和二重結合を有するカルボキシル基含有感光性樹脂が、光硬化性や耐現像性の面から好ましい。エチレン性不飽和二重結合は、アクリル酸もしくはメタクリル酸又はそれらの誘導体由来であることが好ましい。エチレン性不飽和二重結合を有さないカルボキシル基含有樹脂のみを用いる場合、組成物を光硬化性とするためには、後述する分子中に複数のエチレン性不飽和基を有する化合物、即ち光反応性モノマーを併用する必要がある。
カルボキシル基含有樹脂の具体例としては、以下のような化合物(オリゴマー及びポリマーのいずれでもよい)を挙げることができる。
なお、本明細書において、(メタ)アクリレートとは、アクリレート、メタクリレート及びそれらの混合物を総称する用語で、他の類似の表現についても同様である。
また、前記カルボキシル基含有樹脂の酸価は、40〜200mgKOH/gの範囲が適当であり、より好ましくは45〜120mgKOH/gの範囲である。カルボキシル基含有樹脂の酸価が40mgKOH/g未満であるとアルカリ現像が困難となり、一方、200mgKOH/gを超えると現像液による露光部の溶解が進むために、必要以上にラインが痩せたり、場合によっては、露光部と未露光部の区別なく現像液で溶解剥離してしまい、正常なレジストパターンの描画が困難となるので好ましくない。
光重合開始剤は、特に限定されないが、オキシムエステル基を有するオキシムエステル系光重合開始剤、α−アミノアセトフェノン系光重合開始剤、アシルホスフィンオキサイド系光重合開始剤、チタノセン系光重合開始剤からなる群から選択される1種以上の光重合開始剤を好適に使用することができる。
(式中、R1は、炭素原子数1〜4のアルキル基、または、ニトロ基、ハロゲン原子もしくは炭素原子数1〜4のアルキル基で置換されていてもよいフェニル基を表す。
R2は、炭素原子数1〜4のアルキル基、炭素原子数1〜4のアルコキシ基、または、炭素原子数1〜4のアルキル基もしくはアルコキシ基で置換されていてもよいフェニル基を表す。
R3は、酸素原子または硫黄原子で連結されていてもよく、フェニル基で置換されていてもよい炭素原子数1〜20のアルキル基、炭素原子数1〜4のアルコキシ基で置換されていてもよいベンジル基を表す。
R4は、ニトロ基、または、X−C(=O)−で表されるアシル基を表す。Xは、炭素原子数1〜4のアルキル基で置換されていてもよいアリール基、チエニル基、モルホリノ基、チオフェニル基、または、下記式で示される構造を表す。)
このような光重合開始剤、光開始助剤、及び増感剤の総量は、前記カルボキシル基含有樹脂100質量部に対して35質量部以下であることが好ましい。35質量部を超えると、これらの光吸収により深部硬化性が低下する傾向にある。
本発明の光硬化性樹脂組成物には一次粒径が異なる2種以上のフィラーが配合されるが、本発明者等は、2種以上のフィラーのうち、1種以上のフィラーが粉体で配合され、1種以上のフィラーがスラリー状態で配合されることにより、フィラーが高充填された硬化物を得られる光硬化性樹脂組成物が得られることを見出した。また、フィラーをより高充填で配合できるため、スラリー状態で配合するフィラーの一次粒径が1μm以下であることが好ましい。さらに、フィラーをスラリー状態で配合することで、フィラーと樹脂とのぬれ性は向上し、光の散乱を抑えることが可能となるため解像性は向上すると考えられる。スラリー状態で配合するフィラー量が増えると、溶剤量が多くなり、乾燥性などが悪化し、作業性も低下するが、全てのフィラーをスラリー状態で配合するのではなく、粉体でも配合することによって、解像性が良好でありながらも、乾燥性や作業性を改善することができる。
本発明の光硬化性樹脂組成物は、公知慣用の光反応性モノマーを含んでもよい。光反応性モノマーは、分子中に1個以上のエチレン性不飽和基を有する化合物である。光反応性モノマーは、活性エネルギー線照射によるカルボキシル基含有樹脂の光硬化を助けるものである。
本発明の光硬化性樹脂組成物は、耐熱性、絶縁信頼性等の特性を向上させる目的で更に熱硬化性成分を含んでいてもよい。熱硬化性成分としては、アミノ樹脂、イソシアネート化合物、ブロックイソシアネート化合物、マレイミド化合物、ベンゾオキサジン化合物、オキサゾリン化合物、カルボジイミド化合物、シクロカーボネート化合物、多官能オキセタン化合物、エピスルフィド樹脂、エポキシ樹脂などの公知慣用の熱硬化性樹脂が使用できる。
マレイミドエチルカーボネート)、脂肪族/脂環族マレイミドカルボン酸と各種脂肪族/
脂環族ポリオールとを脱水エステル化、又は脂肪族/脂環族マレイミドカルボン酸エステルと各種脂肪族/脂環族ポリオールとをエステル交換反応して得られる脂肪族/脂環族ポリマレイミドエステル化合物類;脂肪族/脂環族マレイミドカルボン酸と各種脂肪族/脂環族ポリエポキシドとをエーテル開環反応して得られる脂肪族/脂環族ポリマレイミドエステル化合物類、脂肪族/脂環族マレイミドアルコールと各種脂肪族/脂環族ポリイソシアネートとをウレタン化反応して得られる脂肪族/脂環族ポリマレイミドウレタン化合物類等がある。
これらのエポキシ樹脂は、1種を単独で用いてもよく、2種以上を組み合わせて用いてもよい。
前記の熱硬化性成分を含有する場合は、さらに熱硬化触媒を含有することが好ましい。熱硬化触媒としては、例えば、イミダゾール、2−メチルイミダゾール、2−エチルイミダゾール、2−エチル−4−メチルイミダゾール、2−フェニルイミダゾール、4−フェニルイミダゾール、1−シアノエチル−2−フェニルイミダゾール、1−(2−シアノエチル)−2−エチル−4−メチルイミダゾール等のイミダゾール誘導体;ジシアンジアミド、ベンジルジメチルアミン、4−(ジメチルアミノ)−N,N−ジメチルベンジルアミン、4−メトキシ−N,N−ジメチルベンジルアミン、4−メチル−N,N−ジメチルベンジルアミン等のアミン化合物、アジピン酸ジヒドラジド、セバシン酸ジヒドラジド等のヒドラジン化合物;トリフェニルホスフィン等のリン化合物などが挙げられる。また、市販されているものとしては、例えば四国化成工業社製の2MZ−A、2MZ−OK、2PHZ、2P4BHZ、2P4MHZ(いずれもイミダゾール系化合物の商品名)、サンアプロ社製のU−CAT(登録商標)3503N、U−CAT3502T(いずれもジメチルアミンのブロックイソシアネート化合物の商品名)、DBU、DBN、U−CATSA102、U−CAT5002(いずれも二環式アミジン化合物及びその塩)などが挙げられる。特に、これらに限られるものではなく、エポキシ樹脂やオキセタン化合物の熱硬化触媒、もしくはエポキシ基及びオキセタニル基の少なくとも何れか一方とカルボキシル基の反応を促進するものであればよく、1種を単独で用いてもよく、2種以上の混合物として用いてもよい。また、グアナミン、アセトグアナミン、ベンゾグアナミン、メラミン、2,4−ジアミノ−6−メタクリロイルオキシエチル−S−トリアジン、2−ビニル−2,4−ジアミノ−S−トリアジン、2−ビニル−4,6−ジアミノ−S−トリアジン・イソシアヌル酸付加物、2,4−ジアミノ−6−メタクリロイルオキシエチル−S−トリアジン・イソシアヌル酸付加物等のS−トリアジン誘導体を用いることもでき、好ましくはこれら密着性付与剤としても機能する化合物を前記熱硬化触媒と併用する。
本発明の光硬化性樹脂組成物は、着色剤を配合することができる。着色剤としては、赤、青、緑、黄などの慣用公知の着色剤を使用することができ、顔料、染料、色素のいずれでもよい。具体的には、カラーインデックス(C.I.;ザ ソサイエティ オブ ダイヤーズ アンド カラリスツ(The Society of Dyers and Colourists)発行)番号が付されているものを挙げることができる。但し、環境負荷低減並びに人体への影響の観点からハロゲンを含有しない着色剤であることが好ましい。
赤色着色剤としてはモノアゾ系、ジズアゾ系、アゾレーキ系、ベンズイミダゾロン系、ペリレン系、ジケトピロロピロール系、縮合アゾ系、アントラキノン系、キナクリドン系などが挙げられる。
青色着色剤としてはフタロシアニン系、アントラキノン系があり、顔料系はピグメント(Pigment)に分類されている化合物があり、上記以外にも、金属置換もしくは無置換のフタロシアニン化合物も使用することができる。
緑色着色剤としては、同様にフタロシアニン系、アントラキノン系、ペリレン系があり、上記以外にも、金属置換もしくは無置換のフタロシアニン化合物も使用することができる。
黄色着色剤としてはモノアゾ系、ジスアゾ系、縮合アゾ系、ベンズイミダゾロン系、イソインドリノン系、アントラキノン系等が挙げられる。
上記の光硬化性樹脂組成物には、樹脂組成物の調製のためや、フィラーをスラリー状態に調製するために、また、基板やキャリアフィルムに塗布するための粘度調整のために、有機溶剤を使用することができる。
本発明の光硬化性樹脂組成物には、必要に応じてさらに、エラストマー、メルカプト化合物、密着促進剤、ブロック共重合体、酸化防止剤、紫外線吸収剤などの成分を配合することができる。これらは、電子材料の分野において公知の物を使用することができる。また、本発明の光硬化性樹脂組成物には、微粉シリカ、ハイドロタルサイト、有機ベントナイト、モンモリロナイトなどの公知慣用の増粘剤、シリコーン系、フッ素系、高分子系などの消泡剤及びレベリング剤の少なくとも何れか一方、イミダゾール系、チアゾール系、トリアゾール系等のシランカップリング剤、防錆剤などのような公知慣用の添加剤類を配合することができる。
剥離可能なカバーフィルムとしては、例えば、ポリエチレンフィルム、ポリテトラフルオロエチレンフィルム、ポリプロピレンフィルム、表面処理した紙等を用いることができ、カバーフィルムを剥離するときに膜とキャリアフィルムとの接着力よりも膜とカバーフィルムとの接着力がより小さいものであればよい。
ジエチレングリコールモノエチルエーテルアセテート(カルビトールアセテート)600gにオルソクレゾールノボラック型エポキシ樹脂(DIC社製、EPICLON N−695、軟化点95℃、エポキシ当量214、平均官能基数7.6)1070g(グリシジル基数(芳香環総数):5.0モル)、アクリル酸360g(5.0モル)、及びハイドロキノン1.5gを仕込み、100℃に加熱攪拌し、均一溶解した。次いで、トリフェニルホスフィン4.3gを仕込み、110℃に加熱して2時間反応後、120℃に昇温してさらに12時間反応を行った。得られた反応液に芳香族系炭化水素(ソルベッソ150)415g、テトラヒドロ無水フタル酸456.0g(3.0モル)を仕込み、110℃で4時間反応を行い、冷却後、固形分酸価89mgKOH/g、固形分65%の樹脂溶液を得た。これを樹脂溶液A−1とする。
温度計、窒素導入装置兼アルキレンオキサイド導入装置及び撹拌装置を備えたオートクレーブに、ノボラック型クレゾール樹脂(昭和電工社製、ショーノールCRG951、OH当量:119.4)119.4g、水酸化カリウム1.19g及びトルエン119.4gを仕込み、撹拌しつつ系内を窒素置換し、加熱昇温した。次に、プロピレンオキサイド63.8gを徐々に滴下し、125〜132℃、0〜4.8kg/cm2で16時間反応させた。その後、室温まで冷却し、この反応溶液に89%リン酸1.56gを添加混合して水酸化カリウムを中和し、不揮発分62.1%、水酸基価が182.2g/eq.であるノボラック型クレゾール樹脂のプロピレンオキサイド反応溶液を得た。これは、フェノール性水酸基1当量当りアルキレンオキサイドが平均1.08モル付加しているものであった。得られたノボラック型クレゾール樹脂のアルキレンオキサイド反応溶液293.0g、アクリル酸43.2g、メタンスルホン酸11.53g、メチルハイドロキノン0.18g及びトルエン252.9gを、撹拌機、温度計及び空気吹き込み管を備えた反応器に仕込み、空気を10ml/分の速度で吹き込み、撹拌しながら、110℃で12時間反応させた。反応により生成した水は、トルエンとの共沸混合物として、12.6gの水が留出した。その後、室温まで冷却し、得られた反応溶液を15%水酸化ナトリウム水溶液35.35gで中和し、次いで水洗した。その後、エバポレーターにてトルエンをジエチレングリコールモノエチルエーテルアセテート(カルビトールアセテート)118.1gで置換しつつ留去し、ノボラック型アクリレート樹脂溶液を得た。次に、得られたノボラック型アクリレート樹脂溶液332.5g及びトリフェニルホスフィン1.22gを、撹拌器、温度計及び空気吹き込み管を備えた反応器に仕込み、空気を10ml/分の速度で吹き込み、撹拌しながら、テトラヒドロフタル酸無水物60.8gを徐々に加え、95〜101℃で6時間反応させた。固形物の酸価88mgKOH/g、不揮発分71%のカルボキシル基含有感光性樹脂を得た。これを樹脂溶液A−2とする。
上記で得た樹脂溶液A−1及びA−2の樹脂(固形分)の屈折率を、ERMA社製屈折率計ER−7MWを用いて、589.3nm、25℃の条件で測定した。結果を、シリカ、硫酸バリウム、ハイドロタルサイトの屈折率とあわせて、下記表1に示す。
真球状シリカ(アドマテック社製SO−E2)700g、溶剤としてジエチレングリコールモノエチルエーテルアセテート(カルビトールアセテート)295g、シランカップリング剤としてビニルシランカップリング剤5gを混合攪拌したものを、上記と同じくビーズミルで分散処理を行った。これを3回繰り返して3μmフィルターでろ過したシリカスラリーを作製した。
合成ハイドロタルサイト(協和化学社製DHT−4H)700g、溶剤としてジエチレングリコールモノエチルエーテルアセテート(カルビトールアセテート)295g、湿潤分散剤5gを混合攪拌し、上記と同様にビーズミルにて分散処理を行った。これを3回繰り返して3μmフィルターでろ過したハイドロタルサイトスラリーを作製した。
硫酸バリウム(堺化学社製B−30)700gと、溶剤としてジエチレングリコールモノエチルエーテルアセテート(カルビトールアセテート)295g、湿潤分散剤5gを混合攪拌し、ビーズミルにて0.5μmのジルコニアビーズを用い分散処理を行った。これを3回繰り返して3μmのフィルターを通したバリウムスラリーを作製した。
*2:エタノン.1−[9−エチル−6−(2−メチルベンゾイル)−9H−カルバゾール−3−イル]−1−(0−アセチルオキシム)(BASFジャパン社製イルガキュアーOXE−02)
*3:ジペンタエリスリトールペンタアクリレート(日本化薬社製DPHA)
*4:2−メルカプトベンゾチアゾール
*5:SO−E2(アドマテックス社製)
*6:DHT−4H(協和化学工業社製)
*7:B−30(堺化学社製)
*8:ビフェニルノボラック変性型エポキシ樹脂(日本化薬社製NC3000)
*9:ビキシレノール型エポキシ樹脂(三菱化学社製YX−4000)
*10:ジエチレングリコールモノエチルエーテルアセテート(カルビトールアセテート)
上記参考例5及び比較例3の光硬化性樹脂組成物について、粒度分布をマイクロトラック(日機装社製MT3300EX)にて測定した。参考例5の結果を図1に、比較例3の結果を図2に示す。参考例5のD50は0.28μm、D90は1.2μmであった。比較例3のD50は6.9μm、D90は11.2μmであった。
前記実施例及び比較例の光硬化性樹脂組成物を、ガラス基板上にスクリーン印刷法により、膜厚が約25μmになるように塗布し、80℃の熱風循環式乾燥炉で30分間乾燥させた。その際の印刷性を、以下の基準で評価した。
○:膜厚が約25μmの乾燥塗膜を作製にする事が出来る。
×:膜厚が約25μmの乾燥塗膜を作製にする事が困難。
前記実施例及び比較例の光硬化性樹脂組成物を、ガラス基板上にスクリーン印刷法により、膜厚が約25μmになるように塗布し、80℃の熱風循環式乾燥炉で30分間乾燥させた。乾燥後、1wt%炭酸ナトリウム水溶液によって現像を行い、乾燥塗膜が除去されるまでの時間をストップウォッチにより計測した。
前記実施例及び比較例の各光硬化性樹脂組成物を、パターン形成された銅箔基板上にスクリーン印刷で全面塗布し、80℃で乾燥し20分から80分まで10分おきに基板を取り出し室温まで放冷した。この基板に30℃の1wt%炭酸ナトリウム水溶液をスプレー圧0.2MPaの条件で90秒間現像を行い、残渣が残らない最大許容乾燥時間を最大現像ライフとした。
前記実施例及び比較例の光硬化性樹脂組成物を、パターン形成された銅箔基板上にスクリーン印刷で全面塗布し、80℃で30分乾燥し、室温まで放冷して、評価基板を得た。得られた評価基板に対して、下記のように特性を評価した。
尚、下記の評価において、光硬化性樹脂組成物のパターンの形成は、得られた評価基板に対して、高圧水銀灯を搭載した露光装置を用いて最適露光量でソルダーレジストパターンを露光し、30℃の1wt%炭酸ナトリウム水溶液をスプレー圧0.2MPaの条件で90秒間現像することによって行った。パターン形成後には、UVコンベア炉にて積算露光量1000mJ/cm2の条件で紫外線照射した後、160℃で60分加熱して硬化した。
得られた評価基板に対して、解像性評価用ネガマスクとしてビア開口径60μmを有するネガパターンを用い、上記条件で光硬化性樹脂組成物にソルダーレジストパターンを形成し、硬化した。ソルダーレジスト開口部のボトム径を1000倍の走査型電子顕微鏡(SEM)にて観察及び測長を行い、以下の評価基準で評価した。
◎:ボトム径が55以上60μm未満。
○:ボトム径が50以上55μm未満。
×:ボトム径が50μm未満。
パターン形成された銅箔基板に代えて、クシ型電極(ライン/スペース=50ミクロン/50ミクロン)が形成されたBT基板に光硬化性樹脂組成物を塗布することを除き、上記と同じ条件で評価基板を得た。得られた評価基板上の光硬化性樹脂組成物を上記と同じ条件で硬化して硬化塗膜を形成した。このようにして得た基板を、130℃、湿度85%の雰囲気下の高温高湿槽に入れ、電圧12Vを荷電し、168時間、槽内HAST試験を行った。168時間経過時の槽内絶縁抵抗値を下記の判断基準に従い評価した。
◎:108Ω以上
○:106超108Ω未満
×:106Ω以下
得られた評価基板上の光硬化性樹脂を上記と同じ条件で硬化して得た3mm×10mmのサイズの硬化塗膜を、セイコーインスツル社製TMA6100にて10gの荷重を加えながら一定の昇温速度で0℃〜260℃の温度範囲で引張り試験を行った。温度に対する硬化塗膜の伸び量から線膨張係数を算出した。
樹脂の比重を1.0としたうえで、前記実施例及び比較例の光硬化性樹脂組成物の乾燥塗膜時における理論上の比重を算出した。
上記各試験の結果を表3にまとめて示す。
Claims (4)
- カルボキシル基含有樹脂と、光重合開始剤と、一次粒径が異なる2種以上のフィラーとを含む光硬化性樹脂組成物であって、
前記カルボキシル基含有樹脂が、フェノール化合物を出発原料として得られるカルボキシル基含有樹脂を含み、
前記2種以上のフィラーのうち、1種以上のフィラーが粉体で配合され、1種以上のフィラーが、粉体を予め液体に分散させたスラリー状態で配合されてなり、前記スラリー状態で配合されるフィラーとして硫酸バリウムを含み、前記光硬化性樹脂組成物における粒度分布D50が3.0μm以下であり、D90が8.0μm以下であることを特徴とする光硬化性樹脂組成物。 - 請求項1記載の光硬化性樹脂組成物を、フィルム上に塗布乾燥して得られることを特徴とするドライフィルム。
- 請求項1記載の光硬化性樹脂組成物、または、請求項1記載の光硬化性樹脂組成物をフィルム上に塗布乾燥して得られるドライフィルムを、活性エネルギー線照射及び加熱の少なくとも何れか一方により硬化して得られる硬化物を具備することを特徴とするプリント配線板。
- カルボキシル基含有樹脂と、一次粒径が異なる2種以上のフィラーとを含む光硬化性樹脂組成物の製造方法であって、
前記一次粒径が異なる2種以上のフィラーを、1種以上のフィラーを粉体で、かつ、1種以上のフィラーを、粉体を予め液体に分散させたスラリー状態で、配合する工程を含み、
前記スラリー状態で配合されるフィラーとして硫酸バリウムを含み、前記カルボキシル基含有樹脂が、フェノール化合物を出発原料として得られるカルボキシル基含有樹脂を含み、粒度分布D50が3.0μm以下であり、D90が8.0μm以下であることを特徴とする光硬化性樹脂組成物の製造方法。
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