JP5494807B2 - 真空ポンプ - Google Patents

真空ポンプ Download PDF

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Publication number
JP5494807B2
JP5494807B2 JP2012527783A JP2012527783A JP5494807B2 JP 5494807 B2 JP5494807 B2 JP 5494807B2 JP 2012527783 A JP2012527783 A JP 2012527783A JP 2012527783 A JP2012527783 A JP 2012527783A JP 5494807 B2 JP5494807 B2 JP 5494807B2
Authority
JP
Japan
Prior art keywords
pump
magnetic
vacuum pump
shielding member
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2012527783A
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English (en)
Japanese (ja)
Other versions
JPWO2012018111A1 (ja
Inventor
慎吾 筒井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP2012527783A priority Critical patent/JP5494807B2/ja
Publication of JPWO2012018111A1 publication Critical patent/JPWO2012018111A1/ja
Application granted granted Critical
Publication of JP5494807B2 publication Critical patent/JP5494807B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/95—Preventing corrosion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F05D2300/171—Steel alloys
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/50—Intrinsic material properties or characteristics
    • F05D2300/507—Magnetic properties
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/611—Coating

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
JP2012527783A 2010-08-06 2011-08-05 真空ポンプ Expired - Fee Related JP5494807B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012527783A JP5494807B2 (ja) 2010-08-06 2011-08-05 真空ポンプ

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2010177136 2010-08-06
JP2010177136 2010-08-06
JP2010232977 2010-10-15
JP2010232977 2010-10-15
JP2012527783A JP5494807B2 (ja) 2010-08-06 2011-08-05 真空ポンプ
PCT/JP2011/067943 WO2012018111A1 (ja) 2010-08-06 2011-08-05 真空ポンプ

Publications (2)

Publication Number Publication Date
JPWO2012018111A1 JPWO2012018111A1 (ja) 2013-10-03
JP5494807B2 true JP5494807B2 (ja) 2014-05-21

Family

ID=45559606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012527783A Expired - Fee Related JP5494807B2 (ja) 2010-08-06 2011-08-05 真空ポンプ

Country Status (4)

Country Link
US (1) US20130129482A1 (zh)
JP (1) JP5494807B2 (zh)
CN (1) CN103069173B (zh)
WO (1) WO2012018111A1 (zh)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6206002B2 (ja) * 2013-08-30 2017-10-04 株式会社島津製作所 ターボ分子ポンプ
DE102014102273A1 (de) * 2014-02-21 2015-08-27 Pfeiffer Vacuum Gmbh Vakuumpumpe
CN104466606B (zh) * 2014-11-18 2017-11-10 宁波日鼎电子科技有限公司 一种部份导通的连接器外壳电泳处理方法
EP3034881B1 (de) * 2014-12-18 2018-10-31 Pfeiffer Vacuum GmbH Vakuumpumpe
JP6433812B2 (ja) * 2015-02-25 2018-12-05 エドワーズ株式会社 アダプタ及び真空ポンプ
JP6578838B2 (ja) * 2015-09-15 2019-09-25 株式会社島津製作所 真空ポンプおよび質量分析装置
JP6658309B2 (ja) 2016-05-31 2020-03-04 株式会社島津製作所 真空ポンプ
JP6948147B2 (ja) * 2017-04-18 2021-10-13 エドワーズ株式会社 真空ポンプ、真空ポンプに備わる磁気軸受部およびシャフト
JP6927735B2 (ja) * 2017-04-20 2021-09-01 エドワーズ株式会社 真空ポンプ、磁気軸受装置及びロータ
WO2018198288A1 (ja) * 2017-04-27 2018-11-01 株式会社島津製作所 ポンプ監視装置、真空処理装置および真空ポンプ
JP6992569B2 (ja) * 2018-02-14 2022-01-13 株式会社島津製作所 真空ポンプおよびバランス調整方法
EP3561306B1 (de) * 2018-07-20 2021-06-09 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3640481B1 (de) * 2018-10-15 2023-05-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2588146A (en) * 2019-10-09 2021-04-21 Edwards Ltd Vacuum pump
EP3926174B1 (de) * 2021-06-29 2023-06-14 Pfeiffer Vacuum Technology AG Vakuumpumpe

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01190991A (ja) * 1988-01-26 1989-08-01 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ
JP2003003988A (ja) * 2001-06-22 2003-01-08 Boc Edwards Technologies Ltd 真空ポンプ
JP2003129991A (ja) * 2001-10-24 2003-05-08 Boc Edwards Technologies Ltd 分子ポンプ
JP3119272U (ja) * 2005-12-08 2006-02-16 株式会社島津製作所 分子ポンプ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0769444B2 (ja) * 1987-04-08 1995-07-31 日本原子力研究所 タ−ボ分子ポンプのシ−ルド装置
JPH0745805Y2 (ja) * 1990-03-20 1995-10-18 日本信号株式会社 硬貨処理装置
JP2003021092A (ja) * 2001-07-03 2003-01-24 Boc Edwards Technologies Ltd 真空ポンプ
EP1757825B1 (en) * 2005-08-24 2010-09-29 Mecos Traxler AG Magnetic bearing device with an improved vacuum feedthrough
KR100944543B1 (ko) * 2008-07-31 2010-03-03 주식회사 중원 에스엠이티 마그네트 펌프용 커플러

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01190991A (ja) * 1988-01-26 1989-08-01 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ
JP2003003988A (ja) * 2001-06-22 2003-01-08 Boc Edwards Technologies Ltd 真空ポンプ
JP2003129991A (ja) * 2001-10-24 2003-05-08 Boc Edwards Technologies Ltd 分子ポンプ
JP3119272U (ja) * 2005-12-08 2006-02-16 株式会社島津製作所 分子ポンプ

Also Published As

Publication number Publication date
CN103069173B (zh) 2016-05-04
WO2012018111A1 (ja) 2012-02-09
US20130129482A1 (en) 2013-05-23
JPWO2012018111A1 (ja) 2013-10-03
CN103069173A (zh) 2013-04-24

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