JP5489658B2 - 計測装置 - Google Patents

計測装置 Download PDF

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Publication number
JP5489658B2
JP5489658B2 JP2009254452A JP2009254452A JP5489658B2 JP 5489658 B2 JP5489658 B2 JP 5489658B2 JP 2009254452 A JP2009254452 A JP 2009254452A JP 2009254452 A JP2009254452 A JP 2009254452A JP 5489658 B2 JP5489658 B2 JP 5489658B2
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JP
Japan
Prior art keywords
light
wavelength
phase
light source
polarization direction
Prior art date
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Expired - Fee Related
Application number
JP2009254452A
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English (en)
Japanese (ja)
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JP2011099756A (ja
JP2011099756A5 (enExample
Inventor
福之 蔵本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2009254452A priority Critical patent/JP5489658B2/ja
Priority to US12/910,250 priority patent/US8559015B2/en
Publication of JP2011099756A publication Critical patent/JP2011099756A/ja
Publication of JP2011099756A5 publication Critical patent/JP2011099756A5/ja
Application granted granted Critical
Publication of JP5489658B2 publication Critical patent/JP5489658B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G01B9/02069—Synchronization of light source or manipulator and detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2009254452A 2009-11-05 2009-11-05 計測装置 Expired - Fee Related JP5489658B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009254452A JP5489658B2 (ja) 2009-11-05 2009-11-05 計測装置
US12/910,250 US8559015B2 (en) 2009-11-05 2010-10-22 Measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009254452A JP5489658B2 (ja) 2009-11-05 2009-11-05 計測装置

Publications (3)

Publication Number Publication Date
JP2011099756A JP2011099756A (ja) 2011-05-19
JP2011099756A5 JP2011099756A5 (enExample) 2012-12-20
JP5489658B2 true JP5489658B2 (ja) 2014-05-14

Family

ID=43925115

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009254452A Expired - Fee Related JP5489658B2 (ja) 2009-11-05 2009-11-05 計測装置

Country Status (2)

Country Link
US (1) US8559015B2 (enExample)
JP (1) JP5489658B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012251828A (ja) * 2011-06-01 2012-12-20 Canon Inc 波長走査干渉計
JP2013181780A (ja) * 2012-02-29 2013-09-12 Canon Inc 計測装置及び物品の製造方法
JP2014206419A (ja) 2013-04-11 2014-10-30 キヤノン株式会社 計測装置、それを用いた物品の製造方法
KR102144541B1 (ko) * 2014-05-08 2020-08-18 주식회사 히타치엘지 데이터 스토리지 코리아 2방향 거리 검출 장치
WO2017054036A1 (en) 2015-09-28 2017-04-06 Baraja Pty Ltd Spatial profiling system and method
CN105655267A (zh) * 2016-01-04 2016-06-08 京东方科技集团股份有限公司 一种用于对基板进行检测的预警系统及生产设备
US11422238B2 (en) 2016-11-16 2022-08-23 Baraja Pty Ltd. Optical beam director
KR20250123842A (ko) * 2022-12-20 2025-08-18 아토큐브 시스템즈 게엠베하 거리를 간섭계적으로 측정하기 위한 시스템 및 방법

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62240801A (ja) * 1986-04-14 1987-10-21 Hoya Corp 光路長差測定装置
JP2808136B2 (ja) * 1989-06-07 1998-10-08 キヤノン株式会社 測長方法及び装置
JPH03257353A (ja) * 1990-03-08 1991-11-15 Yokogawa Electric Corp 空気の屈折率測定装置
JP2725434B2 (ja) 1990-03-30 1998-03-11 横河電機株式会社 Ｆｍヘテロダイン法を用いたアブソリュート測長方法およびアブソリュート測長器
JPH0466804A (ja) * 1990-07-06 1992-03-03 Yokogawa Electric Corp アブソリュート測長器
JPH06117810A (ja) * 1991-05-28 1994-04-28 Yokogawa Electric Corp 外乱補正機能付きアブソリュ−ト測長器
JPH05203408A (ja) * 1991-11-26 1993-08-10 Olympus Optical Co Ltd 位相差検出器
DE4314486C2 (de) 1993-05-03 1998-08-27 Heidenhain Gmbh Dr Johannes Absolutinterferometrisches Meßverfahren sowie dafür geeignete Laserinterferometeranordnung
JPH1144503A (ja) * 1997-07-28 1999-02-16 Nikon Corp 光波干渉測定装置
TW367407B (en) * 1997-12-22 1999-08-21 Asml Netherlands Bv Interferometer system with two wavelengths, and lithographic apparatus provided with such a system
US6051835A (en) * 1998-01-07 2000-04-18 Bio-Rad Laboratories, Inc. Spectral imaging apparatus and methodology
US6208424B1 (en) * 1998-08-27 2001-03-27 Zygo Corporation Interferometric apparatus and method for measuring motion along multiple axes
US6417927B2 (en) * 1999-04-28 2002-07-09 Zygo Corporation Method and apparatus for accurately compensating both long and short term fluctuations in the refractive index of air in an interferometer
US6724486B1 (en) * 1999-04-28 2004-04-20 Zygo Corporation Helium- Neon laser light source generating two harmonically related, single- frequency wavelengths for use in displacement and dispersion measuring interferometry
JP3510569B2 (ja) * 2000-06-22 2004-03-29 三菱重工業株式会社 光周波数変調方式距離計
JP2005300250A (ja) * 2004-04-08 2005-10-27 Canon Inc 光干渉測定装置、光干渉測定方法、光学素子、及び露光装置
US7333214B2 (en) * 2006-03-31 2008-02-19 Mitutoyo Corporation Detector for interferometric distance measurement
US7697195B2 (en) * 2006-05-25 2010-04-13 Zygo Corporation Apparatus for reducing wavefront errors in output beams of acousto-optic devices
KR100951618B1 (ko) * 2008-02-19 2010-04-09 한국과학기술원 광주파수 발생기를 이용한 절대거리 측정방법 및 시스템

Also Published As

Publication number Publication date
JP2011099756A (ja) 2011-05-19
US8559015B2 (en) 2013-10-15
US20110102805A1 (en) 2011-05-05

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