JP5602538B2 - 光波干渉計測装置 - Google Patents
光波干渉計測装置 Download PDFInfo
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- JP5602538B2 JP5602538B2 JP2010183615A JP2010183615A JP5602538B2 JP 5602538 B2 JP5602538 B2 JP 5602538B2 JP 2010183615 A JP2010183615 A JP 2010183615A JP 2010183615 A JP2010183615 A JP 2010183615A JP 5602538 B2 JP5602538 B2 JP 5602538B2
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 77
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
- G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02007—Two or more frequencies or sources used for interferometric measurement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/0209—Low-coherence interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
- G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
- G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
- G01S17/34—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/45—Multiple detectors for detecting interferometer signals
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
2 レーザー光源部2
3 分光素子
4a、4b 偏光ビームスプリッタ
5a、5b λ/4波長板
6a 参照ミラー
6b 被検ミラー
7 コーナーキューブ
8 ミラー
9a、9b 分光素子
10a、10b 位相検出部
11a、11b 光検出器
12 解析部
13 周波数変調ユニット
14 メモリ
Claims (8)
- 光波干渉によって参照光路と被検光路の幾何学的距離差を計測する計測装置であって、
測長用光源からの光であって参照面で反射した光と被検面で反射された光の干渉信号の位相を検出する位相検出部と、
前記測長用光源の波長とは異なる非測長用光源からの光であって前記参照面で反射した光と前記被検面で反射された光の強度を検出する強度検出部と、
前記位相と前記測長用光源の波長から算出される光路長と、前記非測長用光源の光であって前記参照面で反射した光の強度に対する前記被検面で反射された光の強度の割合、水蒸気の吸収パラメータ及び前記光路長から算出される前記被検面と前記参照面の間の水蒸気圧分布の平均値と、から前記幾何学的距離を算出する解析部を有することを特徴とする計測装置。 - 前記非測長用光源の波長は、前記光路長に応じて変えられることを特徴とする請求項1に記載の計測装置。
- 前記計測装置は、前記幾何学的距離[m]と水蒸気圧の算出精度δpw[Pa]と水蒸気の吸収線強度と吸収線関数のピーク値との積σw[Pa−1m−1]の間の第1の関係と、前記積σw[Pa−1m−1]と水蒸気の吸収線の波長[λ]の間の第2の関係と、を格納するメモリを更に有し、
前記解析部は、前記算出された光路長に対応する前記算出精度δpw[Pa]の値があらかじめ決められた水蒸気圧精度Δpw以下となる前記積σw[Pa−1m−1]の値域を前記メモリに格納された前記第1の関係から取得し、
前記取得した積σw[Pa−1m−1]の値域内の前記水蒸気の吸収線の波長を前記メモリに格納された前記第2の関係から取得し、
前記非測長用光源の波長は、前記取得された波長に設定されることを特徴とする請求項1または2に記載の計測装置。 - 前記計測装置は、前記非測長用光源の波長を変調する波長変調手段を更に有し、
前記強度検出部は、非測長用光の変調成分を同期検出することを特徴とする請求項1〜3のいずれかに記載の計測装置。 - 前記非測長用光源の波長は単一波長であり、前記光路長に応じて前記非測長用光源の波長を変調するための波長変調手段を更に有することを特徴とする請求項1〜3のいずれかに記載の計測装置。
- 前記非測長用光源は異なる波長の複数の狭帯域光源からなり、
前記複数の狭帯域光源の各波長は、異なる水蒸気の吸収線のピークとなる波長に設定されることを特徴とする請求項1〜3のいずれかに記載の計測装置。 - 前記非測長用光源は波長走査型光源からなり、
前記強度検出部は異なる複数の水蒸気の吸収線による非測長用光の透過スペクトルを取得することを特徴とする請求項1〜3のいずれかに記載の計測装置。 - 前記非測長用光源の波長と前記測長用光源の波長差は、20nm以内であることを特徴とする請求項1〜7のいずれかに記載の計測装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010183615A JP5602538B2 (ja) | 2010-03-03 | 2010-08-19 | 光波干渉計測装置 |
US13/038,683 US8416422B2 (en) | 2010-03-03 | 2011-03-02 | Lightwave interference measurement apparatus used to measure optical path length or distance |
Applications Claiming Priority (3)
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JP2010046321 | 2010-03-03 | ||
JP2010046321 | 2010-03-03 | ||
JP2010183615A JP5602538B2 (ja) | 2010-03-03 | 2010-08-19 | 光波干渉計測装置 |
Publications (2)
Publication Number | Publication Date |
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JP2011203231A JP2011203231A (ja) | 2011-10-13 |
JP5602538B2 true JP5602538B2 (ja) | 2014-10-08 |
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JP2010183615A Expired - Fee Related JP5602538B2 (ja) | 2010-03-03 | 2010-08-19 | 光波干渉計測装置 |
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US (1) | US8416422B2 (ja) |
JP (1) | JP5602538B2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI487876B (zh) * | 2012-10-04 | 2015-06-11 | Zygo Corp | 降低雜訊的位置監控系統 |
DE102014011569B4 (de) * | 2014-08-02 | 2016-08-18 | Precitec Optronik Gmbh | Verfahren zum Messen des Abstands zwischen einem Werkstück und einem Bearbeitungskopf einer Laserbearbeitungsvorrichtung |
JP6503618B2 (ja) * | 2015-08-26 | 2019-04-24 | 株式会社東京精密 | 距離測定装置及びその方法 |
CN111338332B (zh) * | 2018-11-30 | 2022-03-18 | 宝时得科技(中国)有限公司 | 自动行走设备、其避障方法及装置 |
CN110569410A (zh) * | 2019-08-30 | 2019-12-13 | 广西师范大学 | 一种测距数据处理方法、装置及计算机可读存储介质 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0961110A (ja) * | 1995-08-25 | 1997-03-07 | Nikon Corp | 光波干渉測定装置 |
JPH1019508A (ja) * | 1996-07-02 | 1998-01-23 | Nikon Corp | 光波干渉測定装置および屈折率変動測定系 |
US5764362A (en) * | 1996-08-20 | 1998-06-09 | Zygo Corporation | Superheterodyne method and apparatus for measuring the refractive index of air using multiple-pass interferometry |
JPH1096601A (ja) * | 1996-09-20 | 1998-04-14 | Nikon Corp | 光波干渉測定装置 |
US6219144B1 (en) * | 1997-10-02 | 2001-04-17 | Zygo Corporation | Apparatus and method for measuring the refractive index and optical path length effects of air using multiple-pass interferometry |
US6573996B1 (en) * | 1997-11-12 | 2003-06-03 | Science Research Laboratory, Inc. | Method and apparatus for enhanced precision interferometric distance measurement |
JP2000055611A (ja) * | 1998-08-11 | 2000-02-25 | Nikon Corp | 光波干渉測定装置 |
FI982603A (fi) * | 1998-12-02 | 2000-06-03 | Leonid Mihaljov | Laser-mittauksen epätarkkuutta pienentävä mittausmenetelmä |
JP2000275169A (ja) * | 1999-03-23 | 2000-10-06 | Chino Corp | 光学的測定装置 |
US6417927B2 (en) * | 1999-04-28 | 2002-07-09 | Zygo Corporation | Method and apparatus for accurately compensating both long and short term fluctuations in the refractive index of air in an interferometer |
JP4666820B2 (ja) | 2001-06-25 | 2011-04-06 | キヤノン株式会社 | 虹彩型光量調節装置、レンズ鏡筒および撮影装置 |
TWI259898B (en) * | 2002-01-24 | 2006-08-11 | Zygo Corp | Method and apparatus for compensation of time-varying optical properties of gas in interferometry |
DE10334350B3 (de) * | 2003-07-25 | 2005-02-03 | Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Arbeit, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt | Verfahren zur Bestimung der Brechzahl bei interferometrischen Längenmessungen und Interferometeranordnung hierfür |
US7528961B2 (en) * | 2005-04-29 | 2009-05-05 | Zygo Corporation | Compensation of turbulent effects of gas in measurement paths of multi-axis interferometers |
US7292347B2 (en) * | 2005-08-01 | 2007-11-06 | Mitutoyo Corporation | Dual laser high precision interferometer |
-
2010
- 2010-08-19 JP JP2010183615A patent/JP5602538B2/ja not_active Expired - Fee Related
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2011
- 2011-03-02 US US13/038,683 patent/US8416422B2/en not_active Expired - Fee Related
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US20110216326A1 (en) | 2011-09-08 |
JP2011203231A (ja) | 2011-10-13 |
US8416422B2 (en) | 2013-04-09 |
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