JP5476878B2 - 発光パネルの製造方法 - Google Patents
発光パネルの製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims description 38
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- 229910052751 metal Inorganic materials 0.000 claims description 26
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- 229910052709 silver Inorganic materials 0.000 description 8
- 239000004332 silver Substances 0.000 description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
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- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 3
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 101100313164 Caenorhabditis elegans sea-1 gene Proteins 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
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- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- BEQNOZDXPONEMR-UHFFFAOYSA-N cadmium;oxotin Chemical compound [Cd].[Sn]=O BEQNOZDXPONEMR-UHFFFAOYSA-N 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- XMPZTFVPEKAKFH-UHFFFAOYSA-P ceric ammonium nitrate Chemical compound [NH4+].[NH4+].[Ce+4].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O XMPZTFVPEKAKFH-UHFFFAOYSA-P 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
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- 229910000423 chromium oxide Inorganic materials 0.000 description 1
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- 229910001873 dinitrogen Inorganic materials 0.000 description 1
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- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- AUHZEENZYGFFBQ-UHFFFAOYSA-N mesitylene Substances CC1=CC(C)=CC(C)=C1 AUHZEENZYGFFBQ-UHFFFAOYSA-N 0.000 description 1
- 125000001827 mesitylenyl group Chemical group [H]C1=C(C(*)=C(C([H])=C1C([H])([H])[H])C([H])([H])[H])C([H])([H])[H] 0.000 description 1
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- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
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- 229920000553 poly(phenylenevinylene) Polymers 0.000 description 1
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- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/22—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
- G09G3/30—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
- G09G3/32—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED]
- G09G3/3208—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED]
- G09G3/3225—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED] using an active matrix
- G09G3/3233—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED] using an active matrix with pixel circuitry controlling the current through the light-emitting element
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/86—Arrangements for improving contrast, e.g. preventing reflection of ambient light
- H10K50/865—Arrangements for improving contrast, e.g. preventing reflection of ambient light comprising light absorbing layers, e.g. light-blocking layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/122—Pixel-defining structures or layers, e.g. banks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/126—Shielding, e.g. light-blocking means over the TFTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/131—Interconnections, e.g. wiring lines or terminals
Description
平坦化膜5は、SiO2、SiN、SiON等の無機絶縁体をCVD法もしくはスパッタ法で100〜10000nm成膜することにより形成することができる。あるいは、ポリシロキサン、ポリイミド、アクリル樹脂、フッ素樹脂等の有機絶縁体を塗布することにより形成することができる。また、有機絶縁体の膜と無機絶縁体の膜を積層してもよい。有機絶縁体の膜上に無機絶縁体の膜を設けた場合には、有機絶縁体の膜から生じるガス等を遮断することができるので好ましい。また平坦化膜5は光透過性であることが好ましい。
なお、有機絶縁体に感光性を付与し、現像処理することで所望のコンタクトホール5aを形成してもよい。
また、ゲート絶縁膜31には、信号線51の上部であってトランジスタ22のドレイン電極22Dと重なる部分にコンタクトホール31aが、キャパシタ27の一方の電極27aの上部であってトランジスタ22のソース電極22Sと重なる部分にコンタクトホール31bが、トランジスタ22のゲート電極22Gの上部であって走査線52と重なる部分にコンタクトホール31cが、それぞれ形成されている。
n型半導体膜21c,21d,22c,22dは一部がチャネル保護膜21b,22bと重なるように形成されている。
走査線52及び共通電源線53は、マトリクス状に配列される画素電極41の間に、図2の横方向に形成されている。
なお、絶縁基板2から保護絶縁膜32までの積層構造がトランジスタアレイパネル100である。
画素電極41、有機EL層42、電子注入層45、対向電極46の順に積層されたものが有機EL素子40である。
まず、図7に示すように、遮光膜の材料となる酸化クロム、窒化クロム、あるいは酸化窒化クロム等をターゲットとするスパッタ法等により、金属膜61を厚さ50〜150nmとなるように絶縁基板2上に成膜する。次に、感光性レジストを用い、硝酸セリウムアンモニウムを含むエッチャントで金属膜61に対しウェットエッチングを行うことにより、図8に示すように所望のパターンの遮光膜4を残す。
次に、図11に示すように平坦化膜5を形成する。次に、平坦化膜5に対しドライエッチングを行うことにより、図12に示すようにコンタクトホール5aを形成する。
次に、図13に示すように、Al、AlTi、AlTiNd等の金属によりゲートメタル層63を形成する。次に、図14に示すように、ゲートメタル層63をパターニングすることによりゲート電極21G,22G、電極27a、信号線51を形成する。
次に、ゲート絶縁膜31の上部に、半導体膜21a,22aとなるアモルファスシリコン層64、チャネル保護膜21b,22bとなる絶縁膜65を順に形成する。次に、図16に示すように、アモルファスシリコン層64、絶縁膜65をパターニングして半導体膜21a,22a、チャネル保護膜21b,22bを形成する。
次に、図21に示すように、ゲート絶縁膜31に対しドライエッチングを行うことにより、コンタクトホール31a、31b、31cを形成する。
次に、図22に示すように、ドレインメタル層68を成膜する。次に、図23に示すように、ドレインメタル層68をパターニングして電極27b、ソース電極21S,22S及びドレイン電極21D,22D、走査線52及び共通電源線53を形成する。
次に、図26に示すように、ポリイミド系等のポジ型の感光性樹脂材料69を塗布する。次に、図27に示すように、絶縁基板2側から遮光膜4、走査線52、及び共通電源線53をマスクとして感光性樹脂材料69を露光させる。次に、露光部分の可溶化した感光性樹脂材料69を除去する。その後、現像処理を行うことで図28に示すように遮光膜4、走査線52、及び共通電源線53の形状に対応した形状の開口を有する隔壁6が形成される。
なお、走査線52と共通電源線53との隙間であって保護絶縁膜32で覆われている部分は、幅が狭いこと、及び露光部分が現像液に触れないことより、隔壁6として残存する。
その後、大気に曝露した状態で、ホットプレートを用いてトランジスタアレイパネル100を160〜200℃の温度で乾燥させ、残留溶媒の除去を行うことで正孔注入層43を形成する。
4 遮光膜
5 平坦化膜(第1の絶縁膜)
6 隔壁
8 開口
10 有機ELディスプレイパネル
21,22 トランジスタ
40 有機EL素子
41 画素電極
42 有機EL層(担体輸送層)
46 対向電極
51 信号線
52 走査線
53 共通電源線
54 補助信号線
69 感光性樹脂
70 撥液剤
Claims (1)
- 基板上に形成された第1電極と、前記第1電極上に形成された少なくとも一層からなる担体輸送層と、前記隔壁及び前記担体輸送層上に形成された第2電極と、を備える発光パネルの製造方法において、
前記基板に設けられた金属膜からなる遮光部の上面に堆積された補助信号線メタルをエッチングしてなる補助信号線を形成する工程と、
前記補助信号線上が開口された開口部を有する絶縁膜を形成する工程と、
前記開口部内及び前記絶縁膜上に金属層を堆積し、前記金属層をエッチングして、前記開口部内に前記補助信号線と導通する信号線を形成するとともに前記絶縁膜上にゲート電極を形成する工程と、
前記信号線上に、前記信号線と導通するドレイン電極を形成する工程と、
前記基板に設けられた前記遮光部の上方を含む前記基板の上面側にポジ型感光性樹脂を塗布する工程と、
前記基板の下面から前記ポジ型感光性樹脂側に向けて光を照射して、前記遮光部の形状に対応した形状の開口を有する隔壁を形成する工程と、
前記開口を有する隔壁を形成する工程の後、前記隔壁上及び前記開口内部に撥液剤を塗布し、前記基板の下面から光を照射し、前記開口内部の前記撥液剤を分解する工程と、を備えることを特徴とする発光パネルの製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009211230A JP5476878B2 (ja) | 2009-09-14 | 2009-09-14 | 発光パネルの製造方法 |
TW099130796A TWI445169B (zh) | 2009-09-14 | 2010-09-13 | 發光面板之製造方法 |
US12/880,341 US8354285B2 (en) | 2009-09-14 | 2010-09-13 | Light emitting panel and manufacturing method of light emitting panel |
KR1020100089393A KR101208283B1 (ko) | 2009-09-14 | 2010-09-13 | 발광 패널 및 발광 패널의 제조방법 |
CN2010102842203A CN102024843B (zh) | 2009-09-14 | 2010-09-14 | 发光面板以及发光面板的制造方法 |
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TWI467756B (zh) * | 2011-07-19 | 2015-01-01 | Chimei Innolux Corp | 有機電激發光顯示裝置 |
CN102709243B (zh) * | 2012-05-18 | 2015-04-29 | 京东方科技集团股份有限公司 | 有机发光二极管显示面板及其制造方法 |
KR102256083B1 (ko) * | 2014-03-26 | 2021-05-26 | 엘지디스플레이 주식회사 | 유기전계발광표시장치 |
KR102263207B1 (ko) * | 2014-07-17 | 2021-06-14 | 소니그룹주식회사 | 광전 변환 소자, 촬상 장치, 광센서 및 광전 변환 소자의 제조 방법 |
KR102238994B1 (ko) * | 2014-07-17 | 2021-04-12 | 엘지디스플레이 주식회사 | 표시장치 |
KR102184904B1 (ko) * | 2014-08-28 | 2020-12-02 | 엘지디스플레이 주식회사 | 유기발광표시패널 및 표시장치 |
KR102294311B1 (ko) * | 2014-12-24 | 2021-08-26 | 엘지디스플레이 주식회사 | 유기발광표시패널 및 유기발광표시장치 |
KR102370035B1 (ko) * | 2015-02-05 | 2022-03-07 | 삼성디스플레이 주식회사 | 투명 표시 기판, 투명 표시 장치 및 투명 표시 장치의 제조 방법 |
KR102390441B1 (ko) * | 2015-10-15 | 2022-04-26 | 삼성디스플레이 주식회사 | 유기발광 표시장치 |
CN111554701B (zh) * | 2016-05-20 | 2023-05-16 | 群创光电股份有限公司 | 显示设备 |
CN107331692B (zh) * | 2017-08-25 | 2019-09-17 | 深圳市华星光电半导体显示技术有限公司 | Oled显示面板及其制作方法 |
CN107885004B (zh) * | 2017-12-06 | 2020-12-08 | 京东方科技集团股份有限公司 | 一种阵列基板、显示面板、显示装置及其制作工艺 |
WO2019191862A1 (en) * | 2018-04-02 | 2019-10-10 | Boe Technology Group Co., Ltd. | Array substrate, display apparatus, method of reducing current-resistance drop and data loss in display apparatus, and method of fabricating array substrate |
US11049884B2 (en) | 2019-04-28 | 2021-06-29 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Display panel and method of manufacturing same, and display module |
CN110148599B (zh) * | 2019-04-28 | 2023-06-30 | 武汉华星光电半导体显示技术有限公司 | 显示面板及其制作方法 |
CN111509011A (zh) * | 2020-04-26 | 2020-08-07 | 武汉华星光电半导体显示技术有限公司 | 显示装置及其制备方法 |
JP2022020172A (ja) * | 2020-07-20 | 2022-02-01 | 株式会社ジャパンディスプレイ | 表示装置 |
CN112086572B (zh) * | 2020-09-09 | 2022-06-10 | 武汉华星光电半导体显示技术有限公司 | 一种显示面板和显示装置 |
CN115132941B (zh) * | 2022-06-24 | 2023-04-07 | 长沙惠科光电有限公司 | 显示面板的制备方法及显示面板 |
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JP2002237383A (ja) * | 2000-03-31 | 2002-08-23 | Seiko Epson Corp | 有機el素子の製造方法、有機el素子 |
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JP2002353424A (ja) * | 2001-03-23 | 2002-12-06 | Seiko Epson Corp | 基板装置の製造方法及び基板装置、電気光学装置の製造方法及び電気光学装置、並びに電子機器 |
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US7710019B2 (en) * | 2002-12-11 | 2010-05-04 | Samsung Electronics Co., Ltd. | Organic light-emitting diode display comprising auxiliary electrodes |
TWI231153B (en) * | 2004-02-26 | 2005-04-11 | Toppoly Optoelectronics Corp | Organic electroluminescence display device and its fabrication method |
JP4265515B2 (ja) * | 2004-09-29 | 2009-05-20 | カシオ計算機株式会社 | ディスプレイパネル |
JP2006216297A (ja) * | 2005-02-02 | 2006-08-17 | Dainippon Screen Mfg Co Ltd | 有機el用基板およびその製造方法 |
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JP4857688B2 (ja) * | 2005-09-29 | 2012-01-18 | カシオ計算機株式会社 | 表示装置及びその製造方法 |
JP4582004B2 (ja) * | 2006-01-13 | 2010-11-17 | セイコーエプソン株式会社 | 発光装置および電子機器 |
JP2007234391A (ja) | 2006-03-01 | 2007-09-13 | Seiko Epson Corp | エレクトロルミネッセンス表示装置及び電子機器 |
JP2007287462A (ja) * | 2006-04-17 | 2007-11-01 | Seiko Epson Corp | 電気光学装置および電子機器 |
TWI333389B (en) * | 2006-08-16 | 2010-11-11 | Au Optronics Corp | Low-reflection self-illumination unit display |
JP2008140573A (ja) * | 2006-11-30 | 2008-06-19 | Seiko Epson Corp | エレクトロルミネッセンス装置、エレクトロルミネッセンス装置の製造方法並びに電子機器 |
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- 2010-09-13 KR KR1020100089393A patent/KR101208283B1/ko active IP Right Grant
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CN102024843A (zh) | 2011-04-20 |
US8354285B2 (en) | 2013-01-15 |
TWI445169B (zh) | 2014-07-11 |
CN102024843B (zh) | 2013-11-06 |
KR101208283B1 (ko) | 2012-12-05 |
KR20110029095A (ko) | 2011-03-22 |
JP2011061103A (ja) | 2011-03-24 |
TW201121037A (en) | 2011-06-16 |
US20110062458A1 (en) | 2011-03-17 |
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