JP5473591B2 - 搬送振動監視装置及び真空処理装置並びに搬送振動監視方法 - Google Patents

搬送振動監視装置及び真空処理装置並びに搬送振動監視方法 Download PDF

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JP5473591B2
JP5473591B2 JP2009296479A JP2009296479A JP5473591B2 JP 5473591 B2 JP5473591 B2 JP 5473591B2 JP 2009296479 A JP2009296479 A JP 2009296479A JP 2009296479 A JP2009296479 A JP 2009296479A JP 5473591 B2 JP5473591 B2 JP 5473591B2
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carrier
substrate
conveyance
acceleration
reference value
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JP2011138835A (ja
JP2011138835A5 (enExample
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忠司 若崎
浩 曽根
隆嗣 東坂
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Canon Anelva Corp
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Canon Anelva Corp
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JP2009296479A 2009-12-26 2009-12-26 搬送振動監視装置及び真空処理装置並びに搬送振動監視方法 Active JP5473591B2 (ja)

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JP2009296479A JP5473591B2 (ja) 2009-12-26 2009-12-26 搬送振動監視装置及び真空処理装置並びに搬送振動監視方法

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JP2009296479A JP5473591B2 (ja) 2009-12-26 2009-12-26 搬送振動監視装置及び真空処理装置並びに搬送振動監視方法

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JP2011138835A JP2011138835A (ja) 2011-07-14
JP2011138835A5 JP2011138835A5 (enExample) 2013-05-09
JP5473591B2 true JP5473591B2 (ja) 2014-04-16

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10790176B2 (en) 2017-10-30 2020-09-29 Samsung Electronics Co., Ltd. Substrate carrier
JPWO2021124429A1 (enExample) * 2019-12-17 2021-06-24

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10768186B2 (en) 2015-03-18 2020-09-08 Hitachi High-Tech Corporation Inspection device
JP7256360B2 (ja) * 2018-12-14 2023-04-12 シンフォニアテクノロジー株式会社 搬送異常検知システム

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001330620A (ja) * 2000-03-14 2001-11-30 Omron Corp 振動・衝撃警報装置
JP2001264157A (ja) * 2000-03-14 2001-09-26 Omron Corp 振動データ収集ツールと、この振動データ収集ツールを用いた振動管理装置
JP4222589B2 (ja) * 2001-03-26 2009-02-12 キヤノンアネルバ株式会社 基板搬送装置及びそれを用いた基板処理装置
JP2005171940A (ja) * 2003-12-15 2005-06-30 Hitachi Constr Mach Co Ltd 建設機械のエンジンメンテナンス時期予測装置及び予測方法
JP4403841B2 (ja) * 2004-03-19 2010-01-27 株式会社安川電機 ウェハ有無検出装置およびこれを用いた搬送ロボット装置
JP2005334836A (ja) * 2004-05-31 2005-12-08 Renesas Technology Corp 搬送台車、およびそれを用いた軌道清掃方法、走行検査方法並びに半導体装置の製造方法
JP2006278396A (ja) * 2005-03-28 2006-10-12 Tokyo Electron Ltd 処理装置及びプログラム
JP2006310349A (ja) * 2005-04-26 2006-11-09 Renesas Technology Corp 半導体装置の製造システム及び製造方法
JP2009124078A (ja) * 2007-11-19 2009-06-04 Hitachi Kokusai Electric Inc 基板処理装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10790176B2 (en) 2017-10-30 2020-09-29 Samsung Electronics Co., Ltd. Substrate carrier
JPWO2021124429A1 (enExample) * 2019-12-17 2021-06-24
WO2021124429A1 (ja) * 2019-12-17 2021-06-24 ヤマハ発動機株式会社 搬送装置
CN114829274A (zh) * 2019-12-17 2022-07-29 雅马哈发动机株式会社 输送装置
JP7286803B2 (ja) 2019-12-17 2023-06-05 ヤマハ発動機株式会社 搬送装置
US11738954B2 (en) 2019-12-17 2023-08-29 Yamaha Hatsudoki Kabushiki Kaisha Conveyance device
DE112019007860B4 (de) 2019-12-17 2025-03-06 Yamaha Hatsudoki Kabushiki Kaisha Fördervorrichtung
CN114829274B (zh) * 2019-12-17 2025-03-11 雅马哈发动机株式会社 输送装置

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