JP5460760B2 - 液体吐出ヘッドの製造方法 - Google Patents
液体吐出ヘッドの製造方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims description 88
- 239000007788 liquid Substances 0.000 title claims description 47
- 238000004519 manufacturing process Methods 0.000 title claims description 29
- 239000011347 resin Substances 0.000 claims description 38
- 229920005989 resin Polymers 0.000 claims description 38
- 239000000758 substrate Substances 0.000 claims description 27
- 238000007599 discharging Methods 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 239000010703 silicon Substances 0.000 description 13
- 239000000463 material Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 9
- 229910052782 aluminium Inorganic materials 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 229920002614 Polyether block amide Polymers 0.000 description 2
- WPPDFTBPZNZZRP-UHFFFAOYSA-N aluminum copper Chemical compound [Al].[Cu] WPPDFTBPZNZZRP-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- 238000000018 DNA microarray Methods 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- -1 aluminum silicon copper Chemical compound 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/175—Ink supply systems ; Circuit parts therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14475—Structure thereof only for on-demand ink jet heads characterised by nozzle shapes or number of orifices per chamber
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
液体を吐出する吐出口が配列方向に沿って複数設けられた吐出口部材を備える液体吐出ヘッドの製造方法であって、
光硬化性樹脂を含有する樹脂層が設けられた基板を用意する工程と、
前記樹脂層を露光する露光処理である、第1の露光処理及び第2の露光処理を行う露光工程と、
前記第1の露光処理及び第2の露光処理を行った樹脂層から前記複数の吐出口を形成する工程と、を有し、
前記第1の露光処理によって形成される吐出口の側壁の前記基板に対する傾斜角と、前記第2の露光処理によって形成される吐出口の側壁の前記基板に対する傾斜角とが異なり、
前記吐出口は前記配列方向に直交する直交方向に沿った側壁を有し、
前記第1の露光処理は、前記吐出口の表面側開口の前記配列方向の幅をa、前記吐出口の裏面側開口の前記配列方向の幅をbとした場合、比(b/a)が1以上となるように、前記直交方向に沿った側壁に対応する前記樹脂層の部分を露光する処理であり、
前記第2の露光処理は、前記吐出口の表面側開口の前記直交方向の幅をc、前記吐出口の裏面側開口の前記直交方向の幅をdとした場合、比(d/c)が1より大きくなるように、前記直交方向に沿った側壁以外の側壁に対応する前記樹脂層の部分を露光する処理であり、
前記比(d/c)は前記比(b/a)より大きく、
前記第1の露光処理によって形成される前記直交方向に沿った側壁と、前記第2の露光処理によって形成される前記直交方向に沿った側壁以外の側壁とで、前記複数の吐出口を構成する1つの吐出口が形成されていることを特徴とする液体吐出ヘッドの製造方法である。
以下に、本実施形態の製造方法により作製されるインクジェット記録ヘッドの構成例についてより具体的に説明する。図1(A)は図2の吐出口の上面図であり、図1(B)は図1(A)のA−A線における断面図、図1(C)は図1(A)のB−B線における断面図である。また、A−A線は配列方向を表すこととなり、B−B線は配列方向に直交する直交方向を表すことになる。したがって、図1(B)は直交方向に垂直な面による吐出口の断面形状であり、図1(C)は配列方向に垂直な面による吐出口の断面形状である。
以下に、本実施形態の露光条件について具体的に説明する。
2 流路形成部材
3 密着向上層
4 吐出エネルギー発生素子
5 シリコン基板
7 インク供給口(液体供給口)
301 熱酸化膜(表面側)
302 犠牲層
303 シリコン酸化膜
304 シリコン窒化膜
305 熱酸化膜(裏面側)
307 流路型材
308 ネガ型感光性樹脂
401 流路壁
402 ドライフィルム
403 吐出口部材
Claims (6)
- 液体を吐出する吐出口が配列方向に沿って複数設けられた吐出口部材を備える液体吐出ヘッドの製造方法であって、
光硬化性樹脂を含有する樹脂層が設けられた基板を用意する工程と、
前記樹脂層を露光する露光処理である、第1の露光処理及び第2の露光処理を行う露光工程と、
前記第1の露光処理及び第2の露光処理を行った樹脂層から前記複数の吐出口を形成する工程と、を有し、
前記第1の露光処理によって形成される吐出口の側壁の前記基板に対する傾斜角と、前記第2の露光処理によって形成される吐出口の側壁の前記基板に対する傾斜角とが異なり、
前記吐出口は前記配列方向に直交する直交方向に沿った側壁を有し、
前記第1の露光処理は、前記吐出口の表面側開口の前記配列方向の幅をa、前記吐出口の裏面側開口の前記配列方向の幅をbとした場合、比(b/a)が1以上となるように、前記直交方向に沿った側壁に対応する前記樹脂層の部分を露光する処理であり、
前記第2の露光処理は、前記吐出口の表面側開口の前記直交方向の幅をc、前記吐出口の裏面側開口の前記直交方向の幅をdとした場合、比(d/c)が1より大きくなるように、前記直交方向に沿った側壁以外の側壁に対応する前記樹脂層の部分を露光する処理であり、
前記比(d/c)は前記比(b/a)より大きく、
前記第1の露光処理によって形成される前記直交方向に沿った側壁と、前記第2の露光処理によって形成される前記直交方向に沿った側壁以外の側壁とで、前記複数の吐出口を構成する1つの吐出口が形成されていることを特徴とする液体吐出ヘッドの製造方法。 - 前記配列方向に垂直な面による前記吐出口の断面形状がテーパ状である請求項1に記載の液体吐出ヘッドの製造方法。
- 前記直交方向に垂直な面による前記吐出口の断面形状がテーパ状又は四角形状である請求項1又は2に記載の液体吐出ヘッドの製造方法。
- 前記幅a及び前記幅bは、それぞれ、前記配列方向に垂直であって前記吐出口の中心を通る面による前記吐出口の断面形状における上辺の幅及び下辺の幅であり、
前記幅c及び前記幅dは、それぞれ、前記直交方向に垂直であって前記吐出口の中心を通る面による前記吐出口の断面形状における上辺の幅及び下辺の幅である請求項1乃至3のいずれかに記載の液体吐出ヘッドの製造方法。 - 前記樹脂層はネガ型感光性樹脂で形成されたものである請求項1乃至4のいずれかに記載の液体吐出ヘッドの製造方法。
- 前記第1の露光処理では、前記直交方向に沿った側壁に対応した直線を含むパターンを有するマスクを用いて前記樹脂層の露光を行い、前記第2の露光処理では、前記直交方向に沿った側壁以外の側壁に対応した曲線を含むパターンを有するマスクを用いて前記樹脂層の露光を行う請求項1乃至5のいずれかに記載の液体吐出ヘッドの製造方法。
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JP2012024153A JP5460760B2 (ja) | 2011-02-28 | 2012-02-07 | 液体吐出ヘッドの製造方法 |
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JP2012024153A JP5460760B2 (ja) | 2011-02-28 | 2012-02-07 | 液体吐出ヘッドの製造方法 |
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JP2012192729A JP2012192729A (ja) | 2012-10-11 |
JP5460760B2 true JP5460760B2 (ja) | 2014-04-02 |
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US (1) | US8652767B2 (ja) |
EP (1) | EP2492096B1 (ja) |
JP (1) | JP5460760B2 (ja) |
KR (1) | KR101438267B1 (ja) |
CN (1) | CN102673156B (ja) |
BR (1) | BR102012004467A2 (ja) |
RU (1) | RU2507073C2 (ja) |
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Publication number | Priority date | Publication date | Assignee | Title |
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JP6008556B2 (ja) * | 2012-04-25 | 2016-10-19 | キヤノン株式会社 | 液体吐出ヘッドの製造方法及び露光方法 |
US9308728B2 (en) * | 2013-05-31 | 2016-04-12 | Stmicroelectronics, Inc. | Method of making inkjet print heads having inkjet chambers and orifices formed in a wafer and related devices |
JP6137950B2 (ja) | 2013-06-10 | 2017-05-31 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
JP2015052754A (ja) * | 2013-09-09 | 2015-03-19 | 富士フイルム株式会社 | 樹脂硬化物の製造方法、並びにこれを用いた固体撮像素子および液晶表示装置の製造方法 |
US9776409B2 (en) | 2014-04-24 | 2017-10-03 | Hewlett-Packard Development Company, L.P. | Fluidic ejection device with layers having different light sensitivities |
JP6929639B2 (ja) * | 2016-01-08 | 2021-09-01 | キヤノン株式会社 | 液体吐出ヘッド、液体吐出装置及び液体の供給方法 |
US10040290B2 (en) | 2016-01-08 | 2018-08-07 | Canon Kabushiki Kaisha | Liquid ejection head, liquid ejection apparatus, and method of supplying liquid |
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EP0419190B1 (en) | 1989-09-18 | 1995-03-29 | Canon Kabushiki Kaisha | Ink jet recording head, cartridge and apparatus |
JPH09207341A (ja) | 1996-02-07 | 1997-08-12 | Seiko Epson Corp | インクジェットヘッド用ノズルプレートおよびその製造方法 |
JPH09216368A (ja) | 1996-02-13 | 1997-08-19 | Seiko Epson Corp | インクジェットノズルプレートおよびその製造方法 |
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-
2012
- 2012-01-26 US US13/359,249 patent/US8652767B2/en not_active Expired - Fee Related
- 2012-02-01 EP EP20120000676 patent/EP2492096B1/en not_active Not-in-force
- 2012-02-07 JP JP2012024153A patent/JP5460760B2/ja active Active
- 2012-02-20 KR KR20120016854A patent/KR101438267B1/ko active IP Right Grant
- 2012-02-27 RU RU2012107068/12A patent/RU2507073C2/ru not_active IP Right Cessation
- 2012-02-28 CN CN201210048283.8A patent/CN102673156B/zh not_active Expired - Fee Related
- 2012-02-28 BR BR102012004467A patent/BR102012004467A2/pt not_active Application Discontinuation
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JP2012192729A (ja) | 2012-10-11 |
KR101438267B1 (ko) | 2014-09-04 |
EP2492096B1 (en) | 2015-04-08 |
CN102673156A (zh) | 2012-09-19 |
BR102012004467A2 (pt) | 2013-07-23 |
CN102673156B (zh) | 2014-10-29 |
EP2492096A1 (en) | 2012-08-29 |
US8652767B2 (en) | 2014-02-18 |
RU2507073C2 (ru) | 2014-02-20 |
US20120218350A1 (en) | 2012-08-30 |
KR20120098434A (ko) | 2012-09-05 |
RU2012107068A (ru) | 2013-09-10 |
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