JP5458486B2 - アレイ基板、表示装置、及びその製造方法 - Google Patents

アレイ基板、表示装置、及びその製造方法 Download PDF

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Publication number
JP5458486B2
JP5458486B2 JP2007270090A JP2007270090A JP5458486B2 JP 5458486 B2 JP5458486 B2 JP 5458486B2 JP 2007270090 A JP2007270090 A JP 2007270090A JP 2007270090 A JP2007270090 A JP 2007270090A JP 5458486 B2 JP5458486 B2 JP 5458486B2
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Japan
Prior art keywords
film
thin film
resist
conductive film
forming
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Active
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JP2007270090A
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English (en)
Japanese (ja)
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JP2008152236A (ja
Inventor
雄一 升谷
茂昭 野海
武志 島村
理 青木
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2007270090A priority Critical patent/JP5458486B2/ja
Priority to TW096143429A priority patent/TW200832719A/zh
Priority to US11/943,976 priority patent/US9645457B2/en
Priority to KR1020070119535A priority patent/KR20080046604A/ko
Publication of JP2008152236A publication Critical patent/JP2008152236A/ja
Application granted granted Critical
Publication of JP5458486B2 publication Critical patent/JP5458486B2/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1345—Conductors connecting electrodes to cell terminals
    • G02F1/13454—Drivers integrated on the active matrix substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136286—Wiring, e.g. gate line, drain line
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/48—Flattening arrangements

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Liquid Crystal (AREA)
  • Thin Film Transistor (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP2007270090A 2006-11-22 2007-10-17 アレイ基板、表示装置、及びその製造方法 Active JP5458486B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007270090A JP5458486B2 (ja) 2006-11-22 2007-10-17 アレイ基板、表示装置、及びその製造方法
TW096143429A TW200832719A (en) 2006-11-22 2007-11-16 Array substrae, display device, and method for manufacturing the array substrate
US11/943,976 US9645457B2 (en) 2006-11-22 2007-11-21 Array substrate, display device, and method for manufacturing the array substrate
KR1020070119535A KR20080046604A (ko) 2006-11-22 2007-11-22 어레이 기판, 표시장치 및 그 제조 방법

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006315579 2006-11-22
JP2006315579 2006-11-22
JP2007270090A JP5458486B2 (ja) 2006-11-22 2007-10-17 アレイ基板、表示装置、及びその製造方法

Publications (2)

Publication Number Publication Date
JP2008152236A JP2008152236A (ja) 2008-07-03
JP5458486B2 true JP5458486B2 (ja) 2014-04-02

Family

ID=39517343

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007270090A Active JP5458486B2 (ja) 2006-11-22 2007-10-17 アレイ基板、表示装置、及びその製造方法

Country Status (4)

Country Link
JP (1) JP5458486B2 (zh)
KR (1) KR20080046604A (zh)
CN (1) CN101202286A (zh)
TW (1) TW200832719A (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010047288A1 (en) * 2008-10-24 2010-04-29 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductordevice
JP5339356B2 (ja) * 2009-04-03 2013-11-13 パナソニック液晶ディスプレイ株式会社 表示装置
JP5594084B2 (ja) * 2010-11-19 2014-09-24 セイコーエプソン株式会社 電気光学装置及び電子機器
TWI419097B (zh) * 2011-01-11 2013-12-11 E Ink Holdings Inc 顯示器
JP5950638B2 (ja) 2012-03-12 2016-07-13 三菱電機株式会社 配線構造及びそれを備える薄膜トランジスタアレイ基板並びに表示装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4264675B2 (ja) * 1998-08-17 2009-05-20 栄 田中 液晶表示装置とその製造方法
JP2002141512A (ja) * 2000-11-06 2002-05-17 Advanced Display Inc 薄膜のパターニング方法およびそれを用いたｔｆｔアレイ基板およびその製造方法
JP4675504B2 (ja) * 2001-06-20 2011-04-27 ルネサスエレクトロニクス株式会社 マスクパターンの設計方法
JP3783707B2 (ja) * 2003-03-19 2006-06-07 セイコーエプソン株式会社 検査素子付基板並びに電気光学装置用基板及び電気光学装置及び電子機器
US8064003B2 (en) * 2003-11-28 2011-11-22 Tadahiro Ohmi Thin film transistor integrated circuit device, active matrix display device, and manufacturing methods of the same
JP4802462B2 (ja) * 2004-07-27 2011-10-26 三菱電機株式会社 薄膜トランジスタアレイ基板の製造方法
JP4096933B2 (ja) * 2004-09-30 2008-06-04 セイコーエプソン株式会社 パターンの形成方法
JP3922280B2 (ja) * 2004-09-30 2007-05-30 セイコーエプソン株式会社 配線パターンの形成方法及びデバイスの製造方法
JP4805587B2 (ja) * 2005-02-24 2011-11-02 エーユー オプトロニクス コーポレイション 液晶表示装置とその製造方法
KR101190045B1 (ko) * 2005-12-21 2012-10-12 엘지디스플레이 주식회사 포토 마스크 및 이를 이용한 액정표시장치용 어레이 기판의제조 방법

Also Published As

Publication number Publication date
KR20080046604A (ko) 2008-05-27
TW200832719A (en) 2008-08-01
JP2008152236A (ja) 2008-07-03
CN101202286A (zh) 2008-06-18

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