KR20080046604A - 어레이 기판, 표시장치 및 그 제조 방법 - Google Patents
어레이 기판, 표시장치 및 그 제조 방법 Download PDFInfo
- Publication number
- KR20080046604A KR20080046604A KR1020070119535A KR20070119535A KR20080046604A KR 20080046604 A KR20080046604 A KR 20080046604A KR 1020070119535 A KR1020070119535 A KR 1020070119535A KR 20070119535 A KR20070119535 A KR 20070119535A KR 20080046604 A KR20080046604 A KR 20080046604A
- Authority
- KR
- South Korea
- Prior art keywords
- film
- thin film
- resist
- conductive film
- patterns
- Prior art date
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Images
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
- G02F1/13454—Drivers integrated on the active matrix substrate
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/48—Flattening arrangements
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006315579 | 2006-11-22 | ||
JPJP-P-2006-00315579 | 2006-11-22 | ||
JP2007270090A JP5458486B2 (ja) | 2006-11-22 | 2007-10-17 | アレイ基板、表示装置、及びその製造方法 |
JPJP-P-2007-00270090 | 2007-10-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20080046604A true KR20080046604A (ko) | 2008-05-27 |
Family
ID=39517343
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020070119535A KR20080046604A (ko) | 2006-11-22 | 2007-11-22 | 어레이 기판, 표시장치 및 그 제조 방법 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5458486B2 (zh) |
KR (1) | KR20080046604A (zh) |
CN (1) | CN101202286A (zh) |
TW (1) | TW200832719A (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010047288A1 (en) * | 2008-10-24 | 2010-04-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductordevice |
JP5339356B2 (ja) * | 2009-04-03 | 2013-11-13 | パナソニック液晶ディスプレイ株式会社 | 表示装置 |
JP5594084B2 (ja) * | 2010-11-19 | 2014-09-24 | セイコーエプソン株式会社 | 電気光学装置及び電子機器 |
TWI419097B (zh) * | 2011-01-11 | 2013-12-11 | E Ink Holdings Inc | 顯示器 |
JP5950638B2 (ja) | 2012-03-12 | 2016-07-13 | 三菱電機株式会社 | 配線構造及びそれを備える薄膜トランジスタアレイ基板並びに表示装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4264675B2 (ja) * | 1998-08-17 | 2009-05-20 | 栄 田中 | 液晶表示装置とその製造方法 |
JP2002141512A (ja) * | 2000-11-06 | 2002-05-17 | Advanced Display Inc | 薄膜のパターニング方法およびそれを用いたtftアレイ基板およびその製造方法 |
JP4675504B2 (ja) * | 2001-06-20 | 2011-04-27 | ルネサスエレクトロニクス株式会社 | マスクパターンの設計方法 |
JP3783707B2 (ja) * | 2003-03-19 | 2006-06-07 | セイコーエプソン株式会社 | 検査素子付基板並びに電気光学装置用基板及び電気光学装置及び電子機器 |
US8064003B2 (en) * | 2003-11-28 | 2011-11-22 | Tadahiro Ohmi | Thin film transistor integrated circuit device, active matrix display device, and manufacturing methods of the same |
JP4802462B2 (ja) * | 2004-07-27 | 2011-10-26 | 三菱電機株式会社 | 薄膜トランジスタアレイ基板の製造方法 |
JP4096933B2 (ja) * | 2004-09-30 | 2008-06-04 | セイコーエプソン株式会社 | パターンの形成方法 |
JP3922280B2 (ja) * | 2004-09-30 | 2007-05-30 | セイコーエプソン株式会社 | 配線パターンの形成方法及びデバイスの製造方法 |
JP4805587B2 (ja) * | 2005-02-24 | 2011-11-02 | エーユー オプトロニクス コーポレイション | 液晶表示装置とその製造方法 |
KR101190045B1 (ko) * | 2005-12-21 | 2012-10-12 | 엘지디스플레이 주식회사 | 포토 마스크 및 이를 이용한 액정표시장치용 어레이 기판의제조 방법 |
-
2007
- 2007-10-17 JP JP2007270090A patent/JP5458486B2/ja active Active
- 2007-11-16 TW TW096143429A patent/TW200832719A/zh unknown
- 2007-11-22 CN CNA2007101596500A patent/CN101202286A/zh active Pending
- 2007-11-22 KR KR1020070119535A patent/KR20080046604A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
JP5458486B2 (ja) | 2014-04-02 |
TW200832719A (en) | 2008-08-01 |
JP2008152236A (ja) | 2008-07-03 |
CN101202286A (zh) | 2008-06-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |