JP5453960B2 - 液体噴射ヘッド及び液体噴射装置並びにアクチュエーター装置 - Google Patents
液体噴射ヘッド及び液体噴射装置並びにアクチュエーター装置 Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04581—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads based on piezoelectric elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04588—Control methods or devices therefor, e.g. driver circuits, control circuits using a specific waveform
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/055—Devices for absorbing or preventing back-pressure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B41J2002/1425—Embedded thin film piezoelectric element
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B41J2002/14266—Sheet-like thin film type piezoelectric element
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14419—Manifold
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- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
かかる態様では、圧電体層の変位量は、圧電素子を繰り返し駆動した際において、繰り返し回数に従って上昇し、その後に低下する。これによれば、電界の印加により圧電体層の分極の一部が固定される疲労現象が発生した際に、圧電体層の変位量の変化率を小さくすることができる。また、変位量が低下する方向のみに変化するのに比べて、変化率が小さくなることから、圧電素子の駆動制御を簡略化できる。
かかる態様では、変位量の変化率を低減して、信頼性を向上した液体噴射装置を実現できる。
かかる態様では、圧電体層の変位量は、圧電素子を繰り返し駆動した際において、繰り返し回数に従って上昇し、その後に低下する。これによれば、電界の印加により圧電体層の分極の一部が固定される疲労現象が発生した際に、圧電体層の変位量の変化率が大きくなるのを防止することができる。また、変位量が低下する方向のみに変化するのに比べて、変化率が小さくなることから、圧電素子の駆動制御を簡略化できる。
(実施形態1)
図1は、本発明の実施形態1に係る液体噴射ヘッドの一例であるインクジェット式記録ヘッドの概略構成を示す分解斜視図であり、図2は、図1の平面図及びそのA−A′断面図である。
上述した実施形態1では、第2電極80から第1電極60に向かって電圧を印加するようにしたが、本実施形態では、第1電極60から第2電極80側に向かって電圧を印加するようにしたものである。
図12は、本発明の実施形態3に係る液体噴射ヘッドの一例であるインクジェット式記録ヘッドの平面図及びそのB−B′断面図であり、図13は、記録ヘッドの圧力発生室の並設方向の要部を拡大した断面図である。なお、上述した実施形態1と同様の部材には同一の符号を付して重複する説明は省略する。
図14は、本発明の実施形態4に係る液体噴射ヘッドの一例であるインクジェット式記録ヘッドの平面図及びそのC−C′断面図であり、図15は、記録ヘッドの圧力発生室の並設方向の要部を拡大した断面図である。なお、上述した実施形態1と同様の部材には同一の符号を付して重複する説明は省略する。
以上、本発明の各実施形態を説明したが、本発明の基本的な構成は上述したものに限定されるものではない。例えば、上述した実施形態1では、流路形成基板10として、シリコン単結晶基板を例示したが、特にこれに限定されず、例えば、結晶面方位が(100)面、(110)面等のシリコン単結晶基板を用いるようにしてもよく、また、SOI基板、ガラス等の材料を用いるようにしてもよい。
Claims (7)
- 液滴を噴射するノズル開口に連通する圧力発生室が形成された流路形成基板と、
第1電極と、該第1電極上に形成された一般式がABO3で示されるペロブスカイト構造を有する圧電体層と、該圧電体層の前記第1電極とは反対側に形成された第2電極と、
を備えた圧電素子と、を具備し、
前記圧電体層は単斜晶系構造を有し、
前記第1電極及び前記第2電極の間に発生する電界の方向と、前記圧電体層の分極モーメントの方向とがなす角度が、前記圧電体層の圧電定数が極大となる際の前記電界の方向と前記圧電体層の分極モーメントの方向とがなす角度よりも大きく、
前記圧電体層の変位量は、前記圧電素子を繰り返し駆動した際において、繰り返し回数に従って上昇し、その後低下する
ことを特徴とする液体噴射ヘッド。 - 前記第1電極及び第2電極の間に発生する電界の方向と前記圧電体層の分極モーメントの方向とがなす角度は、前記圧電体層の圧電定数が極大となる際の前記電界の方向と前記圧電体層の分極モーメントの方向とがなす角度よりも3°以上大きいことを特徴とする請求項1記載の液体噴射ヘッド。
- 前記圧電体層は、鉛、ジルコニウム及びチタンを含むことを特徴とする請求項1又は2記載の液体噴射ヘッド。
- 前記圧電体層は、(100)面に優先配向していることを特徴とする請求項1〜3の何れか一項に記載の液体噴射ヘッド。
- 前記第1電極及び第2電極の間に発生する電界の方向は、前記第1電極から前記第2電極の方向であることを特徴とする請求項1〜4の何れか一項に記載の液体噴射ヘッド。
- 請求項1〜5の何れか一項に記載の液体噴射ヘッドと、前記第1電極及び第2電極に電圧を印加して、前記圧電素子に所定の方向の電界を発生させる駆動手段とを備えることを特徴とする液体噴射装置。
- 第1電極と、該第1電極上に形成された一般式がABO3で示されるペロブスカイト構造を有する圧電体層と、該圧電体層の前記第1電極とは反対側に形成された第2電極と、
からなる圧電素子を具備し、
前記圧電体層は単斜晶系構造を有し、
前記第1電極及び前記第2電極の間に発生する電界の方向と、前記圧電体層の分極モーメントの方向とがなす角度が、前記圧電体層の圧電定数が極大となる際の前記電界の方向と前記圧電体層の分極モーメントの方向とがなす角度よりも大きく、
前記圧電体層の変位量は、前記圧電素子を繰り返し駆動した際において、繰り返し回数に従って上昇し、その後低下する
ことを特徴とするアクチュエーター装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009159556A JP5453960B2 (ja) | 2008-09-19 | 2009-07-06 | 液体噴射ヘッド及び液体噴射装置並びにアクチュエーター装置 |
CN200910173568.2A CN101676109B (zh) | 2008-09-19 | 2009-09-17 | 液体喷射头及液体喷射装置和执行元件装置 |
US12/562,306 US8534802B2 (en) | 2008-09-19 | 2009-09-18 | Liquid ejecting head, liquid ejecting apparatus and actuator device |
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JP5561463B2 (ja) * | 2009-02-24 | 2014-07-30 | セイコーエプソン株式会社 | 液体噴射ヘッドの製造方法、液体噴射ヘッド及び液体噴射装置 |
JP5552825B2 (ja) * | 2010-02-10 | 2014-07-16 | セイコーエプソン株式会社 | アクチュエータ、液滴噴射ヘッド及びその製造方法、並びに液滴噴射装置 |
US8752926B2 (en) * | 2012-02-16 | 2014-06-17 | Seiko Epson Corporation | Liquid ejecting apparatus |
JP5861514B2 (ja) * | 2012-03-14 | 2016-02-16 | コニカミノルタ株式会社 | インクジェット記録装置 |
JP6299338B2 (ja) * | 2014-03-31 | 2018-03-28 | セイコーエプソン株式会社 | 圧電素子、液体噴射ヘッド、液体噴射装置及びセンサー |
JP6629465B2 (ja) * | 2016-05-18 | 2020-01-15 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | 電気活性ポリマーに基づくアクチュエータデバイス |
IT201900005794A1 (it) * | 2019-04-15 | 2020-10-15 | St Microelectronics Srl | Dispositivo di eiezione di fluido con ridotto numero di componenti e metodo di fabbricazione del dispositivo di eiezione di fluido |
JP2021115732A (ja) * | 2020-01-23 | 2021-08-10 | セイコーエプソン株式会社 | 液体吐出方法、駆動パルス決定プログラム、および、液体吐出装置 |
JP7532780B2 (ja) * | 2020-01-23 | 2024-08-14 | セイコーエプソン株式会社 | 液体吐出方法、駆動パルス決定プログラム、および、液体吐出装置 |
WO2023238680A1 (ja) * | 2022-06-08 | 2023-12-14 | コニカミノルタ株式会社 | ダイ、ダイの製造方法、液滴吐出ヘッド及び液滴吐出装置 |
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JP2006114562A (ja) * | 2004-10-12 | 2006-04-27 | Seiko Epson Corp | 圧電体膜、圧電素子、圧電アクチュエーター、圧電ポンプ、インクジェット式記録ヘッド、インクジェットプリンター、表面弾性波素子、薄膜圧電共振子、周波数フィルタ、発振器、電子回路、および電子機器 |
JP5304976B2 (ja) * | 2006-08-24 | 2013-10-02 | セイコーエプソン株式会社 | 積層膜の製造方法及びアクチュエータ装置の製造方法並びに液体噴射ヘッドの製造方法、アクチュエータ装置 |
JP5157157B2 (ja) * | 2006-12-22 | 2013-03-06 | セイコーエプソン株式会社 | アクチュエータ装置及びその製造方法並びにその駆動方法、液体噴射ヘッド |
JP4314498B2 (ja) * | 2007-02-28 | 2009-08-19 | セイコーエプソン株式会社 | 圧電素子、液体噴射ヘッド、およびプリンタ |
JP5127268B2 (ja) * | 2007-03-02 | 2013-01-23 | キヤノン株式会社 | 圧電体、圧電体素子、圧電体素子を用いた液体吐出ヘッド及び液体吐出装置 |
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US8534802B2 (en) | 2013-09-17 |
US20100073435A1 (en) | 2010-03-25 |
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