JP5420666B2 - ウエットエッチング装置およびウエットエッチング方法 - Google Patents
ウエットエッチング装置およびウエットエッチング方法 Download PDFInfo
- Publication number
- JP5420666B2 JP5420666B2 JP2011523615A JP2011523615A JP5420666B2 JP 5420666 B2 JP5420666 B2 JP 5420666B2 JP 2011523615 A JP2011523615 A JP 2011523615A JP 2011523615 A JP2011523615 A JP 2011523615A JP 5420666 B2 JP5420666 B2 JP 5420666B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- etching
- tank
- wet etching
- treatment tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
Description
Claims (6)
- 基板(10)にエッチング薬液を付着させてエッチング処理するエッチング処理槽(5)と、
前記エッチング処理槽(5)に接続され連続して前記基板(10)を処理し、前記基板(10)上の液滴を除去するエアーナイフ(14,15)が設けられた基板処理槽と、
少なくとも前記エッチング処理槽(5)と接続され、内部が負圧に保たれたダクト(9)と、
前記基板処理槽と前記ダクト(9)とを接続した排気管(21,24)と
を備え、
前記排気管(21,24)には、前記排気管(21,24)の開閉を行なう開閉部(23,26)、および、外気を取込む取込口(22,25)が設けられ、
前記取込口(22,25)の開閉を前記開閉部(23,26)により行ない、
前記基板処理槽の内部の圧力を所定の圧力に保つように前記開閉部(23,26)を動作させる、ウエットエッチング装置(1)。 - 前記開閉部(23,26)の動作を調節することにより、前記基板処理槽内の圧力を調整する制御部(50)を備えた、請求項1に記載のウエットエッチング装置。
- 前記制御部が、前記エアーナイフ(14,15)の作動と前記開閉部(23,26)の作動とを同期させる、請求項2に記載のウエットエッチング装置。
- 前記基板処理槽が、エッチング処理後の前記基板(10)を水洗処理する水洗処理槽(6)、および、水洗処理後の前記基板(10)を乾燥処理する乾燥処理槽(7)の少なくとも一方である、請求項1から請求項3のいずれかに記載のウエットエッチング装置。
- 基板(10)にエッチング薬液を付着させてエッチング処理する第1工程と、
前記基板(10)上の液滴をエアーナイフ(14,15)により除去する第2工程と
を備え、
前記エアーナイフ(14,15)の作動時に、前記第2工程を行なう基板処理槽から、前記エアーナイフ(14,15)の吐出流量より大きな流量の排気を行ない、
前記基板処理槽からの前記排気および外部から取込んだ空気を合わせて、一定の流量で排気する、ウエットエッチング方法。 - 前記第2工程は、エッチング処理後の前記基板(10)を水洗処理する工程、および、水洗処理後の前記基板(10)を乾燥処理する工程の少なくとも一方である、請求項5に記載のウエットエッチング方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011523615A JP5420666B2 (ja) | 2009-07-23 | 2010-07-14 | ウエットエッチング装置およびウエットエッチング方法 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009172456 | 2009-07-23 | ||
JP2009172456 | 2009-07-23 | ||
PCT/JP2010/061889 WO2011010584A1 (ja) | 2009-07-23 | 2010-07-14 | ウエットエッチング装置およびウエットエッチング方法 |
JP2011523615A JP5420666B2 (ja) | 2009-07-23 | 2010-07-14 | ウエットエッチング装置およびウエットエッチング方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2011010584A1 JPWO2011010584A1 (ja) | 2012-12-27 |
JP5420666B2 true JP5420666B2 (ja) | 2014-02-19 |
Family
ID=43499057
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011523615A Expired - Fee Related JP5420666B2 (ja) | 2009-07-23 | 2010-07-14 | ウエットエッチング装置およびウエットエッチング方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20120111835A1 (ja) |
JP (1) | JP5420666B2 (ja) |
CN (1) | CN102473627B (ja) |
WO (1) | WO2011010584A1 (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101125568B1 (ko) * | 2009-12-14 | 2012-03-22 | 삼성모바일디스플레이주식회사 | 식각 장치 |
DE102011109568A1 (de) * | 2011-08-05 | 2013-02-07 | Rena Gmbh | Abluftsystem und Verfahren dazu |
JP6219848B2 (ja) * | 2012-12-28 | 2017-10-25 | 株式会社Screenホールディングス | 処理装置とその排気切換装置並びに排気切換ユニットと切換弁ボックス |
JP6384414B2 (ja) * | 2014-08-08 | 2018-09-05 | 東京エレクトロン株式会社 | 基板加熱装置、基板加熱方法、記憶媒体 |
CN104950488B (zh) * | 2015-05-28 | 2018-03-09 | 深圳市华星光电技术有限公司 | 面板湿制程排气装置 |
CN105080877A (zh) * | 2015-06-11 | 2015-11-25 | 合肥鑫晟光电科技有限公司 | 一种用于湿法刻蚀的清洁系统 |
JP6482979B2 (ja) * | 2015-07-29 | 2019-03-13 | 東京エレクトロン株式会社 | 液処理装置 |
TW201805076A (zh) * | 2016-08-02 | 2018-02-16 | 睿明科技股份有限公司 | 防止液體殘留於基板的風刀吹乾方法 |
CN106373910B (zh) * | 2016-09-05 | 2019-04-05 | 中山大学 | 一种用于氧化物半导体薄膜的湿法刻蚀设备及湿法刻蚀方法 |
JP6665760B2 (ja) * | 2016-11-16 | 2020-03-13 | 日本電気硝子株式会社 | ガラス基板の製造装置及び製造方法 |
US20180169832A1 (en) * | 2016-12-21 | 2018-06-21 | The Procter & Gamble Company | Method for etching an absorbent structure |
US20190193053A1 (en) * | 2017-12-26 | 2019-06-27 | The Procter & Gamble Company | Fluid etched foam |
CN114433587B (zh) * | 2022-01-05 | 2023-03-28 | 蚌埠中光电科技有限公司 | 一种大尺寸基板玻璃清洗线风刀用下抽排气装置 |
CN115254789A (zh) * | 2022-08-22 | 2022-11-01 | 赫曼半导体技术(深圳)有限公司 | 湿法制程基板处理装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06208988A (ja) * | 1992-02-21 | 1994-07-26 | Chuo Riken:Kk | ウェット処理装置 |
JPH10144647A (ja) * | 1996-11-15 | 1998-05-29 | Matsushita Electric Ind Co Ltd | 枚葉処理装置とその使用方法 |
JP2006278606A (ja) * | 2005-03-29 | 2006-10-12 | Dainippon Screen Mfg Co Ltd | 基板処理装置および基板処理方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1503758A (zh) * | 2002-02-04 | 2004-06-09 | 住友精密工业株式会社 | 传送式基板处理装置 |
JP3982812B2 (ja) * | 2002-10-31 | 2007-09-26 | 株式会社アドバンスト・ディスプレイ | エアーナイフの洗浄方法、エアーナイフ及びウェットエッチング装置 |
US8794896B2 (en) * | 2005-12-14 | 2014-08-05 | Tokyo Electron Limited | Vacuum processing apparatus and zonal airflow generating unit |
-
2010
- 2010-07-14 WO PCT/JP2010/061889 patent/WO2011010584A1/ja active Application Filing
- 2010-07-14 JP JP2011523615A patent/JP5420666B2/ja not_active Expired - Fee Related
- 2010-07-14 US US13/386,379 patent/US20120111835A1/en not_active Abandoned
- 2010-07-14 CN CN201080032902.3A patent/CN102473627B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06208988A (ja) * | 1992-02-21 | 1994-07-26 | Chuo Riken:Kk | ウェット処理装置 |
JPH10144647A (ja) * | 1996-11-15 | 1998-05-29 | Matsushita Electric Ind Co Ltd | 枚葉処理装置とその使用方法 |
JP2006278606A (ja) * | 2005-03-29 | 2006-10-12 | Dainippon Screen Mfg Co Ltd | 基板処理装置および基板処理方法 |
Also Published As
Publication number | Publication date |
---|---|
CN102473627B (zh) | 2014-11-05 |
JPWO2011010584A1 (ja) | 2012-12-27 |
CN102473627A (zh) | 2012-05-23 |
US20120111835A1 (en) | 2012-05-10 |
WO2011010584A1 (ja) | 2011-01-27 |
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