JP5406674B2 - 熱式流体流量センサおよびその製造方法 - Google Patents

熱式流体流量センサおよびその製造方法 Download PDF

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Publication number
JP5406674B2
JP5406674B2 JP2009254621A JP2009254621A JP5406674B2 JP 5406674 B2 JP5406674 B2 JP 5406674B2 JP 2009254621 A JP2009254621 A JP 2009254621A JP 2009254621 A JP2009254621 A JP 2009254621A JP 5406674 B2 JP5406674 B2 JP 5406674B2
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Japan
Prior art keywords
heating resistor
fluid flow
film
resistor
flow sensor
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Expired - Fee Related
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JP2009254621A
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English (en)
Japanese (ja)
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JP2011099757A (ja
JP2011099757A5 (https=
Inventor
憲之 佐久間
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Astemo Ltd
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Hitachi Automotive Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Automotive Systems Ltd filed Critical Hitachi Automotive Systems Ltd
Priority to JP2009254621A priority Critical patent/JP5406674B2/ja
Priority to US12/901,101 priority patent/US8468883B2/en
Priority to EP10013570.6A priority patent/EP2320200B1/en
Priority to CN2010105098968A priority patent/CN102052942A/zh
Publication of JP2011099757A publication Critical patent/JP2011099757A/ja
Publication of JP2011099757A5 publication Critical patent/JP2011099757A5/ja
Application granted granted Critical
Publication of JP5406674B2 publication Critical patent/JP5406674B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/6965—Circuits therefor, e.g. constant-current flow meters comprising means to store calibration data for flow signal calculation or correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/02—Compensating or correcting for variations in pressure, density or temperature
    • G01F15/04—Compensating or correcting for variations in pressure, density or temperature of gases to be measured
    • G01F15/043—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2009254621A 2009-11-06 2009-11-06 熱式流体流量センサおよびその製造方法 Expired - Fee Related JP5406674B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009254621A JP5406674B2 (ja) 2009-11-06 2009-11-06 熱式流体流量センサおよびその製造方法
US12/901,101 US8468883B2 (en) 2009-11-06 2010-10-08 Thermal type flow sensor having a humidity detection portion and an air flow detecting portion
EP10013570.6A EP2320200B1 (en) 2009-11-06 2010-10-12 Thermal type fluid flow sensor and fabricating method
CN2010105098968A CN102052942A (zh) 2009-11-06 2010-10-13 热式流体流量传感器及其制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009254621A JP5406674B2 (ja) 2009-11-06 2009-11-06 熱式流体流量センサおよびその製造方法

Publications (3)

Publication Number Publication Date
JP2011099757A JP2011099757A (ja) 2011-05-19
JP2011099757A5 JP2011099757A5 (https=) 2012-09-20
JP5406674B2 true JP5406674B2 (ja) 2014-02-05

Family

ID=43264709

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009254621A Expired - Fee Related JP5406674B2 (ja) 2009-11-06 2009-11-06 熱式流体流量センサおよびその製造方法

Country Status (4)

Country Link
US (1) US8468883B2 (https=)
EP (1) EP2320200B1 (https=)
JP (1) JP5406674B2 (https=)
CN (1) CN102052942A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014001928A (ja) * 2012-06-15 2014-01-09 Hitachi Automotive Systems Ltd 熱式流量計

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JP5276964B2 (ja) * 2008-12-08 2013-08-28 日立オートモティブシステムズ株式会社 熱式流体流量センサおよびその製造方法
JP5114463B2 (ja) * 2009-09-25 2013-01-09 日立オートモティブシステムズ株式会社 発熱抵抗式空気流量測定装置
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DE102011089480A1 (de) * 2011-12-21 2013-06-27 Robert Bosch Gmbh Sensorvorrichtung zur Erfassung mindestens einer Eigenschaft eines strömenden fluiden Mediums
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JP5883740B2 (ja) * 2012-08-01 2016-03-15 日立オートモティブシステムズ株式会社 熱式空気流量センサ
DE102012219305B3 (de) * 2012-10-23 2014-02-13 Continental Automotive Gmbh Luftmassenmesser mit einem Sensorelement
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JP6021761B2 (ja) * 2013-08-27 2016-11-09 日立オートモティブシステムズ株式会社 ガスセンサ装置
JP6035582B2 (ja) * 2013-10-30 2016-11-30 株式会社デンソー 空気流量測定装置及びその製造方法
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WO2015151947A1 (ja) * 2014-04-04 2015-10-08 日立オートモティブシステムズ株式会社 湿度検出装置
JP6362913B2 (ja) * 2014-04-28 2018-07-25 日立オートモティブシステムズ株式会社 熱式空気流量センサ
JP6201901B2 (ja) * 2014-06-04 2017-09-27 株式会社デンソー 空気流量測定装置
JP6274021B2 (ja) 2014-06-10 2018-02-07 株式会社デンソー 湿度測定装置
US9513242B2 (en) * 2014-09-12 2016-12-06 Honeywell International Inc. Humidity sensor
JP6686276B2 (ja) * 2014-12-09 2020-04-22 株式会社デンソー エアフロメータ
US10900921B2 (en) * 2015-01-20 2021-01-26 Masco Corporation Multi-functional water quality sensor
US11079262B2 (en) 2015-01-30 2021-08-03 Hitachi Automotive Systems, Ltd. Physical quantity detection apparatus and electronic apparatus
US10677747B2 (en) 2015-02-17 2020-06-09 Honeywell International Inc. Humidity sensor
JP6606185B2 (ja) * 2015-09-04 2019-11-13 日立オートモティブシステムズ株式会社 半導体装置、車載用半導体装置および車載制御装置
JP6520636B2 (ja) * 2015-10-16 2019-05-29 株式会社デンソー 物理量センササブアセンブリおよび物理量測定装置
DE102016206549A1 (de) * 2016-04-19 2017-10-19 Robert Bosch Gmbh Sensorelement für thermische Anemometrie
DE102016108625A1 (de) * 2016-05-10 2017-11-16 Innovative Sensor Technology Ist Ag Thermischer Durchflusssensor
EP3244201B1 (en) 2016-05-13 2021-10-27 Honeywell International Inc. Fet based humidity sensor with barrier layer protecting gate dielectric
JP6747124B2 (ja) * 2016-07-14 2020-08-26 株式会社デンソー 流量センサ
CN107655534A (zh) * 2016-07-26 2018-02-02 上海微联传感科技有限公司 空气流量传感器及其制造方法
CN107764349A (zh) * 2016-08-22 2018-03-06 上海微联传感科技有限公司 空气流量传感器及其制备方法
DE112017002858T5 (de) * 2016-08-26 2019-02-28 Hitachi Automotive Systems, Ltd. Thermisches Feuchtigkeitsmessgerät
GB2558896B (en) * 2017-01-17 2019-10-09 Cambridge Entpr Ltd A single membane flow-pressure sensing device
JP6544365B2 (ja) * 2017-02-08 2019-07-17 株式会社デンソー 絶対湿度センサ
JP6798336B2 (ja) * 2017-02-08 2020-12-09 株式会社デンソー 絶対湿度センサ
US12163944B2 (en) 2017-07-20 2024-12-10 The Regents Of The University Of Michigan Multi-functional water quality sensor
JP6993893B2 (ja) * 2018-02-16 2022-02-10 日立Astemo株式会社 半導体素子及びそれを用いた流量測定装置
JP6661678B2 (ja) * 2018-02-23 2020-03-11 三菱電機株式会社 熱式検出センサ
KR20240001734A (ko) * 2022-06-24 2024-01-04 삼성디스플레이 주식회사 표시장치 및 이의 제조 방법
CN115824464B (zh) * 2022-09-20 2025-12-30 河南中原光电测控技术有限公司 一种热通量传感器标定方法及装置
CN116499517B (zh) * 2023-02-13 2025-10-31 北京理工大学 一种cmos mems集成流量、气体/湿度传感器

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014001928A (ja) * 2012-06-15 2014-01-09 Hitachi Automotive Systems Ltd 熱式流量計

Also Published As

Publication number Publication date
EP2320200A1 (en) 2011-05-11
US20110107832A1 (en) 2011-05-12
US8468883B2 (en) 2013-06-25
CN102052942A (zh) 2011-05-11
JP2011099757A (ja) 2011-05-19
EP2320200B1 (en) 2017-09-20

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